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You searched for subject:(Wafer stage). Showing records 1 – 6 of 6 total matches.

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Delft University of Technology

1. Boots, E. (author). Actuation of a 450 mm through Wall Wafer Stage.

Degree: 2012, Delft University of Technology

Precision and Microsystems Engineering

Mechanical, Maritime and Materials Engineering

Advisors/Committee Members: Ostayen, R.A.J. (mentor).

Subjects/Keywords: Wall Wafer Stage

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APA (6th Edition):

Boots, E. (. (2012). Actuation of a 450 mm through Wall Wafer Stage. (Masters Thesis). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:145a3691-6c89-4d52-b3e8-e92f952b9cdc

Chicago Manual of Style (16th Edition):

Boots, E (author). “Actuation of a 450 mm through Wall Wafer Stage.” 2012. Masters Thesis, Delft University of Technology. Accessed January 26, 2021. http://resolver.tudelft.nl/uuid:145a3691-6c89-4d52-b3e8-e92f952b9cdc.

MLA Handbook (7th Edition):

Boots, E (author). “Actuation of a 450 mm through Wall Wafer Stage.” 2012. Web. 26 Jan 2021.

Vancouver:

Boots E(. Actuation of a 450 mm through Wall Wafer Stage. [Internet] [Masters thesis]. Delft University of Technology; 2012. [cited 2021 Jan 26]. Available from: http://resolver.tudelft.nl/uuid:145a3691-6c89-4d52-b3e8-e92f952b9cdc.

Council of Science Editors:

Boots E(. Actuation of a 450 mm through Wall Wafer Stage. [Masters Thesis]. Delft University of Technology; 2012. Available from: http://resolver.tudelft.nl/uuid:145a3691-6c89-4d52-b3e8-e92f952b9cdc


Delft University of Technology

2. Zoutendijk, Mike (author). Applying Deflation Methods in a Topology Optimization Procedure.

Degree: 2019, Delft University of Technology

Structure Optimization has been an important subject with many applications for centuries. In the last sixty years, numerical optimization has facilitated large advancements in this… (more)

Subjects/Keywords: Deflation; Topology Optimization; Model Order Reduction; Iterative methods; Wafer stage; PETSc

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APA (6th Edition):

Zoutendijk, M. (. (2019). Applying Deflation Methods in a Topology Optimization Procedure. (Masters Thesis). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:c5b85fd2-4745-465b-8988-6d9d59664343

Chicago Manual of Style (16th Edition):

Zoutendijk, Mike (author). “Applying Deflation Methods in a Topology Optimization Procedure.” 2019. Masters Thesis, Delft University of Technology. Accessed January 26, 2021. http://resolver.tudelft.nl/uuid:c5b85fd2-4745-465b-8988-6d9d59664343.

MLA Handbook (7th Edition):

Zoutendijk, Mike (author). “Applying Deflation Methods in a Topology Optimization Procedure.” 2019. Web. 26 Jan 2021.

Vancouver:

Zoutendijk M(. Applying Deflation Methods in a Topology Optimization Procedure. [Internet] [Masters thesis]. Delft University of Technology; 2019. [cited 2021 Jan 26]. Available from: http://resolver.tudelft.nl/uuid:c5b85fd2-4745-465b-8988-6d9d59664343.

Council of Science Editors:

Zoutendijk M(. Applying Deflation Methods in a Topology Optimization Procedure. [Masters Thesis]. Delft University of Technology; 2019. Available from: http://resolver.tudelft.nl/uuid:c5b85fd2-4745-465b-8988-6d9d59664343


Delft University of Technology

3. Dijkstra, B.G. Iterative learning control, with applications to a wafer-stage.

Degree: 2004, Delft University of Technology

 In the past Iterative Learning Control has been shown to be a method that can easily achieve extremely high performance with very limited effort from… (more)

Subjects/Keywords: ilc; wafer-stage; input-shaping

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APA (6th Edition):

Dijkstra, B. G. (2004). Iterative learning control, with applications to a wafer-stage. (Doctoral Dissertation). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba ; urn:NBN:nl:ui:24-uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba ; urn:NBN:nl:ui:24-uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba ; http://resolver.tudelft.nl/uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba

Chicago Manual of Style (16th Edition):

Dijkstra, B G. “Iterative learning control, with applications to a wafer-stage.” 2004. Doctoral Dissertation, Delft University of Technology. Accessed January 26, 2021. http://resolver.tudelft.nl/uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba ; urn:NBN:nl:ui:24-uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba ; urn:NBN:nl:ui:24-uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba ; http://resolver.tudelft.nl/uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba.

MLA Handbook (7th Edition):

Dijkstra, B G. “Iterative learning control, with applications to a wafer-stage.” 2004. Web. 26 Jan 2021.

Vancouver:

Dijkstra BG. Iterative learning control, with applications to a wafer-stage. [Internet] [Doctoral dissertation]. Delft University of Technology; 2004. [cited 2021 Jan 26]. Available from: http://resolver.tudelft.nl/uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba ; urn:NBN:nl:ui:24-uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba ; urn:NBN:nl:ui:24-uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba ; http://resolver.tudelft.nl/uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba.

Council of Science Editors:

Dijkstra BG. Iterative learning control, with applications to a wafer-stage. [Doctoral Dissertation]. Delft University of Technology; 2004. Available from: http://resolver.tudelft.nl/uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba ; urn:NBN:nl:ui:24-uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba ; urn:NBN:nl:ui:24-uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba ; http://resolver.tudelft.nl/uuid:b29a7fa2-6bee-4b59-8aaf-b7b016e1eeba


Delft University of Technology

4. Huang, X. (author). Actuation System Design for a 3 DoF Contactless Wafer Stage.

Degree: 2016, Delft University of Technology

Silicon wafers are getting bigger and bigger in the production line, aiming for faster manufacturing, lower cost and higher yield. The handling/transportation technique is becoming… (more)

Subjects/Keywords: pneumatic; actuator; contactless; wafer; stage; piezo; low cost; RPR; valve; orifice; compressed air

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Huang, X. (. (2016). Actuation System Design for a 3 DoF Contactless Wafer Stage. (Masters Thesis). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:d654771f-bcc8-453b-89f7-d79be5369815

Chicago Manual of Style (16th Edition):

Huang, X (author). “Actuation System Design for a 3 DoF Contactless Wafer Stage.” 2016. Masters Thesis, Delft University of Technology. Accessed January 26, 2021. http://resolver.tudelft.nl/uuid:d654771f-bcc8-453b-89f7-d79be5369815.

MLA Handbook (7th Edition):

Huang, X (author). “Actuation System Design for a 3 DoF Contactless Wafer Stage.” 2016. Web. 26 Jan 2021.

Vancouver:

Huang X(. Actuation System Design for a 3 DoF Contactless Wafer Stage. [Internet] [Masters thesis]. Delft University of Technology; 2016. [cited 2021 Jan 26]. Available from: http://resolver.tudelft.nl/uuid:d654771f-bcc8-453b-89f7-d79be5369815.

Council of Science Editors:

Huang X(. Actuation System Design for a 3 DoF Contactless Wafer Stage. [Masters Thesis]. Delft University of Technology; 2016. Available from: http://resolver.tudelft.nl/uuid:d654771f-bcc8-453b-89f7-d79be5369815


Indian Institute of Science

5. Vimala Rani, M. Impact of Real Time Events on the Relative Efficiency of the Proposed Dynamic Scheduling Algorithms for Diffusion Furnace(s) in the Semiconductor Manufacturing.

Degree: PhD, Faculty of Engineering, 2018, Indian Institute of Science

 The manufacturing industries play a significant role in contributing to the economy of a country. Among various manufacturing industries, the semiconductor manufacturing (SM) industries is… (more)

Subjects/Keywords: Semiconductor Manufacturing; Manufacturing Industry; Wafer Fabrication Stage; Diffusion Furnace; Dynamic Scheduling Algorithms; Dynamic Real Time Scheduling; Scheduling Diffusion Furnace; Real Time Events; Management

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Vimala Rani, M. (2018). Impact of Real Time Events on the Relative Efficiency of the Proposed Dynamic Scheduling Algorithms for Diffusion Furnace(s) in the Semiconductor Manufacturing. (Doctoral Dissertation). Indian Institute of Science. Retrieved from http://etd.iisc.ac.in/handle/2005/3555

Chicago Manual of Style (16th Edition):

Vimala Rani, M. “Impact of Real Time Events on the Relative Efficiency of the Proposed Dynamic Scheduling Algorithms for Diffusion Furnace(s) in the Semiconductor Manufacturing.” 2018. Doctoral Dissertation, Indian Institute of Science. Accessed January 26, 2021. http://etd.iisc.ac.in/handle/2005/3555.

MLA Handbook (7th Edition):

Vimala Rani, M. “Impact of Real Time Events on the Relative Efficiency of the Proposed Dynamic Scheduling Algorithms for Diffusion Furnace(s) in the Semiconductor Manufacturing.” 2018. Web. 26 Jan 2021.

Vancouver:

Vimala Rani M. Impact of Real Time Events on the Relative Efficiency of the Proposed Dynamic Scheduling Algorithms for Diffusion Furnace(s) in the Semiconductor Manufacturing. [Internet] [Doctoral dissertation]. Indian Institute of Science; 2018. [cited 2021 Jan 26]. Available from: http://etd.iisc.ac.in/handle/2005/3555.

Council of Science Editors:

Vimala Rani M. Impact of Real Time Events on the Relative Efficiency of the Proposed Dynamic Scheduling Algorithms for Diffusion Furnace(s) in the Semiconductor Manufacturing. [Doctoral Dissertation]. Indian Institute of Science; 2018. Available from: http://etd.iisc.ac.in/handle/2005/3555


Delft University of Technology

6. Broxterman, Stefan (author). Using Topology Optimization for Actuator Placement within Motion Systems.

Degree: 2017, Delft University of Technology

Topology optimization is a strong approach for generating optimal designs which cannot be obtained using conventional optimization methods. Improving structural characteristics by changing the internal… (more)

Subjects/Keywords: topology; optimization; actuator; placement; motion; systems; design; supports; load; load placement; eigenmodes; eigenfrequency; stefan; broxterman; tudelft; msc; pme; precision; mechanisms; compliant; case; wafer; stage; harmonic; excitation

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Broxterman, S. (. (2017). Using Topology Optimization for Actuator Placement within Motion Systems. (Masters Thesis). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:dabadd38-19f4-413e-b597-e8777a9bbb88

Chicago Manual of Style (16th Edition):

Broxterman, Stefan (author). “Using Topology Optimization for Actuator Placement within Motion Systems.” 2017. Masters Thesis, Delft University of Technology. Accessed January 26, 2021. http://resolver.tudelft.nl/uuid:dabadd38-19f4-413e-b597-e8777a9bbb88.

MLA Handbook (7th Edition):

Broxterman, Stefan (author). “Using Topology Optimization for Actuator Placement within Motion Systems.” 2017. Web. 26 Jan 2021.

Vancouver:

Broxterman S(. Using Topology Optimization for Actuator Placement within Motion Systems. [Internet] [Masters thesis]. Delft University of Technology; 2017. [cited 2021 Jan 26]. Available from: http://resolver.tudelft.nl/uuid:dabadd38-19f4-413e-b597-e8777a9bbb88.

Council of Science Editors:

Broxterman S(. Using Topology Optimization for Actuator Placement within Motion Systems. [Masters Thesis]. Delft University of Technology; 2017. Available from: http://resolver.tudelft.nl/uuid:dabadd38-19f4-413e-b597-e8777a9bbb88

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