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You searched for subject:(c axis tilted). Showing records 1 – 2 of 2 total matches.

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NSYSU

1. Yang, Chun-hung. The Liquid Sensor Using Shear-Mode Thin Film Bulk Acoustic Resonator with AlN Films.

Degree: Master, Electrical Engineering, 2011, NSYSU

Shear-mode thin film bulk acoustic resonator (TFBAR) devices with c-axis tilted AlN films are fabricated for the application of liquid sensors. To fabricate shear-mode TFBAR devices, the off-axis RF magnetron sputtering method for the growth of piezoelectric AlN thin films is adopted and influences of the relative distance and the sputtering parameters are investigated. The shrar-mode phenomenon of a TFBAR results from the tilted crystalline orientation of AlN thin films. In this thesis, the AlN thin films are deposited with tilting angles of 15° and 23°, set by controlling the deposition parameters. The properties of the AlN thin films are investigated by X-ray diffraction and scanning electron microscopy. The frequency response is measured using an HP8720 network analyzer and a CASCADE probe station. The frequency response of the TFBAR device with 23° tilted AlN thin film is measured to reveal its ability to provide shear-mode resonance. The resonance frequencies of the longitudinal and shear modes are 2.07 GHz and 1.17 GHz, respectively. To investigate the sensing characteristics of TFBAR, two basic experiments of mass and liquid loading are carried out. The sensitivities of the longitudinal and shear modes to mass loading are calculated to be 2295 Hz cm2/ng and 1363 Hz cm2/ng with the mechanical quality factors of 588 and 337, respectively. However, the mechanical quality factors of the longitudinal mode of TFBAR without and with a liquid loading decreased from 588 to 0, whereas those remain almost the same for the shear mode under liquid loading. The sensitivities of the longitudinal and shear modes are calculated to be 0 and 17.88 Hz cm2/μg for liquid loading. Advisors/Committee Members: Ying-chung Chen (committee member), Shoou-jinn Chang (chair), Mau-phon Houng (chair), Rurng-sheng Guo (chair), Meng-chyi Wu (chair).

Subjects/Keywords: FBAR; sensor; shear-mode; AlN thin films; tilted c-axis

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Yang, C. (2011). The Liquid Sensor Using Shear-Mode Thin Film Bulk Acoustic Resonator with AlN Films. (Thesis). NSYSU. Retrieved from http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0815111-184823

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Yang, Chun-hung. “The Liquid Sensor Using Shear-Mode Thin Film Bulk Acoustic Resonator with AlN Films.” 2011. Thesis, NSYSU. Accessed September 15, 2019. http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0815111-184823.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Yang, Chun-hung. “The Liquid Sensor Using Shear-Mode Thin Film Bulk Acoustic Resonator with AlN Films.” 2011. Web. 15 Sep 2019.

Vancouver:

Yang C. The Liquid Sensor Using Shear-Mode Thin Film Bulk Acoustic Resonator with AlN Films. [Internet] [Thesis]. NSYSU; 2011. [cited 2019 Sep 15]. Available from: http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0815111-184823.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Yang C. The Liquid Sensor Using Shear-Mode Thin Film Bulk Acoustic Resonator with AlN Films. [Thesis]. NSYSU; 2011. Available from: http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0815111-184823

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


NSYSU

2. Jiang, Jia-Ming. Study of Liquid Sensor Using Dual-Mode ZnO Thin-Film Bulk Acoustic Resonator (TFBAR).

Degree: Master, Electrical Engineering, 2011, NSYSU

A novel liquid sensor is designed and fabricated by using thin film bulk acoustic resonator (TFBAR) devices with c-axis 23°-tilted ZnO films. To fabricate TFBAR devices, the off-axis RF magnetron sputtering method for the growth of piezoelectric ZnO thin films is adopted. The influences of the relative distance and sputtering parameters are investigated. In this report, the piezoelectric ZnO thin films with tilting angle of 23° are set by controlling the deposition parameters. The properties of the c-axis 23°-tilted ZnO thin films are investigated by X-ray diffraction and scanning electron microscopy. The frequency response is measured using an HP8720 network analyzer with a CASCADE probe station. The TFBAR devices with 23°-tilted ZnO thin films display shear and longitudinal resonant modes at 752.75 MHz and 1.70 GHz, respectively. The mechanical quality factors (QL for longitude mode and QS for shear mode) are thus the important parameters of dual-mode TFBAR devices used in liquid environments. QL decreased from 545 to 0 upon in liquid loading, whereas QS remained almost unchanged at 296 in all environments. Moreover, the sensitivity of the shear mode to liquid loading is calculated to be 13 Hz cm2/μg. Advisors/Committee Members: Rurng-sheng Guo (chair), Ying-chung Chen (committee member), Shoou-jinn Chang (chair), Meng-chyi Wu (chair), Chien-chuan Cheng (chair).

Subjects/Keywords: c-axis-tilted; ZnO thin films; Dual-Mode; TFBAR; sensor

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Jiang, J. (2011). Study of Liquid Sensor Using Dual-Mode ZnO Thin-Film Bulk Acoustic Resonator (TFBAR). (Thesis). NSYSU. Retrieved from http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0830111-125300

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Jiang, Jia-Ming. “Study of Liquid Sensor Using Dual-Mode ZnO Thin-Film Bulk Acoustic Resonator (TFBAR).” 2011. Thesis, NSYSU. Accessed September 15, 2019. http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0830111-125300.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Jiang, Jia-Ming. “Study of Liquid Sensor Using Dual-Mode ZnO Thin-Film Bulk Acoustic Resonator (TFBAR).” 2011. Web. 15 Sep 2019.

Vancouver:

Jiang J. Study of Liquid Sensor Using Dual-Mode ZnO Thin-Film Bulk Acoustic Resonator (TFBAR). [Internet] [Thesis]. NSYSU; 2011. [cited 2019 Sep 15]. Available from: http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0830111-125300.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Jiang J. Study of Liquid Sensor Using Dual-Mode ZnO Thin-Film Bulk Acoustic Resonator (TFBAR). [Thesis]. NSYSU; 2011. Available from: http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0830111-125300

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

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