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You searched for subject:(Silicon micromachining). Showing records 1 – 29 of 29 total matches.

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Delft University of Technology

1. Li, S.J. Micro-Fluidic MEMS for Micro-Particle Filtration:.

Degree: 2011, Delft University of Technology

 Recently there has been an onset of fluidic filters fabricated using micro electro-mechanical systems (MEMS) technology. These filters, compared to conventional ones, are more accurate… (more)

Subjects/Keywords: MEMS; silicon micromachining; particle separation

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APA (6th Edition):

Li, S. J. (2011). Micro-Fluidic MEMS for Micro-Particle Filtration:. (Masters Thesis). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:727a48af-06e8-4d58-8a02-9ffde0d1624e

Chicago Manual of Style (16th Edition):

Li, S J. “Micro-Fluidic MEMS for Micro-Particle Filtration:.” 2011. Masters Thesis, Delft University of Technology. Accessed November 17, 2019. http://resolver.tudelft.nl/uuid:727a48af-06e8-4d58-8a02-9ffde0d1624e.

MLA Handbook (7th Edition):

Li, S J. “Micro-Fluidic MEMS for Micro-Particle Filtration:.” 2011. Web. 17 Nov 2019.

Vancouver:

Li SJ. Micro-Fluidic MEMS for Micro-Particle Filtration:. [Internet] [Masters thesis]. Delft University of Technology; 2011. [cited 2019 Nov 17]. Available from: http://resolver.tudelft.nl/uuid:727a48af-06e8-4d58-8a02-9ffde0d1624e.

Council of Science Editors:

Li SJ. Micro-Fluidic MEMS for Micro-Particle Filtration:. [Masters Thesis]. Delft University of Technology; 2011. Available from: http://resolver.tudelft.nl/uuid:727a48af-06e8-4d58-8a02-9ffde0d1624e


University of Minnesota

2. Cho, Young Seek. Development of Three Dimensional Integration and Packaging Techniques for Complex Communication Systems.

Degree: PhD, Electrical Engineering, 2010, University of Minnesota

 Three dimensional packaging is considered as a promising packaging solution that can offer small form factor and high performance capability to high- speed electronics, for… (more)

Subjects/Keywords: 3D Packaging; embedded passive; flip-chip; silicon micromachining; through silicon via

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APA (6th Edition):

Cho, Y. S. (2010). Development of Three Dimensional Integration and Packaging Techniques for Complex Communication Systems. (Doctoral Dissertation). University of Minnesota. Retrieved from http://hdl.handle.net/11299/191382

Chicago Manual of Style (16th Edition):

Cho, Young Seek. “Development of Three Dimensional Integration and Packaging Techniques for Complex Communication Systems.” 2010. Doctoral Dissertation, University of Minnesota. Accessed November 17, 2019. http://hdl.handle.net/11299/191382.

MLA Handbook (7th Edition):

Cho, Young Seek. “Development of Three Dimensional Integration and Packaging Techniques for Complex Communication Systems.” 2010. Web. 17 Nov 2019.

Vancouver:

Cho YS. Development of Three Dimensional Integration and Packaging Techniques for Complex Communication Systems. [Internet] [Doctoral dissertation]. University of Minnesota; 2010. [cited 2019 Nov 17]. Available from: http://hdl.handle.net/11299/191382.

Council of Science Editors:

Cho YS. Development of Three Dimensional Integration and Packaging Techniques for Complex Communication Systems. [Doctoral Dissertation]. University of Minnesota; 2010. Available from: http://hdl.handle.net/11299/191382


University of Western Australia

3. Lai, Meifang. Porous silicon and its application for micromachining technologies.

Degree: PhD, 2012, University of Western Australia

[Truncated abstract] Porous silicon (PS), which exhibits valuable characteristics including photoluminescence, easily tunable refractive index, and large surface area, has gained enormous attention worldwide for… (more)

Subjects/Keywords: Porous silicon; Passivation; Photolithography; Alkaline developer; Reactive ion etching; Micromachining

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APA (6th Edition):

Lai, M. (2012). Porous silicon and its application for micromachining technologies. (Doctoral Dissertation). University of Western Australia. Retrieved from http://repository.uwa.edu.au:80/R/?func=dbin-jump-full&object_id=33374&local_base=GEN01-INS01

Chicago Manual of Style (16th Edition):

Lai, Meifang. “Porous silicon and its application for micromachining technologies.” 2012. Doctoral Dissertation, University of Western Australia. Accessed November 17, 2019. http://repository.uwa.edu.au:80/R/?func=dbin-jump-full&object_id=33374&local_base=GEN01-INS01.

MLA Handbook (7th Edition):

Lai, Meifang. “Porous silicon and its application for micromachining technologies.” 2012. Web. 17 Nov 2019.

Vancouver:

Lai M. Porous silicon and its application for micromachining technologies. [Internet] [Doctoral dissertation]. University of Western Australia; 2012. [cited 2019 Nov 17]. Available from: http://repository.uwa.edu.au:80/R/?func=dbin-jump-full&object_id=33374&local_base=GEN01-INS01.

Council of Science Editors:

Lai M. Porous silicon and its application for micromachining technologies. [Doctoral Dissertation]. University of Western Australia; 2012. Available from: http://repository.uwa.edu.au:80/R/?func=dbin-jump-full&object_id=33374&local_base=GEN01-INS01


McMaster University

4. Hsu, Eugene. Ultrashort-pulse laser ablation of silicon toward device applications.

Degree: PhD, 2012, McMaster University

This thesis presents investigations on ultrafast laser irradiation of silicon towards the goal of hybridizing ultrafast laser processing and conventional semiconductor fabrication techniques to… (more)

Subjects/Keywords: Ultrafast laser micromachining; ablation; black silicon; Engineering Physics; Engineering Physics

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APA (6th Edition):

Hsu, E. (2012). Ultrashort-pulse laser ablation of silicon toward device applications. (Doctoral Dissertation). McMaster University. Retrieved from http://hdl.handle.net/11375/12551

Chicago Manual of Style (16th Edition):

Hsu, Eugene. “Ultrashort-pulse laser ablation of silicon toward device applications.” 2012. Doctoral Dissertation, McMaster University. Accessed November 17, 2019. http://hdl.handle.net/11375/12551.

MLA Handbook (7th Edition):

Hsu, Eugene. “Ultrashort-pulse laser ablation of silicon toward device applications.” 2012. Web. 17 Nov 2019.

Vancouver:

Hsu E. Ultrashort-pulse laser ablation of silicon toward device applications. [Internet] [Doctoral dissertation]. McMaster University; 2012. [cited 2019 Nov 17]. Available from: http://hdl.handle.net/11375/12551.

Council of Science Editors:

Hsu E. Ultrashort-pulse laser ablation of silicon toward device applications. [Doctoral Dissertation]. McMaster University; 2012. Available from: http://hdl.handle.net/11375/12551

5. LIU MINGHUI. Electrochemical generation and processing of porous silicon.

Degree: 2005, National University of Singapore

Subjects/Keywords: Porous Silicon; Photoluminescence; Micromachining

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APA (6th Edition):

MINGHUI, L. (2005). Electrochemical generation and processing of porous silicon. (Thesis). National University of Singapore. Retrieved from http://scholarbank.nus.edu.sg/handle/10635/14986

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

MINGHUI, LIU. “Electrochemical generation and processing of porous silicon.” 2005. Thesis, National University of Singapore. Accessed November 17, 2019. http://scholarbank.nus.edu.sg/handle/10635/14986.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

MINGHUI, LIU. “Electrochemical generation and processing of porous silicon.” 2005. Web. 17 Nov 2019.

Vancouver:

MINGHUI L. Electrochemical generation and processing of porous silicon. [Internet] [Thesis]. National University of Singapore; 2005. [cited 2019 Nov 17]. Available from: http://scholarbank.nus.edu.sg/handle/10635/14986.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

MINGHUI L. Electrochemical generation and processing of porous silicon. [Thesis]. National University of Singapore; 2005. Available from: http://scholarbank.nus.edu.sg/handle/10635/14986

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


Delft University of Technology

6. Li, Y.X. Plasma Etching for Integrated Silicon Sensor Applications.

Degree: 1995, Delft University of Technology

Subjects/Keywords: Plasma etching; silicon sensor; micromachining

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APA (6th Edition):

Li, Y. X. (1995). Plasma Etching for Integrated Silicon Sensor Applications. (Doctoral Dissertation). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0 ; urn:NBN:nl:ui:24-uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0 ; urn:NBN:nl:ui:24-uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0 ; http://resolver.tudelft.nl/uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0

Chicago Manual of Style (16th Edition):

Li, Y X. “Plasma Etching for Integrated Silicon Sensor Applications.” 1995. Doctoral Dissertation, Delft University of Technology. Accessed November 17, 2019. http://resolver.tudelft.nl/uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0 ; urn:NBN:nl:ui:24-uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0 ; urn:NBN:nl:ui:24-uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0 ; http://resolver.tudelft.nl/uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0.

MLA Handbook (7th Edition):

Li, Y X. “Plasma Etching for Integrated Silicon Sensor Applications.” 1995. Web. 17 Nov 2019.

Vancouver:

Li YX. Plasma Etching for Integrated Silicon Sensor Applications. [Internet] [Doctoral dissertation]. Delft University of Technology; 1995. [cited 2019 Nov 17]. Available from: http://resolver.tudelft.nl/uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0 ; urn:NBN:nl:ui:24-uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0 ; urn:NBN:nl:ui:24-uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0 ; http://resolver.tudelft.nl/uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0.

Council of Science Editors:

Li YX. Plasma Etching for Integrated Silicon Sensor Applications. [Doctoral Dissertation]. Delft University of Technology; 1995. Available from: http://resolver.tudelft.nl/uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0 ; urn:NBN:nl:ui:24-uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0 ; urn:NBN:nl:ui:24-uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0 ; http://resolver.tudelft.nl/uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0


Delft University of Technology

7. Foerster, J.A. Integrated micro vacuum tubes in silicon.

Degree: 1996, Delft University of Technology

Subjects/Keywords: vacuum tubes; triode; silicon micromachining

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APA (6th Edition):

Foerster, J. A. (1996). Integrated micro vacuum tubes in silicon. (Doctoral Dissertation). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559 ; urn:NBN:nl:ui:24-uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559 ; urn:NBN:nl:ui:24-uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559 ; http://resolver.tudelft.nl/uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559

Chicago Manual of Style (16th Edition):

Foerster, J A. “Integrated micro vacuum tubes in silicon.” 1996. Doctoral Dissertation, Delft University of Technology. Accessed November 17, 2019. http://resolver.tudelft.nl/uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559 ; urn:NBN:nl:ui:24-uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559 ; urn:NBN:nl:ui:24-uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559 ; http://resolver.tudelft.nl/uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559.

MLA Handbook (7th Edition):

Foerster, J A. “Integrated micro vacuum tubes in silicon.” 1996. Web. 17 Nov 2019.

Vancouver:

Foerster JA. Integrated micro vacuum tubes in silicon. [Internet] [Doctoral dissertation]. Delft University of Technology; 1996. [cited 2019 Nov 17]. Available from: http://resolver.tudelft.nl/uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559 ; urn:NBN:nl:ui:24-uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559 ; urn:NBN:nl:ui:24-uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559 ; http://resolver.tudelft.nl/uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559.

Council of Science Editors:

Foerster JA. Integrated micro vacuum tubes in silicon. [Doctoral Dissertation]. Delft University of Technology; 1996. Available from: http://resolver.tudelft.nl/uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559 ; urn:NBN:nl:ui:24-uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559 ; urn:NBN:nl:ui:24-uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559 ; http://resolver.tudelft.nl/uuid:5861602c-6e9e-4054-8b37-4e8a4efdd559

8. OW YUEH SHENG. Micromachining of Silicon via ION Irradiation with Porous Silicon Formation.

Degree: 2010, National University of Singapore

Subjects/Keywords: micromachining; silicon; porous silicon; ion irradiation

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APA (6th Edition):

SHENG, O. Y. (2010). Micromachining of Silicon via ION Irradiation with Porous Silicon Formation. (Thesis). National University of Singapore. Retrieved from http://scholarbank.nus.edu.sg/handle/10635/20958

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

SHENG, OW YUEH. “Micromachining of Silicon via ION Irradiation with Porous Silicon Formation.” 2010. Thesis, National University of Singapore. Accessed November 17, 2019. http://scholarbank.nus.edu.sg/handle/10635/20958.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

SHENG, OW YUEH. “Micromachining of Silicon via ION Irradiation with Porous Silicon Formation.” 2010. Web. 17 Nov 2019.

Vancouver:

SHENG OY. Micromachining of Silicon via ION Irradiation with Porous Silicon Formation. [Internet] [Thesis]. National University of Singapore; 2010. [cited 2019 Nov 17]. Available from: http://scholarbank.nus.edu.sg/handle/10635/20958.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

SHENG OY. Micromachining of Silicon via ION Irradiation with Porous Silicon Formation. [Thesis]. National University of Singapore; 2010. Available from: http://scholarbank.nus.edu.sg/handle/10635/20958

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


NSYSU

9. Hsu, Li-Han. Development of Flexural Plate-wave Device with Silicon Trench Reflective Grating Structure.

Degree: Master, Electrical Engineering, 2012, NSYSU

 Abstract Compared with the other micro acoustic wave devices, the flexural plate-wave (FPW) device is more suitable for being used in liquid-sensing applications due to… (more)

Subjects/Keywords: flexural plate-wave; silicon-trench reflective grating structure; electromechanical coupling coefficient; ZnO; bulk micromachining technology

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APA (6th Edition):

Hsu, L. (2012). Development of Flexural Plate-wave Device with Silicon Trench Reflective Grating Structure. (Thesis). NSYSU. Retrieved from http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0730112-180344

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Hsu, Li-Han. “Development of Flexural Plate-wave Device with Silicon Trench Reflective Grating Structure.” 2012. Thesis, NSYSU. Accessed November 17, 2019. http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0730112-180344.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Hsu, Li-Han. “Development of Flexural Plate-wave Device with Silicon Trench Reflective Grating Structure.” 2012. Web. 17 Nov 2019.

Vancouver:

Hsu L. Development of Flexural Plate-wave Device with Silicon Trench Reflective Grating Structure. [Internet] [Thesis]. NSYSU; 2012. [cited 2019 Nov 17]. Available from: http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0730112-180344.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Hsu L. Development of Flexural Plate-wave Device with Silicon Trench Reflective Grating Structure. [Thesis]. NSYSU; 2012. Available from: http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0730112-180344

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


Iowa State University

10. Pecholt, Benjamin. Laser microfabrication and testing of silicon carbide diaphragms for MEMS applications.

Degree: 2009, Iowa State University

 Laser microfabrication of silicon carbide for MEMS applications was explored. 3C-SiC and 6H-SiC were laser micromachined using various lasers. 3C-SiC thin films were patterned using… (more)

Subjects/Keywords: 3C-SiC; 6H-SiC; Laser Ablation; Laser micromachining; MEMS Pressure Sensor; Silicon Carbide; Mechanical Engineering

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APA (6th Edition):

Pecholt, B. (2009). Laser microfabrication and testing of silicon carbide diaphragms for MEMS applications. (Thesis). Iowa State University. Retrieved from https://lib.dr.iastate.edu/etd/11989

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Pecholt, Benjamin. “Laser microfabrication and testing of silicon carbide diaphragms for MEMS applications.” 2009. Thesis, Iowa State University. Accessed November 17, 2019. https://lib.dr.iastate.edu/etd/11989.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Pecholt, Benjamin. “Laser microfabrication and testing of silicon carbide diaphragms for MEMS applications.” 2009. Web. 17 Nov 2019.

Vancouver:

Pecholt B. Laser microfabrication and testing of silicon carbide diaphragms for MEMS applications. [Internet] [Thesis]. Iowa State University; 2009. [cited 2019 Nov 17]. Available from: https://lib.dr.iastate.edu/etd/11989.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Pecholt B. Laser microfabrication and testing of silicon carbide diaphragms for MEMS applications. [Thesis]. Iowa State University; 2009. Available from: https://lib.dr.iastate.edu/etd/11989

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

11. Shi, Zhichao. Micro-actionneurs numériques en silicium pour la réalisation d'un micro-convoyeur : Silicon digital micro-actuators for development of a micro-conveyor.

Degree: Docteur es, Electronique et Optoélectronique, Nano- et Microtechnologies, 2017, Paris Saclay

Les travaux de cette thèse portent sur le développement (modélisation, conception, réalisation et tests) d’une surface intelligente (smart surface) composée d’un réseau d'actionneurs numériques MEMS,… (more)

Subjects/Keywords: Microfabrication sur silicium; Gravure profonde aux réactions ioniques; Mems; Silicon micromachining; Deep RIE; Mems

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APA (6th Edition):

Shi, Z. (2017). Micro-actionneurs numériques en silicium pour la réalisation d'un micro-convoyeur : Silicon digital micro-actuators for development of a micro-conveyor. (Doctoral Dissertation). Paris Saclay. Retrieved from http://www.theses.fr/2017SACLS175

Chicago Manual of Style (16th Edition):

Shi, Zhichao. “Micro-actionneurs numériques en silicium pour la réalisation d'un micro-convoyeur : Silicon digital micro-actuators for development of a micro-conveyor.” 2017. Doctoral Dissertation, Paris Saclay. Accessed November 17, 2019. http://www.theses.fr/2017SACLS175.

MLA Handbook (7th Edition):

Shi, Zhichao. “Micro-actionneurs numériques en silicium pour la réalisation d'un micro-convoyeur : Silicon digital micro-actuators for development of a micro-conveyor.” 2017. Web. 17 Nov 2019.

Vancouver:

Shi Z. Micro-actionneurs numériques en silicium pour la réalisation d'un micro-convoyeur : Silicon digital micro-actuators for development of a micro-conveyor. [Internet] [Doctoral dissertation]. Paris Saclay; 2017. [cited 2019 Nov 17]. Available from: http://www.theses.fr/2017SACLS175.

Council of Science Editors:

Shi Z. Micro-actionneurs numériques en silicium pour la réalisation d'un micro-convoyeur : Silicon digital micro-actuators for development of a micro-conveyor. [Doctoral Dissertation]. Paris Saclay; 2017. Available from: http://www.theses.fr/2017SACLS175

12. CHAMPEAUX FREDERIC JEAN THOMAS. Medici simulations of ion beam irradiated silicon under anodization.

Degree: 2006, National University of Singapore

Subjects/Keywords: simulation porous silicon micromachining tcad photoluminescence

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APA (6th Edition):

THOMAS, C. F. J. (2006). Medici simulations of ion beam irradiated silicon under anodization. (Thesis). National University of Singapore. Retrieved from http://scholarbank.nus.edu.sg/handle/10635/15169

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

THOMAS, CHAMPEAUX FREDERIC JEAN. “Medici simulations of ion beam irradiated silicon under anodization.” 2006. Thesis, National University of Singapore. Accessed November 17, 2019. http://scholarbank.nus.edu.sg/handle/10635/15169.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

THOMAS, CHAMPEAUX FREDERIC JEAN. “Medici simulations of ion beam irradiated silicon under anodization.” 2006. Web. 17 Nov 2019.

Vancouver:

THOMAS CFJ. Medici simulations of ion beam irradiated silicon under anodization. [Internet] [Thesis]. National University of Singapore; 2006. [cited 2019 Nov 17]. Available from: http://scholarbank.nus.edu.sg/handle/10635/15169.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

THOMAS CFJ. Medici simulations of ion beam irradiated silicon under anodization. [Thesis]. National University of Singapore; 2006. Available from: http://scholarbank.nus.edu.sg/handle/10635/15169

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of New South Wales

13. Tangwarodomnukun, Viboon. Towards damage-free micro-fabrication of silicon substrates using a hybrid laser-waterjet technology.

Degree: Mechanical & Manufacturing Engineering, 2012, University of New South Wales

 A novel hybrid laser-waterjet machining technology is developed in this thesis using a new material removal concept to achieve near damage-free micromachining. Using this concept,… (more)

Subjects/Keywords: Waterjet; Hybrid laser-waterjet process; Laser; Micromachining; Silicon wafer; Heat transfer; Finite difference method; Damage-free machining

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APA (6th Edition):

Tangwarodomnukun, V. (2012). Towards damage-free micro-fabrication of silicon substrates using a hybrid laser-waterjet technology. (Doctoral Dissertation). University of New South Wales. Retrieved from http://handle.unsw.edu.au/1959.4/51643 ; https://unsworks.unsw.edu.au/fapi/datastream/unsworks:10310/SOURCE02?view=true

Chicago Manual of Style (16th Edition):

Tangwarodomnukun, Viboon. “Towards damage-free micro-fabrication of silicon substrates using a hybrid laser-waterjet technology.” 2012. Doctoral Dissertation, University of New South Wales. Accessed November 17, 2019. http://handle.unsw.edu.au/1959.4/51643 ; https://unsworks.unsw.edu.au/fapi/datastream/unsworks:10310/SOURCE02?view=true.

MLA Handbook (7th Edition):

Tangwarodomnukun, Viboon. “Towards damage-free micro-fabrication of silicon substrates using a hybrid laser-waterjet technology.” 2012. Web. 17 Nov 2019.

Vancouver:

Tangwarodomnukun V. Towards damage-free micro-fabrication of silicon substrates using a hybrid laser-waterjet technology. [Internet] [Doctoral dissertation]. University of New South Wales; 2012. [cited 2019 Nov 17]. Available from: http://handle.unsw.edu.au/1959.4/51643 ; https://unsworks.unsw.edu.au/fapi/datastream/unsworks:10310/SOURCE02?view=true.

Council of Science Editors:

Tangwarodomnukun V. Towards damage-free micro-fabrication of silicon substrates using a hybrid laser-waterjet technology. [Doctoral Dissertation]. University of New South Wales; 2012. Available from: http://handle.unsw.edu.au/1959.4/51643 ; https://unsworks.unsw.edu.au/fapi/datastream/unsworks:10310/SOURCE02?view=true


Delft University of Technology

14. Wolffenbuttel, M.R. Surface Micromachined Capacitive Tactile Image Sensor.

Degree: 1994, Delft University of Technology

Subjects/Keywords: tactile sensor; silicon sensor; micromachining; interface electronics

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APA (6th Edition):

Wolffenbuttel, M. R. (1994). Surface Micromachined Capacitive Tactile Image Sensor. (Doctoral Dissertation). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:794940cd-9548-41bc-b6cd-7833caabdb13 ; urn:NBN:nl:ui:24-uuid:794940cd-9548-41bc-b6cd-7833caabdb13 ; urn:NBN:nl:ui:24-uuid:794940cd-9548-41bc-b6cd-7833caabdb13 ; http://resolver.tudelft.nl/uuid:794940cd-9548-41bc-b6cd-7833caabdb13

Chicago Manual of Style (16th Edition):

Wolffenbuttel, M R. “Surface Micromachined Capacitive Tactile Image Sensor.” 1994. Doctoral Dissertation, Delft University of Technology. Accessed November 17, 2019. http://resolver.tudelft.nl/uuid:794940cd-9548-41bc-b6cd-7833caabdb13 ; urn:NBN:nl:ui:24-uuid:794940cd-9548-41bc-b6cd-7833caabdb13 ; urn:NBN:nl:ui:24-uuid:794940cd-9548-41bc-b6cd-7833caabdb13 ; http://resolver.tudelft.nl/uuid:794940cd-9548-41bc-b6cd-7833caabdb13.

MLA Handbook (7th Edition):

Wolffenbuttel, M R. “Surface Micromachined Capacitive Tactile Image Sensor.” 1994. Web. 17 Nov 2019.

Vancouver:

Wolffenbuttel MR. Surface Micromachined Capacitive Tactile Image Sensor. [Internet] [Doctoral dissertation]. Delft University of Technology; 1994. [cited 2019 Nov 17]. Available from: http://resolver.tudelft.nl/uuid:794940cd-9548-41bc-b6cd-7833caabdb13 ; urn:NBN:nl:ui:24-uuid:794940cd-9548-41bc-b6cd-7833caabdb13 ; urn:NBN:nl:ui:24-uuid:794940cd-9548-41bc-b6cd-7833caabdb13 ; http://resolver.tudelft.nl/uuid:794940cd-9548-41bc-b6cd-7833caabdb13.

Council of Science Editors:

Wolffenbuttel MR. Surface Micromachined Capacitive Tactile Image Sensor. [Doctoral Dissertation]. Delft University of Technology; 1994. Available from: http://resolver.tudelft.nl/uuid:794940cd-9548-41bc-b6cd-7833caabdb13 ; urn:NBN:nl:ui:24-uuid:794940cd-9548-41bc-b6cd-7833caabdb13 ; urn:NBN:nl:ui:24-uuid:794940cd-9548-41bc-b6cd-7833caabdb13 ; http://resolver.tudelft.nl/uuid:794940cd-9548-41bc-b6cd-7833caabdb13


Delft University of Technology

15. Pham, P.N. Silicon Micromachining for RF Technology.

Degree: 2003, Delft University of Technology

Subjects/Keywords: silicon micromachining; RF; lithography; 3-D integration

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Pham, P. N. (2003). Silicon Micromachining for RF Technology. (Doctoral Dissertation). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515 ; urn:NBN:nl:ui:24-uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515 ; urn:NBN:nl:ui:24-uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515 ; http://resolver.tudelft.nl/uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515

Chicago Manual of Style (16th Edition):

Pham, P N. “Silicon Micromachining for RF Technology.” 2003. Doctoral Dissertation, Delft University of Technology. Accessed November 17, 2019. http://resolver.tudelft.nl/uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515 ; urn:NBN:nl:ui:24-uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515 ; urn:NBN:nl:ui:24-uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515 ; http://resolver.tudelft.nl/uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515.

MLA Handbook (7th Edition):

Pham, P N. “Silicon Micromachining for RF Technology.” 2003. Web. 17 Nov 2019.

Vancouver:

Pham PN. Silicon Micromachining for RF Technology. [Internet] [Doctoral dissertation]. Delft University of Technology; 2003. [cited 2019 Nov 17]. Available from: http://resolver.tudelft.nl/uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515 ; urn:NBN:nl:ui:24-uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515 ; urn:NBN:nl:ui:24-uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515 ; http://resolver.tudelft.nl/uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515.

Council of Science Editors:

Pham PN. Silicon Micromachining for RF Technology. [Doctoral Dissertation]. Delft University of Technology; 2003. Available from: http://resolver.tudelft.nl/uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515 ; urn:NBN:nl:ui:24-uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515 ; urn:NBN:nl:ui:24-uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515 ; http://resolver.tudelft.nl/uuid:d1e6b12f-f8d8-4985-9840-5ed8001d0515


Georgia Tech

16. Zaman, Mohammad Faisal. Degree-per-hour mode-matched micromachined silicon vibratory gyroscopes.

Degree: PhD, Electrical and Computer Engineering, 2008, Georgia Tech

 The objective of this research dissertation is to design and implement two novel micromachined silicon vibratory gyroscopes, which attempt to incorporate all the necessary attributes… (more)

Subjects/Keywords: SOI; Silicon micromachining; Vibratory gyroscopes; Mode-matching; High-Q; Gyroscopes; Damping (Mechanics); Vibration; Silicon; Micromachining

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APA (6th Edition):

Zaman, M. F. (2008). Degree-per-hour mode-matched micromachined silicon vibratory gyroscopes. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/28168

Chicago Manual of Style (16th Edition):

Zaman, Mohammad Faisal. “Degree-per-hour mode-matched micromachined silicon vibratory gyroscopes.” 2008. Doctoral Dissertation, Georgia Tech. Accessed November 17, 2019. http://hdl.handle.net/1853/28168.

MLA Handbook (7th Edition):

Zaman, Mohammad Faisal. “Degree-per-hour mode-matched micromachined silicon vibratory gyroscopes.” 2008. Web. 17 Nov 2019.

Vancouver:

Zaman MF. Degree-per-hour mode-matched micromachined silicon vibratory gyroscopes. [Internet] [Doctoral dissertation]. Georgia Tech; 2008. [cited 2019 Nov 17]. Available from: http://hdl.handle.net/1853/28168.

Council of Science Editors:

Zaman MF. Degree-per-hour mode-matched micromachined silicon vibratory gyroscopes. [Doctoral Dissertation]. Georgia Tech; 2008. Available from: http://hdl.handle.net/1853/28168


Georgia Tech

17. Wang, Guoan. RF MEMS Switches with Novel Materials and Micromachining Techniques for SOC/SOP RF Front Ends.

Degree: PhD, Electrical and Computer Engineering, 2006, Georgia Tech

 This dissertation deals with the development of RF MEMS switches with novel materials and micromachining techniques for the RF and microwave applications. To enable the… (more)

Subjects/Keywords: CMOS grade Silicon; Micromachining techniques; LCP; BST; Photodefinable; Novel dielectric materials; RF MEMS switch; SOC/SOP; Micromachining; Microwave devices; Dielectrics

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Wang, G. (2006). RF MEMS Switches with Novel Materials and Micromachining Techniques for SOC/SOP RF Front Ends. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/14112

Chicago Manual of Style (16th Edition):

Wang, Guoan. “RF MEMS Switches with Novel Materials and Micromachining Techniques for SOC/SOP RF Front Ends.” 2006. Doctoral Dissertation, Georgia Tech. Accessed November 17, 2019. http://hdl.handle.net/1853/14112.

MLA Handbook (7th Edition):

Wang, Guoan. “RF MEMS Switches with Novel Materials and Micromachining Techniques for SOC/SOP RF Front Ends.” 2006. Web. 17 Nov 2019.

Vancouver:

Wang G. RF MEMS Switches with Novel Materials and Micromachining Techniques for SOC/SOP RF Front Ends. [Internet] [Doctoral dissertation]. Georgia Tech; 2006. [cited 2019 Nov 17]. Available from: http://hdl.handle.net/1853/14112.

Council of Science Editors:

Wang G. RF MEMS Switches with Novel Materials and Micromachining Techniques for SOC/SOP RF Front Ends. [Doctoral Dissertation]. Georgia Tech; 2006. Available from: http://hdl.handle.net/1853/14112

18. Κιτσαρά, Μαρία. Οπτικοί αισθητήρες για χημικούς / βιολογικούς προσδιορισμούς υλοποιημένοι με μικροτεχνολογία πυριτίου.

Degree: 2009, University of Ioannina; Πανεπιστήμιο Ιωαννίνων

The present doctorate thesis suggests an optoelectronic device, entirely based on silicon, which can incorporate monolithically Mach-Zehnder interferometers advantages, by employing silicon technology. The aim… (more)

Subjects/Keywords: Ολοκληρωμένος οπτικός βιοαισθητήρας; Μικρομηχανική πυριτίου; Συμβολόμετρα mach-zehnder ευρέος φάσματος; Βιομοριακές αλληλεπιδράσεις; Integrated optical biosensor; Silicon micromachining; Broad band mach-zehnder interferometry; Biomolecular interactions

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APA (6th Edition):

Κιτσαρά, . . (2009). Οπτικοί αισθητήρες για χημικούς / βιολογικούς προσδιορισμούς υλοποιημένοι με μικροτεχνολογία πυριτίου. (Thesis). University of Ioannina; Πανεπιστήμιο Ιωαννίνων. Retrieved from http://hdl.handle.net/10442/hedi/18261

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Κιτσαρά, Μαρία. “Οπτικοί αισθητήρες για χημικούς / βιολογικούς προσδιορισμούς υλοποιημένοι με μικροτεχνολογία πυριτίου.” 2009. Thesis, University of Ioannina; Πανεπιστήμιο Ιωαννίνων. Accessed November 17, 2019. http://hdl.handle.net/10442/hedi/18261.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Κιτσαρά, Μαρία. “Οπτικοί αισθητήρες για χημικούς / βιολογικούς προσδιορισμούς υλοποιημένοι με μικροτεχνολογία πυριτίου.” 2009. Web. 17 Nov 2019.

Vancouver:

Κιτσαρά . Οπτικοί αισθητήρες για χημικούς / βιολογικούς προσδιορισμούς υλοποιημένοι με μικροτεχνολογία πυριτίου. [Internet] [Thesis]. University of Ioannina; Πανεπιστήμιο Ιωαννίνων; 2009. [cited 2019 Nov 17]. Available from: http://hdl.handle.net/10442/hedi/18261.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Κιτσαρά . Οπτικοί αισθητήρες για χημικούς / βιολογικούς προσδιορισμούς υλοποιημένοι με μικροτεχνολογία πυριτίου. [Thesis]. University of Ioannina; Πανεπιστήμιο Ιωαννίνων; 2009. Available from: http://hdl.handle.net/10442/hedi/18261

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


Hong Kong University of Science and Technology

19. Li, Gang. Piezoresistive pressure sensor with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon.

Degree: 2004, Hong Kong University of Science and Technology

 Micromachined sensors and actuators have been investigated and industrially produced for more than twenty years. The most widely used sensing principle, especially for pressure sensors,… (more)

Subjects/Keywords: Silicon-on-insulator technology; Detectors  – Design and construction; Actuators  – Design and construction; Micromachining

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APA (6th Edition):

Li, G. (2004). Piezoresistive pressure sensor with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon. (Thesis). Hong Kong University of Science and Technology. Retrieved from https://doi.org/10.14711/thesis-b849862 ; http://repository.ust.hk/ir/bitstream/1783.1-2382/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Li, Gang. “Piezoresistive pressure sensor with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon.” 2004. Thesis, Hong Kong University of Science and Technology. Accessed November 17, 2019. https://doi.org/10.14711/thesis-b849862 ; http://repository.ust.hk/ir/bitstream/1783.1-2382/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Li, Gang. “Piezoresistive pressure sensor with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon.” 2004. Web. 17 Nov 2019.

Vancouver:

Li G. Piezoresistive pressure sensor with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2004. [cited 2019 Nov 17]. Available from: https://doi.org/10.14711/thesis-b849862 ; http://repository.ust.hk/ir/bitstream/1783.1-2382/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Li G. Piezoresistive pressure sensor with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon. [Thesis]. Hong Kong University of Science and Technology; 2004. Available from: https://doi.org/10.14711/thesis-b849862 ; http://repository.ust.hk/ir/bitstream/1783.1-2382/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


Indian Institute of Science

20. Singh, Jaspreet. Design, Development and Performance Analysis of Micromachined Sensors for Pressure and Flow Measurement.

Degree: 2014, Indian Institute of Science

 Now-a-days sensors are not limited only to industry or research laboratories but have come to common man’s usage. From kids toys to house hold equipment… (more)

Subjects/Keywords: Micromachined Pressure Sensors; Micromachined Flow Sensors; Microelectromechanical Sensors; MEMS Pressure Sensors; Micromachining; Piezoresistivity; Piezoresistive Pressure Sensors; Semiconductor Sensors; Micromachined Sensors; Pressure Sensors; Flow Sensors; MEMS Sensor; Silicon Pressure Sensors; Instrumentation

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APA (6th Edition):

Singh, J. (2014). Design, Development and Performance Analysis of Micromachined Sensors for Pressure and Flow Measurement. (Thesis). Indian Institute of Science. Retrieved from http://hdl.handle.net/2005/3132

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Singh, Jaspreet. “Design, Development and Performance Analysis of Micromachined Sensors for Pressure and Flow Measurement.” 2014. Thesis, Indian Institute of Science. Accessed November 17, 2019. http://hdl.handle.net/2005/3132.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Singh, Jaspreet. “Design, Development and Performance Analysis of Micromachined Sensors for Pressure and Flow Measurement.” 2014. Web. 17 Nov 2019.

Vancouver:

Singh J. Design, Development and Performance Analysis of Micromachined Sensors for Pressure and Flow Measurement. [Internet] [Thesis]. Indian Institute of Science; 2014. [cited 2019 Nov 17]. Available from: http://hdl.handle.net/2005/3132.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Singh J. Design, Development and Performance Analysis of Micromachined Sensors for Pressure and Flow Measurement. [Thesis]. Indian Institute of Science; 2014. Available from: http://hdl.handle.net/2005/3132

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


Brno University of Technology

21. Šalomoun, Vojtěch. Pokročilé techniky mikroobrábění .

Degree: 2014, Brno University of Technology

 Výroba mikro-elektro-mechanických systémů (MEMS) vyžaduje pokročilý stupeň miniaturizace, kterého nelze dosáhnout klasickými mikroelektronickými technologiemi. Tzv. mikroobrábění zahrnuje celou řadu specifických technik, kterými lze zpracovat materiál,… (more)

Subjects/Keywords: mikroobrábění; objemové; povrchové; křemík; XeF2; BOE; leptání; mikroelektromechanické systémy; MEMS; mikronosník; mikromůstek; mikromembrána; micromachining; bulk; surface; silicon; XeF2; BOE etching; microelectromechanical systems; MEMS; microcantilever; microbridge; micromembrane

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Šalomoun, V. (2014). Pokročilé techniky mikroobrábění . (Thesis). Brno University of Technology. Retrieved from http://hdl.handle.net/11012/34462

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Šalomoun, Vojtěch. “Pokročilé techniky mikroobrábění .” 2014. Thesis, Brno University of Technology. Accessed November 17, 2019. http://hdl.handle.net/11012/34462.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Šalomoun, Vojtěch. “Pokročilé techniky mikroobrábění .” 2014. Web. 17 Nov 2019.

Vancouver:

Šalomoun V. Pokročilé techniky mikroobrábění . [Internet] [Thesis]. Brno University of Technology; 2014. [cited 2019 Nov 17]. Available from: http://hdl.handle.net/11012/34462.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Šalomoun V. Pokročilé techniky mikroobrábění . [Thesis]. Brno University of Technology; 2014. Available from: http://hdl.handle.net/11012/34462

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


Delft University of Technology

22. Pham, H.T.M. PECVD silicon carbide: A structural material for surface micromachined devices.

Degree: 2004, Delft University of Technology

Subjects/Keywords: Silicon carbide material; surface micromachining; post-processing; micro-electromechanical systems

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APA (6th Edition):

Pham, H. T. M. (2004). PECVD silicon carbide: A structural material for surface micromachined devices. (Doctoral Dissertation). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7 ; urn:NBN:nl:ui:24-uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7 ; urn:NBN:nl:ui:24-uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7 ; http://resolver.tudelft.nl/uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7

Chicago Manual of Style (16th Edition):

Pham, H T M. “PECVD silicon carbide: A structural material for surface micromachined devices.” 2004. Doctoral Dissertation, Delft University of Technology. Accessed November 17, 2019. http://resolver.tudelft.nl/uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7 ; urn:NBN:nl:ui:24-uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7 ; urn:NBN:nl:ui:24-uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7 ; http://resolver.tudelft.nl/uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7.

MLA Handbook (7th Edition):

Pham, H T M. “PECVD silicon carbide: A structural material for surface micromachined devices.” 2004. Web. 17 Nov 2019.

Vancouver:

Pham HTM. PECVD silicon carbide: A structural material for surface micromachined devices. [Internet] [Doctoral dissertation]. Delft University of Technology; 2004. [cited 2019 Nov 17]. Available from: http://resolver.tudelft.nl/uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7 ; urn:NBN:nl:ui:24-uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7 ; urn:NBN:nl:ui:24-uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7 ; http://resolver.tudelft.nl/uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7.

Council of Science Editors:

Pham HTM. PECVD silicon carbide: A structural material for surface micromachined devices. [Doctoral Dissertation]. Delft University of Technology; 2004. Available from: http://resolver.tudelft.nl/uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7 ; urn:NBN:nl:ui:24-uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7 ; urn:NBN:nl:ui:24-uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7 ; http://resolver.tudelft.nl/uuid:91e396a8-5857-4e93-ba27-8a82d0d9f2b7

23. TAVERNIER EMMANUEL PIERRE. Micromachining of silicon using ion beams and electrochemical etching.

Degree: 2003, National University of Singapore

Subjects/Keywords: Silicon micromachining; ion beam; porous silicon; multi-level structures; silicon needles; high aspect-ratio

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APA (6th Edition):

PIERRE, T. E. (2003). Micromachining of silicon using ion beams and electrochemical etching. (Thesis). National University of Singapore. Retrieved from http://scholarbank.nus.edu.sg/handle/10635/13482

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

PIERRE, TAVERNIER EMMANUEL. “Micromachining of silicon using ion beams and electrochemical etching.” 2003. Thesis, National University of Singapore. Accessed November 17, 2019. http://scholarbank.nus.edu.sg/handle/10635/13482.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

PIERRE, TAVERNIER EMMANUEL. “Micromachining of silicon using ion beams and electrochemical etching.” 2003. Web. 17 Nov 2019.

Vancouver:

PIERRE TE. Micromachining of silicon using ion beams and electrochemical etching. [Internet] [Thesis]. National University of Singapore; 2003. [cited 2019 Nov 17]. Available from: http://scholarbank.nus.edu.sg/handle/10635/13482.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

PIERRE TE. Micromachining of silicon using ion beams and electrochemical etching. [Thesis]. National University of Singapore; 2003. Available from: http://scholarbank.nus.edu.sg/handle/10635/13482

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


Freie Universität Berlin

24. Kirchner, Viola. Electrochemical Microstructuring with Ultrashort Voltage Pulses.

Degree: 2002, Freie Universität Berlin

 Abstract of Thesis# Abstract The fabrication of microstructures is one of today's key technologies. Applications of microdevices range from sensors and electronic devices up to… (more)

Subjects/Keywords: Micromachining; Microstructuring; Electrochemistry; Voltage Pulses; Stainless Steel; Silicon; 500 Naturwissenschaften und Mathematik::540 Chemie::540 Chemie und zugeordnete Wissenschaften

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APA (6th Edition):

Kirchner, V. (2002). Electrochemical Microstructuring with Ultrashort Voltage Pulses. (Thesis). Freie Universität Berlin. Retrieved from https://refubium.fu-berlin.de/handle/fub188/10585

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Kirchner, Viola. “Electrochemical Microstructuring with Ultrashort Voltage Pulses.” 2002. Thesis, Freie Universität Berlin. Accessed November 17, 2019. https://refubium.fu-berlin.de/handle/fub188/10585.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Kirchner, Viola. “Electrochemical Microstructuring with Ultrashort Voltage Pulses.” 2002. Web. 17 Nov 2019.

Vancouver:

Kirchner V. Electrochemical Microstructuring with Ultrashort Voltage Pulses. [Internet] [Thesis]. Freie Universität Berlin; 2002. [cited 2019 Nov 17]. Available from: https://refubium.fu-berlin.de/handle/fub188/10585.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Kirchner V. Electrochemical Microstructuring with Ultrashort Voltage Pulses. [Thesis]. Freie Universität Berlin; 2002. Available from: https://refubium.fu-berlin.de/handle/fub188/10585

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

25. Brookhuis, Robert Anton. Miniature force-torque sensors for biomechanical applications.

Degree: Faculty of Electrical Engineering, Mathematics & Computer Science, 2014, Twente University (TUP)

 The forces involved in interactions between the human body and the environment are important for many tasks in daily life. For example in sports, the… (more)

Subjects/Keywords: METIS-308830; miniature load cell; tactile sensing; EWI-25622; capacitive sensing; TST-SENSORS; IR-93988; Force-torque sensing; silicon micromachining

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APA (6th Edition):

Brookhuis, R. A. (2014). Miniature force-torque sensors for biomechanical applications. (Doctoral Dissertation). Twente University (TUP). Retrieved from https://research.utwente.nl/en/publications/miniature-forcetorque-sensors-for-biomechanical-applications(92a7cfee-a263-4e3a-8d76-4a9345a925f2).html ; urn:nbn:nl:ui:28-93988 ; 92a7cfee-a263-4e3a-8d76-4a9345a925f2 ; 10.3990/1.9789036537421 ; urn:isbn:978-90-365-3742-1 ; urn:nbn:nl:ui:28-93988 ; https://research.utwente.nl/en/publications/miniature-forcetorque-sensors-for-biomechanical-applications(92a7cfee-a263-4e3a-8d76-4a9345a925f2).html

Chicago Manual of Style (16th Edition):

Brookhuis, Robert Anton. “Miniature force-torque sensors for biomechanical applications.” 2014. Doctoral Dissertation, Twente University (TUP). Accessed November 17, 2019. https://research.utwente.nl/en/publications/miniature-forcetorque-sensors-for-biomechanical-applications(92a7cfee-a263-4e3a-8d76-4a9345a925f2).html ; urn:nbn:nl:ui:28-93988 ; 92a7cfee-a263-4e3a-8d76-4a9345a925f2 ; 10.3990/1.9789036537421 ; urn:isbn:978-90-365-3742-1 ; urn:nbn:nl:ui:28-93988 ; https://research.utwente.nl/en/publications/miniature-forcetorque-sensors-for-biomechanical-applications(92a7cfee-a263-4e3a-8d76-4a9345a925f2).html.

MLA Handbook (7th Edition):

Brookhuis, Robert Anton. “Miniature force-torque sensors for biomechanical applications.” 2014. Web. 17 Nov 2019.

Vancouver:

Brookhuis RA. Miniature force-torque sensors for biomechanical applications. [Internet] [Doctoral dissertation]. Twente University (TUP); 2014. [cited 2019 Nov 17]. Available from: https://research.utwente.nl/en/publications/miniature-forcetorque-sensors-for-biomechanical-applications(92a7cfee-a263-4e3a-8d76-4a9345a925f2).html ; urn:nbn:nl:ui:28-93988 ; 92a7cfee-a263-4e3a-8d76-4a9345a925f2 ; 10.3990/1.9789036537421 ; urn:isbn:978-90-365-3742-1 ; urn:nbn:nl:ui:28-93988 ; https://research.utwente.nl/en/publications/miniature-forcetorque-sensors-for-biomechanical-applications(92a7cfee-a263-4e3a-8d76-4a9345a925f2).html.

Council of Science Editors:

Brookhuis RA. Miniature force-torque sensors for biomechanical applications. [Doctoral Dissertation]. Twente University (TUP); 2014. Available from: https://research.utwente.nl/en/publications/miniature-forcetorque-sensors-for-biomechanical-applications(92a7cfee-a263-4e3a-8d76-4a9345a925f2).html ; urn:nbn:nl:ui:28-93988 ; 92a7cfee-a263-4e3a-8d76-4a9345a925f2 ; 10.3990/1.9789036537421 ; urn:isbn:978-90-365-3742-1 ; urn:nbn:nl:ui:28-93988 ; https://research.utwente.nl/en/publications/miniature-forcetorque-sensors-for-biomechanical-applications(92a7cfee-a263-4e3a-8d76-4a9345a925f2).html


Delft University of Technology

26. Mihailovic, M. MEMS monocrystalline-silicon based thermal devices for chemical and microfluidic applications.

Degree: 2011, Delft University of Technology

 This thesis explores the employment of monocrystalline silicon in microsystems as an active material for different thermal functions, such as heat generation and heat transfer… (more)

Subjects/Keywords: MEMS; monocrystalline silicon; bulk micromachining; wafer bonding; resistive heating; two-phase flow; micro-evaporation; micro-propulsion; high-temperature resistance measurements

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APA (6th Edition):

Mihailovic, M. (2011). MEMS monocrystalline-silicon based thermal devices for chemical and microfluidic applications. (Doctoral Dissertation). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e ; urn:NBN:nl:ui:24-uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e ; urn:NBN:nl:ui:24-uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e ; http://resolver.tudelft.nl/uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e

Chicago Manual of Style (16th Edition):

Mihailovic, M. “MEMS monocrystalline-silicon based thermal devices for chemical and microfluidic applications.” 2011. Doctoral Dissertation, Delft University of Technology. Accessed November 17, 2019. http://resolver.tudelft.nl/uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e ; urn:NBN:nl:ui:24-uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e ; urn:NBN:nl:ui:24-uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e ; http://resolver.tudelft.nl/uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e.

MLA Handbook (7th Edition):

Mihailovic, M. “MEMS monocrystalline-silicon based thermal devices for chemical and microfluidic applications.” 2011. Web. 17 Nov 2019.

Vancouver:

Mihailovic M. MEMS monocrystalline-silicon based thermal devices for chemical and microfluidic applications. [Internet] [Doctoral dissertation]. Delft University of Technology; 2011. [cited 2019 Nov 17]. Available from: http://resolver.tudelft.nl/uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e ; urn:NBN:nl:ui:24-uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e ; urn:NBN:nl:ui:24-uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e ; http://resolver.tudelft.nl/uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e.

Council of Science Editors:

Mihailovic M. MEMS monocrystalline-silicon based thermal devices for chemical and microfluidic applications. [Doctoral Dissertation]. Delft University of Technology; 2011. Available from: http://resolver.tudelft.nl/uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e ; urn:NBN:nl:ui:24-uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e ; urn:NBN:nl:ui:24-uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e ; http://resolver.tudelft.nl/uuid:ea9a2f9e-56c3-4739-9315-02da51e0ba9e


McMaster University

27. Crawford, Travis H. R. Examination of Surface Morphology and Sub-Surface Crystallographic Changes of Si, Cu, GaP and Ge After Ultrashort Laser Pulse Irradiation.

Degree: PhD, 2008, McMaster University

 This thesis reports the effects of ultrashort laser pulse irradiation of various materials. The morphology after irradiation was examined using several microscopy techniques. Emphasis was… (more)

Subjects/Keywords: ultrashort laser pulse irradiation; crystallography; laser-induced period surface changes; femtosecond laser micromachining; pulse fluence; silicon; gallium phosphide; germanium; copper; material modification

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APA (6th Edition):

Crawford, T. H. R. (2008). Examination of Surface Morphology and Sub-Surface Crystallographic Changes of Si, Cu, GaP and Ge After Ultrashort Laser Pulse Irradiation. (Doctoral Dissertation). McMaster University. Retrieved from http://hdl.handle.net/11375/17625

Chicago Manual of Style (16th Edition):

Crawford, Travis H R. “Examination of Surface Morphology and Sub-Surface Crystallographic Changes of Si, Cu, GaP and Ge After Ultrashort Laser Pulse Irradiation.” 2008. Doctoral Dissertation, McMaster University. Accessed November 17, 2019. http://hdl.handle.net/11375/17625.

MLA Handbook (7th Edition):

Crawford, Travis H R. “Examination of Surface Morphology and Sub-Surface Crystallographic Changes of Si, Cu, GaP and Ge After Ultrashort Laser Pulse Irradiation.” 2008. Web. 17 Nov 2019.

Vancouver:

Crawford THR. Examination of Surface Morphology and Sub-Surface Crystallographic Changes of Si, Cu, GaP and Ge After Ultrashort Laser Pulse Irradiation. [Internet] [Doctoral dissertation]. McMaster University; 2008. [cited 2019 Nov 17]. Available from: http://hdl.handle.net/11375/17625.

Council of Science Editors:

Crawford THR. Examination of Surface Morphology and Sub-Surface Crystallographic Changes of Si, Cu, GaP and Ge After Ultrashort Laser Pulse Irradiation. [Doctoral Dissertation]. McMaster University; 2008. Available from: http://hdl.handle.net/11375/17625


University of Florida

28. Li, Yawei. Side-Implanted Piezoresistive Shear Stress Sensor for Turbulent Boundary Layer Measurement.

Degree: PhD, Aerospace Engineering - Mechanical and Aerospace Engineering, 2008, University of Florida

 In this dissertation, I discuss the device modeling, design optimization, fabrication, packaging and characterization of a micromachined floating element piezoresistive shear stress sensor for the… (more)

Subjects/Keywords: Design optimization; Doping; Electric potential; Oxides; Resistors; Sensors; Shear stress; Silicon; Structural deflection; Thermal noise; drie, friction, implanted, mems, micromachining, optimization, piezoresistive, rie, sensor, shear, side, skin, stress

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Li, Y. (2008). Side-Implanted Piezoresistive Shear Stress Sensor for Turbulent Boundary Layer Measurement. (Doctoral Dissertation). University of Florida. Retrieved from http://ufdc.ufl.edu/UFE0017550

Chicago Manual of Style (16th Edition):

Li, Yawei. “Side-Implanted Piezoresistive Shear Stress Sensor for Turbulent Boundary Layer Measurement.” 2008. Doctoral Dissertation, University of Florida. Accessed November 17, 2019. http://ufdc.ufl.edu/UFE0017550.

MLA Handbook (7th Edition):

Li, Yawei. “Side-Implanted Piezoresistive Shear Stress Sensor for Turbulent Boundary Layer Measurement.” 2008. Web. 17 Nov 2019.

Vancouver:

Li Y. Side-Implanted Piezoresistive Shear Stress Sensor for Turbulent Boundary Layer Measurement. [Internet] [Doctoral dissertation]. University of Florida; 2008. [cited 2019 Nov 17]. Available from: http://ufdc.ufl.edu/UFE0017550.

Council of Science Editors:

Li Y. Side-Implanted Piezoresistive Shear Stress Sensor for Turbulent Boundary Layer Measurement. [Doctoral Dissertation]. University of Florida; 2008. Available from: http://ufdc.ufl.edu/UFE0017550


Université Catholique de Louvain

29. Parvais, Bertrand. Nonlinear devices characterization and micromachining techniques for RF integrated circuits.

Degree: 2004, Université Catholique de Louvain

The present work is dedicated to the development of high performance integrated circuits for wireless communications, by acting of three different levels: technologies, devices, and… (more)

Subjects/Keywords: Intermodulation; Surface micromachining; Dry etching; Silanes; SOI; Release; Polysilicon; ICP; Plasma etching; Hydrophobicity; LNA; RIE; Low-noise amplifier; IFM; Stress; Capillarity; Linearity; Microsystem; VCO; Silicidation; Oscillators; Large-signal network analyzer; Describing functions; Integral function method; Silicon-on-insulator; Distortion; CMOS; Circuit design; MEMS; RF IC; Stiction; Volterra; Phase noise; Varactor; Tunable capacitor

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Parvais, B. (2004). Nonlinear devices characterization and micromachining techniques for RF integrated circuits. (Thesis). Université Catholique de Louvain. Retrieved from http://hdl.handle.net/2078.1/5008

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Parvais, Bertrand. “Nonlinear devices characterization and micromachining techniques for RF integrated circuits.” 2004. Thesis, Université Catholique de Louvain. Accessed November 17, 2019. http://hdl.handle.net/2078.1/5008.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Parvais, Bertrand. “Nonlinear devices characterization and micromachining techniques for RF integrated circuits.” 2004. Web. 17 Nov 2019.

Vancouver:

Parvais B. Nonlinear devices characterization and micromachining techniques for RF integrated circuits. [Internet] [Thesis]. Université Catholique de Louvain; 2004. [cited 2019 Nov 17]. Available from: http://hdl.handle.net/2078.1/5008.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Parvais B. Nonlinear devices characterization and micromachining techniques for RF integrated circuits. [Thesis]. Université Catholique de Louvain; 2004. Available from: http://hdl.handle.net/2078.1/5008

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

.