subject:(Microelectromechanical systems)

University of Johannesburg

1. Tibbles, Christopher Jeremy. Analysis of micro-scale EDM.

Degree: 2014, University of Johannesburg

►

M.Ing. (Mechanical Engineering)

Micro electromechanical systems (MEMS) are presented and the application of electro discharge machining (EDM) to this scale of manufacture is discussed. A… (more)

Subjects/Keywords: Microelectromechanical systems

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APA (6^th Edition):

Tibbles, C. J. (2014). Analysis of micro-scale EDM. (Thesis). University of Johannesburg. Retrieved from http://hdl.handle.net/10210/12721

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Tibbles, Christopher Jeremy. “Analysis of micro-scale EDM.” 2014. Thesis, University of Johannesburg. Accessed February 25, 2020. http://hdl.handle.net/10210/12721.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Tibbles, Christopher Jeremy. “Analysis of micro-scale EDM.” 2014. Web. 25 Feb 2020.

Vancouver:

Tibbles CJ. Analysis of micro-scale EDM. [Internet] [Thesis]. University of Johannesburg; 2014. [cited 2020 Feb 25]. Available from: http://hdl.handle.net/10210/12721.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Tibbles CJ. Analysis of micro-scale EDM. [Thesis]. University of Johannesburg; 2014. Available from: http://hdl.handle.net/10210/12721

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

University of Utah

2. Anderson, Eric. Micro charge pump actuation in SUMMiT V MEMS.

Degree: Honors BS;, Mechanical Engineering;, 2008, University of Utah

URL: http://content.lib.utah.edu/cdm/singleitem/collection/etd2/id/2103/rec/768

► Micro-Electrical-Mechanical-Systems (MEMS) may contain mechanical parts that are often actuated by an external electrical signal. Visual inspection of the mechanical parts may require a Scanning… (more)

▼ Micro-Electrical-Mechanical-Systems (MEMS) may contain mechanical parts that are often actuated by an external electrical signal. Visual inspection of the mechanical parts may require a Scanning Electron Microscope (SEM) due to the extremely small dimensions involved. While imaging, electrons interact with the specimen and may generate static electric charge within features of the specimen. Recently, devices have been designed to use the forces generated as a result of interacting static electric charges within features produced during SEM imaging as means of actuating mechanical movement. This study investigates two such MEMS devices designed and fabricated using the Sandia SUMMiT V MEMS process. The first design is a test structure used to quantify the forces and charges generated through the actuation process. The test structure utilizes thin beams that bend and store energy. A theoretical beam mechanics model has been created to quantify those forces. After fabrication the test structure was cross sectioned. Actual dimensions were measured using optical and electron microscopes. These dimensions were compared with those expected from design simulations. The actual test structure dimensions were found to be suitable for micro charge pump actuation. The second design is a series of interlocking shelves intended to expand into a stepped pyramid when viewed under a SEM. This pyramid was intended to demonstrate the unique ability of the charge pump method. Unfortunately, the pyramid device was found to be too loosely designed and resulted in steps moving off track likely during final steps of fabrication. When steps were inline, SEM imaging of the pyramid expanded only partially. The design has been revised to include beams running perpendicular to and cutting into the step's top layer as well as bottom layer. These beams as well as an extra layer underneath the pyramid, should help the pyramid to survive manufacture and charge properly. A practical application of micro charge pump actuation, as well as the pyramid is discussed.

Subjects/Keywords: Microelectromechanical systems; Microactuators

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APA (6^th Edition):

Anderson, E. (2008). Micro charge pump actuation in SUMMiT V MEMS. (Masters Thesis). University of Utah. Retrieved from http://content.lib.utah.edu/cdm/singleitem/collection/etd2/id/2103/rec/768

Chicago Manual of Style (16^th Edition):

Anderson, Eric. “Micro charge pump actuation in SUMMiT V MEMS.” 2008. Masters Thesis, University of Utah. Accessed February 25, 2020. http://content.lib.utah.edu/cdm/singleitem/collection/etd2/id/2103/rec/768.

MLA Handbook (7^th Edition):

Anderson, Eric. “Micro charge pump actuation in SUMMiT V MEMS.” 2008. Web. 25 Feb 2020.

Vancouver:

Anderson E. Micro charge pump actuation in SUMMiT V MEMS. [Internet] [Masters thesis]. University of Utah; 2008. [cited 2020 Feb 25]. Available from: http://content.lib.utah.edu/cdm/singleitem/collection/etd2/id/2103/rec/768.

Council of Science Editors:

Anderson E. Micro charge pump actuation in SUMMiT V MEMS. [Masters Thesis]. University of Utah; 2008. Available from: http://content.lib.utah.edu/cdm/singleitem/collection/etd2/id/2103/rec/768

Montana State University

3. Mishty, Anamika Sharmin. Dynamic response of mini cantilever beams in viscous media.

Degree: College of Engineering, 2010, Montana State University

URL: https://scholarworks.montana.edu/xmlui/handle/1/1882

► In concurrent engineering, viscosity and density of a fluid are two important parameters as they are the indicators of some predefined standards of the concerned… (more)

Subjects/Keywords: Microelectromechanical systems.; Fluids.

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APA (6^th Edition):

Mishty, A. S. (2010). Dynamic response of mini cantilever beams in viscous media. (Thesis). Montana State University. Retrieved from https://scholarworks.montana.edu/xmlui/handle/1/1882

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Mishty, Anamika Sharmin. “Dynamic response of mini cantilever beams in viscous media.” 2010. Thesis, Montana State University. Accessed February 25, 2020. https://scholarworks.montana.edu/xmlui/handle/1/1882.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Mishty, Anamika Sharmin. “Dynamic response of mini cantilever beams in viscous media.” 2010. Web. 25 Feb 2020.

Vancouver:

Mishty AS. Dynamic response of mini cantilever beams in viscous media. [Internet] [Thesis]. Montana State University; 2010. [cited 2020 Feb 25]. Available from: https://scholarworks.montana.edu/xmlui/handle/1/1882.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Mishty AS. Dynamic response of mini cantilever beams in viscous media. [Thesis]. Montana State University; 2010. Available from: https://scholarworks.montana.edu/xmlui/handle/1/1882

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Montana State University

4. Lukes, Sarah Jane. Imaging performance of elliptical-boundary varifocal mirrors in active optical systems.

Degree: College of Engineering, 2015, Montana State University

URL: https://scholarworks.montana.edu/xmlui/handle/1/8862

► Micro-electro-mechanical systems deformable-membrane mirrors provide a means of focus control and attendant spherical aberration correction for miniaturized imaging systems. The technology has greatly advanced in… (more)

▼ Micro-electro-mechanical systems deformable-membrane mirrors provide a means of focus control and attendant spherical aberration correction for miniaturized imaging systems. The technology has greatly advanced in the last decade, thereby extending their focal range capabilities. This dissertation describes a novel SU-8 2002 silicon-on-insulator wafer deformable mirror. A 4.000 mm x 5.657 mm mirror for 45° incident light rays achieves 22 micron stroke or 65 diopters, limited by snapdown. The mirrors show excellent optical quality while flat. Most have peak-to-valley difference of less than 150 nm and root-mean-square less than 25 nm. The process proves simple, only requiring a silicon-on-insulator wafer, SU-8 2002, and a metal layer. Xenon difluoride etches the silicon to release the mirrors. Greater than 90% of the devices survive fabrication and release. While current literature includes several aberration analyses on static mirrors, analyses that incorporate the dynamic nature of these mirrors do not exist. Optical designers may have a choice between deformable mirrors and other types of varifocal mirrors or lenses. Furthermore, a dynamic mirror at an incidence angle other than normal may be desired due to space limitations or for higher throughput (normal incidence requires a beam splitter). This dissertation presents an analysis based on the characteristic function of the system. It provides 2nd and 3rd order aberration coefficients in terms of dynamic focus range and base ray incidence angle. These afford an understanding of the significance of different types of aberrations. Root-mean-square and Strehl calculations provide insight into overall imaging performance for various conditions. I present general guidelines for maximum incidence angle and field of fiew that provide near diffraction-limited performance. Experimental verification of the MEMS mirrors at 5° and 45° incidence angles validates the analytical results. A Blu-ray optical pick-up imaging demonstration shows the utility of these mirrors for focus control and spherical aberration correction. Imaging results of the first demonstration of a deformable mirror for dynamic agile focus control and spherical aberration correction in a commercial table-top confocal microscope are also shown. Advisors/Committee Members: Chairperson, Graduate Committee: David L. Dickensheets (advisor).

Subjects/Keywords: Microelectromechanical systems.; Imaging systems.; Mirrors.

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APA (6^th Edition):

Lukes, S. J. (2015). Imaging performance of elliptical-boundary varifocal mirrors in active optical systems. (Thesis). Montana State University. Retrieved from https://scholarworks.montana.edu/xmlui/handle/1/8862

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Lukes, Sarah Jane. “Imaging performance of elliptical-boundary varifocal mirrors in active optical systems.” 2015. Thesis, Montana State University. Accessed February 25, 2020. https://scholarworks.montana.edu/xmlui/handle/1/8862.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Lukes, Sarah Jane. “Imaging performance of elliptical-boundary varifocal mirrors in active optical systems.” 2015. Web. 25 Feb 2020.

Vancouver:

Lukes SJ. Imaging performance of elliptical-boundary varifocal mirrors in active optical systems. [Internet] [Thesis]. Montana State University; 2015. [cited 2020 Feb 25]. Available from: https://scholarworks.montana.edu/xmlui/handle/1/8862.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Lukes SJ. Imaging performance of elliptical-boundary varifocal mirrors in active optical systems. [Thesis]. Montana State University; 2015. Available from: https://scholarworks.montana.edu/xmlui/handle/1/8862

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

University of Alberta

5. Shewchuk, Ryan M. Increasing Organic Photovoltaic Device Efficiency Through Microstructuring Techniques.

Degree: MS, Department of Electrical and Computer Engineering, 2016, University of Alberta

URL: https://era.library.ualberta.ca/files/czp38wc62g

► Organic photovoltaics offer the tantalizing possibility of inexpensive renewable energy generation. However, there are many issues that need to be solved before organic photovoltaics can… (more)

Subjects/Keywords: Organic Photovoltaics; MEMS; Microelectromechanical Systems

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APA (6^th Edition):

Shewchuk, R. M. (2016). Increasing Organic Photovoltaic Device Efficiency Through Microstructuring Techniques. (Masters Thesis). University of Alberta. Retrieved from https://era.library.ualberta.ca/files/czp38wc62g

Chicago Manual of Style (16^th Edition):

Shewchuk, Ryan M. “Increasing Organic Photovoltaic Device Efficiency Through Microstructuring Techniques.” 2016. Masters Thesis, University of Alberta. Accessed February 25, 2020. https://era.library.ualberta.ca/files/czp38wc62g.

MLA Handbook (7^th Edition):

Shewchuk, Ryan M. “Increasing Organic Photovoltaic Device Efficiency Through Microstructuring Techniques.” 2016. Web. 25 Feb 2020.

Vancouver:

Shewchuk RM. Increasing Organic Photovoltaic Device Efficiency Through Microstructuring Techniques. [Internet] [Masters thesis]. University of Alberta; 2016. [cited 2020 Feb 25]. Available from: https://era.library.ualberta.ca/files/czp38wc62g.

Council of Science Editors:

Shewchuk RM. Increasing Organic Photovoltaic Device Efficiency Through Microstructuring Techniques. [Masters Thesis]. University of Alberta; 2016. Available from: https://era.library.ualberta.ca/files/czp38wc62g

University of Alberta

6. Benfield, David C. A Study of Six-Axis MEMS Sensors for Load Detection in Biomedical Applications.

Degree: PhD, Department of Mechanical Engineering, 2012, University of Alberta

URL: https://era.library.ualberta.ca/files/wm117p68c

► Quantification of the loads applied in biomedical applications has the potential to increase patient safety during surgical procedures and to improve the knowledge of the… (more)

Subjects/Keywords: microelectromechanical systems; scoliosis; sensor

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APA (6^th Edition):

Benfield, D. C. (2012). A Study of Six-Axis MEMS Sensors for Load Detection in Biomedical Applications. (Doctoral Dissertation). University of Alberta. Retrieved from https://era.library.ualberta.ca/files/wm117p68c

Chicago Manual of Style (16^th Edition):

Benfield, David C. “A Study of Six-Axis MEMS Sensors for Load Detection in Biomedical Applications.” 2012. Doctoral Dissertation, University of Alberta. Accessed February 25, 2020. https://era.library.ualberta.ca/files/wm117p68c.

MLA Handbook (7^th Edition):

Benfield, David C. “A Study of Six-Axis MEMS Sensors for Load Detection in Biomedical Applications.” 2012. Web. 25 Feb 2020.

Vancouver:

Benfield DC. A Study of Six-Axis MEMS Sensors for Load Detection in Biomedical Applications. [Internet] [Doctoral dissertation]. University of Alberta; 2012. [cited 2020 Feb 25]. Available from: https://era.library.ualberta.ca/files/wm117p68c.

Council of Science Editors:

Benfield DC. A Study of Six-Axis MEMS Sensors for Load Detection in Biomedical Applications. [Doctoral Dissertation]. University of Alberta; 2012. Available from: https://era.library.ualberta.ca/files/wm117p68c

University of Illinois – Urbana-Champaign

7. Keller, Katrina. Using resonant MEMS pedestal sensors and filtering techniques to determine the growth curve of MDA-MB-231, metastatic breast cancer cells.

Degree: MS, 0408, 2014, University of Illinois – Urbana-Champaign

URL: http://hdl.handle.net/2142/46940

► Studying cells at the individual level is incredibly important for understanding underlying mechanisms for growth, cell cycle control, cell mass, cell adhesion to surfaces, and… (more)

Subjects/Keywords: Microelectromechanical systems (MEMS); Cancer

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APA (6^th Edition):

Keller, K. (2014). Using resonant MEMS pedestal sensors and filtering techniques to determine the growth curve of MDA-MB-231, metastatic breast cancer cells. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/46940

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Keller, Katrina. “Using resonant MEMS pedestal sensors and filtering techniques to determine the growth curve of MDA-MB-231, metastatic breast cancer cells.” 2014. Thesis, University of Illinois – Urbana-Champaign. Accessed February 25, 2020. http://hdl.handle.net/2142/46940.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Keller, Katrina. “Using resonant MEMS pedestal sensors and filtering techniques to determine the growth curve of MDA-MB-231, metastatic breast cancer cells.” 2014. Web. 25 Feb 2020.

Vancouver:

Keller K. Using resonant MEMS pedestal sensors and filtering techniques to determine the growth curve of MDA-MB-231, metastatic breast cancer cells. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2014. [cited 2020 Feb 25]. Available from: http://hdl.handle.net/2142/46940.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Keller K. Using resonant MEMS pedestal sensors and filtering techniques to determine the growth curve of MDA-MB-231, metastatic breast cancer cells. [Thesis]. University of Illinois – Urbana-Champaign; 2014. Available from: http://hdl.handle.net/2142/46940

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Cape Peninsula University of Technology

8. Mustafa, Haithem Ali Babiker. Development of a noncontact current sensor based on MEMS technology .

Degree: 2007, Cape Peninsula University of Technology

URL: http://etd.cput.ac.za/handle/20.500.11838/1082

► Most ofMEMS sensors are based on the micro-cantilever technology, which use wide range of different design materials and structures. The benefit ofMEMS technology is in… (more)

Subjects/Keywords: Microelectromechanical systems

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APA (6^th Edition):

Mustafa, H. A. B. (2007). Development of a noncontact current sensor based on MEMS technology . (Thesis). Cape Peninsula University of Technology. Retrieved from http://etd.cput.ac.za/handle/20.500.11838/1082

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Mustafa, Haithem Ali Babiker. “Development of a noncontact current sensor based on MEMS technology .” 2007. Thesis, Cape Peninsula University of Technology. Accessed February 25, 2020. http://etd.cput.ac.za/handle/20.500.11838/1082.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Mustafa, Haithem Ali Babiker. “Development of a noncontact current sensor based on MEMS technology .” 2007. Web. 25 Feb 2020.

Vancouver:

Mustafa HAB. Development of a noncontact current sensor based on MEMS technology . [Internet] [Thesis]. Cape Peninsula University of Technology; 2007. [cited 2020 Feb 25]. Available from: http://etd.cput.ac.za/handle/20.500.11838/1082.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Mustafa HAB. Development of a noncontact current sensor based on MEMS technology . [Thesis]. Cape Peninsula University of Technology; 2007. Available from: http://etd.cput.ac.za/handle/20.500.11838/1082

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Montana State University

9. Moog, Eric John. Numerical modeling of the deflection of an electrostatically actuated circular membrane mirror.

Degree: College of Engineering, 2011, Montana State University

URL: https://scholarworks.montana.edu/xmlui/handle/1/1897

► This thesis outlines a numerical modeling method to describe the deflection behavior and investigate control schemes for an electrostatically actuated deformable membrane mirror, with application… (more)

Subjects/Keywords: Microelectromechanical systems.; Mirrors.; Finite differences.

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APA (6^th Edition):

Moog, E. J. (2011). Numerical modeling of the deflection of an electrostatically actuated circular membrane mirror. (Thesis). Montana State University. Retrieved from https://scholarworks.montana.edu/xmlui/handle/1/1897

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Moog, Eric John. “Numerical modeling of the deflection of an electrostatically actuated circular membrane mirror.” 2011. Thesis, Montana State University. Accessed February 25, 2020. https://scholarworks.montana.edu/xmlui/handle/1/1897.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Moog, Eric John. “Numerical modeling of the deflection of an electrostatically actuated circular membrane mirror.” 2011. Web. 25 Feb 2020.

Vancouver:

Moog EJ. Numerical modeling of the deflection of an electrostatically actuated circular membrane mirror. [Internet] [Thesis]. Montana State University; 2011. [cited 2020 Feb 25]. Available from: https://scholarworks.montana.edu/xmlui/handle/1/1897.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Moog EJ. Numerical modeling of the deflection of an electrostatically actuated circular membrane mirror. [Thesis]. Montana State University; 2011. Available from: https://scholarworks.montana.edu/xmlui/handle/1/1897

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Boston University

10. Ozturk, Mehmet Saadeddin. Electrothermally actuated terahertz metamaterial.

Degree: MS, Engineering, 2010, Boston University

URL: http://hdl.handle.net/2144/34955

► Microelectromechanical Systems (MEMS) have been adapted from Integrated Circuit (IC) technology. MEMS enable fabrication of devices size from a few microns to hundreds of microns.… (more)

▼ Microelectromechanical Systems (MEMS) have been adapted from Integrated Circuit (IC) technology. MEMS enable fabrication of devices size from a few microns to hundreds of microns. This scale is also a proper scale for Terahertz (THz) metamaterials (MM), which are designed for building homogeneous mediums. Our study aims to demonstrate an operating device which is designed by using mechanical and electromagnetic principles, fabricated by MEMS technology. MEMS actuator and electromagnetic resonator are the two main parts of our device which is called Electrothermally Actuated Metamaterial (ETAMM). Mechanical actuator is realized by using conventional photolithography techniques and THz Time Domain Spectroscopy (TDS) is used for excitation and detection of the resonator. This project is a contribution to the active THz MM devices of which main purpose is to control the optical property by au external stimuli. We aimed to fabricate a tunable THz Metamaterial device. The device is comprised of two mirrored Split Ring Resonator (mSRR) with a certain resonant frequency. Resonance frequency is tuned by electrothermal actuation. As a novel approach, mSRR itself is used as au actuator. Devices nre connected to ectch other through electrodes. They make the current flow through an array and this flow leads to joule heating by causing a thermal expansion of the device. This elastic deformation of the device results as in an out of plane buckling and changes the distance between mSRR and bare silicon substrate. In the electromagnetic part of the mechanism: the change in distance caused by thermal expansion, alters the effective dielectric constant within the gap between the structure and the substrate. Dielectric constant in the gap is the main parameter for resonance frequency, for this reason we chose it as a tuning parameter of the device. In the final analysis, ETAMM utilizes the change in the dielectric constant to alter the resonance frequency. Our device delivered 6 GHz resonance frequency shift as a response to an applied voltage of 5.7V on the device.

Subjects/Keywords: Microelectromechanical systems; Terahertz metamaterials; Engineering

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APA (6^th Edition):

Ozturk, M. S. (2010). Electrothermally actuated terahertz metamaterial. (Masters Thesis). Boston University. Retrieved from http://hdl.handle.net/2144/34955

Chicago Manual of Style (16^th Edition):

Ozturk, Mehmet Saadeddin. “Electrothermally actuated terahertz metamaterial.” 2010. Masters Thesis, Boston University. Accessed February 25, 2020. http://hdl.handle.net/2144/34955.

MLA Handbook (7^th Edition):

Ozturk, Mehmet Saadeddin. “Electrothermally actuated terahertz metamaterial.” 2010. Web. 25 Feb 2020.

Vancouver:

Ozturk MS. Electrothermally actuated terahertz metamaterial. [Internet] [Masters thesis]. Boston University; 2010. [cited 2020 Feb 25]. Available from: http://hdl.handle.net/2144/34955.

Council of Science Editors:

Ozturk MS. Electrothermally actuated terahertz metamaterial. [Masters Thesis]. Boston University; 2010. Available from: http://hdl.handle.net/2144/34955

University of Oklahoma

11. Borras Pinilla, Carlos. MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP.

Degree: PhD, 2012, University of Oklahoma

URL: http://hdl.handle.net/11244/319433

► Non-dimensional ratios in the analytical equations are used to extrapolate the performance of designs beyond that of the baseline configuration and tailor designs for particular… (more)

Subjects/Keywords: Microelectromechanical systems; Microfluidics; Nanotechnology

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APA (6^th Edition):

Borras Pinilla, C. (2012). MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP. (Doctoral Dissertation). University of Oklahoma. Retrieved from http://hdl.handle.net/11244/319433

Chicago Manual of Style (16^th Edition):

Borras Pinilla, Carlos. “MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP.” 2012. Doctoral Dissertation, University of Oklahoma. Accessed February 25, 2020. http://hdl.handle.net/11244/319433.

MLA Handbook (7^th Edition):

Borras Pinilla, Carlos. “MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP.” 2012. Web. 25 Feb 2020.

Vancouver:

Borras Pinilla C. MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP. [Internet] [Doctoral dissertation]. University of Oklahoma; 2012. [cited 2020 Feb 25]. Available from: http://hdl.handle.net/11244/319433.

Council of Science Editors:

Borras Pinilla C. MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP. [Doctoral Dissertation]. University of Oklahoma; 2012. Available from: http://hdl.handle.net/11244/319433

University of Oklahoma

12. Borras Pinilla, Carlos. MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP.

Degree: PhD, 2012, University of Oklahoma

URL: http://hdl.handle.net/11244/318483

► Non-dimensional ratios in the analytical equations are used to extrapolate the performance of designs beyond that of the baseline configuration and tailor designs for particular… (more)

Subjects/Keywords: Microelectromechanical systems; Microfluidics; Nanotechnology

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APA (6^th Edition):

Borras Pinilla, C. (2012). MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP. (Doctoral Dissertation). University of Oklahoma. Retrieved from http://hdl.handle.net/11244/318483

Chicago Manual of Style (16^th Edition):

Borras Pinilla, Carlos. “MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP.” 2012. Doctoral Dissertation, University of Oklahoma. Accessed February 25, 2020. http://hdl.handle.net/11244/318483.

MLA Handbook (7^th Edition):

Borras Pinilla, Carlos. “MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP.” 2012. Web. 25 Feb 2020.

Vancouver:

Borras Pinilla C. MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP. [Internet] [Doctoral dissertation]. University of Oklahoma; 2012. [cited 2020 Feb 25]. Available from: http://hdl.handle.net/11244/318483.

Council of Science Editors:

Borras Pinilla C. MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP. [Doctoral Dissertation]. University of Oklahoma; 2012. Available from: http://hdl.handle.net/11244/318483

Rutgers University

13. Sun, Jingjing, 1977-. Micropen direct-write technique for fabrication of advanced electroceramic and optical materials:.

Degree: PhD, Materials Science and Engineering, 2010, Rutgers University

URL: http://hdl.rutgers.edu/1782.2/rucore10001600001.ETD.000052155

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Direct-write technologies, a subset of the rapid prototyping, have been applied for many applications including electronics, photonics and biomedical engineering. Among them, MicropenTM is a… (more)

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Direct-write technologies, a subset of the rapid prototyping, have been applied for many applications including electronics, photonics and biomedical engineering. Among them, MicropenTM is a promising technique, providing precision deposition of materials with various viscosities, on-line design changes and writing on nonplanar substrates. The objective of this project was to directly write two- and three-dimensional novel structures by MicropenTM for potential optical and transducer applications. First, to gain a basic understanding of MicropenTM operation, poly(methyl methacrylate) (PMMA) solutions were developed as a model system. The effects of solution rheological properties on deposition conditions were investigated. Secondly, PMMA/SiO2 hybrids were developed using sol-gel process. The effects of organic/inorganic ratios on thermal stability, microstructure and optical properties were studied. The solution with 80 wt% PMMA loading was chosen to deposit lines for optical applications. Another application was the direct-write of lead zirconate titanate (PZT) thick films (6-70 µm) for MEMS or high frequency medical imaging applications. Pastes consisting of 15-30 vol% ceramic loading in a sol-gel solution were prepared for the deposition of films on various substrates. The PZT sol was used as a binder as well as to achieve low temperature heat treatment of the films. Using the 15 vol% paste with a 250-µm pen tip, a four-layer film was deposited on a silicon substrate. This 16-µm film with 1 cm2 area had K of 870, tanδ of 4.1%, Pr of 12.2 µC/cm2 and Ec of 27 kV/cm. Furthermore, MicropenTM was utilized for the direct-write of ceramic skeletal structures to develop PZT ceramic/polymer composites with 2-2 connectivity for medical ultrasound transducers. Ceramic/binder based pastes were developed as writing materials. The 35 vol% paste exhibited shear thinning with a viscosity of 45 Pa•s at lower shear rate and 3 Pa•s at higher shear rate. Using a 100-µm pen tip, the fabricated composite with ~360 µm height had resonance frequencies of ~4 MHz, and electromechanical properties of K=650, tanδ=2.1%, kt=0.60 and d33=210 pC/N. Finally, composites with linear and Gaussian volume fraction gradients were fabricated by MicropenTM. Their vibration amplitude profiles showed maximum output at center with gradual decreasing towards edge of the composites.

Advisors/Committee Members: Sun, Jingjing, 1977- (author), Safari, Ahmad (chair), Klein, Lisa (internal member), Danforth, Stephen (internal member), Vittadello, Michele (outside member).

Subjects/Keywords: Rapid prototyping; Microelectromechanical systems

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Sun, Jingjing, 1. (2010). Micropen direct-write technique for fabrication of advanced electroceramic and optical materials:. (Doctoral Dissertation). Rutgers University. Retrieved from http://hdl.rutgers.edu/1782.2/rucore10001600001.ETD.000052155

Chicago Manual of Style (16^th Edition):

Sun, Jingjing, 1977-. “Micropen direct-write technique for fabrication of advanced electroceramic and optical materials:.” 2010. Doctoral Dissertation, Rutgers University. Accessed February 25, 2020. http://hdl.rutgers.edu/1782.2/rucore10001600001.ETD.000052155.

MLA Handbook (7^th Edition):

Sun, Jingjing, 1977-. “Micropen direct-write technique for fabrication of advanced electroceramic and optical materials:.” 2010. Web. 25 Feb 2020.

Vancouver:

Sun, Jingjing 1. Micropen direct-write technique for fabrication of advanced electroceramic and optical materials:. [Internet] [Doctoral dissertation]. Rutgers University; 2010. [cited 2020 Feb 25]. Available from: http://hdl.rutgers.edu/1782.2/rucore10001600001.ETD.000052155.

Council of Science Editors:

Sun, Jingjing 1. Micropen direct-write technique for fabrication of advanced electroceramic and optical materials:. [Doctoral Dissertation]. Rutgers University; 2010. Available from: http://hdl.rutgers.edu/1782.2/rucore10001600001.ETD.000052155

Rutgers University

14. Pan, Yanbiao, 1986-. Organic microelectromechanical relay technology for ultralow-power flexible transparent large-area electronics.

Degree: PhD, Electrical and Computer Engineering, 2017, Rutgers University

URL: https://rucore.libraries.rutgers.edu/rutgers-lib/53961/

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Much research to date has focused on synthesizing new polymers or improving existing polymers, in order to overcome the limits of the conventional organic thin-film… (more)

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Much research to date has focused on synthesizing new polymers or improving existing polymers, in order to overcome the limits of the conventional organic thin-film transistor (OTFT): (1) A rather low channel carrier mobility (< 20 cm²V^-1s^-1 typically) requires a power supply voltage well above 2 V for a reasonable on-/off-current ratio (> 10⁵); (2) The formation of a relatively poor-quality interface between the polymeric channel and gate insulator induces large off-state leakage current well above 10^-13 A; (3) Asymmetric pairs of n- and p-type OTFTs result in noncomplementary switching. All these would affect the overall power consumption at the transistor, circuit, and system levels. This doctoral dissertation proposes and demonstrates radically-different, organic microelectromechanical (MEM) relays, in order to overcome such limits and hence enable efficient implementation of portable and/or wearable large-area electronics for the internet of things requiring ultralow-power operation, structural flexibility, visual transparency, and low-cost/-temperature processing. Firstly, a polymer-based low-thermal-budget surface-micromachining process is developed to implement organic relay prototypes (comprising multiple or single input/output terminals). Fabricated relays exhibit unique I-V characteristics including immeasurably-low off-state leakage current, abrupt transitions to the on-/off-state with an input voltage swing less than 60 mV for a decade change in output current, a relatively high on/off current ratio well above 10⁵, and complementary switching behavior and can endure a finite number of hot- and cold-switching cycles. Secondly, the effects of humidity, temperature, and low-surface-energy contacting electrodes materials on switching characteristics (such as hysteresis voltages and on-state resistance) are investigated. Thirdly, basic Boolean operations including AND, OR, and XOR and logic functions (e.g., carry bit generation for four inputs) are demonstrated using a multi-input/-output relay.

Advisors/Committee Members: Feldman, Leonard (internal member), Lu, Yicheng (internal member), Jeon, Jaeseok (internal member), Guo, Zhixiong (outside member).

Subjects/Keywords: Microelectromechanical systems; Electric relays

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APA (6^th Edition):

Pan, Yanbiao, 1. (2017). Organic microelectromechanical relay technology for ultralow-power flexible transparent large-area electronics. (Doctoral Dissertation). Rutgers University. Retrieved from https://rucore.libraries.rutgers.edu/rutgers-lib/53961/

Chicago Manual of Style (16^th Edition):

Pan, Yanbiao, 1986-. “Organic microelectromechanical relay technology for ultralow-power flexible transparent large-area electronics.” 2017. Doctoral Dissertation, Rutgers University. Accessed February 25, 2020. https://rucore.libraries.rutgers.edu/rutgers-lib/53961/.

MLA Handbook (7^th Edition):

Pan, Yanbiao, 1986-. “Organic microelectromechanical relay technology for ultralow-power flexible transparent large-area electronics.” 2017. Web. 25 Feb 2020.

Vancouver:

Pan, Yanbiao 1. Organic microelectromechanical relay technology for ultralow-power flexible transparent large-area electronics. [Internet] [Doctoral dissertation]. Rutgers University; 2017. [cited 2020 Feb 25]. Available from: https://rucore.libraries.rutgers.edu/rutgers-lib/53961/.

Council of Science Editors:

Pan, Yanbiao 1. Organic microelectromechanical relay technology for ultralow-power flexible transparent large-area electronics. [Doctoral Dissertation]. Rutgers University; 2017. Available from: https://rucore.libraries.rutgers.edu/rutgers-lib/53961/

Rutgers University

15. Ferrer, Anthony Jesus, 1987-. Dewetting of thin films on flexible substrates via direct-write laser exposure.

Degree: PhD, Materials Science and Engineering, 2015, Rutgers University

URL: https://rucore.libraries.rutgers.edu/rutgers-lib/47366/

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Microelectromechanical systems (MEMS) have enabled a wide variety of technologies both in the consumer space and in industrial/research areas. At the market level, such devices… (more)

Subjects/Keywords: Thin films; Microelectromechanical systems

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APA (6^th Edition):

Ferrer, Anthony Jesus, 1. (2015). Dewetting of thin films on flexible substrates via direct-write laser exposure. (Doctoral Dissertation). Rutgers University. Retrieved from https://rucore.libraries.rutgers.edu/rutgers-lib/47366/

Chicago Manual of Style (16^th Edition):

Ferrer, Anthony Jesus, 1987-. “Dewetting of thin films on flexible substrates via direct-write laser exposure.” 2015. Doctoral Dissertation, Rutgers University. Accessed February 25, 2020. https://rucore.libraries.rutgers.edu/rutgers-lib/47366/.

MLA Handbook (7^th Edition):

Ferrer, Anthony Jesus, 1987-. “Dewetting of thin films on flexible substrates via direct-write laser exposure.” 2015. Web. 25 Feb 2020.

Vancouver:

Ferrer, Anthony Jesus 1. Dewetting of thin films on flexible substrates via direct-write laser exposure. [Internet] [Doctoral dissertation]. Rutgers University; 2015. [cited 2020 Feb 25]. Available from: https://rucore.libraries.rutgers.edu/rutgers-lib/47366/.

Council of Science Editors:

Ferrer, Anthony Jesus 1. Dewetting of thin films on flexible substrates via direct-write laser exposure. [Doctoral Dissertation]. Rutgers University; 2015. Available from: https://rucore.libraries.rutgers.edu/rutgers-lib/47366/

Hong Kong University of Science and Technology

16. Chan, Yin Ling Elena ECE. Design, fabrication and characterization of bulk-type MEMS high pressure sensor.

Degree: 2018, Hong Kong University of Science and Technology

URL: http://repository.ust.hk/ir/Record/1783.1-95894 ; https://doi.org/10.14711/thesis-991012637368403412 ; http://repository.ust.hk/ir/bitstream/1783.1-95894/1/th_redirect.html

► Many industrial, automotive, and oil exploration applications demand measuring pressure higher than 200 MPa (or 2000 atmospheres). Micro-electro-mechanical systems (MEMS) refer to tiny electrical devices… (more)

Subjects/Keywords: Microelectromechanical systems ; Pressure transducers

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Chan, Y. L. E. E. (2018). Design, fabrication and characterization of bulk-type MEMS high pressure sensor. (Thesis). Hong Kong University of Science and Technology. Retrieved from http://repository.ust.hk/ir/Record/1783.1-95894 ; https://doi.org/10.14711/thesis-991012637368403412 ; http://repository.ust.hk/ir/bitstream/1783.1-95894/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Chan, Yin Ling Elena ECE. “Design, fabrication and characterization of bulk-type MEMS high pressure sensor.” 2018. Thesis, Hong Kong University of Science and Technology. Accessed February 25, 2020. http://repository.ust.hk/ir/Record/1783.1-95894 ; https://doi.org/10.14711/thesis-991012637368403412 ; http://repository.ust.hk/ir/bitstream/1783.1-95894/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Chan, Yin Ling Elena ECE. “Design, fabrication and characterization of bulk-type MEMS high pressure sensor.” 2018. Web. 25 Feb 2020.

Vancouver:

Chan YLEE. Design, fabrication and characterization of bulk-type MEMS high pressure sensor. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2018. [cited 2020 Feb 25]. Available from: http://repository.ust.hk/ir/Record/1783.1-95894 ; https://doi.org/10.14711/thesis-991012637368403412 ; http://repository.ust.hk/ir/bitstream/1783.1-95894/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Chan YLEE. Design, fabrication and characterization of bulk-type MEMS high pressure sensor. [Thesis]. Hong Kong University of Science and Technology; 2018. Available from: http://repository.ust.hk/ir/Record/1783.1-95894 ; https://doi.org/10.14711/thesis-991012637368403412 ; http://repository.ust.hk/ir/bitstream/1783.1-95894/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

University of Missouri – Columbia

17. Zhu, Jianxiong. Design, analysis and dynamic phenomena of MEMS capacitive power harvester.

Degree: 2015, University of Missouri – Columbia

URL: http://hdl.handle.net/10355/46907

► Unwanted vibrations are all around us in our daily life. These vibrations can effectively be converted into electrical power through capacitive device. Even though the… (more)

Subjects/Keywords: Microelectromechanical systems; Energy harvesting; Vibration

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APA (6^th Edition):

Zhu, J. (2015). Design, analysis and dynamic phenomena of MEMS capacitive power harvester. (Thesis). University of Missouri – Columbia. Retrieved from http://hdl.handle.net/10355/46907

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Zhu, Jianxiong. “Design, analysis and dynamic phenomena of MEMS capacitive power harvester.” 2015. Thesis, University of Missouri – Columbia. Accessed February 25, 2020. http://hdl.handle.net/10355/46907.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Zhu, Jianxiong. “Design, analysis and dynamic phenomena of MEMS capacitive power harvester.” 2015. Web. 25 Feb 2020.

Vancouver:

Zhu J. Design, analysis and dynamic phenomena of MEMS capacitive power harvester. [Internet] [Thesis]. University of Missouri – Columbia; 2015. [cited 2020 Feb 25]. Available from: http://hdl.handle.net/10355/46907.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Zhu J. Design, analysis and dynamic phenomena of MEMS capacitive power harvester. [Thesis]. University of Missouri – Columbia; 2015. Available from: http://hdl.handle.net/10355/46907

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

University of Western Australia

18. Martyniuk, Mariusz. Low-temperature micro-opto-electro-mechanical technologies for temperature sensitive substrates.

Degree: PhD, 2006, University of Western Australia

URL: http://repository.uwa.edu.au:80/R/?func=dbin-jump-full&object_id=8557&local_base=GEN01-INS01

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[Truncated abstract] The salient feature of next generation infrared (IR) on-chip integrated sensors is likely to be sensitivity in a narrow wavelength band that is… (more)

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[Truncated abstract] The salient feature of next generation infrared (IR) on-chip integrated sensors is likely to be sensitivity in a narrow wavelength band that is tuneable over a selected range of the IR spectrum. It is proposed that this can be achieved by the integration of present-day HgCdTe IR detectors with thin-film based microelectro- mechanical systems (MEMS) optical mirror technology. Narrow-band sensitivity is obtained by optical resonance phenomena within a Fabry-Perot (FP) cavity, that is created by two Bragg reflectors and is monolithically integrated with an HgCdTe IR detector. Electrostatic actuation of the thin-film membrane supported Bragg reflector is the means of providing wavelength discrimination of the incident IR photons which, for example, could be used for target discrimination or detection of various chemical/biological species via identification of narrow spectral features . . . The outcomes from this thesis have been incorporated into a monolithic integrated technology comprising low-temperature MEMS and HgCdTe IR detector technology. The integrated technology has been shown to be viable, and successful prototypes have been fabricated. Structural properties of the SiNx, SiOx, and Ge layers encompassed in the suspended IR reflector have allowed for IR photon detection in a narrow wavelength band with full-width at halfmaximum of ∼100nm that is tunable over a wavelength range from 2.2 to 1.85μm using a maximum tuning voltage of only 7.5V. Although the thesis objectives have been focused on a specific application related to multi-spectral IR detection technology as a demonstration vehicle, the findings of this thesis are directly applicable to any MEMS technologies that are to be merged with temperaturesensitive substrates/materials.

[Truncated abstract] The salient feature of next generation infrared (IR) on-chip integrated sensors is likely to be sensitivity in a narrow wavelength band that is tuneable over a selected range of the IR spectrum. It is proposed that this can be achieved by the integration of present-day HgCdTe IR detectors with thin-film based microelectro- mechanical systems (MEMS) optical mirror technology. Narrow-band sensitivity is obtained by optical resonance phenomena within a Fabry-Perot (FP) cavity, that is created by two Bragg reflectors and is monolithically integrated with an HgCdTe IR detector. Electrostatic actuation of the thin-film membrane supported Bragg reflector is the means of providing wavelength discrimination of the incident IR photons which, for example, could be used for target discrimination or detection of various chemical/biological species via identification of narrow spectral features . . . The outcomes from this thesis have been incorporated into a monolithic integrated technology comprising low-temperature MEMS and HgCdTe IR detector technology. The integrated technology has been shown to be viable, and successful prototypes have been fabricated. Structural properties of the SiNx, SiOx, and Ge layers encompassed in the…

Subjects/Keywords: Microelectromechanical systems; Microelectronics

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Martyniuk, M. (2006). Low-temperature micro-opto-electro-mechanical technologies for temperature sensitive substrates. (Doctoral Dissertation). University of Western Australia. Retrieved from http://repository.uwa.edu.au:80/R/?func=dbin-jump-full&object_id=8557&local_base=GEN01-INS01

Chicago Manual of Style (16^th Edition):

Martyniuk, Mariusz. “Low-temperature micro-opto-electro-mechanical technologies for temperature sensitive substrates.” 2006. Doctoral Dissertation, University of Western Australia. Accessed February 25, 2020. http://repository.uwa.edu.au:80/R/?func=dbin-jump-full&object_id=8557&local_base=GEN01-INS01.

MLA Handbook (7^th Edition):

Martyniuk, Mariusz. “Low-temperature micro-opto-electro-mechanical technologies for temperature sensitive substrates.” 2006. Web. 25 Feb 2020.

Vancouver:

Martyniuk M. Low-temperature micro-opto-electro-mechanical technologies for temperature sensitive substrates. [Internet] [Doctoral dissertation]. University of Western Australia; 2006. [cited 2020 Feb 25]. Available from: http://repository.uwa.edu.au:80/R/?func=dbin-jump-full&object_id=8557&local_base=GEN01-INS01.

Council of Science Editors:

Martyniuk M. Low-temperature micro-opto-electro-mechanical technologies for temperature sensitive substrates. [Doctoral Dissertation]. University of Western Australia; 2006. Available from: http://repository.uwa.edu.au:80/R/?func=dbin-jump-full&object_id=8557&local_base=GEN01-INS01

Massey University

19. Sundararajan, Ananiah Durai. Design of analogue CMOS VLSI MEMS sensor : a dissertation presented in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Engineering , Integrated Circuit Design at School of Engineering and Advanced Technology, Massey University, Albany campus .

Degree: 2015, Massey University

URL: http://hdl.handle.net/10179/9998

► There is an increasing demand of a highly sensitive and reliable pressure micro-sensor system, for implantable and non-implantable medical applications. The prerequisite of a miniaturized… (more)

▼ There is an increasing demand of a highly sensitive and reliable pressure micro-sensor system, for implantable and non-implantable medical applications. The prerequisite of a miniaturized device for minimally invasive procedures, posed greater challenges in the complex integrated design of micro-system. Micro-sensor system designs in the recent advanced CMOS technologies are explored in this work for effective system miniaturization and improved performance. The material choices and geometry designs, which significantly influence the sensitivity and dynamic range of the micro-scale sensor devices, are well addressed. Cointegrations of MEMS devices with signal conditioning circuits that effectively reduce the parasitic effect are also performed for enhancing the overall system performance. In addition, system reliability is also improved with on-chip metal interconnections. The employed process technologies to a greater extent contributed to the high yield for these low cost micro-sensor systems. This research focuses on the design of integrated CMOS MEMS capacitive pressure sensors for diverse bio-medical applications. Two monolithically integrated capacitive pressure microsensor systems are designed, fabricated and experimentally verified. A novel micro-electromechanical capacitive pressure sensor in SiGeMEMS process, vertically integrated on top of a 0.18 μm TSMC CMOS processed die is proposed. The perforated elliptic diaphragm, which is edge clamped at the semi-major axis is developed using poly-SiGe material. High performance on-chip CMOS conditioning circuits are also designed to achieve better overall sensitivity. Experimental results indicate a high sensitivity of around 0.12 mV/hPa along with a nonlinearity of around 1% for the full scale range of applied pressure load. The L-clamp spring anchored diaphragm provided a wide dynamic range of around 900 hPa. Another integrated capacitive pressure micro-system, developed using the advanced standard IBM CMOS process in two geometrical designs is also proposed. A step-sided elliptic diaphragm that overcomes the CMOS process limitations is fabricated to achieve regulated membrane deflections and improved sensitivity. A foundry compatible post-process technique, for a lateral release length of 125 μm is also performed successfully on the 130 nm CMOS platform. A current cross mirroring technique is utilized to enhance the transconductance of an on-chip operational amplifier to achieve a high single stage gain. Sensitivities of the fluorosilicate sealed absolute pressure sensors were measured to be 0.07 mV/Pa and 0.05 mV/Pa for the elliptic and rectangular element, respectively. In addition, the linear capacitive transduction dynamic range was found to be 0.32 pF and 0.23 pF, respectively, for the elliptic and rectangular element.

Subjects/Keywords: Microelectromechanical systems; Pressure transducers; Metal oxide semiconductors

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Sundararajan, A. D. (2015). Design of analogue CMOS VLSI MEMS sensor : a dissertation presented in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Engineering , Integrated Circuit Design at School of Engineering and Advanced Technology, Massey University, Albany campus . (Thesis). Massey University. Retrieved from http://hdl.handle.net/10179/9998

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Sundararajan, Ananiah Durai. “Design of analogue CMOS VLSI MEMS sensor : a dissertation presented in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Engineering , Integrated Circuit Design at School of Engineering and Advanced Technology, Massey University, Albany campus .” 2015. Thesis, Massey University. Accessed February 25, 2020. http://hdl.handle.net/10179/9998.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Sundararajan, Ananiah Durai. “Design of analogue CMOS VLSI MEMS sensor : a dissertation presented in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Engineering , Integrated Circuit Design at School of Engineering and Advanced Technology, Massey University, Albany campus .” 2015. Web. 25 Feb 2020.

Vancouver:

Sundararajan AD. Design of analogue CMOS VLSI MEMS sensor : a dissertation presented in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Engineering , Integrated Circuit Design at School of Engineering and Advanced Technology, Massey University, Albany campus . [Internet] [Thesis]. Massey University; 2015. [cited 2020 Feb 25]. Available from: http://hdl.handle.net/10179/9998.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Sundararajan AD. Design of analogue CMOS VLSI MEMS sensor : a dissertation presented in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Engineering , Integrated Circuit Design at School of Engineering and Advanced Technology, Massey University, Albany campus . [Thesis]. Massey University; 2015. Available from: http://hdl.handle.net/10179/9998

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

University of Michigan

20. Gross, Andrew John. Low Power, Integrated, Thermoelectric Micro-coolers for Microsystems Applications.

Degree: PhD, Electrical Engineering, 2010, University of Michigan

URL: http://hdl.handle.net/2027.42/78973

► Advancements in micro-cooling are driven by applications across a number of industries, including biomedical, defense, communications, digital and analog electronics, and MEMS sensors. Thermoelectric coolers… (more)

▼ Advancements in micro-cooling are driven by applications across a number of industries, including biomedical, defense, communications, digital and analog electronics, and MEMS sensors. Thermoelectric coolers are attractive because they offer compact solid-state operation, and can be designed for low-power dissipation, which is a key consideration when targeting mobile applications. . This thesis presents the design, modeling, and measured performance of a new class of integrated thermoelectric microcoolers optimized for low-power operation. Two processes for fabricating microscale thermoelectric coolers using bismuth telluride and antimony telluride are presented. The first process is based on a 3-wafer stack silicon-glass-silicon process that provides excellent thermal isolation, good mechanical support, and full integration capability. Four different cooler designs based on this process were developed. The highest performing 6-stage design achieved cooling of 22.3 K with a power input of only 24.7 mW, and represents the highest reported performance for a multistage, in-plane, thermoelectric microcooler to date. The second process is based on a single wafer with a XeF2 release. Four different cooler variations have been fabricated based on this process, including a 4-stage design with a novel scheme for distributing current to the thermocouples that has achieved more the 17 K of cooling. Although this cooler has not yet produced cooling as high as the best from the silicon-glass-silicon process, the process addresses a number of shortcomings of the silicon-glass-silicon process, including reducing parasitic thermal resistance, and increasing fabrication reliability. Simulations show that coolers produced with this process hold the potential to achieve temperature differences greater than 40 K when paired with the appropriate thermoelectric materials In addition to the achievements stated above, the development of these thermoelectric coolers has produced several contributions. The first is an analysis of the requirements for low-power thermoelectric cooling and application of those requirements to multiple processes and cooler designs. Second, the first planar multistage thermoelectric cooler has been demonstrated. Third, is the integration of thin-film thermoelectric materials with a planar micro-fabrication process, and fourth is the development of a low-power microcooler device that can be integrated with arbitrary MEMS and electronic devices. Advisors/Committee Members: Najafi, Khalil (committee member), Kaviany, Massoud (committee member), Peterson, Becky Lorenz (committee member), Uher, Ctirad (committee member), Wise, Kensall D. (committee member).

Subjects/Keywords: Microelectromechanical Systems; Thermoelectric; Cooling; Electrical Engineering; Engineering

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Gross, A. J. (2010). Low Power, Integrated, Thermoelectric Micro-coolers for Microsystems Applications. (Doctoral Dissertation). University of Michigan. Retrieved from http://hdl.handle.net/2027.42/78973

Chicago Manual of Style (16^th Edition):

Gross, Andrew John. “Low Power, Integrated, Thermoelectric Micro-coolers for Microsystems Applications.” 2010. Doctoral Dissertation, University of Michigan. Accessed February 25, 2020. http://hdl.handle.net/2027.42/78973.

MLA Handbook (7^th Edition):

Gross, Andrew John. “Low Power, Integrated, Thermoelectric Micro-coolers for Microsystems Applications.” 2010. Web. 25 Feb 2020.

Vancouver:

Gross AJ. Low Power, Integrated, Thermoelectric Micro-coolers for Microsystems Applications. [Internet] [Doctoral dissertation]. University of Michigan; 2010. [cited 2020 Feb 25]. Available from: http://hdl.handle.net/2027.42/78973.

Council of Science Editors:

Gross AJ. Low Power, Integrated, Thermoelectric Micro-coolers for Microsystems Applications. [Doctoral Dissertation]. University of Michigan; 2010. Available from: http://hdl.handle.net/2027.42/78973

Rutgers University

21. Lo, Meng-chen, 1986-. Flexible, implantable, micro-electrode probes with an ultrafast degrading polymer coating as a temporary insertion aid for long term neuronal signal aquisition.

Degree: PhD, Biomedical Engineering, 2015, Rutgers University

URL: https://rucore.libraries.rutgers.edu/rutgers-lib/48602/

►

Brain computer interfaces (BCI) establish communication between the brain and external devices by recording and decoding neural signals and using the signals to drive the… (more)

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Brain computer interfaces (BCI) establish communication between the brain and external devices by recording and decoding neural signals and using the signals to drive the devices. Implanted neural microprobes are one means of recording these signals. Despite the short term feasibility of currently available neural prosthetic devices, most of these devices suffer from long term gliosis. In order to address this challenge, it is hypothesized that smaller, more flexible probes that match the mechanical properties of brain tissue could allow better long term integration with neural tissue. The goal of this work is to investigate and understand different device design parameters (e.g., size and material) that might affect brain tissue responses of a long term chronic intracortical neural probe. The miniaturized probe is coated with an ultrafast degrading Tyrosine-derived polycarbonate (E5005(2K)). The polymer is mechanically stiff, which allows it to act as a temporary insertion aid for the probes to penetrate tissue, yet has been designed to degrade within several hours, leaving the flexible probes in place for high fidelity recording. First, a fabrication process was developed incorporating both probe fabrication and polymer coating procedures. The probes were characterized to ensure consistent quality. Second, the probes were evaluated using an in-vivo rat model to assess glial tissue response via immunohistochemistry. Finally, the microfabrication process was expanded to electrically functionalize the probes via metallization, to create electrodes for signal recording. In vivo animal study suggested that both polymer coating and probe sizes play roles in glial scar formation. The larger polymer coating devices introduced more severe glial scar response despite polymer degradation within a few hours post device implantation, which might result from the more severe insertion mechanical trauma. The experimental results also confirmed our hypothesis that the smaller probe/polymer coating devices performed better with minimal glial response compared to the larger probe/polymer coating devices in both short/long terms. Finally, we demonstrated the probe’s recording feasibility using in vitro models, and showed that the electrode remained intact during polymer coating and degradation for the proper device operation. In conclusion, the flexible microprobe with an ultrafast degrading polymer coating as an insertion aid demonstrates promising results to address challenges in electrode-cell interface. Future work will evaluate the electrical recording performance of the miniaturized probe to confirm consistent signal quality while attenuating tissue reaction for prolonged device operation.

Advisors/Committee Members: Zahn, Jefferey D. (chair), Shreiber, David I. (internal member), Kohn, Joachim (internal member), Danish, Shabbar F. (outside member).

Subjects/Keywords: Neurons; Microelectromechanical systems; Biotechnology; Brain-computer interfaces

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APA (6^th Edition):

Lo, Meng-chen, 1. (2015). Flexible, implantable, micro-electrode probes with an ultrafast degrading polymer coating as a temporary insertion aid for long term neuronal signal aquisition. (Doctoral Dissertation). Rutgers University. Retrieved from https://rucore.libraries.rutgers.edu/rutgers-lib/48602/

Chicago Manual of Style (16^th Edition):

Lo, Meng-chen, 1986-. “Flexible, implantable, micro-electrode probes with an ultrafast degrading polymer coating as a temporary insertion aid for long term neuronal signal aquisition.” 2015. Doctoral Dissertation, Rutgers University. Accessed February 25, 2020. https://rucore.libraries.rutgers.edu/rutgers-lib/48602/.

MLA Handbook (7^th Edition):

Lo, Meng-chen, 1986-. “Flexible, implantable, micro-electrode probes with an ultrafast degrading polymer coating as a temporary insertion aid for long term neuronal signal aquisition.” 2015. Web. 25 Feb 2020.

Vancouver:

Lo, Meng-chen 1. Flexible, implantable, micro-electrode probes with an ultrafast degrading polymer coating as a temporary insertion aid for long term neuronal signal aquisition. [Internet] [Doctoral dissertation]. Rutgers University; 2015. [cited 2020 Feb 25]. Available from: https://rucore.libraries.rutgers.edu/rutgers-lib/48602/.

Council of Science Editors:

Lo, Meng-chen 1. Flexible, implantable, micro-electrode probes with an ultrafast degrading polymer coating as a temporary insertion aid for long term neuronal signal aquisition. [Doctoral Dissertation]. Rutgers University; 2015. Available from: https://rucore.libraries.rutgers.edu/rutgers-lib/48602/

Georgia Tech

22. Lee, Wook. Diffraction-based integrated optical readout for micromachined optomechanical sensors.

Degree: PhD, Electrical and Computer Engineering, 2006, Georgia Tech

URL: http://hdl.handle.net/1853/14006

► Highly sensitive optical displacement detection methods implemented in a small volume and with reduced power consumption have a potential to compete with commonly used capacitance… (more)

▼ Highly sensitive optical displacement detection methods implemented in a small volume and with reduced power consumption have a potential to compete with commonly used capacitance based methods in micromechanical sensor systems. This dissertation presents the design, implementation, and characterization of a miniaturized optomechanical displacement sensor system heterogeneously integrated with a coherent laser source and optoelectronic readout as a step in realizing this potential. The sensor uses a phase-sensitive diffraction grating built on a transparent substrate to achieve interferometric sensitivity in a small volume. The device sensitivity is actively optimized via the built-in electrostatic actuation capability, which may be utilized for self calibration and force feedback operation. Optical interconnect through the backside of the sensor enables compact integration with optoelectronic components. For optical readout, a custom-designed silicon photodiode array has been fabricated including deep reactive ion etching of through-wafer holes. The hybrid-integrated system has been implemented and characterized in an acoustic sensor application using both continuous wave and pulsed lasers to show reduced power consumption potential. Comprehensive diffraction analysis has been carried out for optical design of the integrated sensor. Furthermore, a fully-vectorial method has been formulated for general multilayered grating structures and compared with the scalar diffraction approach to investigate the effects of polarization and grating periods. In addition, a grating-assisted resonant-cavity-enhanced (GARCE) detection method has been proposed to improve the displacement sensitivity in optomechanical microsensors. Fabrication of the GARCE structures based on both metallic and dielectric mirrors has been successfully demonstrated, and preliminary experimental results have shown a good agreement with theoretical predictions. The concepts developed and demonstrated in this thesis form a technology platform which already had an impact in a variety of applications including optical microphones, micromachined ultrasonic transducers and transducers arrays, micromachined inertial sensors, and scanning probe microscopy. Advisors/Committee Members: F. Levent Degertekin (Committee Chair), David S. Citrin (Committee Member), Paul E. Hasler (Committee Member), Peter J. Hesketh (Committee Member), Zhiping Zhou (Committee Member).

Subjects/Keywords: Microelectromechanical systems (MEMS)

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APA (6^th Edition):

Lee, W. (2006). Diffraction-based integrated optical readout for micromachined optomechanical sensors. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/14006

Chicago Manual of Style (16^th Edition):

Lee, Wook. “Diffraction-based integrated optical readout for micromachined optomechanical sensors.” 2006. Doctoral Dissertation, Georgia Tech. Accessed February 25, 2020. http://hdl.handle.net/1853/14006.

MLA Handbook (7^th Edition):

Lee, Wook. “Diffraction-based integrated optical readout for micromachined optomechanical sensors.” 2006. Web. 25 Feb 2020.

Vancouver:

Lee W. Diffraction-based integrated optical readout for micromachined optomechanical sensors. [Internet] [Doctoral dissertation]. Georgia Tech; 2006. [cited 2020 Feb 25]. Available from: http://hdl.handle.net/1853/14006.

Council of Science Editors:

Lee W. Diffraction-based integrated optical readout for micromachined optomechanical sensors. [Doctoral Dissertation]. Georgia Tech; 2006. Available from: http://hdl.handle.net/1853/14006

Hong Kong University of Science and Technology

23. Zeng, Fan. Silicon-migration technology and its applications to micro-electro-mechanical systems.

Degree: 2014, Hong Kong University of Science and Technology

URL: http://repository.ust.hk/ir/Record/1783.1-72513 ; https://doi.org/10.14711/thesis-b1432232 ; http://repository.ust.hk/ir/bitstream/1783.1-72513/1/th_redirect.html

► It is difficult for traditional micro-engineering methods to generate a suspended structural layer for micro-electro-mechanical systems (MEMS) applications without a releasing step. The limitation becomes… (more)

▼ It is difficult for traditional micro-engineering methods to generate a suspended structural layer for micro-electro-mechanical systems (MEMS) applications without a releasing step. The limitation becomes more serious when it comes to integration with electronic circuits. Various schemes proposed for MEMS-CMOS integration have issues that either hamper design flexibility or require special care. Silicon-Migration Technology (SiMiT) starts with the formation of an array of “wells” using a deep reactive-ion etcher (DRIE). During a subsequent heat-treatment, surface-diffusion of silicon leads to the coalescence of the voids at the bases of adjacent wells and the closing of the space at the top of a well. In the end a continuous cavity buried under a cover-diaphragm can be obtained without a releasing step. Following a brief summary of the physics, simulations and experimental results of the initial works on SiMiT, the SiMiT process was further understood via a self-developed front-tracking simulator. SiMiT thermal treatment was carried out using rapid thermal annealing at 1150 °C in atmospheric pressure argon. Various structures useful for MEMS applications including oxide micro-channels, suspended cantilevers and diaphragms were realized using SiMiT. Potential application issues with SiMiT were discussed, with solutions provided. The application of SiMiT to the realization of a CMOS integrated 16×16 self-scanned active-matrix tactile sensor was subsequently described. A sensitivity of ~0.03 μV/V/Pa and spatial resolution of ~145 “pixels per inch”, suitable for applications such as dexterous robotic manipulation, was achieved. With the elimination of the conventional sacrificial layer etch, the issues of material- and process-incompatibility inherently present in many integration schemes are largely avoided. Finally, SiMiT is applied to the realization of a differential capacitive pressure sensor with innovative diaphragm shape and reference capacitor designs, achieving a sensitivity of ~40 aF/Pa in a ~100 kPa pressure range.

Subjects/Keywords: Microelectromechanical systems ; Metal oxide semiconductors, Complementary ; Silicon

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APA (6^th Edition):

Zeng, F. (2014). Silicon-migration technology and its applications to micro-electro-mechanical systems. (Thesis). Hong Kong University of Science and Technology. Retrieved from http://repository.ust.hk/ir/Record/1783.1-72513 ; https://doi.org/10.14711/thesis-b1432232 ; http://repository.ust.hk/ir/bitstream/1783.1-72513/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Zeng, Fan. “Silicon-migration technology and its applications to micro-electro-mechanical systems.” 2014. Thesis, Hong Kong University of Science and Technology. Accessed February 25, 2020. http://repository.ust.hk/ir/Record/1783.1-72513 ; https://doi.org/10.14711/thesis-b1432232 ; http://repository.ust.hk/ir/bitstream/1783.1-72513/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Zeng, Fan. “Silicon-migration technology and its applications to micro-electro-mechanical systems.” 2014. Web. 25 Feb 2020.

Vancouver:

Zeng F. Silicon-migration technology and its applications to micro-electro-mechanical systems. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2014. [cited 2020 Feb 25]. Available from: http://repository.ust.hk/ir/Record/1783.1-72513 ; https://doi.org/10.14711/thesis-b1432232 ; http://repository.ust.hk/ir/bitstream/1783.1-72513/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Zeng F. Silicon-migration technology and its applications to micro-electro-mechanical systems. [Thesis]. Hong Kong University of Science and Technology; 2014. Available from: http://repository.ust.hk/ir/Record/1783.1-72513 ; https://doi.org/10.14711/thesis-b1432232 ; http://repository.ust.hk/ir/bitstream/1783.1-72513/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Hong Kong University of Science and Technology

24. Wang, Lu. Design, fabrication and application of micro-fabricated nanomaterials tensile testing device.

Degree: 2015, Hong Kong University of Science and Technology

URL: http://repository.ust.hk/ir/Record/1783.1-74989 ; https://doi.org/10.14711/thesis-b1487517 ; http://repository.ust.hk/ir/bitstream/1783.1-74989/1/th_redirect.html

► Due to their excellent properties of nanomaterials, such as small size, low density, and high strength, they have an extensive usage in micro-electronics, data storage,… (more)

Subjects/Keywords: Nanostructured materials ; Testing ; Mechanical properties ; Microelectromechanical systems

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APA (6^th Edition):

Wang, L. (2015). Design, fabrication and application of micro-fabricated nanomaterials tensile testing device. (Thesis). Hong Kong University of Science and Technology. Retrieved from http://repository.ust.hk/ir/Record/1783.1-74989 ; https://doi.org/10.14711/thesis-b1487517 ; http://repository.ust.hk/ir/bitstream/1783.1-74989/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Wang, Lu. “Design, fabrication and application of micro-fabricated nanomaterials tensile testing device.” 2015. Thesis, Hong Kong University of Science and Technology. Accessed February 25, 2020. http://repository.ust.hk/ir/Record/1783.1-74989 ; https://doi.org/10.14711/thesis-b1487517 ; http://repository.ust.hk/ir/bitstream/1783.1-74989/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Wang, Lu. “Design, fabrication and application of micro-fabricated nanomaterials tensile testing device.” 2015. Web. 25 Feb 2020.

Vancouver:

Wang L. Design, fabrication and application of micro-fabricated nanomaterials tensile testing device. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2015. [cited 2020 Feb 25]. Available from: http://repository.ust.hk/ir/Record/1783.1-74989 ; https://doi.org/10.14711/thesis-b1487517 ; http://repository.ust.hk/ir/bitstream/1783.1-74989/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Wang L. Design, fabrication and application of micro-fabricated nanomaterials tensile testing device. [Thesis]. Hong Kong University of Science and Technology; 2015. Available from: http://repository.ust.hk/ir/Record/1783.1-74989 ; https://doi.org/10.14711/thesis-b1487517 ; http://repository.ust.hk/ir/bitstream/1783.1-74989/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Hong Kong University of Science and Technology

25. Sui, Wenshu. Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry.

Degree: 2017, Hong Kong University of Science and Technology

URL: http://repository.ust.hk/ir/Record/1783.1-88939 ; https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html

► With the increasing opportunities offered by the consumer market, the microphone industry is more important than ever. In this work, the design parameters of capacitive… (more)

▼ With the increasing opportunities offered by the consumer market, the microphone industry is more important than ever. In this work, the design parameters of capacitive MEMS microphone was analyzed based on a general one-dimensional (1D) model. The theoretical sensitivity of the capacitive microphone is shown to be a nonlinear function of diaphragm radius (a), thickness (h), back chamber length (L), the residual stress (σ_rs) and some other parameters. Based on the general 1D model, a critical diaphragm radius was found located at the inflection point of the sensitivity - radius scaling analysis curve, which reflects the minimal equivalent spring constant of the microphone. We then modified this 1D model by revising the diaphragm as a composited layer that is fitted to the PolyMUMPs process. The modified 1D model was applied to predict the critical design parameters of the capacitive MEMS microphone to be fabricated by the PolyMUMPs process, and the critical diaphragm radius of 300 μm is obtained. The agreement between experimental result and theoretical prediction verifies our general 1D model, and proves the critical value can be used to guide the design of capacitive microphone. As parylene can be utilized in the MEMS microphone field such as the movable diaphragm and packaging material for its great dielectric properties and high coating uniformity, the properties of parylene should be further studied. In this work, a comparative study of the viscoelasticity of parylene C was presented by using Nanoindentation technology and Molecular Dynamics (MD) simulations. By applying different types of loadings on parylene C films at different temperatures and frequencies, the complex modulus, relaxation modulus and glass transition temperature (T_g) of the parylene C were obtained. The predicted T_g determined from the temperature-dependent density change in the MD model is consistent with the results in the measurements and previous works. Furthermore, with Time-Temperature Superposition Principle (TTSP), the master curve of parylene C were successfully determined on its creep and relaxation behaviour, for the first time, which is critical for the parylene reliability study of bio-MEMS devices.

Subjects/Keywords: Microelectromechanical systems ; Microphone ; Design and construction

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APA (6^th Edition):

Sui, W. (2017). Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry. (Thesis). Hong Kong University of Science and Technology. Retrieved from http://repository.ust.hk/ir/Record/1783.1-88939 ; https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Sui, Wenshu. “Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry.” 2017. Thesis, Hong Kong University of Science and Technology. Accessed February 25, 2020. http://repository.ust.hk/ir/Record/1783.1-88939 ; https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Sui, Wenshu. “Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry.” 2017. Web. 25 Feb 2020.

Vancouver:

Sui W. Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2017. [cited 2020 Feb 25]. Available from: http://repository.ust.hk/ir/Record/1783.1-88939 ; https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Sui W. Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry. [Thesis]. Hong Kong University of Science and Technology; 2017. Available from: http://repository.ust.hk/ir/Record/1783.1-88939 ; https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Hong Kong University of Science and Technology

26. Dong, Xiaoshi PHYS. Mode coupling and self-sustained oscillations in micro-/nano-electromechanical systems.

Degree: 2019, Hong Kong University of Science and Technology

URL: http://repository.ust.hk/ir/Record/1783.1-99530 ; https://doi.org/10.14711/thesis-991012711065003412 ; http://repository.ust.hk/ir/bitstream/1783.1-99530/1/th_redirect.html

► Resonators made from micro-/nanoelectromechanical systems are of great importance for their applications ranging from ultra-sensitive measurement to fundamental researches. In this work, we study the… (more)

Subjects/Keywords: Oscillators, Electric ; Electric resonators ; Microelectromechanical systems

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APA (6^th Edition):

Dong, X. P. (2019). Mode coupling and self-sustained oscillations in micro-/nano-electromechanical systems. (Thesis). Hong Kong University of Science and Technology. Retrieved from http://repository.ust.hk/ir/Record/1783.1-99530 ; https://doi.org/10.14711/thesis-991012711065003412 ; http://repository.ust.hk/ir/bitstream/1783.1-99530/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Dong, Xiaoshi PHYS. “Mode coupling and self-sustained oscillations in micro-/nano-electromechanical systems.” 2019. Thesis, Hong Kong University of Science and Technology. Accessed February 25, 2020. http://repository.ust.hk/ir/Record/1783.1-99530 ; https://doi.org/10.14711/thesis-991012711065003412 ; http://repository.ust.hk/ir/bitstream/1783.1-99530/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Dong, Xiaoshi PHYS. “Mode coupling and self-sustained oscillations in micro-/nano-electromechanical systems.” 2019. Web. 25 Feb 2020.

Vancouver:

Dong XP. Mode coupling and self-sustained oscillations in micro-/nano-electromechanical systems. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2019. [cited 2020 Feb 25]. Available from: http://repository.ust.hk/ir/Record/1783.1-99530 ; https://doi.org/10.14711/thesis-991012711065003412 ; http://repository.ust.hk/ir/bitstream/1783.1-99530/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Dong XP. Mode coupling and self-sustained oscillations in micro-/nano-electromechanical systems. [Thesis]. Hong Kong University of Science and Technology; 2019. Available from: http://repository.ust.hk/ir/Record/1783.1-99530 ; https://doi.org/10.14711/thesis-991012711065003412 ; http://repository.ust.hk/ir/bitstream/1783.1-99530/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

University of Missouri – Columbia

27. Nguyen, Quang Thanh Nhat. Wearable energy-harvesting micro devices.

Degree: 2016, University of Missouri – Columbia

URL: http://hdl.handle.net/10355/62537

► [ACCESS RESTRICTED TO THE UNIVERSITY OF MISSOURI AT AUTHOR'S REQUEST.] The focus of this dissertation is wearable energy-harvesting mircro devices. They are designed to harvest… (more)

Subjects/Keywords: Microelectromechanical systems; Wearable technology; Energy harvesting

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APA (6^th Edition):

Nguyen, Q. T. N. (2016). Wearable energy-harvesting micro devices. (Thesis). University of Missouri – Columbia. Retrieved from http://hdl.handle.net/10355/62537

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Nguyen, Quang Thanh Nhat. “Wearable energy-harvesting micro devices.” 2016. Thesis, University of Missouri – Columbia. Accessed February 25, 2020. http://hdl.handle.net/10355/62537.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Nguyen, Quang Thanh Nhat. “Wearable energy-harvesting micro devices.” 2016. Web. 25 Feb 2020.

Vancouver:

Nguyen QTN. Wearable energy-harvesting micro devices. [Internet] [Thesis]. University of Missouri – Columbia; 2016. [cited 2020 Feb 25]. Available from: http://hdl.handle.net/10355/62537.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Nguyen QTN. Wearable energy-harvesting micro devices. [Thesis]. University of Missouri – Columbia; 2016. Available from: http://hdl.handle.net/10355/62537

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Michigan State University

28. Cabrera, Rafmag. A comprehensive study in the applicability of the solid-solid structural phase transition of vanadium dioxide to micro-electro-mechanical devices.

Degree: 2014, Michigan State University

URL: http://etd.lib.msu.edu/islandora/object/etd:2956

►

Thesis Ph. D. Michigan State University. Electrical Engineering 2014.

This dissertation presents a series of studies which explores the use of the structural phase transition… (more)

Subjects/Keywords: Microelectromechanical systems; Vanadium oxide; Electrical engineering

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APA (6^th Edition):

Cabrera, R. (2014). A comprehensive study in the applicability of the solid-solid structural phase transition of vanadium dioxide to micro-electro-mechanical devices. (Thesis). Michigan State University. Retrieved from http://etd.lib.msu.edu/islandora/object/etd:2956

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Cabrera, Rafmag. “A comprehensive study in the applicability of the solid-solid structural phase transition of vanadium dioxide to micro-electro-mechanical devices.” 2014. Thesis, Michigan State University. Accessed February 25, 2020. http://etd.lib.msu.edu/islandora/object/etd:2956.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Cabrera, Rafmag. “A comprehensive study in the applicability of the solid-solid structural phase transition of vanadium dioxide to micro-electro-mechanical devices.” 2014. Web. 25 Feb 2020.

Vancouver:

Cabrera R. A comprehensive study in the applicability of the solid-solid structural phase transition of vanadium dioxide to micro-electro-mechanical devices. [Internet] [Thesis]. Michigan State University; 2014. [cited 2020 Feb 25]. Available from: http://etd.lib.msu.edu/islandora/object/etd:2956.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Cabrera R. A comprehensive study in the applicability of the solid-solid structural phase transition of vanadium dioxide to micro-electro-mechanical devices. [Thesis]. Michigan State University; 2014. Available from: http://etd.lib.msu.edu/islandora/object/etd:2956

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Michigan State University

29. Lu, Xi (Of Michigan State University). Theoretical analysis and reduction techniques of DC capacitor ripples and requirements in inverters.

Degree: 2014, Michigan State University

URL: http://etd.lib.msu.edu/islandora/object/etd:2468

►

Thesis Ph. D. Michigan State University. Electrical Engineering 2014.

DC link capacitor is an important component for many conventional topologies, such as three-phase voltage source… (more)

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Thesis Ph. D. Michigan State University. Electrical Engineering 2014.

DC link capacitor is an important component for many conventional topologies, such as three-phase voltage source inverter (VSI), H-bridge VSI and etc. Minimization of the dc capacitor is an essential step towards developing and manufacturing compact low-cost inverter systems for high temperature operation, long life and high reliability. Traditionally, the dc capacitance has been determined according to empirical equations and computer simulations, which provides little insights into how to minimize the dc capacitor. In order to achieve an optimum minimization of the dc capacitor, an accurate theory to calculate the dc capacitor voltage ripple and current ripples must be developed first, then pulse-width modulation (PWM) and control techniques or topological improvements can be further developed to minimize both dc voltage and current ripples. This dissertation is mainly divided into two parts. First half is minimizing the capacitor ripple and requirements for three-phase VSI; while second half is for H-bridge VSI. In the first half of the dissertation, it proposes an accurate theory of calculating the dc link capacitor voltage ripples and current ripples for inverters and PWM rectifiers. The results are analyzed and summarized into graphs according to the theory, which helps find the right capacitance value for a given voltage ripple tolerance and the rms ripple current that the capacitor has to absorb. In hybrid electric vehicle (HEV) applications, the high voltage battery pack is connected to the dc link bus through a dc-dc converter. Based on the above-proposed theory, a PWM modulation method for the dc-dc converter is developed to further reduce the dc capacitor current ripples and requirements. To verify the proposed theory and PWM method, a 150 kW inverter prototype has been built. The comparison between the calculation result and experimental result shows that they are in close agreement. For the second half of the dissertation, contributions for H-bridge inverters are made for photovoltaic and FACTs systems. As the demand of the renewable energy increases every year, the photovoltaic (PV) systems have been playing an important part in supplying energy for the global consumption. In order to connect PV modules to the grid without inserting any bulky low frequency step-up transformers, the cascaded H-bridge multilevel inverters are utilized to increase the output voltage level up to the grid voltage (e.g. 13.8 kV). The 2ω harmonic component on the dc link side of the H-bridge inverters has long been a thorny problem, which requires a huge dc link capacitor bank to absorb this 2ω low frequency current ripple in order to maintain the dc link voltage ripple under a tolerable value. This dissertation presents a simple 3rd harmonic injection method for the cascaded H-bridge multilevel inverters for photovoltaic systems at unity power factor. This approach achieves a 40% to 50% reduction of the dc link capacitance, without adding any…

Advisors/Committee Members: Peng, Fang Z., Mitra, Joydeep, Wang, Bingsen, Zhu, Guoming.

Subjects/Keywords: Microelectromechanical systems; Electric inverters; Capacitors; Electrical engineering

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APA (6^th Edition):

Lu, X. (. M. S. U. (2014). Theoretical analysis and reduction techniques of DC capacitor ripples and requirements in inverters. (Thesis). Michigan State University. Retrieved from http://etd.lib.msu.edu/islandora/object/etd:2468

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Lu, Xi (Of Michigan State University). “Theoretical analysis and reduction techniques of DC capacitor ripples and requirements in inverters.” 2014. Thesis, Michigan State University. Accessed February 25, 2020. http://etd.lib.msu.edu/islandora/object/etd:2468.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Lu, Xi (Of Michigan State University). “Theoretical analysis and reduction techniques of DC capacitor ripples and requirements in inverters.” 2014. Web. 25 Feb 2020.

Vancouver:

Lu X(MSU. Theoretical analysis and reduction techniques of DC capacitor ripples and requirements in inverters. [Internet] [Thesis]. Michigan State University; 2014. [cited 2020 Feb 25]. Available from: http://etd.lib.msu.edu/islandora/object/etd:2468.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Lu X(MSU. Theoretical analysis and reduction techniques of DC capacitor ripples and requirements in inverters. [Thesis]. Michigan State University; 2014. Available from: http://etd.lib.msu.edu/islandora/object/etd:2468

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Montana State University

30. Liu, Tianbo. MEMS 3-dimensional scanner with SU-8 flexures for a handheld confocal microscope.

Degree: College of Engineering, 2018, Montana State University

URL: https://scholarworks.montana.edu/xmlui/handle/1/15090

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Subjects/Keywords: Scanning systems.; Confocal microscopy.; Microelectromechanical systems.; Mirrors.; Skin.; Cancer.; Diagnosis.

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Liu, T. (2018). MEMS 3-dimensional scanner with SU-8 flexures for a handheld confocal microscope. (Thesis). Montana State University. Retrieved from https://scholarworks.montana.edu/xmlui/handle/1/15090

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Liu, Tianbo. “MEMS 3-dimensional scanner with SU-8 flexures for a handheld confocal microscope.” 2018. Thesis, Montana State University. Accessed February 25, 2020. https://scholarworks.montana.edu/xmlui/handle/1/15090.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Liu, Tianbo. “MEMS 3-dimensional scanner with SU-8 flexures for a handheld confocal microscope.” 2018. Web. 25 Feb 2020.

Vancouver:

Liu T. MEMS 3-dimensional scanner with SU-8 flexures for a handheld confocal microscope. [Internet] [Thesis]. Montana State University; 2018. [cited 2020 Feb 25]. Available from: https://scholarworks.montana.edu/xmlui/handle/1/15090.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Liu T. MEMS 3-dimensional scanner with SU-8 flexures for a handheld confocal microscope. [Thesis]. Montana State University; 2018. Available from: https://scholarworks.montana.edu/xmlui/handle/1/15090

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

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