subject:(Microelectromechanical systems)

University of Johannesburg

1. Tibbles, Christopher Jeremy. Analysis of micro-scale EDM.

Degree: 2014, University of Johannesburg

►

M.Ing. (Mechanical Engineering)

Micro electromechanical systems (MEMS) are presented and the application of electro discharge machining (EDM) to this scale of manufacture is discussed. A… (more)

Subjects/Keywords: Microelectromechanical systems

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APA (6^th Edition):

Tibbles, C. J. (2014). Analysis of micro-scale EDM. (Thesis). University of Johannesburg. Retrieved from http://hdl.handle.net/10210/12721

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Tibbles, Christopher Jeremy. “Analysis of micro-scale EDM.” 2014. Thesis, University of Johannesburg. Accessed March 02, 2021. http://hdl.handle.net/10210/12721.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Tibbles, Christopher Jeremy. “Analysis of micro-scale EDM.” 2014. Web. 02 Mar 2021.

Vancouver:

Tibbles CJ. Analysis of micro-scale EDM. [Internet] [Thesis]. University of Johannesburg; 2014. [cited 2021 Mar 02]. Available from: http://hdl.handle.net/10210/12721.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Tibbles CJ. Analysis of micro-scale EDM. [Thesis]. University of Johannesburg; 2014. Available from: http://hdl.handle.net/10210/12721

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

University of Utah

2. Anderson, Eric. Micro charge pump actuation in SUMMiT V MEMS.

Degree: Honors BS;, Mechanical Engineering;, 2008, University of Utah

URL: http://content.lib.utah.edu/cdm/singleitem/collection/etd2/id/2103/rec/768

► Micro-Electrical-Mechanical-Systems (MEMS) may contain mechanical parts that are often actuated by an external electrical signal. Visual inspection of the mechanical parts may require a Scanning… (more)

▼ Micro-Electrical-Mechanical-Systems (MEMS) may contain mechanical parts that are often actuated by an external electrical signal. Visual inspection of the mechanical parts may require a Scanning Electron Microscope (SEM) due to the extremely small dimensions involved. While imaging, electrons interact with the specimen and may generate static electric charge within features of the specimen. Recently, devices have been designed to use the forces generated as a result of interacting static electric charges within features produced during SEM imaging as means of actuating mechanical movement. This study investigates two such MEMS devices designed and fabricated using the Sandia SUMMiT V MEMS process. The first design is a test structure used to quantify the forces and charges generated through the actuation process. The test structure utilizes thin beams that bend and store energy. A theoretical beam mechanics model has been created to quantify those forces. After fabrication the test structure was cross sectioned. Actual dimensions were measured using optical and electron microscopes. These dimensions were compared with those expected from design simulations. The actual test structure dimensions were found to be suitable for micro charge pump actuation. The second design is a series of interlocking shelves intended to expand into a stepped pyramid when viewed under a SEM. This pyramid was intended to demonstrate the unique ability of the charge pump method. Unfortunately, the pyramid device was found to be too loosely designed and resulted in steps moving off track likely during final steps of fabrication. When steps were inline, SEM imaging of the pyramid expanded only partially. The design has been revised to include beams running perpendicular to and cutting into the step's top layer as well as bottom layer. These beams as well as an extra layer underneath the pyramid, should help the pyramid to survive manufacture and charge properly. A practical application of micro charge pump actuation, as well as the pyramid is discussed.

Subjects/Keywords: Microelectromechanical systems; Microactuators

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APA (6^th Edition):

Anderson, E. (2008). Micro charge pump actuation in SUMMiT V MEMS. (Masters Thesis). University of Utah. Retrieved from http://content.lib.utah.edu/cdm/singleitem/collection/etd2/id/2103/rec/768

Chicago Manual of Style (16^th Edition):

Anderson, Eric. “Micro charge pump actuation in SUMMiT V MEMS.” 2008. Masters Thesis, University of Utah. Accessed March 02, 2021. http://content.lib.utah.edu/cdm/singleitem/collection/etd2/id/2103/rec/768.

MLA Handbook (7^th Edition):

Anderson, Eric. “Micro charge pump actuation in SUMMiT V MEMS.” 2008. Web. 02 Mar 2021.

Vancouver:

Anderson E. Micro charge pump actuation in SUMMiT V MEMS. [Internet] [Masters thesis]. University of Utah; 2008. [cited 2021 Mar 02]. Available from: http://content.lib.utah.edu/cdm/singleitem/collection/etd2/id/2103/rec/768.

Council of Science Editors:

Anderson E. Micro charge pump actuation in SUMMiT V MEMS. [Masters Thesis]. University of Utah; 2008. Available from: http://content.lib.utah.edu/cdm/singleitem/collection/etd2/id/2103/rec/768

Montana State University

3. Lukes, Sarah Jane. Imaging performance of elliptical-boundary varifocal mirrors in active optical systems.

Degree: PhD, College of Engineering, 2015, Montana State University

URL: https://scholarworks.montana.edu/xmlui/handle/1/8862

► Micro-electro-mechanical systems deformable-membrane mirrors provide a means of focus control and attendant spherical aberration correction for miniaturized imaging systems. The technology has greatly advanced in… (more)

▼ Micro-electro-mechanical systems deformable-membrane mirrors provide a means of focus control and attendant spherical aberration correction for miniaturized imaging systems. The technology has greatly advanced in the last decade, thereby extending their focal range capabilities. This dissertation describes a novel SU-8 2002 silicon-on-insulator wafer deformable mirror. A 4.000 mm x 5.657 mm mirror for 45° incident light rays achieves 22 micron stroke or 65 diopters, limited by snapdown. The mirrors show excellent optical quality while flat. Most have peak-to-valley difference of less than 150 nm and root-mean-square less than 25 nm. The process proves simple, only requiring a silicon-on-insulator wafer, SU-8 2002, and a metal layer. Xenon difluoride etches the silicon to release the mirrors. Greater than 90% of the devices survive fabrication and release. While current literature includes several aberration analyses on static mirrors, analyses that incorporate the dynamic nature of these mirrors do not exist. Optical designers may have a choice between deformable mirrors and other types of varifocal mirrors or lenses. Furthermore, a dynamic mirror at an incidence angle other than normal may be desired due to space limitations or for higher throughput (normal incidence requires a beam splitter). This dissertation presents an analysis based on the characteristic function of the system. It provides 2nd and 3rd order aberration coefficients in terms of dynamic focus range and base ray incidence angle. These afford an understanding of the significance of different types of aberrations. Root-mean-square and Strehl calculations provide insight into overall imaging performance for various conditions. I present general guidelines for maximum incidence angle and field of fiew that provide near diffraction-limited performance. Experimental verification of the MEMS mirrors at 5° and 45° incidence angles validates the analytical results. A Blu-ray optical pick-up imaging demonstration shows the utility of these mirrors for focus control and spherical aberration correction. Imaging results of the first demonstration of a deformable mirror for dynamic agile focus control and spherical aberration correction in a commercial table-top confocal microscope are also shown. Advisors/Committee Members: Chairperson, Graduate Committee: David L. Dickensheets (advisor).

Subjects/Keywords: Microelectromechanical systems.; Imaging systems.; Mirrors.

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APA (6^th Edition):

Lukes, S. J. (2015). Imaging performance of elliptical-boundary varifocal mirrors in active optical systems. (Doctoral Dissertation). Montana State University. Retrieved from https://scholarworks.montana.edu/xmlui/handle/1/8862

Chicago Manual of Style (16^th Edition):

Lukes, Sarah Jane. “Imaging performance of elliptical-boundary varifocal mirrors in active optical systems.” 2015. Doctoral Dissertation, Montana State University. Accessed March 02, 2021. https://scholarworks.montana.edu/xmlui/handle/1/8862.

MLA Handbook (7^th Edition):

Lukes, Sarah Jane. “Imaging performance of elliptical-boundary varifocal mirrors in active optical systems.” 2015. Web. 02 Mar 2021.

Vancouver:

Lukes SJ. Imaging performance of elliptical-boundary varifocal mirrors in active optical systems. [Internet] [Doctoral dissertation]. Montana State University; 2015. [cited 2021 Mar 02]. Available from: https://scholarworks.montana.edu/xmlui/handle/1/8862.

Council of Science Editors:

Lukes SJ. Imaging performance of elliptical-boundary varifocal mirrors in active optical systems. [Doctoral Dissertation]. Montana State University; 2015. Available from: https://scholarworks.montana.edu/xmlui/handle/1/8862

Cape Peninsula University of Technology

4. Mustafa, Haithem Ali Babiker. Development of a noncontact current sensor based on MEMS technology .

Degree: 2007, Cape Peninsula University of Technology

URL: http://etd.cput.ac.za/handle/20.500.11838/1082

► Most ofMEMS sensors are based on the micro-cantilever technology, which use wide range of different design materials and structures. The benefit ofMEMS technology is in… (more)

Subjects/Keywords: Microelectromechanical systems

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APA (6^th Edition):

Mustafa, H. A. B. (2007). Development of a noncontact current sensor based on MEMS technology . (Thesis). Cape Peninsula University of Technology. Retrieved from http://etd.cput.ac.za/handle/20.500.11838/1082

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Mustafa, Haithem Ali Babiker. “Development of a noncontact current sensor based on MEMS technology .” 2007. Thesis, Cape Peninsula University of Technology. Accessed March 02, 2021. http://etd.cput.ac.za/handle/20.500.11838/1082.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Mustafa, Haithem Ali Babiker. “Development of a noncontact current sensor based on MEMS technology .” 2007. Web. 02 Mar 2021.

Vancouver:

Mustafa HAB. Development of a noncontact current sensor based on MEMS technology . [Internet] [Thesis]. Cape Peninsula University of Technology; 2007. [cited 2021 Mar 02]. Available from: http://etd.cput.ac.za/handle/20.500.11838/1082.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Mustafa HAB. Development of a noncontact current sensor based on MEMS technology . [Thesis]. Cape Peninsula University of Technology; 2007. Available from: http://etd.cput.ac.za/handle/20.500.11838/1082

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

University of Alberta

5. Shewchuk, Ryan M. Increasing Organic Photovoltaic Device Efficiency Through Microstructuring Techniques.

Degree: MS, Department of Electrical and Computer Engineering, 2016, University of Alberta

URL: https://era.library.ualberta.ca/files/czp38wc62g

► Organic photovoltaics offer the tantalizing possibility of inexpensive renewable energy generation. However, there are many issues that need to be solved before organic photovoltaics can… (more)

Subjects/Keywords: Organic Photovoltaics; MEMS; Microelectromechanical Systems

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APA (6^th Edition):

Shewchuk, R. M. (2016). Increasing Organic Photovoltaic Device Efficiency Through Microstructuring Techniques. (Masters Thesis). University of Alberta. Retrieved from https://era.library.ualberta.ca/files/czp38wc62g

Chicago Manual of Style (16^th Edition):

Shewchuk, Ryan M. “Increasing Organic Photovoltaic Device Efficiency Through Microstructuring Techniques.” 2016. Masters Thesis, University of Alberta. Accessed March 02, 2021. https://era.library.ualberta.ca/files/czp38wc62g.

MLA Handbook (7^th Edition):

Shewchuk, Ryan M. “Increasing Organic Photovoltaic Device Efficiency Through Microstructuring Techniques.” 2016. Web. 02 Mar 2021.

Vancouver:

Shewchuk RM. Increasing Organic Photovoltaic Device Efficiency Through Microstructuring Techniques. [Internet] [Masters thesis]. University of Alberta; 2016. [cited 2021 Mar 02]. Available from: https://era.library.ualberta.ca/files/czp38wc62g.

Council of Science Editors:

Shewchuk RM. Increasing Organic Photovoltaic Device Efficiency Through Microstructuring Techniques. [Masters Thesis]. University of Alberta; 2016. Available from: https://era.library.ualberta.ca/files/czp38wc62g

University of Alberta

6. Benfield, David C. A Study of Six-Axis MEMS Sensors for Load Detection in Biomedical Applications.

Degree: PhD, Department of Mechanical Engineering, 2012, University of Alberta

URL: https://era.library.ualberta.ca/files/wm117p68c

► Quantification of the loads applied in biomedical applications has the potential to increase patient safety during surgical procedures and to improve the knowledge of the… (more)

Subjects/Keywords: microelectromechanical systems; scoliosis; sensor

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APA (6^th Edition):

Benfield, D. C. (2012). A Study of Six-Axis MEMS Sensors for Load Detection in Biomedical Applications. (Doctoral Dissertation). University of Alberta. Retrieved from https://era.library.ualberta.ca/files/wm117p68c

Chicago Manual of Style (16^th Edition):

Benfield, David C. “A Study of Six-Axis MEMS Sensors for Load Detection in Biomedical Applications.” 2012. Doctoral Dissertation, University of Alberta. Accessed March 02, 2021. https://era.library.ualberta.ca/files/wm117p68c.

MLA Handbook (7^th Edition):

Benfield, David C. “A Study of Six-Axis MEMS Sensors for Load Detection in Biomedical Applications.” 2012. Web. 02 Mar 2021.

Vancouver:

Benfield DC. A Study of Six-Axis MEMS Sensors for Load Detection in Biomedical Applications. [Internet] [Doctoral dissertation]. University of Alberta; 2012. [cited 2021 Mar 02]. Available from: https://era.library.ualberta.ca/files/wm117p68c.

Council of Science Editors:

Benfield DC. A Study of Six-Axis MEMS Sensors for Load Detection in Biomedical Applications. [Doctoral Dissertation]. University of Alberta; 2012. Available from: https://era.library.ualberta.ca/files/wm117p68c

Boston University

7. Ozturk, Mehmet Saadeddin. Electrothermally actuated terahertz metamaterial.

Degree: MS, Engineering, 2010, Boston University

URL: http://hdl.handle.net/2144/34955

► Microelectromechanical Systems (MEMS) have been adapted from Integrated Circuit (IC) technology. MEMS enable fabrication of devices size from a few microns to hundreds of microns.… (more)

▼ Microelectromechanical Systems (MEMS) have been adapted from Integrated Circuit (IC) technology. MEMS enable fabrication of devices size from a few microns to hundreds of microns. This scale is also a proper scale for Terahertz (THz) metamaterials (MM), which are designed for building homogeneous mediums. Our study aims to demonstrate an operating device which is designed by using mechanical and electromagnetic principles, fabricated by MEMS technology. MEMS actuator and electromagnetic resonator are the two main parts of our device which is called Electrothermally Actuated Metamaterial (ETAMM). Mechanical actuator is realized by using conventional photolithography techniques and THz Time Domain Spectroscopy (TDS) is used for excitation and detection of the resonator. This project is a contribution to the active THz MM devices of which main purpose is to control the optical property by au external stimuli. We aimed to fabricate a tunable THz Metamaterial device. The device is comprised of two mirrored Split Ring Resonator (mSRR) with a certain resonant frequency. Resonance frequency is tuned by electrothermal actuation. As a novel approach, mSRR itself is used as au actuator. Devices nre connected to ectch other through electrodes. They make the current flow through an array and this flow leads to joule heating by causing a thermal expansion of the device. This elastic deformation of the device results as in an out of plane buckling and changes the distance between mSRR and bare silicon substrate. In the electromagnetic part of the mechanism: the change in distance caused by thermal expansion, alters the effective dielectric constant within the gap between the structure and the substrate. Dielectric constant in the gap is the main parameter for resonance frequency, for this reason we chose it as a tuning parameter of the device. In the final analysis, ETAMM utilizes the change in the dielectric constant to alter the resonance frequency. Our device delivered 6 GHz resonance frequency shift as a response to an applied voltage of 5.7V on the device.

Subjects/Keywords: Microelectromechanical systems; Terahertz metamaterials; Engineering

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APA (6^th Edition):

Ozturk, M. S. (2010). Electrothermally actuated terahertz metamaterial. (Masters Thesis). Boston University. Retrieved from http://hdl.handle.net/2144/34955

Chicago Manual of Style (16^th Edition):

Ozturk, Mehmet Saadeddin. “Electrothermally actuated terahertz metamaterial.” 2010. Masters Thesis, Boston University. Accessed March 02, 2021. http://hdl.handle.net/2144/34955.

MLA Handbook (7^th Edition):

Ozturk, Mehmet Saadeddin. “Electrothermally actuated terahertz metamaterial.” 2010. Web. 02 Mar 2021.

Vancouver:

Ozturk MS. Electrothermally actuated terahertz metamaterial. [Internet] [Masters thesis]. Boston University; 2010. [cited 2021 Mar 02]. Available from: http://hdl.handle.net/2144/34955.

Council of Science Editors:

Ozturk MS. Electrothermally actuated terahertz metamaterial. [Masters Thesis]. Boston University; 2010. Available from: http://hdl.handle.net/2144/34955

Hong Kong University of Science and Technology

8. Chan, Yin Ling Elena ECE. Design, fabrication and characterization of bulk-type MEMS high pressure sensor.

Degree: 2018, Hong Kong University of Science and Technology

URL: http://repository.ust.hk/ir/Record/1783.1-95894 ; https://doi.org/10.14711/thesis-991012637368403412 ; http://repository.ust.hk/ir/bitstream/1783.1-95894/1/th_redirect.html

► Many industrial, automotive, and oil exploration applications demand measuring pressure higher than 200 MPa (or 2000 atmospheres). Micro-electro-mechanical systems (MEMS) refer to tiny electrical devices… (more)

Subjects/Keywords: Microelectromechanical systems ; Pressure transducers

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APA (6^th Edition):

Chan, Y. L. E. E. (2018). Design, fabrication and characterization of bulk-type MEMS high pressure sensor. (Thesis). Hong Kong University of Science and Technology. Retrieved from http://repository.ust.hk/ir/Record/1783.1-95894 ; https://doi.org/10.14711/thesis-991012637368403412 ; http://repository.ust.hk/ir/bitstream/1783.1-95894/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Chan, Yin Ling Elena ECE. “Design, fabrication and characterization of bulk-type MEMS high pressure sensor.” 2018. Thesis, Hong Kong University of Science and Technology. Accessed March 02, 2021. http://repository.ust.hk/ir/Record/1783.1-95894 ; https://doi.org/10.14711/thesis-991012637368403412 ; http://repository.ust.hk/ir/bitstream/1783.1-95894/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Chan, Yin Ling Elena ECE. “Design, fabrication and characterization of bulk-type MEMS high pressure sensor.” 2018. Web. 02 Mar 2021.

Vancouver:

Chan YLEE. Design, fabrication and characterization of bulk-type MEMS high pressure sensor. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2018. [cited 2021 Mar 02]. Available from: http://repository.ust.hk/ir/Record/1783.1-95894 ; https://doi.org/10.14711/thesis-991012637368403412 ; http://repository.ust.hk/ir/bitstream/1783.1-95894/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Chan YLEE. Design, fabrication and characterization of bulk-type MEMS high pressure sensor. [Thesis]. Hong Kong University of Science and Technology; 2018. Available from: http://repository.ust.hk/ir/Record/1783.1-95894 ; https://doi.org/10.14711/thesis-991012637368403412 ; http://repository.ust.hk/ir/bitstream/1783.1-95894/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Montana State University

9. Moog, Eric John. Numerical modeling of the deflection of an electrostatically actuated circular membrane mirror.

Degree: MS, College of Engineering, 2011, Montana State University

URL: https://scholarworks.montana.edu/xmlui/handle/1/1897

► This thesis outlines a numerical modeling method to describe the deflection behavior and investigate control schemes for an electrostatically actuated deformable membrane mirror, with application… (more)

Subjects/Keywords: Microelectromechanical systems.; Mirrors.; Finite differences.

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APA (6^th Edition):

Moog, E. J. (2011). Numerical modeling of the deflection of an electrostatically actuated circular membrane mirror. (Masters Thesis). Montana State University. Retrieved from https://scholarworks.montana.edu/xmlui/handle/1/1897

Chicago Manual of Style (16^th Edition):

Moog, Eric John. “Numerical modeling of the deflection of an electrostatically actuated circular membrane mirror.” 2011. Masters Thesis, Montana State University. Accessed March 02, 2021. https://scholarworks.montana.edu/xmlui/handle/1/1897.

MLA Handbook (7^th Edition):

Moog, Eric John. “Numerical modeling of the deflection of an electrostatically actuated circular membrane mirror.” 2011. Web. 02 Mar 2021.

Vancouver:

Moog EJ. Numerical modeling of the deflection of an electrostatically actuated circular membrane mirror. [Internet] [Masters thesis]. Montana State University; 2011. [cited 2021 Mar 02]. Available from: https://scholarworks.montana.edu/xmlui/handle/1/1897.

Council of Science Editors:

Moog EJ. Numerical modeling of the deflection of an electrostatically actuated circular membrane mirror. [Masters Thesis]. Montana State University; 2011. Available from: https://scholarworks.montana.edu/xmlui/handle/1/1897

University of Illinois – Urbana-Champaign

10. Keller, Katrina. Using resonant MEMS pedestal sensors and filtering techniques to determine the growth curve of MDA-MB-231, metastatic breast cancer cells.

Degree: MS, 0408, 2014, University of Illinois – Urbana-Champaign

URL: http://hdl.handle.net/2142/46940

► Studying cells at the individual level is incredibly important for understanding underlying mechanisms for growth, cell cycle control, cell mass, cell adhesion to surfaces, and… (more)

Subjects/Keywords: Microelectromechanical systems (MEMS); Cancer

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APA (6^th Edition):

Keller, K. (2014). Using resonant MEMS pedestal sensors and filtering techniques to determine the growth curve of MDA-MB-231, metastatic breast cancer cells. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/46940

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Keller, Katrina. “Using resonant MEMS pedestal sensors and filtering techniques to determine the growth curve of MDA-MB-231, metastatic breast cancer cells.” 2014. Thesis, University of Illinois – Urbana-Champaign. Accessed March 02, 2021. http://hdl.handle.net/2142/46940.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Keller, Katrina. “Using resonant MEMS pedestal sensors and filtering techniques to determine the growth curve of MDA-MB-231, metastatic breast cancer cells.” 2014. Web. 02 Mar 2021.

Vancouver:

Keller K. Using resonant MEMS pedestal sensors and filtering techniques to determine the growth curve of MDA-MB-231, metastatic breast cancer cells. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2014. [cited 2021 Mar 02]. Available from: http://hdl.handle.net/2142/46940.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Keller K. Using resonant MEMS pedestal sensors and filtering techniques to determine the growth curve of MDA-MB-231, metastatic breast cancer cells. [Thesis]. University of Illinois – Urbana-Champaign; 2014. Available from: http://hdl.handle.net/2142/46940

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

University of Oklahoma

11. Borras Pinilla, Carlos. MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP.

Degree: PhD, 2012, University of Oklahoma

URL: http://hdl.handle.net/11244/319433

► Non-dimensional ratios in the analytical equations are used to extrapolate the performance of designs beyond that of the baseline configuration and tailor designs for particular… (more)

Subjects/Keywords: Microelectromechanical systems; Microfluidics; Nanotechnology

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APA (6^th Edition):

Borras Pinilla, C. (2012). MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP. (Doctoral Dissertation). University of Oklahoma. Retrieved from http://hdl.handle.net/11244/319433

Chicago Manual of Style (16^th Edition):

Borras Pinilla, Carlos. “MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP.” 2012. Doctoral Dissertation, University of Oklahoma. Accessed March 02, 2021. http://hdl.handle.net/11244/319433.

MLA Handbook (7^th Edition):

Borras Pinilla, Carlos. “MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP.” 2012. Web. 02 Mar 2021.

Vancouver:

Borras Pinilla C. MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP. [Internet] [Doctoral dissertation]. University of Oklahoma; 2012. [cited 2021 Mar 02]. Available from: http://hdl.handle.net/11244/319433.

Council of Science Editors:

Borras Pinilla C. MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP. [Doctoral Dissertation]. University of Oklahoma; 2012. Available from: http://hdl.handle.net/11244/319433

University of Oklahoma

12. Borras Pinilla, Carlos. MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP.

Degree: PhD, 2012, University of Oklahoma

URL: http://hdl.handle.net/11244/318483

► Non-dimensional ratios in the analytical equations are used to extrapolate the performance of designs beyond that of the baseline configuration and tailor designs for particular… (more)

Subjects/Keywords: Microelectromechanical systems; Microfluidics; Nanotechnology

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Borras Pinilla, C. (2012). MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP. (Doctoral Dissertation). University of Oklahoma. Retrieved from http://hdl.handle.net/11244/318483

Chicago Manual of Style (16^th Edition):

Borras Pinilla, Carlos. “MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP.” 2012. Doctoral Dissertation, University of Oklahoma. Accessed March 02, 2021. http://hdl.handle.net/11244/318483.

MLA Handbook (7^th Edition):

Borras Pinilla, Carlos. “MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP.” 2012. Web. 02 Mar 2021.

Vancouver:

Borras Pinilla C. MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP. [Internet] [Doctoral dissertation]. University of Oklahoma; 2012. [cited 2021 Mar 02]. Available from: http://hdl.handle.net/11244/318483.

Council of Science Editors:

Borras Pinilla C. MULTIPHYSICS ANALYSIS OF HIGH DIFFERENTIAL PRESSURE ELECTROZIPPER PERISTALTIC MICROPUMP. [Doctoral Dissertation]. University of Oklahoma; 2012. Available from: http://hdl.handle.net/11244/318483

University of Missouri – Columbia

13. Zhu, Jianxiong. Design, analysis and dynamic phenomena of MEMS capacitive power harvester.

Degree: 2015, University of Missouri – Columbia

URL: http://hdl.handle.net/10355/46907

► Unwanted vibrations are all around us in our daily life. These vibrations can effectively be converted into electrical power through capacitive device. Even though the… (more)

Subjects/Keywords: Microelectromechanical systems; Energy harvesting; Vibration

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Zhu, J. (2015). Design, analysis and dynamic phenomena of MEMS capacitive power harvester. (Thesis). University of Missouri – Columbia. Retrieved from http://hdl.handle.net/10355/46907

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Zhu, Jianxiong. “Design, analysis and dynamic phenomena of MEMS capacitive power harvester.” 2015. Thesis, University of Missouri – Columbia. Accessed March 02, 2021. http://hdl.handle.net/10355/46907.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Zhu, Jianxiong. “Design, analysis and dynamic phenomena of MEMS capacitive power harvester.” 2015. Web. 02 Mar 2021.

Vancouver:

Zhu J. Design, analysis and dynamic phenomena of MEMS capacitive power harvester. [Internet] [Thesis]. University of Missouri – Columbia; 2015. [cited 2021 Mar 02]. Available from: http://hdl.handle.net/10355/46907.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Zhu J. Design, analysis and dynamic phenomena of MEMS capacitive power harvester. [Thesis]. University of Missouri – Columbia; 2015. Available from: http://hdl.handle.net/10355/46907

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Rutgers University

14. Pan, Yanbiao, 1986-. Organic microelectromechanical relay technology for ultralow-power flexible transparent large-area electronics.

Degree: PhD, Electrical and Computer Engineering, 2017, Rutgers University

URL: https://rucore.libraries.rutgers.edu/rutgers-lib/53961/

►

Much research to date has focused on synthesizing new polymers or improving existing polymers, in order to overcome the limits of the conventional organic thin-film… (more)

▼

Much research to date has focused on synthesizing new polymers or improving existing polymers, in order to overcome the limits of the conventional organic thin-film transistor (OTFT): (1) A rather low channel carrier mobility (< 20 cm²V^-1s^-1 typically) requires a power supply voltage well above 2 V for a reasonable on-/off-current ratio (> 10⁵); (2) The formation of a relatively poor-quality interface between the polymeric channel and gate insulator induces large off-state leakage current well above 10^-13 A; (3) Asymmetric pairs of n- and p-type OTFTs result in noncomplementary switching. All these would affect the overall power consumption at the transistor, circuit, and system levels. This doctoral dissertation proposes and demonstrates radically-different, organic microelectromechanical (MEM) relays, in order to overcome such limits and hence enable efficient implementation of portable and/or wearable large-area electronics for the internet of things requiring ultralow-power operation, structural flexibility, visual transparency, and low-cost/-temperature processing. Firstly, a polymer-based low-thermal-budget surface-micromachining process is developed to implement organic relay prototypes (comprising multiple or single input/output terminals). Fabricated relays exhibit unique I-V characteristics including immeasurably-low off-state leakage current, abrupt transitions to the on-/off-state with an input voltage swing less than 60 mV for a decade change in output current, a relatively high on/off current ratio well above 10⁵, and complementary switching behavior and can endure a finite number of hot- and cold-switching cycles. Secondly, the effects of humidity, temperature, and low-surface-energy contacting electrodes materials on switching characteristics (such as hysteresis voltages and on-state resistance) are investigated. Thirdly, basic Boolean operations including AND, OR, and XOR and logic functions (e.g., carry bit generation for four inputs) are demonstrated using a multi-input/-output relay.

Advisors/Committee Members: Feldman, Leonard (internal member), Lu, Yicheng (internal member), Jeon, Jaeseok (internal member), Guo, Zhixiong (outside member).

Subjects/Keywords: Microelectromechanical systems; Electric relays

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Pan, Yanbiao, 1. (2017). Organic microelectromechanical relay technology for ultralow-power flexible transparent large-area electronics. (Doctoral Dissertation). Rutgers University. Retrieved from https://rucore.libraries.rutgers.edu/rutgers-lib/53961/

Chicago Manual of Style (16^th Edition):

Pan, Yanbiao, 1986-. “Organic microelectromechanical relay technology for ultralow-power flexible transparent large-area electronics.” 2017. Doctoral Dissertation, Rutgers University. Accessed March 02, 2021. https://rucore.libraries.rutgers.edu/rutgers-lib/53961/.

MLA Handbook (7^th Edition):

Pan, Yanbiao, 1986-. “Organic microelectromechanical relay technology for ultralow-power flexible transparent large-area electronics.” 2017. Web. 02 Mar 2021.

Vancouver:

Pan, Yanbiao 1. Organic microelectromechanical relay technology for ultralow-power flexible transparent large-area electronics. [Internet] [Doctoral dissertation]. Rutgers University; 2017. [cited 2021 Mar 02]. Available from: https://rucore.libraries.rutgers.edu/rutgers-lib/53961/.

Council of Science Editors:

Pan, Yanbiao 1. Organic microelectromechanical relay technology for ultralow-power flexible transparent large-area electronics. [Doctoral Dissertation]. Rutgers University; 2017. Available from: https://rucore.libraries.rutgers.edu/rutgers-lib/53961/

Rutgers University

15. Ferrer, Anthony Jesus, 1987-. Dewetting of thin films on flexible substrates via direct-write laser exposure.

Degree: PhD, Materials Science and Engineering, 2015, Rutgers University

URL: https://rucore.libraries.rutgers.edu/rutgers-lib/47366/

►

Microelectromechanical systems (MEMS) have enabled a wide variety of technologies both in the consumer space and in industrial/research areas. At the market level, such devices… (more)

Subjects/Keywords: Thin films; Microelectromechanical systems

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APA (6^th Edition):

Ferrer, Anthony Jesus, 1. (2015). Dewetting of thin films on flexible substrates via direct-write laser exposure. (Doctoral Dissertation). Rutgers University. Retrieved from https://rucore.libraries.rutgers.edu/rutgers-lib/47366/

Chicago Manual of Style (16^th Edition):

Ferrer, Anthony Jesus, 1987-. “Dewetting of thin films on flexible substrates via direct-write laser exposure.” 2015. Doctoral Dissertation, Rutgers University. Accessed March 02, 2021. https://rucore.libraries.rutgers.edu/rutgers-lib/47366/.

MLA Handbook (7^th Edition):

Ferrer, Anthony Jesus, 1987-. “Dewetting of thin films on flexible substrates via direct-write laser exposure.” 2015. Web. 02 Mar 2021.

Vancouver:

Ferrer, Anthony Jesus 1. Dewetting of thin films on flexible substrates via direct-write laser exposure. [Internet] [Doctoral dissertation]. Rutgers University; 2015. [cited 2021 Mar 02]. Available from: https://rucore.libraries.rutgers.edu/rutgers-lib/47366/.

Council of Science Editors:

Ferrer, Anthony Jesus 1. Dewetting of thin films on flexible substrates via direct-write laser exposure. [Doctoral Dissertation]. Rutgers University; 2015. Available from: https://rucore.libraries.rutgers.edu/rutgers-lib/47366/

Hong Kong University of Science and Technology

16. Zeng, Fan. Silicon-migration technology and its applications to micro-electro-mechanical systems.

Degree: 2014, Hong Kong University of Science and Technology

URL: http://repository.ust.hk/ir/Record/1783.1-72513 ; https://doi.org/10.14711/thesis-b1432232 ; http://repository.ust.hk/ir/bitstream/1783.1-72513/1/th_redirect.html

► It is difficult for traditional micro-engineering methods to generate a suspended structural layer for micro-electro-mechanical systems (MEMS) applications without a releasing step. The limitation becomes… (more)

▼ It is difficult for traditional micro-engineering methods to generate a suspended structural layer for micro-electro-mechanical systems (MEMS) applications without a releasing step. The limitation becomes more serious when it comes to integration with electronic circuits. Various schemes proposed for MEMS-CMOS integration have issues that either hamper design flexibility or require special care. Silicon-Migration Technology (SiMiT) starts with the formation of an array of “wells” using a deep reactive-ion etcher (DRIE). During a subsequent heat-treatment, surface-diffusion of silicon leads to the coalescence of the voids at the bases of adjacent wells and the closing of the space at the top of a well. In the end a continuous cavity buried under a cover-diaphragm can be obtained without a releasing step. Following a brief summary of the physics, simulations and experimental results of the initial works on SiMiT, the SiMiT process was further understood via a self-developed front-tracking simulator. SiMiT thermal treatment was carried out using rapid thermal annealing at 1150 °C in atmospheric pressure argon. Various structures useful for MEMS applications including oxide micro-channels, suspended cantilevers and diaphragms were realized using SiMiT. Potential application issues with SiMiT were discussed, with solutions provided. The application of SiMiT to the realization of a CMOS integrated 16×16 self-scanned active-matrix tactile sensor was subsequently described. A sensitivity of ~0.03 μV/V/Pa and spatial resolution of ~145 “pixels per inch”, suitable for applications such as dexterous robotic manipulation, was achieved. With the elimination of the conventional sacrificial layer etch, the issues of material- and process-incompatibility inherently present in many integration schemes are largely avoided. Finally, SiMiT is applied to the realization of a differential capacitive pressure sensor with innovative diaphragm shape and reference capacitor designs, achieving a sensitivity of ~40 aF/Pa in a ~100 kPa pressure range.

Subjects/Keywords: Microelectromechanical systems ; Metal oxide semiconductors, Complementary ; Silicon

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APA (6^th Edition):

Zeng, F. (2014). Silicon-migration technology and its applications to micro-electro-mechanical systems. (Thesis). Hong Kong University of Science and Technology. Retrieved from http://repository.ust.hk/ir/Record/1783.1-72513 ; https://doi.org/10.14711/thesis-b1432232 ; http://repository.ust.hk/ir/bitstream/1783.1-72513/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Zeng, Fan. “Silicon-migration technology and its applications to micro-electro-mechanical systems.” 2014. Thesis, Hong Kong University of Science and Technology. Accessed March 02, 2021. http://repository.ust.hk/ir/Record/1783.1-72513 ; https://doi.org/10.14711/thesis-b1432232 ; http://repository.ust.hk/ir/bitstream/1783.1-72513/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Zeng, Fan. “Silicon-migration technology and its applications to micro-electro-mechanical systems.” 2014. Web. 02 Mar 2021.

Vancouver:

Zeng F. Silicon-migration technology and its applications to micro-electro-mechanical systems. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2014. [cited 2021 Mar 02]. Available from: http://repository.ust.hk/ir/Record/1783.1-72513 ; https://doi.org/10.14711/thesis-b1432232 ; http://repository.ust.hk/ir/bitstream/1783.1-72513/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Zeng F. Silicon-migration technology and its applications to micro-electro-mechanical systems. [Thesis]. Hong Kong University of Science and Technology; 2014. Available from: http://repository.ust.hk/ir/Record/1783.1-72513 ; https://doi.org/10.14711/thesis-b1432232 ; http://repository.ust.hk/ir/bitstream/1783.1-72513/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Hong Kong University of Science and Technology

17. Wang, Lu. Design, fabrication and application of micro-fabricated nanomaterials tensile testing device.

Degree: 2015, Hong Kong University of Science and Technology

URL: http://repository.ust.hk/ir/Record/1783.1-74989 ; https://doi.org/10.14711/thesis-b1487517 ; http://repository.ust.hk/ir/bitstream/1783.1-74989/1/th_redirect.html

► Due to their excellent properties of nanomaterials, such as small size, low density, and high strength, they have an extensive usage in micro-electronics, data storage,… (more)

Subjects/Keywords: Nanostructured materials ; Testing ; Mechanical properties ; Microelectromechanical systems

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Wang, L. (2015). Design, fabrication and application of micro-fabricated nanomaterials tensile testing device. (Thesis). Hong Kong University of Science and Technology. Retrieved from http://repository.ust.hk/ir/Record/1783.1-74989 ; https://doi.org/10.14711/thesis-b1487517 ; http://repository.ust.hk/ir/bitstream/1783.1-74989/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Wang, Lu. “Design, fabrication and application of micro-fabricated nanomaterials tensile testing device.” 2015. Thesis, Hong Kong University of Science and Technology. Accessed March 02, 2021. http://repository.ust.hk/ir/Record/1783.1-74989 ; https://doi.org/10.14711/thesis-b1487517 ; http://repository.ust.hk/ir/bitstream/1783.1-74989/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Wang, Lu. “Design, fabrication and application of micro-fabricated nanomaterials tensile testing device.” 2015. Web. 02 Mar 2021.

Vancouver:

Wang L. Design, fabrication and application of micro-fabricated nanomaterials tensile testing device. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2015. [cited 2021 Mar 02]. Available from: http://repository.ust.hk/ir/Record/1783.1-74989 ; https://doi.org/10.14711/thesis-b1487517 ; http://repository.ust.hk/ir/bitstream/1783.1-74989/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Wang L. Design, fabrication and application of micro-fabricated nanomaterials tensile testing device. [Thesis]. Hong Kong University of Science and Technology; 2015. Available from: http://repository.ust.hk/ir/Record/1783.1-74989 ; https://doi.org/10.14711/thesis-b1487517 ; http://repository.ust.hk/ir/bitstream/1783.1-74989/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Hong Kong University of Science and Technology

18. Sui, Wenshu. Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry.

Degree: 2017, Hong Kong University of Science and Technology

URL: http://repository.ust.hk/ir/Record/1783.1-88939 ; https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html

► With the increasing opportunities offered by the consumer market, the microphone industry is more important than ever. In this work, the design parameters of capacitive… (more)

▼ With the increasing opportunities offered by the consumer market, the microphone industry is more important than ever. In this work, the design parameters of capacitive MEMS microphone was analyzed based on a general one-dimensional (1D) model. The theoretical sensitivity of the capacitive microphone is shown to be a nonlinear function of diaphragm radius (a), thickness (h), back chamber length (L), the residual stress (σ_rs) and some other parameters. Based on the general 1D model, a critical diaphragm radius was found located at the inflection point of the sensitivity - radius scaling analysis curve, which reflects the minimal equivalent spring constant of the microphone. We then modified this 1D model by revising the diaphragm as a composited layer that is fitted to the PolyMUMPs process. The modified 1D model was applied to predict the critical design parameters of the capacitive MEMS microphone to be fabricated by the PolyMUMPs process, and the critical diaphragm radius of 300 μm is obtained. The agreement between experimental result and theoretical prediction verifies our general 1D model, and proves the critical value can be used to guide the design of capacitive microphone. As parylene can be utilized in the MEMS microphone field such as the movable diaphragm and packaging material for its great dielectric properties and high coating uniformity, the properties of parylene should be further studied. In this work, a comparative study of the viscoelasticity of parylene C was presented by using Nanoindentation technology and Molecular Dynamics (MD) simulations. By applying different types of loadings on parylene C films at different temperatures and frequencies, the complex modulus, relaxation modulus and glass transition temperature (T_g) of the parylene C were obtained. The predicted T_g determined from the temperature-dependent density change in the MD model is consistent with the results in the measurements and previous works. Furthermore, with Time-Temperature Superposition Principle (TTSP), the master curve of parylene C were successfully determined on its creep and relaxation behaviour, for the first time, which is critical for the parylene reliability study of bio-MEMS devices.

Subjects/Keywords: Microelectromechanical systems ; Microphone ; Design and construction

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Sui, W. (2017). Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry. (Thesis). Hong Kong University of Science and Technology. Retrieved from http://repository.ust.hk/ir/Record/1783.1-88939 ; https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Sui, Wenshu. “Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry.” 2017. Thesis, Hong Kong University of Science and Technology. Accessed March 02, 2021. http://repository.ust.hk/ir/Record/1783.1-88939 ; https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Sui, Wenshu. “Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry.” 2017. Web. 02 Mar 2021.

Vancouver:

Sui W. Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2017. [cited 2021 Mar 02]. Available from: http://repository.ust.hk/ir/Record/1783.1-88939 ; https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Sui W. Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry. [Thesis]. Hong Kong University of Science and Technology; 2017. Available from: http://repository.ust.hk/ir/Record/1783.1-88939 ; https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Hong Kong University of Science and Technology

19. Dong, Xiaoshi PHYS. Mode coupling and self-sustained oscillations in micro-/nano-electromechanical systems.

Degree: 2019, Hong Kong University of Science and Technology

URL: http://repository.ust.hk/ir/Record/1783.1-99530 ; https://doi.org/10.14711/thesis-991012711065003412 ; http://repository.ust.hk/ir/bitstream/1783.1-99530/1/th_redirect.html

► Resonators made from micro-/nanoelectromechanical systems are of great importance for their applications ranging from ultra-sensitive measurement to fundamental researches. In this work, we study the… (more)

Subjects/Keywords: Oscillators, Electric ; Electric resonators ; Microelectromechanical systems

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APA (6^th Edition):

Dong, X. P. (2019). Mode coupling and self-sustained oscillations in micro-/nano-electromechanical systems. (Thesis). Hong Kong University of Science and Technology. Retrieved from http://repository.ust.hk/ir/Record/1783.1-99530 ; https://doi.org/10.14711/thesis-991012711065003412 ; http://repository.ust.hk/ir/bitstream/1783.1-99530/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Dong, Xiaoshi PHYS. “Mode coupling and self-sustained oscillations in micro-/nano-electromechanical systems.” 2019. Thesis, Hong Kong University of Science and Technology. Accessed March 02, 2021. http://repository.ust.hk/ir/Record/1783.1-99530 ; https://doi.org/10.14711/thesis-991012711065003412 ; http://repository.ust.hk/ir/bitstream/1783.1-99530/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Dong, Xiaoshi PHYS. “Mode coupling and self-sustained oscillations in micro-/nano-electromechanical systems.” 2019. Web. 02 Mar 2021.

Vancouver:

Dong XP. Mode coupling and self-sustained oscillations in micro-/nano-electromechanical systems. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2019. [cited 2021 Mar 02]. Available from: http://repository.ust.hk/ir/Record/1783.1-99530 ; https://doi.org/10.14711/thesis-991012711065003412 ; http://repository.ust.hk/ir/bitstream/1783.1-99530/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Dong XP. Mode coupling and self-sustained oscillations in micro-/nano-electromechanical systems. [Thesis]. Hong Kong University of Science and Technology; 2019. Available from: http://repository.ust.hk/ir/Record/1783.1-99530 ; https://doi.org/10.14711/thesis-991012711065003412 ; http://repository.ust.hk/ir/bitstream/1783.1-99530/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Montana State University

20. Mishty, Anamika Sharmin. Dynamic response of mini cantilever beams in viscous media.

Degree: MS, College of Engineering, 2010, Montana State University

URL: https://scholarworks.montana.edu/xmlui/handle/1/1882

► In concurrent engineering, viscosity and density of a fluid are two important parameters as they are the indicators of some predefined standards of the concerned… (more)

Subjects/Keywords: Microelectromechanical systems.; Fluids.

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Mishty, A. S. (2010). Dynamic response of mini cantilever beams in viscous media. (Masters Thesis). Montana State University. Retrieved from https://scholarworks.montana.edu/xmlui/handle/1/1882

Chicago Manual of Style (16^th Edition):

Mishty, Anamika Sharmin. “Dynamic response of mini cantilever beams in viscous media.” 2010. Masters Thesis, Montana State University. Accessed March 02, 2021. https://scholarworks.montana.edu/xmlui/handle/1/1882.

MLA Handbook (7^th Edition):

Mishty, Anamika Sharmin. “Dynamic response of mini cantilever beams in viscous media.” 2010. Web. 02 Mar 2021.

Vancouver:

Mishty AS. Dynamic response of mini cantilever beams in viscous media. [Internet] [Masters thesis]. Montana State University; 2010. [cited 2021 Mar 02]. Available from: https://scholarworks.montana.edu/xmlui/handle/1/1882.

Council of Science Editors:

Mishty AS. Dynamic response of mini cantilever beams in viscous media. [Masters Thesis]. Montana State University; 2010. Available from: https://scholarworks.montana.edu/xmlui/handle/1/1882

Texas Tech University

21. Tang, Xin. Micromachining process for microsensor fabrication.

Degree: Electrical and Computer Engineering, 2001, Texas Tech University

URL: http://hdl.handle.net/2346/13310

► MEMS (microelectromechanical systems) are an outgrowth of silicon technology. They are chip-sized systems that have the ability to affect their surroundings and to communicate what… (more)

Subjects/Keywords: Micromachining; Microelectromechanical systems

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APA (6^th Edition):

Tang, X. (2001). Micromachining process for microsensor fabrication. (Thesis). Texas Tech University. Retrieved from http://hdl.handle.net/2346/13310

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Tang, Xin. “Micromachining process for microsensor fabrication.” 2001. Thesis, Texas Tech University. Accessed March 02, 2021. http://hdl.handle.net/2346/13310.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Tang, Xin. “Micromachining process for microsensor fabrication.” 2001. Web. 02 Mar 2021.

Vancouver:

Tang X. Micromachining process for microsensor fabrication. [Internet] [Thesis]. Texas Tech University; 2001. [cited 2021 Mar 02]. Available from: http://hdl.handle.net/2346/13310.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Tang X. Micromachining process for microsensor fabrication. [Thesis]. Texas Tech University; 2001. Available from: http://hdl.handle.net/2346/13310

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Georgia Tech

22. Lee, Wook. Diffraction-based integrated optical readout for micromachined optomechanical sensors.

Degree: PhD, Electrical and Computer Engineering, 2006, Georgia Tech

URL: http://hdl.handle.net/1853/14006

► Highly sensitive optical displacement detection methods implemented in a small volume and with reduced power consumption have a potential to compete with commonly used capacitance… (more)

▼ Highly sensitive optical displacement detection methods implemented in a small volume and with reduced power consumption have a potential to compete with commonly used capacitance based methods in micromechanical sensor systems. This dissertation presents the design, implementation, and characterization of a miniaturized optomechanical displacement sensor system heterogeneously integrated with a coherent laser source and optoelectronic readout as a step in realizing this potential. The sensor uses a phase-sensitive diffraction grating built on a transparent substrate to achieve interferometric sensitivity in a small volume. The device sensitivity is actively optimized via the built-in electrostatic actuation capability, which may be utilized for self calibration and force feedback operation. Optical interconnect through the backside of the sensor enables compact integration with optoelectronic components. For optical readout, a custom-designed silicon photodiode array has been fabricated including deep reactive ion etching of through-wafer holes. The hybrid-integrated system has been implemented and characterized in an acoustic sensor application using both continuous wave and pulsed lasers to show reduced power consumption potential. Comprehensive diffraction analysis has been carried out for optical design of the integrated sensor. Furthermore, a fully-vectorial method has been formulated for general multilayered grating structures and compared with the scalar diffraction approach to investigate the effects of polarization and grating periods. In addition, a grating-assisted resonant-cavity-enhanced (GARCE) detection method has been proposed to improve the displacement sensitivity in optomechanical microsensors. Fabrication of the GARCE structures based on both metallic and dielectric mirrors has been successfully demonstrated, and preliminary experimental results have shown a good agreement with theoretical predictions. The concepts developed and demonstrated in this thesis form a technology platform which already had an impact in a variety of applications including optical microphones, micromachined ultrasonic transducers and transducers arrays, micromachined inertial sensors, and scanning probe microscopy. Advisors/Committee Members: F. Levent Degertekin (Committee Chair), David S. Citrin (Committee Member), Paul E. Hasler (Committee Member), Peter J. Hesketh (Committee Member), Zhiping Zhou (Committee Member).

Subjects/Keywords: Microelectromechanical systems (MEMS)

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Lee, W. (2006). Diffraction-based integrated optical readout for micromachined optomechanical sensors. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/14006

Chicago Manual of Style (16^th Edition):

Lee, Wook. “Diffraction-based integrated optical readout for micromachined optomechanical sensors.” 2006. Doctoral Dissertation, Georgia Tech. Accessed March 02, 2021. http://hdl.handle.net/1853/14006.

MLA Handbook (7^th Edition):

Lee, Wook. “Diffraction-based integrated optical readout for micromachined optomechanical sensors.” 2006. Web. 02 Mar 2021.

Vancouver:

Lee W. Diffraction-based integrated optical readout for micromachined optomechanical sensors. [Internet] [Doctoral dissertation]. Georgia Tech; 2006. [cited 2021 Mar 02]. Available from: http://hdl.handle.net/1853/14006.

Council of Science Editors:

Lee W. Diffraction-based integrated optical readout for micromachined optomechanical sensors. [Doctoral Dissertation]. Georgia Tech; 2006. Available from: http://hdl.handle.net/1853/14006

Massey University

23. Sundararajan, Ananiah Durai. Design of analogue CMOS VLSI MEMS sensor : a dissertation presented in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Engineering , Integrated Circuit Design at School of Engineering and Advanced Technology, Massey University, Albany campus .

Degree: 2015, Massey University

URL: http://hdl.handle.net/10179/9998

► There is an increasing demand of a highly sensitive and reliable pressure micro-sensor system, for implantable and non-implantable medical applications. The prerequisite of a miniaturized… (more)

▼ There is an increasing demand of a highly sensitive and reliable pressure micro-sensor system, for implantable and non-implantable medical applications. The prerequisite of a miniaturized device for minimally invasive procedures, posed greater challenges in the complex integrated design of micro-system. Micro-sensor system designs in the recent advanced CMOS technologies are explored in this work for effective system miniaturization and improved performance. The material choices and geometry designs, which significantly influence the sensitivity and dynamic range of the micro-scale sensor devices, are well addressed. Cointegrations of MEMS devices with signal conditioning circuits that effectively reduce the parasitic effect are also performed for enhancing the overall system performance. In addition, system reliability is also improved with on-chip metal interconnections. The employed process technologies to a greater extent contributed to the high yield for these low cost micro-sensor systems. This research focuses on the design of integrated CMOS MEMS capacitive pressure sensors for diverse bio-medical applications. Two monolithically integrated capacitive pressure microsensor systems are designed, fabricated and experimentally verified. A novel micro-electromechanical capacitive pressure sensor in SiGeMEMS process, vertically integrated on top of a 0.18 μm TSMC CMOS processed die is proposed. The perforated elliptic diaphragm, which is edge clamped at the semi-major axis is developed using poly-SiGe material. High performance on-chip CMOS conditioning circuits are also designed to achieve better overall sensitivity. Experimental results indicate a high sensitivity of around 0.12 mV/hPa along with a nonlinearity of around 1% for the full scale range of applied pressure load. The L-clamp spring anchored diaphragm provided a wide dynamic range of around 900 hPa. Another integrated capacitive pressure micro-system, developed using the advanced standard IBM CMOS process in two geometrical designs is also proposed. A step-sided elliptic diaphragm that overcomes the CMOS process limitations is fabricated to achieve regulated membrane deflections and improved sensitivity. A foundry compatible post-process technique, for a lateral release length of 125 μm is also performed successfully on the 130 nm CMOS platform. A current cross mirroring technique is utilized to enhance the transconductance of an on-chip operational amplifier to achieve a high single stage gain. Sensitivities of the fluorosilicate sealed absolute pressure sensors were measured to be 0.07 mV/Pa and 0.05 mV/Pa for the elliptic and rectangular element, respectively. In addition, the linear capacitive transduction dynamic range was found to be 0.32 pF and 0.23 pF, respectively, for the elliptic and rectangular element.

Subjects/Keywords: Microelectromechanical systems; Pressure transducers; Metal oxide semiconductors

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Sundararajan, A. D. (2015). Design of analogue CMOS VLSI MEMS sensor : a dissertation presented in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Engineering , Integrated Circuit Design at School of Engineering and Advanced Technology, Massey University, Albany campus . (Thesis). Massey University. Retrieved from http://hdl.handle.net/10179/9998

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Sundararajan, Ananiah Durai. “Design of analogue CMOS VLSI MEMS sensor : a dissertation presented in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Engineering , Integrated Circuit Design at School of Engineering and Advanced Technology, Massey University, Albany campus .” 2015. Thesis, Massey University. Accessed March 02, 2021. http://hdl.handle.net/10179/9998.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Sundararajan, Ananiah Durai. “Design of analogue CMOS VLSI MEMS sensor : a dissertation presented in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Engineering , Integrated Circuit Design at School of Engineering and Advanced Technology, Massey University, Albany campus .” 2015. Web. 02 Mar 2021.

Vancouver:

Sundararajan AD. Design of analogue CMOS VLSI MEMS sensor : a dissertation presented in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Engineering , Integrated Circuit Design at School of Engineering and Advanced Technology, Massey University, Albany campus . [Internet] [Thesis]. Massey University; 2015. [cited 2021 Mar 02]. Available from: http://hdl.handle.net/10179/9998.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Sundararajan AD. Design of analogue CMOS VLSI MEMS sensor : a dissertation presented in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Engineering , Integrated Circuit Design at School of Engineering and Advanced Technology, Massey University, Albany campus . [Thesis]. Massey University; 2015. Available from: http://hdl.handle.net/10179/9998

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Massey University

24. Lofroth, Matthew. Development of a compliant micro gripper : a thesis submitted in partial fulfillment for the degree of Masters of Engineering in the School of Engineering and Advanced Technology, Massey University .

Degree: 2019, Massey University

URL: http://hdl.handle.net/10179/15437

► Manipulating micro objects simply and effectively has been a widely discussed and challenging task in recent literature for many reasons. Limitations in complex micro fabrication… (more)

▼ Manipulating micro objects simply and effectively has been a widely discussed and challenging task in recent literature for many reasons. Limitations in complex micro fabrication techniques mean creating extremely small tools at the micro scale is very difficult. Adhesion forces also dominate at this scale, causing anything and everything to stick together. This means that even when these tiny structures are created and introduced to the micro world, they quickly become polluted with contaminants and struggle to pick and place particles without said particle adhering to the tool. Indirect methods for micro manipulation exist, however these can be damaging to biological material such as cells, due to unseen forces being focused into a small point. Having the ability to safely manipulate and separate these objects from a culture is crucial to understanding their individual characteristics. Therefore a safe and reliable method for micro manipulation needs to be developed. This project focuses on investigating the current methods used for micro manipulation in order to identify any possible routes towards developing a simple and yet effective means for manipulating micro objects. A modular micro gripping mechanism is proposed in this report, capable of manipulating many different types of objects such as spherical, non spherical or other arbitrary shapes. The proposed micro gripper combines traditional machining techniques with a complex micro fabrication process to produce a modular mechanism consisting of a sturdy, compliant aluminium base in which replaceable silicon and borosilicate glass end effectors are attached. This creates an easily customisable solution for micro manipulation with an array of different micro tips for different applications. A kinematic analysis for the gripper has been provided which predicts the workspace of the gripper given an input actuation. Design parameters of the gripper have also been optimised through various techniques such as FEA (finite element analysis) simulation and the effects of altering individual flexure beam lengths. The gripper is operated by a piezo actuator with a total capable expansion of 19 mm when 150 VDC is applied. This expansion is then amplified by a factor of 8.1 to a maximum tip displacement of approximately 154 mm. Displacement amplification is achieved by incorporating bridge and lever amplifying techniques into the compliant design. The complete micro gripper is then used to demonstrate manipulation tasks on several different target object types including silica micro beads (spherical and non spherical), a human eyelash and a grain of pollen. These tests are performed to investigate the effect of adhesion forces and also to demonstrate the large size range of capable pick and place objects (6 mm to 500 mm).

Subjects/Keywords: Manipulators (Mechanism); Microelectromechanical systems; Design and construction

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Lofroth, M. (2019). Development of a compliant micro gripper : a thesis submitted in partial fulfillment for the degree of Masters of Engineering in the School of Engineering and Advanced Technology, Massey University . (Thesis). Massey University. Retrieved from http://hdl.handle.net/10179/15437

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Lofroth, Matthew. “Development of a compliant micro gripper : a thesis submitted in partial fulfillment for the degree of Masters of Engineering in the School of Engineering and Advanced Technology, Massey University .” 2019. Thesis, Massey University. Accessed March 02, 2021. http://hdl.handle.net/10179/15437.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Lofroth, Matthew. “Development of a compliant micro gripper : a thesis submitted in partial fulfillment for the degree of Masters of Engineering in the School of Engineering and Advanced Technology, Massey University .” 2019. Web. 02 Mar 2021.

Vancouver:

Lofroth M. Development of a compliant micro gripper : a thesis submitted in partial fulfillment for the degree of Masters of Engineering in the School of Engineering and Advanced Technology, Massey University . [Internet] [Thesis]. Massey University; 2019. [cited 2021 Mar 02]. Available from: http://hdl.handle.net/10179/15437.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Lofroth M. Development of a compliant micro gripper : a thesis submitted in partial fulfillment for the degree of Masters of Engineering in the School of Engineering and Advanced Technology, Massey University . [Thesis]. Massey University; 2019. Available from: http://hdl.handle.net/10179/15437

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Michigan State University

25. Lu, Xi (Of Michigan State University). Theoretical analysis and reduction techniques of DC capacitor ripples and requirements in inverters.

Degree: 2014, Michigan State University

URL: http://etd.lib.msu.edu/islandora/object/etd:2468

►

Thesis Ph. D. Michigan State University. Electrical Engineering 2014.

DC link capacitor is an important component for many conventional topologies, such as three-phase voltage source… (more)

▼

Thesis Ph. D. Michigan State University. Electrical Engineering 2014.

DC link capacitor is an important component for many conventional topologies, such as three-phase voltage source inverter (VSI), H-bridge VSI and etc. Minimization of the dc capacitor is an essential step towards developing and manufacturing compact low-cost inverter systems for high temperature operation, long life and high reliability. Traditionally, the dc capacitance has been determined according to empirical equations and computer simulations, which provides little insights into how to minimize the dc capacitor. In order to achieve an optimum minimization of the dc capacitor, an accurate theory to calculate the dc capacitor voltage ripple and current ripples must be developed first, then pulse-width modulation (PWM) and control techniques or topological improvements can be further developed to minimize both dc voltage and current ripples. This dissertation is mainly divided into two parts. First half is minimizing the capacitor ripple and requirements for three-phase VSI; while second half is for H-bridge VSI. In the first half of the dissertation, it proposes an accurate theory of calculating the dc link capacitor voltage ripples and current ripples for inverters and PWM rectifiers. The results are analyzed and summarized into graphs according to the theory, which helps find the right capacitance value for a given voltage ripple tolerance and the rms ripple current that the capacitor has to absorb. In hybrid electric vehicle (HEV) applications, the high voltage battery pack is connected to the dc link bus through a dc-dc converter. Based on the above-proposed theory, a PWM modulation method for the dc-dc converter is developed to further reduce the dc capacitor current ripples and requirements. To verify the proposed theory and PWM method, a 150 kW inverter prototype has been built. The comparison between the calculation result and experimental result shows that they are in close agreement. For the second half of the dissertation, contributions for H-bridge inverters are made for photovoltaic and FACTs systems. As the demand of the renewable energy increases every year, the photovoltaic (PV) systems have been playing an important part in supplying energy for the global consumption. In order to connect PV modules to the grid without inserting any bulky low frequency step-up transformers, the cascaded H-bridge multilevel inverters are utilized to increase the output voltage level up to the grid voltage (e.g. 13.8 kV). The 2ω harmonic component on the dc link side of the H-bridge inverters has long been a thorny problem, which requires a huge dc link capacitor bank to absorb this 2ω low frequency current ripple in order to maintain the dc link voltage ripple under a tolerable value. This dissertation presents a simple 3rd harmonic injection method for the cascaded H-bridge multilevel inverters for photovoltaic systems at unity power factor. This approach achieves a 40% to 50% reduction of the dc link capacitance, without adding any…

Advisors/Committee Members: Peng, Fang Z., Mitra, Joydeep, Wang, Bingsen, Zhu, Guoming.

Subjects/Keywords: Microelectromechanical systems; Electric inverters; Capacitors; Electrical engineering

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APA (6^th Edition):

Lu, X. (. M. S. U. (2014). Theoretical analysis and reduction techniques of DC capacitor ripples and requirements in inverters. (Thesis). Michigan State University. Retrieved from http://etd.lib.msu.edu/islandora/object/etd:2468

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Lu, Xi (Of Michigan State University). “Theoretical analysis and reduction techniques of DC capacitor ripples and requirements in inverters.” 2014. Thesis, Michigan State University. Accessed March 02, 2021. http://etd.lib.msu.edu/islandora/object/etd:2468.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Lu, Xi (Of Michigan State University). “Theoretical analysis and reduction techniques of DC capacitor ripples and requirements in inverters.” 2014. Web. 02 Mar 2021.

Vancouver:

Lu X(MSU. Theoretical analysis and reduction techniques of DC capacitor ripples and requirements in inverters. [Internet] [Thesis]. Michigan State University; 2014. [cited 2021 Mar 02]. Available from: http://etd.lib.msu.edu/islandora/object/etd:2468.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Lu X(MSU. Theoretical analysis and reduction techniques of DC capacitor ripples and requirements in inverters. [Thesis]. Michigan State University; 2014. Available from: http://etd.lib.msu.edu/islandora/object/etd:2468

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Michigan State University

26. Torres-Reyes, David. VO₂-based MEMS mirror.

Degree: 2017, Michigan State University

URL: http://etd.lib.msu.edu/islandora/object/etd:4665

►

Thesis Ph. D. Michigan State University. Electrical Engineering 2017

This work presents the design, fabrication, and characterization of the first micro-electro-mechanical-systems (MEMS) mirrors where the… (more)

Subjects/Keywords: Microelectromechanical systems; Mirrors; Vanadium compounds; Electrical engineering

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Torres-Reyes, D. (2017). VO₂-based MEMS mirror. (Thesis). Michigan State University. Retrieved from http://etd.lib.msu.edu/islandora/object/etd:4665

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Torres-Reyes, David. “VO₂-based MEMS mirror.” 2017. Thesis, Michigan State University. Accessed March 02, 2021. http://etd.lib.msu.edu/islandora/object/etd:4665.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Torres-Reyes, David. “VO₂-based MEMS mirror.” 2017. Web. 02 Mar 2021.

Vancouver:

Torres-Reyes D. VO₂-based MEMS mirror. [Internet] [Thesis]. Michigan State University; 2017. [cited 2021 Mar 02]. Available from: http://etd.lib.msu.edu/islandora/object/etd:4665.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Torres-Reyes D. VO₂-based MEMS mirror. [Thesis]. Michigan State University; 2017. Available from: http://etd.lib.msu.edu/islandora/object/etd:4665

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Michigan State University

27. Cabrera, Rafmag. A comprehensive study in the applicability of the solid-solid structural phase transition of vanadium dioxide to micro-electro-mechanical devices.

Degree: 2014, Michigan State University

URL: http://etd.lib.msu.edu/islandora/object/etd:2956

►

Thesis Ph. D. Michigan State University. Electrical Engineering 2014.

This dissertation presents a series of studies which explores the use of the structural phase transition… (more)

Subjects/Keywords: Microelectromechanical systems; Vanadium oxide; Electrical engineering

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APA (6^th Edition):

Cabrera, R. (2014). A comprehensive study in the applicability of the solid-solid structural phase transition of vanadium dioxide to micro-electro-mechanical devices. (Thesis). Michigan State University. Retrieved from http://etd.lib.msu.edu/islandora/object/etd:2956

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Cabrera, Rafmag. “A comprehensive study in the applicability of the solid-solid structural phase transition of vanadium dioxide to micro-electro-mechanical devices.” 2014. Thesis, Michigan State University. Accessed March 02, 2021. http://etd.lib.msu.edu/islandora/object/etd:2956.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Cabrera, Rafmag. “A comprehensive study in the applicability of the solid-solid structural phase transition of vanadium dioxide to micro-electro-mechanical devices.” 2014. Web. 02 Mar 2021.

Vancouver:

Cabrera R. A comprehensive study in the applicability of the solid-solid structural phase transition of vanadium dioxide to micro-electro-mechanical devices. [Internet] [Thesis]. Michigan State University; 2014. [cited 2021 Mar 02]. Available from: http://etd.lib.msu.edu/islandora/object/etd:2956.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Cabrera R. A comprehensive study in the applicability of the solid-solid structural phase transition of vanadium dioxide to micro-electro-mechanical devices. [Thesis]. Michigan State University; 2014. Available from: http://etd.lib.msu.edu/islandora/object/etd:2956

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

University of Missouri – Columbia

28. Nguyen, Quang Thanh Nhat. Wearable energy-harvesting micro devices.

Degree: 2016, University of Missouri – Columbia

URL: http://hdl.handle.net/10355/62537

► [ACCESS RESTRICTED TO THE UNIVERSITY OF MISSOURI AT AUTHOR'S REQUEST.] The focus of this dissertation is wearable energy-harvesting mircro devices. They are designed to harvest… (more)

Subjects/Keywords: Microelectromechanical systems; Wearable technology; Energy harvesting

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APA (6^th Edition):

Nguyen, Q. T. N. (2016). Wearable energy-harvesting micro devices. (Thesis). University of Missouri – Columbia. Retrieved from http://hdl.handle.net/10355/62537

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Nguyen, Quang Thanh Nhat. “Wearable energy-harvesting micro devices.” 2016. Thesis, University of Missouri – Columbia. Accessed March 02, 2021. http://hdl.handle.net/10355/62537.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Nguyen, Quang Thanh Nhat. “Wearable energy-harvesting micro devices.” 2016. Web. 02 Mar 2021.

Vancouver:

Nguyen QTN. Wearable energy-harvesting micro devices. [Internet] [Thesis]. University of Missouri – Columbia; 2016. [cited 2021 Mar 02]. Available from: http://hdl.handle.net/10355/62537.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Nguyen QTN. Wearable energy-harvesting micro devices. [Thesis]. University of Missouri – Columbia; 2016. Available from: http://hdl.handle.net/10355/62537

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Rutgers University

29. Lo, Meng-chen, 1986-. Flexible, implantable, micro-electrode probes with an ultrafast degrading polymer coating as a temporary insertion aid for long term neuronal signal aquisition.

Degree: PhD, Biomedical Engineering, 2015, Rutgers University

URL: https://rucore.libraries.rutgers.edu/rutgers-lib/48602/

►

Brain computer interfaces (BCI) establish communication between the brain and external devices by recording and decoding neural signals and using the signals to drive the… (more)

▼

Brain computer interfaces (BCI) establish communication between the brain and external devices by recording and decoding neural signals and using the signals to drive the devices. Implanted neural microprobes are one means of recording these signals. Despite the short term feasibility of currently available neural prosthetic devices, most of these devices suffer from long term gliosis. In order to address this challenge, it is hypothesized that smaller, more flexible probes that match the mechanical properties of brain tissue could allow better long term integration with neural tissue. The goal of this work is to investigate and understand different device design parameters (e.g., size and material) that might affect brain tissue responses of a long term chronic intracortical neural probe. The miniaturized probe is coated with an ultrafast degrading Tyrosine-derived polycarbonate (E5005(2K)). The polymer is mechanically stiff, which allows it to act as a temporary insertion aid for the probes to penetrate tissue, yet has been designed to degrade within several hours, leaving the flexible probes in place for high fidelity recording. First, a fabrication process was developed incorporating both probe fabrication and polymer coating procedures. The probes were characterized to ensure consistent quality. Second, the probes were evaluated using an in-vivo rat model to assess glial tissue response via immunohistochemistry. Finally, the microfabrication process was expanded to electrically functionalize the probes via metallization, to create electrodes for signal recording. In vivo animal study suggested that both polymer coating and probe sizes play roles in glial scar formation. The larger polymer coating devices introduced more severe glial scar response despite polymer degradation within a few hours post device implantation, which might result from the more severe insertion mechanical trauma. The experimental results also confirmed our hypothesis that the smaller probe/polymer coating devices performed better with minimal glial response compared to the larger probe/polymer coating devices in both short/long terms. Finally, we demonstrated the probe’s recording feasibility using in vitro models, and showed that the electrode remained intact during polymer coating and degradation for the proper device operation. In conclusion, the flexible microprobe with an ultrafast degrading polymer coating as an insertion aid demonstrates promising results to address challenges in electrode-cell interface. Future work will evaluate the electrical recording performance of the miniaturized probe to confirm consistent signal quality while attenuating tissue reaction for prolonged device operation.

Advisors/Committee Members: Zahn, Jefferey D. (chair), Shreiber, David I. (internal member), Kohn, Joachim (internal member), Danish, Shabbar F. (outside member).

Subjects/Keywords: Neurons; Microelectromechanical systems; Biotechnology; Brain-computer interfaces

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Lo, Meng-chen, 1. (2015). Flexible, implantable, micro-electrode probes with an ultrafast degrading polymer coating as a temporary insertion aid for long term neuronal signal aquisition. (Doctoral Dissertation). Rutgers University. Retrieved from https://rucore.libraries.rutgers.edu/rutgers-lib/48602/

Chicago Manual of Style (16^th Edition):

Lo, Meng-chen, 1986-. “Flexible, implantable, micro-electrode probes with an ultrafast degrading polymer coating as a temporary insertion aid for long term neuronal signal aquisition.” 2015. Doctoral Dissertation, Rutgers University. Accessed March 02, 2021. https://rucore.libraries.rutgers.edu/rutgers-lib/48602/.

MLA Handbook (7^th Edition):

Lo, Meng-chen, 1986-. “Flexible, implantable, micro-electrode probes with an ultrafast degrading polymer coating as a temporary insertion aid for long term neuronal signal aquisition.” 2015. Web. 02 Mar 2021.

Vancouver:

Lo, Meng-chen 1. Flexible, implantable, micro-electrode probes with an ultrafast degrading polymer coating as a temporary insertion aid for long term neuronal signal aquisition. [Internet] [Doctoral dissertation]. Rutgers University; 2015. [cited 2021 Mar 02]. Available from: https://rucore.libraries.rutgers.edu/rutgers-lib/48602/.

Council of Science Editors:

Lo, Meng-chen 1. Flexible, implantable, micro-electrode probes with an ultrafast degrading polymer coating as a temporary insertion aid for long term neuronal signal aquisition. [Doctoral Dissertation]. Rutgers University; 2015. Available from: https://rucore.libraries.rutgers.edu/rutgers-lib/48602/

Montana State University

30. Liu, Tianbo. MEMS 3-dimensional scanner with SU-8 flexures for a handheld confocal microscope.

Degree: PhD, College of Engineering, 2018, Montana State University

URL: https://scholarworks.montana.edu/xmlui/handle/1/15090

► The conventional method for diagnosing skin cancer is to perform a biopsy followed by pathology. However not only are biopsies invasive and likely to leave… (more)

Subjects/Keywords: Scanning systems.; Confocal microscopy.; Microelectromechanical systems.; Mirrors.; Skin.; Cancer.; Diagnosis.

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Liu, T. (2018). MEMS 3-dimensional scanner with SU-8 flexures for a handheld confocal microscope. (Doctoral Dissertation). Montana State University. Retrieved from https://scholarworks.montana.edu/xmlui/handle/1/15090

Chicago Manual of Style (16^th Edition):

Liu, Tianbo. “MEMS 3-dimensional scanner with SU-8 flexures for a handheld confocal microscope.” 2018. Doctoral Dissertation, Montana State University. Accessed March 02, 2021. https://scholarworks.montana.edu/xmlui/handle/1/15090.

MLA Handbook (7^th Edition):

Liu, Tianbo. “MEMS 3-dimensional scanner with SU-8 flexures for a handheld confocal microscope.” 2018. Web. 02 Mar 2021.

Vancouver:

Liu T. MEMS 3-dimensional scanner with SU-8 flexures for a handheld confocal microscope. [Internet] [Doctoral dissertation]. Montana State University; 2018. [cited 2021 Mar 02]. Available from: https://scholarworks.montana.edu/xmlui/handle/1/15090.

Council of Science Editors:

Liu T. MEMS 3-dimensional scanner with SU-8 flexures for a handheld confocal microscope. [Doctoral Dissertation]. Montana State University; 2018. Available from: https://scholarworks.montana.edu/xmlui/handle/1/15090

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Open Access Theses and Dissertations