subject:(Microelectromechanical system Design AND construction)

Ryerson University

1. Eskandari, Amiraslan. Design and optimization of compliant mechanical amplifiers.

Degree: 2013, Ryerson University

URL: https://digital.library.ryerson.ca/islandora/object/RULA%3A2825

► Piezoelectric (PZT) actuators are micro motion generators capable of producing a high displacement resolution and low strain with high force outputs. However, due to their… (more)

Subjects/Keywords: Piezoelectric devices – Design and construction; Actuators – Design and construction; Microelectromechanical system – Design and construction

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APA (6^th Edition):

Eskandari, A. (2013). Design and optimization of compliant mechanical amplifiers. (Thesis). Ryerson University. Retrieved from https://digital.library.ryerson.ca/islandora/object/RULA%3A2825

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Eskandari, Amiraslan. “Design and optimization of compliant mechanical amplifiers.” 2013. Thesis, Ryerson University. Accessed October 17, 2019. https://digital.library.ryerson.ca/islandora/object/RULA%3A2825.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Eskandari, Amiraslan. “Design and optimization of compliant mechanical amplifiers.” 2013. Web. 17 Oct 2019.

Vancouver:

Eskandari A. Design and optimization of compliant mechanical amplifiers. [Internet] [Thesis]. Ryerson University; 2013. [cited 2019 Oct 17]. Available from: https://digital.library.ryerson.ca/islandora/object/RULA%3A2825.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Eskandari A. Design and optimization of compliant mechanical amplifiers. [Thesis]. Ryerson University; 2013. Available from: https://digital.library.ryerson.ca/islandora/object/RULA%3A2825

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Hong Kong University of Science and Technology

2. Sui, Wenshu. Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry.

Degree: 2017, Hong Kong University of Science and Technology

URL: https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html

► With the increasing opportunities offered by the consumer market, the microphone industry is more important than ever. In this work, the design parameters of capacitive… (more)

▼ With the increasing opportunities offered by the consumer market, the microphone industry is more important than ever. In this work, the design parameters of capacitive MEMS microphone was analyzed based on a general one-dimensional (1D) model. The theoretical sensitivity of the capacitive microphone is shown to be a nonlinear function of diaphragm radius (a), thickness (h), back chamber length (L), the residual stress (σ_rs) and some other parameters. Based on the general 1D model, a critical diaphragm radius was found located at the inflection point of the sensitivity - radius scaling analysis curve, which reflects the minimal equivalent spring constant of the microphone. We then modified this 1D model by revising the diaphragm as a composited layer that is fitted to the PolyMUMPs process. The modified 1D model was applied to predict the critical design parameters of the capacitive MEMS microphone to be fabricated by the PolyMUMPs process, and the critical diaphragm radius of 300 μm is obtained. The agreement between experimental result and theoretical prediction verifies our general 1D model, and proves the critical value can be used to guide the design of capacitive microphone. As parylene can be utilized in the MEMS microphone field such as the movable diaphragm and packaging material for its great dielectric properties and high coating uniformity, the properties of parylene should be further studied. In this work, a comparative study of the viscoelasticity of parylene C was presented by using Nanoindentation technology and Molecular Dynamics (MD) simulations. By applying different types of loadings on parylene C films at different temperatures and frequencies, the complex modulus, relaxation modulus and glass transition temperature (T_g) of the parylene C were obtained. The predicted T_g determined from the temperature-dependent density change in the MD model is consistent with the results in the measurements and previous works. Furthermore, with Time-Temperature Superposition Principle (TTSP), the master curve of parylene C were successfully determined on its creep and relaxation behaviour, for the first time, which is critical for the parylene reliability study of bio-MEMS devices.

Subjects/Keywords: Microelectromechanical systems; Microphone; Design and construction

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Sui, W. (2017). Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry. (Thesis). Hong Kong University of Science and Technology. Retrieved from https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Sui, Wenshu. “Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry.” 2017. Thesis, Hong Kong University of Science and Technology. Accessed October 17, 2019. https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Sui, Wenshu. “Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry.” 2017. Web. 17 Oct 2019.

Vancouver:

Sui W. Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2017. [cited 2019 Oct 17]. Available from: https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Sui W. Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry. [Thesis]. Hong Kong University of Science and Technology; 2017. Available from: https://doi.org/10.14711/thesis-991012532267203412 ; http://repository.ust.hk/ir/bitstream/1783.1-88939/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Ryerson University

3. [No author]. FPCB Actuator Driven Micromirror Based Availability Indicator and Laser Pattern Pointer.

Degree: 2015, Ryerson University

URL: https://digital.library.ryerson.ca/islandora/object/RULA%3A5718

► The thesis presents a FPCB (Flexible Printed Circuit Board) actuator driven micromirror and the laser pattern generating technology for availability indicator and laser pattern pointer.… (more)

Subjects/Keywords: Microelectromechanical systems – Micromachining; Mirrors – Design; Microelectromechanical systems – Design and construction; Flexible printed circuits – Design and construction

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APA (6^th Edition):

author], [. (2015). FPCB Actuator Driven Micromirror Based Availability Indicator and Laser Pattern Pointer. (Thesis). Ryerson University. Retrieved from https://digital.library.ryerson.ca/islandora/object/RULA%3A5718

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

author], [No. “FPCB Actuator Driven Micromirror Based Availability Indicator and Laser Pattern Pointer.” 2015. Thesis, Ryerson University. Accessed October 17, 2019. https://digital.library.ryerson.ca/islandora/object/RULA%3A5718.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

author], [No. “FPCB Actuator Driven Micromirror Based Availability Indicator and Laser Pattern Pointer.” 2015. Web. 17 Oct 2019.

Vancouver:

author] [. FPCB Actuator Driven Micromirror Based Availability Indicator and Laser Pattern Pointer. [Internet] [Thesis]. Ryerson University; 2015. [cited 2019 Oct 17]. Available from: https://digital.library.ryerson.ca/islandora/object/RULA%3A5718.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

author] [. FPCB Actuator Driven Micromirror Based Availability Indicator and Laser Pattern Pointer. [Thesis]. Ryerson University; 2015. Available from: https://digital.library.ryerson.ca/islandora/object/RULA%3A5718

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Oregon State University

4. Park, Sang-Bin. The use of electrochemical micromachining for making a microfloat valve.

Degree: MS, Industrial Engineering, 1999, Oregon State University

URL: http://hdl.handle.net/1957/33164

► Micromanufacturing consists of processes for producing structures, devices or systems with feature sizes measured in micrometers. Micromanufacturing began in the mid-1960's with microelectronics fabrication technology.… (more)

▼ Micromanufacturing consists of processes for producing structures, devices or systems with feature sizes measured in micrometers. Micromanufacturing began in the mid-1960's with microelectronics fabrication technology. In the 1980's, Micro-Electro-Mechanical Systems (MEMS) began to be developed, in which electrical and mechanical subsystems were integrated at small scales. More recently, Microtechnology-based Energy and Chemical Systems (MECS) have been developed that have led to improved heat and mass transfer in energy and chemical systems. At Oregon State University, new methods to fabricate MECS have been developed. One of the new methods involves microlamination – bonding thin strips of different materials together. This method has generated a high volume and low-cost approach to the production of high-aspect-ratio (height-to-width) structures. Past efforts to make microfloat valves using microlamination methods resulted in an 11:1 diodicity ratio. It was hypothesized that the valve had a ridge of redeposited material around the valve seat caused by the condensation and deposition of ablation ejecta during laser machining. The contribution of this thesis is the creation of a microfloat valve using an Electrochemical Micromachining (EMM) method. EMM methods are known to produce smooth surfaces, free of burrs or any other types of aspirates. Therefore, it was hypothesized that float valves made with EMM methods would improve valve performance. Four steps were involved in the creation of the microfloat valve: lamina formation, laminae registration, laminae bonding and component dissociation. A total of 9 laminae-some of which were made with 304 stainless steel 76.2 μm thick, others of which were made with 50.8 μm thick polyimide-made up the microfloat valve. Photolithography and EMM were used to form the lamina. Even though the laminae created by EMM were smaller in size than desired, the machined areas did not have redeposited material, and some areas had straight walls. In laminae registration, a two edge registration method was used. In the laminae bonding step, laminae were bonded by the adhesive method at 248°C under 135 kPa pressure for 13.5 minutes. In the component dissociation step, a capacitor dissociation method that was designed at OSU was used. Upon performance testing, the average diodicity ratio for the EMM valve was 12.45 over the range 0 kPa-450 kPa, indicating improved performance when compared to the Laser Ablation valve-which had an average 11.17 over the range 0 kPa-100 kPa. Microscope examination of valves revealed that statistically significant improvement in valve performance would require refinement of component dissociation methods. Advisors/Committee Members: Paul, Brian K. (advisor), Wilson, Rick (committee member).

Subjects/Keywords: Microelectromechanical systems – Design and construction

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APA (6^th Edition):

Park, S. (1999). The use of electrochemical micromachining for making a microfloat valve. (Masters Thesis). Oregon State University. Retrieved from http://hdl.handle.net/1957/33164

Chicago Manual of Style (16^th Edition):

Park, Sang-Bin. “The use of electrochemical micromachining for making a microfloat valve.” 1999. Masters Thesis, Oregon State University. Accessed October 17, 2019. http://hdl.handle.net/1957/33164.

MLA Handbook (7^th Edition):

Park, Sang-Bin. “The use of electrochemical micromachining for making a microfloat valve.” 1999. Web. 17 Oct 2019.

Vancouver:

Park S. The use of electrochemical micromachining for making a microfloat valve. [Internet] [Masters thesis]. Oregon State University; 1999. [cited 2019 Oct 17]. Available from: http://hdl.handle.net/1957/33164.

Council of Science Editors:

Park S. The use of electrochemical micromachining for making a microfloat valve. [Masters Thesis]. Oregon State University; 1999. Available from: http://hdl.handle.net/1957/33164

Hong Kong University of Science and Technology

5. Ramanan, Aditya. Design and characterisation of a microresonator with enhanced damping.

Degree: 2016, Hong Kong University of Science and Technology

URL: https://doi.org/10.14711/thesis-b1590161

► Advances in microfabrication technologies has changed the way society functions, giving rise to the microelectronics and the digital age we live in. Microresonators are a… (more)

▼ Advances in microfabrication technologies has changed the way society functions, giving rise to the microelectronics and the digital age we live in. Microresonators are a popular micro electro mechanical system (MEMS) used in many applications such as gyroscopes, oscillators and many micro sensors. They are structures that vibrate upon the application of a force at its resonant frequency. Their performance is characterized by a non-dimensional parameter known as the quality factor which is defined as the ratio of the input energy to the energy lost over one period of vibration. Among all the loss mechanisms, air damping, which is caused by constant collisions between air molecules and the resonator, dominates when the resonator vibrates in air or even in a low vacuum environment. For many applications, damping is a hindrance which people try to mitigate by operating in a high vacuum or by changing the structural design. For others, such as pressure sensing based on air damping, enhanced damping is however desirable as it could potentially increase the sensing range. Regardless of the objective, it is an area where research could be beneficial. In this thesis air damping in microresonators is explored and the impact of using a different shape such as a curved one instead of the standard parallel plate is studied. A 3D Monte Carlo simulation is performed to simulate the damping in the curved and straight structures following which a practical design is created to experimentally validate the effect suggested by the simulations. The devices are fabricated and tested both optically and electronically. A two-node driving and detection scheme is used owing to its simplicity and the signal output is used to obtain the quality factor of the various resonators fabricated. Preliminary results suggest that curved structures do indeed enhance the damping when compared to parallel plates that have the same number molecules entering the squeeze film domain. The difference can be as high as twice that of its equivalent straight structures, indicating the curved plates could be a viable design for damping enhancement.

Subjects/Keywords: Microresonators (Optoelectronics); Design and construction; Microelectromechanical systems; Damping (Mechanics)

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APA (6^th Edition):

Ramanan, A. (2016). Design and characterisation of a microresonator with enhanced damping. (Thesis). Hong Kong University of Science and Technology. Retrieved from https://doi.org/10.14711/thesis-b1590161

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Ramanan, Aditya. “Design and characterisation of a microresonator with enhanced damping.” 2016. Thesis, Hong Kong University of Science and Technology. Accessed October 17, 2019. https://doi.org/10.14711/thesis-b1590161.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Ramanan, Aditya. “Design and characterisation of a microresonator with enhanced damping.” 2016. Web. 17 Oct 2019.

Vancouver:

Ramanan A. Design and characterisation of a microresonator with enhanced damping. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2016. [cited 2019 Oct 17]. Available from: https://doi.org/10.14711/thesis-b1590161.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Ramanan A. Design and characterisation of a microresonator with enhanced damping. [Thesis]. Hong Kong University of Science and Technology; 2016. Available from: https://doi.org/10.14711/thesis-b1590161

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Hong Kong University of Science and Technology

6. Zhou, Zhijian. High frequency MEMS sensor for aero-acoustic measurements.

Degree: 2013, Hong Kong University of Science and Technology

URL: https://doi.org/10.14711/thesis-b1214709 ; http://repository.ust.hk/ir/bitstream/1783.1-7890/1/th_redirect.html

► Aero-acoustics, a branch of acoustics which studies noise generation via either turbulent fluid motion or aerodynamic forces interacting with surfaces, is a growing area and… (more)

▼ Aero-acoustics, a branch of acoustics which studies noise generation via either turbulent fluid motion or aerodynamic forces interacting with surfaces, is a growing area and has received fresh emphasis due to advances in air, ground and space transportation. While tests of a real object are possible, the setup is usually complicated and the results are easily corrupted by the ambient noise. Consequently, testing in relatively tightly-controlled laboratory settings using scaled models with reduced dimensions is preferred. However, when the dimensions are reduced by a factor of M, the amplitude and the bandwidth of the corresponding acoustic waves are increased by 10logM in decibels and M, respectively. Therefore microphones with a bandwidth of several hundreds of kHz and a dynamic range covering 40Pa to 4kPa are needed for aero-acoustic measurements. Micro-Electro-Mechanical-system (MEMS) microphones have been investigated for more than twenty years, and recently, the semiconductor industry has put more and more concentration on this area. Compared with all other working principles, due to their scaling characteristic, piezoresistive type microphones can achieve a higher sensitivity bandwidth (SBW) product, and in turn they are well suited for aero-acoustic measurements. In this thesis, two metal-induced-lateral-crystallized (MILC) polycrystalline silicon (poly-Si) based piezoresistive type MEMS microphones are designed and fabricated using surface micromachining and bulk micromachining techniques, respectively. These microphones are calibrated using an electrical spark generated shockwave (N-wave) source. For the surface micromachined sample, the measured static sensitivity is 0.4μV/V/Pa, dynamic sensitivity is 0.033μV/V/Pa and the frequency range starts from 100kHz with a first mode resonant frequency of 400kHz. For the bulk micromachined sample, the measured static sensitivity is 0.28μV/V/Pa, dynamic sensitivity is 0.33μV/V/Pa and the frequency range starts from 6kHz with a first mode resonant frequency of 715kHz.

Subjects/Keywords: Microphone; Aeroacoustics; Measurement; Microelectromechanical systems; Design and construction

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APA (6^th Edition):

Zhou, Z. (2013). High frequency MEMS sensor for aero-acoustic measurements. (Thesis). Hong Kong University of Science and Technology. Retrieved from https://doi.org/10.14711/thesis-b1214709 ; http://repository.ust.hk/ir/bitstream/1783.1-7890/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Zhou, Zhijian. “High frequency MEMS sensor for aero-acoustic measurements.” 2013. Thesis, Hong Kong University of Science and Technology. Accessed October 17, 2019. https://doi.org/10.14711/thesis-b1214709 ; http://repository.ust.hk/ir/bitstream/1783.1-7890/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Zhou, Zhijian. “High frequency MEMS sensor for aero-acoustic measurements.” 2013. Web. 17 Oct 2019.

Vancouver:

Zhou Z. High frequency MEMS sensor for aero-acoustic measurements. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2013. [cited 2019 Oct 17]. Available from: https://doi.org/10.14711/thesis-b1214709 ; http://repository.ust.hk/ir/bitstream/1783.1-7890/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Zhou Z. High frequency MEMS sensor for aero-acoustic measurements. [Thesis]. Hong Kong University of Science and Technology; 2013. Available from: https://doi.org/10.14711/thesis-b1214709 ; http://repository.ust.hk/ir/bitstream/1783.1-7890/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Ryerson University

7. Xue, Yuan. Development of a novel automated micro-assembly mechanism.

Degree: 2011, Ryerson University

URL: https://digital.library.ryerson.ca/islandora/object/RULA%3A928

► In this thesis a novel automated micro assembly mechanism is developed. The assembly mechanism utilizes repulsive-force actuators to flip surface-micromachined 2D structures out-of-plane and assemble… (more)

Subjects/Keywords: Microelectromechanical systems – Design and construction; Microfabrication; Mirrors – Industrial applications; Acceleration (Mechanics)

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APA (6^th Edition):

Xue, Y. (2011). Development of a novel automated micro-assembly mechanism. (Thesis). Ryerson University. Retrieved from https://digital.library.ryerson.ca/islandora/object/RULA%3A928

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Xue, Yuan. “Development of a novel automated micro-assembly mechanism.” 2011. Thesis, Ryerson University. Accessed October 17, 2019. https://digital.library.ryerson.ca/islandora/object/RULA%3A928.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Xue, Yuan. “Development of a novel automated micro-assembly mechanism.” 2011. Web. 17 Oct 2019.

Vancouver:

Xue Y. Development of a novel automated micro-assembly mechanism. [Internet] [Thesis]. Ryerson University; 2011. [cited 2019 Oct 17]. Available from: https://digital.library.ryerson.ca/islandora/object/RULA%3A928.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Xue Y. Development of a novel automated micro-assembly mechanism. [Thesis]. Ryerson University; 2011. Available from: https://digital.library.ryerson.ca/islandora/object/RULA%3A928

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

McGill University

8. Li, Min, 1977 Apr. 2-. Continuum design sensitivity analysis based force calculation in EM devices.

Degree: M. Eng., Department of Electrical and Computer Engineering., 2007, McGill University

URL: http://digitool.library.mcgill.ca/thesisfile111523.pdf

► The continuum design sensitivity analysis (CDSA) has been applied to the magnetostatic and electrostatic force calculation. This method allows the computation of the net loading… (more)

Subjects/Keywords: Microelectromechanical systems – Design and construction.

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APA (6^th Edition):

Li, Min, 1. A. 2. (2007). Continuum design sensitivity analysis based force calculation in EM devices. (Masters Thesis). McGill University. Retrieved from http://digitool.library.mcgill.ca/thesisfile111523.pdf

Chicago Manual of Style (16^th Edition):

Li, Min, 1977 Apr 2-. “Continuum design sensitivity analysis based force calculation in EM devices.” 2007. Masters Thesis, McGill University. Accessed October 17, 2019. http://digitool.library.mcgill.ca/thesisfile111523.pdf.

MLA Handbook (7^th Edition):

Li, Min, 1977 Apr 2-. “Continuum design sensitivity analysis based force calculation in EM devices.” 2007. Web. 17 Oct 2019.

Vancouver:

Li, Min 1A2. Continuum design sensitivity analysis based force calculation in EM devices. [Internet] [Masters thesis]. McGill University; 2007. [cited 2019 Oct 17]. Available from: http://digitool.library.mcgill.ca/thesisfile111523.pdf.

Council of Science Editors:

Li, Min 1A2. Continuum design sensitivity analysis based force calculation in EM devices. [Masters Thesis]. McGill University; 2007. Available from: http://digitool.library.mcgill.ca/thesisfile111523.pdf

Oregon State University

9. Urval, Roshan. CAE-based process designing of powder injection molding for thin-walled micro-fluidic device components.

Degree: MS, Industrial Engineering, 2004, Oregon State University

URL: http://hdl.handle.net/1957/31158

► Powder injection molding (PIM) is a net fabrication technique that combines the complex shape-forming ability of plastic injection molding, the precision of die-casting, and the… (more)

▼ Powder injection molding (PIM) is a net fabrication technique that combines the complex shape-forming ability of plastic injection molding, the precision of die-casting, and the material selection flexibility of powder metallurgy. For this study, the design issues related to PIM for fabrication of thin-walled high-aspect ratio geometries were investigated. These types of geometries are typical to the field of microtechnology-based energy and chemical systems (MECS). MECS are multi-scale (sizes in at least two or more different length scale regimes) fluidic devices working on the principle of heat and mass transfer through embedded micro and nanoscale features. Stainless steel was the material chosen for the investigations because of its high-thermal resistance and chemical inertness necessary for typical microfluidic applications. The investigations for the study were performed using the state-of-the-art computer aided engineering (CAE) design tool, PIMSolver®. The effect of reducing part thickness, on the process parameters including melt temperature, mold temperature, fill time and switch over position, during the mold-filling stage of the injection molding cycle were investigated. The design of experiments was conducted using the Taguchi method. It was seen that the process variability generally increased with reduction in thickness. Mold temperature played the most significant role in controlling the mold filling behavior as the part thickness reduced. The effects of reducing part thickness, process parameters, microscale surface geometry and delivery system design on the occurrence of defects like short shots were also studied. The operating range, in which the mold cavity was completely filled, was greatly reduced as the part thickness was reduced. The single edge gated delivery system designs, with single or branched runners, resulted in a completely formed part. The presence of microchannel features on the part surface increased the possibility of formation of defects like short shots and weld-lines when compared to a featureless part. The study explored some typical micro-fluidic geometries for fabrication using PIM. The final aspect of this study was the PIM experiments performed using a commercial stainless steel feedstock. Experiments were performed to study the mold-filling behavior of a thin, high aspect ratio part and also to study the effect of varying processing conditions on the mold-filling behavior. These experiments also provided correspondence to the mold filling behavior simulated using PIMSolver®. The PIMSolver® closely predicted the mold-filling patterns as seen in the experiments performed under similar molding conditions. The study was successful in laying down a quantitative framework for using PIM to fabricate micro-fluidic devices. Advisors/Committee Members: Atre, Sundar V. (advisor), Jovanovich, Goran (committee member).

Subjects/Keywords: Microelectromechanical systems – Design and construction

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Urval, R. (2004). CAE-based process designing of powder injection molding for thin-walled micro-fluidic device components. (Masters Thesis). Oregon State University. Retrieved from http://hdl.handle.net/1957/31158

Chicago Manual of Style (16^th Edition):

Urval, Roshan. “CAE-based process designing of powder injection molding for thin-walled micro-fluidic device components.” 2004. Masters Thesis, Oregon State University. Accessed October 17, 2019. http://hdl.handle.net/1957/31158.

MLA Handbook (7^th Edition):

Urval, Roshan. “CAE-based process designing of powder injection molding for thin-walled micro-fluidic device components.” 2004. Web. 17 Oct 2019.

Vancouver:

Urval R. CAE-based process designing of powder injection molding for thin-walled micro-fluidic device components. [Internet] [Masters thesis]. Oregon State University; 2004. [cited 2019 Oct 17]. Available from: http://hdl.handle.net/1957/31158.

Council of Science Editors:

Urval R. CAE-based process designing of powder injection molding for thin-walled micro-fluidic device components. [Masters Thesis]. Oregon State University; 2004. Available from: http://hdl.handle.net/1957/31158

Oregon State University

10. Terhaar, Tyson J. Comparison of two microvalve designs fabricated in mild steel using microprojection welding and capacitive dissociation.

Degree: MS, Industrial Engineering, 1998, Oregon State University

URL: http://hdl.handle.net/1957/34138

► Since the dawn of the computer age, there has been a push to create miniature devices. These devices were initially integrated circuit (IC) devices to… (more)

▼ Since the dawn of the computer age, there has been a push to create miniature devices. These devices were initially integrated circuit (IC) devices to perform calculations for computers. As the technology progressed, the scope of the devices diverged to included microelectromechanical (MEMS) devices, meaning that the devices perform mechanical movements via electrical actuation. More recently, a new generation of devices has evolved called microtechnology-based energy and chemical systems (MECS). MECS may employ MEMS technology, however the systems are not designed to produce only mechanical movement. MECS deal with heat and mass transfer, the basic processes used in energy, chemical and biological systems, in the mesoscale realm. Mesoscale devices range from the size of a sugar cube to the size of a human fist. The possibilities of MECS have not been realized. Heating and cooling systems, chemical mixing/distribution, and locking systems are all potential applications. The devices require: 1) revolutionary design, accounting for the scaling effects on device performance; 2) new fabrication technologies for the creation of these designs; and 3) good material properties for mechanical and chemical interactions. Fabrication requirements for MECS are different than for MEMS in that MECS generally require non-silicon metals. Metal microlamination (MML) has been introduced as a general practice for meeting the fabrication requirements for MECS. Prior MML fabrication methods have emphasized the use of diffusion bonding, soldering, or brazing techniques. This thesis will introduce: 1) a novel microflapper valve design fabricated in mild steel using a novel microprojection welding technique; 2) a novel microfloat valve design fabricated in mild steel using a novel capacitive dissociation process for creating free floating geometries. The devices are characterized by comparing actual flow rates to theoretical flow rates of equivalent orifice sizes. Preliminary results show that the microfloat valve achieved an average diodicity (free flow versus leakage rate) ratio of 11.19, while the microflapper valve achieved an average diodicity ratio of 4.08. The theoretical orifice sizes of the microfloat and microflapper valves are 0.629 mm and 0.611 mm respectively. These results suggest that the float valve is the superior design. Advisors/Committee Members: Paul, Brian K. (advisor), Brown, Terry (committee member).

Subjects/Keywords: Microelectromechanical systems – Design and construction

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APA (6^th Edition):

Terhaar, T. J. (1998). Comparison of two microvalve designs fabricated in mild steel using microprojection welding and capacitive dissociation. (Masters Thesis). Oregon State University. Retrieved from http://hdl.handle.net/1957/34138

Chicago Manual of Style (16^th Edition):

Terhaar, Tyson J. “Comparison of two microvalve designs fabricated in mild steel using microprojection welding and capacitive dissociation.” 1998. Masters Thesis, Oregon State University. Accessed October 17, 2019. http://hdl.handle.net/1957/34138.

MLA Handbook (7^th Edition):

Terhaar, Tyson J. “Comparison of two microvalve designs fabricated in mild steel using microprojection welding and capacitive dissociation.” 1998. Web. 17 Oct 2019.

Vancouver:

Terhaar TJ. Comparison of two microvalve designs fabricated in mild steel using microprojection welding and capacitive dissociation. [Internet] [Masters thesis]. Oregon State University; 1998. [cited 2019 Oct 17]. Available from: http://hdl.handle.net/1957/34138.

Council of Science Editors:

Terhaar TJ. Comparison of two microvalve designs fabricated in mild steel using microprojection welding and capacitive dissociation. [Masters Thesis]. Oregon State University; 1998. Available from: http://hdl.handle.net/1957/34138

Hong Kong University of Science and Technology

11. Miao, Zhuonan. Design and fabrication of micro flow sensors using CMOS-MEMS technology.

Degree: 2013, Hong Kong University of Science and Technology

URL: https://doi.org/10.14711/thesis-b1255622 ; http://repository.ust.hk/ir/bitstream/1783.1-92665/1/th_redirect.html

► Energy-efficient building (EEB) is becoming increasingly important in tackling energy shortage issue. However, the market adoption of EEB is hindered by the high cost of… (more)

Subjects/Keywords: Detectors; Design and construction; Microelectromechanical systems; Metal oxide semiconductors, Complementary

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APA (6^th Edition):

Miao, Z. (2013). Design and fabrication of micro flow sensors using CMOS-MEMS technology. (Thesis). Hong Kong University of Science and Technology. Retrieved from https://doi.org/10.14711/thesis-b1255622 ; http://repository.ust.hk/ir/bitstream/1783.1-92665/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Miao, Zhuonan. “Design and fabrication of micro flow sensors using CMOS-MEMS technology.” 2013. Thesis, Hong Kong University of Science and Technology. Accessed October 17, 2019. https://doi.org/10.14711/thesis-b1255622 ; http://repository.ust.hk/ir/bitstream/1783.1-92665/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Miao, Zhuonan. “Design and fabrication of micro flow sensors using CMOS-MEMS technology.” 2013. Web. 17 Oct 2019.

Vancouver:

Miao Z. Design and fabrication of micro flow sensors using CMOS-MEMS technology. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2013. [cited 2019 Oct 17]. Available from: https://doi.org/10.14711/thesis-b1255622 ; http://repository.ust.hk/ir/bitstream/1783.1-92665/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Miao Z. Design and fabrication of micro flow sensors using CMOS-MEMS technology. [Thesis]. Hong Kong University of Science and Technology; 2013. Available from: https://doi.org/10.14711/thesis-b1255622 ; http://repository.ust.hk/ir/bitstream/1783.1-92665/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Drexel University

12. Hamid, Qudus. Combining fabrication and surface modification techniques to develop cell-laden microfluidic devices.

Degree: 2014, Drexel University

URL: http://hdl.handle.net/1860/4542

►

Micro-Electro-Mechanical Systems (MEMS) technologies illustrate the potential for many applications in the field of tissue engineering, regenerative medicine, and life sciences. The fabrication of tissue… (more)

▼

Micro-Electro-Mechanical Systems (MEMS) technologies illustrate the potential for many applications in the field of tissue engineering, regenerative medicine, and life sciences. The fabrication of tissue models integrates the multidisciplinary field of life sciences and engineering. Presently, monolayer cell cultures are frequently used to investigate potential anti-cancer agents. These monolayer cultures give limited feedback on the effects of the micro-environment. A micro-environment, which mimics that of the target tissue, will eliminate the limitations of the traditional mainstays of tissue research. The fabrication of such micro-environment requires a thorough investigation of the actual target organ and/or tissue. Microfabrication techniques are utilized to develop microfluidic channels for continuous nutrition supply to cells inside a micro-environment. The ability of cells to build tissues and maintain tissue-specific functions depends on the interaction between cells and the extracellular matrix (ECM). Three-dimensional tissue platforms are rapidly becoming the method of choice for quantification of the heterogeneity of cell populations for many diagnostic and drug therapy applications. Microfluidic sensors and the integration of sensors with microfluidic systems are often described as miniature versions of their macro-scale counterparts. This technology presents unique advantages for handling costly and difficult-to-obtain samples and reagents as a typical system requires between 100 nL to 10µL of working fluid. The fabrication of a fully functional cell-based biosensor utilizes both biological patterning and microfabrication techniques. SU-8 is a popular photosensitive epoxy-based polymer in MEMS. The patterning of bare SU-8 alone does not provide the appropriate ECM necessary to develop microsystems for biological applications. Manipulating the chemical composition of SU-8 will enhance the biological compatibility, giving the fabricated constructs the appropriate ECM needed to promote a functional tissue array. The objective of this research is to investigate the integration of maskless fabrication, direct cell deposition, and surface modification techniques to engineer cell-laden microfluidics. This thesis presents advances in additive manufacturing techniques, the utilization of plasma chemistry to enhance surface functionalization, and manipulation of photo-polymerization to investigate new approaches to assemble cell-laden microfluidics.

Ph.D., Mechanical Engineering and Mechanics – Drexel University, 2014

Advisors/Committee Members: Sun, Wei 1957 April 17-, College of Engineering.

Subjects/Keywords: Mechanical engineering; Microelectromechanical systems – Design and construction; Tissue engineering – Research

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APA (6^th Edition):

Hamid, Q. (2014). Combining fabrication and surface modification techniques to develop cell-laden microfluidic devices. (Thesis). Drexel University. Retrieved from http://hdl.handle.net/1860/4542

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Hamid, Qudus. “Combining fabrication and surface modification techniques to develop cell-laden microfluidic devices.” 2014. Thesis, Drexel University. Accessed October 17, 2019. http://hdl.handle.net/1860/4542.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Hamid, Qudus. “Combining fabrication and surface modification techniques to develop cell-laden microfluidic devices.” 2014. Web. 17 Oct 2019.

Vancouver:

Hamid Q. Combining fabrication and surface modification techniques to develop cell-laden microfluidic devices. [Internet] [Thesis]. Drexel University; 2014. [cited 2019 Oct 17]. Available from: http://hdl.handle.net/1860/4542.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Hamid Q. Combining fabrication and surface modification techniques to develop cell-laden microfluidic devices. [Thesis]. Drexel University; 2014. Available from: http://hdl.handle.net/1860/4542

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Cape Peninsula University of Technology

13. Zhang, Rui. Mechanics of micromachined bridge-type accelerometer .

Degree: 2005, Cape Peninsula University of Technology

URL: http://etd.cput.ac.za/handle/20.500.11838/1285

► Having simple structure and high sensitivity, micro accelerometer is a type of popular transducer used to measure the acceleration in a great variety of conditions.… (more)

Subjects/Keywords: Microelectromechanical systems – Design and construction; Accelerometers – Design and construction

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APA (6^th Edition):

Zhang, R. (2005). Mechanics of micromachined bridge-type accelerometer . (Thesis). Cape Peninsula University of Technology. Retrieved from http://etd.cput.ac.za/handle/20.500.11838/1285

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Zhang, Rui. “Mechanics of micromachined bridge-type accelerometer .” 2005. Thesis, Cape Peninsula University of Technology. Accessed October 17, 2019. http://etd.cput.ac.za/handle/20.500.11838/1285.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Zhang, Rui. “Mechanics of micromachined bridge-type accelerometer .” 2005. Web. 17 Oct 2019.

Vancouver:

Zhang R. Mechanics of micromachined bridge-type accelerometer . [Internet] [Thesis]. Cape Peninsula University of Technology; 2005. [cited 2019 Oct 17]. Available from: http://etd.cput.ac.za/handle/20.500.11838/1285.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Zhang R. Mechanics of micromachined bridge-type accelerometer . [Thesis]. Cape Peninsula University of Technology; 2005. Available from: http://etd.cput.ac.za/handle/20.500.11838/1285

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

McGill University

14. Wan, Weijie, 1982-. Simulation and optimization of MEMS actuators and tunable capacitors.

Degree: M. Eng., Department of Electrical and Computer Engineering., 2006, McGill University

URL: http://digitool.library.mcgill.ca/thesisfile99798.pdf

► Micro-Electro-Mechanical Systems (MEMS) have played an important role in modern microelectronics, thermal, mechanical and hybrid systems. MEMS technology is a very promising means that might… (more)

Subjects/Keywords: Microelectromechanical systems – Design and construction.; Microactuators – Design and construction.

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APA (6^th Edition):

Wan, Weijie, 1. (2006). Simulation and optimization of MEMS actuators and tunable capacitors. (Masters Thesis). McGill University. Retrieved from http://digitool.library.mcgill.ca/thesisfile99798.pdf

Chicago Manual of Style (16^th Edition):

Wan, Weijie, 1982-. “Simulation and optimization of MEMS actuators and tunable capacitors.” 2006. Masters Thesis, McGill University. Accessed October 17, 2019. http://digitool.library.mcgill.ca/thesisfile99798.pdf.

MLA Handbook (7^th Edition):

Wan, Weijie, 1982-. “Simulation and optimization of MEMS actuators and tunable capacitors.” 2006. Web. 17 Oct 2019.

Vancouver:

Wan, Weijie 1. Simulation and optimization of MEMS actuators and tunable capacitors. [Internet] [Masters thesis]. McGill University; 2006. [cited 2019 Oct 17]. Available from: http://digitool.library.mcgill.ca/thesisfile99798.pdf.

Council of Science Editors:

Wan, Weijie 1. Simulation and optimization of MEMS actuators and tunable capacitors. [Masters Thesis]. McGill University; 2006. Available from: http://digitool.library.mcgill.ca/thesisfile99798.pdf

Cape Peninsula University of Technology

15. Wang, Lin. Mechanics of micro capacitive accelerometer with u-shape cantilever beam .

Degree: 2005, Cape Peninsula University of Technology

URL: http://etd.cput.ac.za/handle/20.500.11838/2616

► Due to an increasing in industrial micromation need in recent years, the use of micro accelerometers has been highly increased. Consecutively, this has promoted research… (more)

▼ Due to an increasing in industrial micromation need in recent years, the use of micro accelerometers has been highly increased. Consecutively, this has promoted research activities in this field; capacitive accelerometers also have got high concern at large. As a research project of the Kentron in South Africa, this thesis deals with a theoretical model for a one-dimensional micro capacitive accelerometer with U-shape cantilever beam. The properties of the small angle tilted-plate capacitor have been analyzed; the capacitance equation and electrostatic force equation of this kind capacitor have been derived. The sensing element of this accelerometer consists of an inertial mass connected with two cantilever beams. The vibration modes analysis to the sensing element was accomplished by using CoventorWare2004's MemMech module, the result indicates that the main vibration mode can cause the capacitance change observably and the effect of the other modes to the capacitance can be ignored, which satisfied the purpose of the design. In the process of deriving the linearizing acceleration equation, the angle of the inertial mass caused by the deformation of the U-shape cantilever beam was taken into account as well as the electrostatic force between the two electrodes, thus the more precise acceleration linear equation was obtained. The sensitivity equation was derived through the acceleration linear equation, the relationship between the main parameters of the system and the sensitivity has been analyzed. The differential structure of this micro capacitive accelerometer was also analyzed; the linearizing acceleration equation and sensitivity equation of this kind structure were derived, it has been proven that the sensitivity of this structure is twice than the normal structure approximately. The maximum detectable signal was obtained in terms of the fracture strength of the cantilever beam and the maximum displacement of the inertial mass. The minimum detectable signal was obtained in terms of the thermal noise analysis. In the process of the dynamic analysis, the forced vibration produced by the sinusoidal periodic force and sinusoidal periodic moment was analyzed and the transient capacitance equation was derived, this proved the system has good dynamic character in theory. The system was simulated and analyzed by using CoventorWare2004's Saber module. The initial capacitance analysis indicates the relationship between the voltage and the initial capacitance, the result is close to the analytic model. The resonance frequencies analysis indicates that the main dimensions of the sensing element can determine the resonance frequencies and each vibration mode's sequence, the initial dimensions of the sensing element was proved reasonable by analyzing. Sensitivity analysis and Monte Carlo analysis indicate the effect of the sensing element's normal manufacturing tolerance to the system's frequency is small. Impact of plate curvature analysis indicates the effect of the inertial mass's… Advisors/Committee Members: Sun, Bohua (advisor).

Subjects/Keywords: Microelectromechanical systems – Design and construction; Accelerometers – Design and construction

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Wang, L. (2005). Mechanics of micro capacitive accelerometer with u-shape cantilever beam . (Thesis). Cape Peninsula University of Technology. Retrieved from http://etd.cput.ac.za/handle/20.500.11838/2616

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Wang, Lin. “Mechanics of micro capacitive accelerometer with u-shape cantilever beam .” 2005. Thesis, Cape Peninsula University of Technology. Accessed October 17, 2019. http://etd.cput.ac.za/handle/20.500.11838/2616.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Wang, Lin. “Mechanics of micro capacitive accelerometer with u-shape cantilever beam .” 2005. Web. 17 Oct 2019.

Vancouver:

Wang L. Mechanics of micro capacitive accelerometer with u-shape cantilever beam . [Internet] [Thesis]. Cape Peninsula University of Technology; 2005. [cited 2019 Oct 17]. Available from: http://etd.cput.ac.za/handle/20.500.11838/2616.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Wang L. Mechanics of micro capacitive accelerometer with u-shape cantilever beam . [Thesis]. Cape Peninsula University of Technology; 2005. Available from: http://etd.cput.ac.za/handle/20.500.11838/2616

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

University of New Mexico

16. Abbas, Khawar. Design fabrication and calibration of MEMS actuators for in-situ materials testing.

Degree: Mechanical Engineering, 2009, University of New Mexico

URL: http://hdl.handle.net/1928/7638

► Many MEMS devices utilize thin metallic films as mechanical structures. The elastic and plastic properties of these thin films (thickness < 1μm) are significantly different… (more)

Subjects/Keywords: Microactuators – Design and construction; Microactuators – Calibration; Metallic films – Mechanical properties – Testing; Microelectromechanical systems – Materials – Testing.

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APA (6^th Edition):

Abbas, K. (2009). Design fabrication and calibration of MEMS actuators for in-situ materials testing. (Masters Thesis). University of New Mexico. Retrieved from http://hdl.handle.net/1928/7638

Chicago Manual of Style (16^th Edition):

Abbas, Khawar. “Design fabrication and calibration of MEMS actuators for in-situ materials testing.” 2009. Masters Thesis, University of New Mexico. Accessed October 17, 2019. http://hdl.handle.net/1928/7638.

MLA Handbook (7^th Edition):

Abbas, Khawar. “Design fabrication and calibration of MEMS actuators for in-situ materials testing.” 2009. Web. 17 Oct 2019.

Vancouver:

Abbas K. Design fabrication and calibration of MEMS actuators for in-situ materials testing. [Internet] [Masters thesis]. University of New Mexico; 2009. [cited 2019 Oct 17]. Available from: http://hdl.handle.net/1928/7638.

Council of Science Editors:

Abbas K. Design fabrication and calibration of MEMS actuators for in-situ materials testing. [Masters Thesis]. University of New Mexico; 2009. Available from: http://hdl.handle.net/1928/7638

Michigan State University

17. Merced, Emmanuell J. Design, fabrication, characterization, and control of VO2-based micro-electro-mechanical actuators.

Degree: 2014, Michigan State University

URL: http://etd.lib.msu.edu/islandora/object/etd:2505

►

Thesis Ph. D. Michigan State University. Electrical Engineering - Doctor of Philosophy 2014.

In this work, a vanadium dioxide (VO2)-based micro-electro-mechanical actuator has been successfully… (more)

Subjects/Keywords: Actuators – Design and construction; Microelectromechanical systems; Vanadium oxide; Control theory; Electrical engineering; Materials Science

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APA (6^th Edition):

Merced, E. J. (2014). Design, fabrication, characterization, and control of VO2-based micro-electro-mechanical actuators. (Thesis). Michigan State University. Retrieved from http://etd.lib.msu.edu/islandora/object/etd:2505

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Merced, Emmanuell J. “Design, fabrication, characterization, and control of VO2-based micro-electro-mechanical actuators.” 2014. Thesis, Michigan State University. Accessed October 17, 2019. http://etd.lib.msu.edu/islandora/object/etd:2505.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Merced, Emmanuell J. “Design, fabrication, characterization, and control of VO2-based micro-electro-mechanical actuators.” 2014. Web. 17 Oct 2019.

Vancouver:

Merced EJ. Design, fabrication, characterization, and control of VO2-based micro-electro-mechanical actuators. [Internet] [Thesis]. Michigan State University; 2014. [cited 2019 Oct 17]. Available from: http://etd.lib.msu.edu/islandora/object/etd:2505.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Merced EJ. Design, fabrication, characterization, and control of VO2-based micro-electro-mechanical actuators. [Thesis]. Michigan State University; 2014. Available from: http://etd.lib.msu.edu/islandora/object/etd:2505

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Northeastern University

18. Walther-Grant, Eric. Analysis of the combined mode resonance in aluminum nitride MEMS resonators.

Degree: MS, Department of Electrical and Computer Engineering, 2016, Northeastern University

URL: http://hdl.handle.net/2047/D20195508

► Aluminum Nitride (AlN) contour-extensional mode resonators (CMRs) have shown great promise for use in a wide range of technologies due to their scalability and the… (more)

Subjects/Keywords: AlN; contour mode; MEMS; piezoelectric properties; Piezoelectric devices; Design and construction; Resonators; Design and construction; Resonance; Mathematical models; Microelectromechanical systems; Design and construction; Aluminum nitride; Finite element method

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APA (6^th Edition):

Walther-Grant, E. (2016). Analysis of the combined mode resonance in aluminum nitride MEMS resonators. (Masters Thesis). Northeastern University. Retrieved from http://hdl.handle.net/2047/D20195508

Chicago Manual of Style (16^th Edition):

Walther-Grant, Eric. “Analysis of the combined mode resonance in aluminum nitride MEMS resonators.” 2016. Masters Thesis, Northeastern University. Accessed October 17, 2019. http://hdl.handle.net/2047/D20195508.

MLA Handbook (7^th Edition):

Walther-Grant, Eric. “Analysis of the combined mode resonance in aluminum nitride MEMS resonators.” 2016. Web. 17 Oct 2019.

Vancouver:

Walther-Grant E. Analysis of the combined mode resonance in aluminum nitride MEMS resonators. [Internet] [Masters thesis]. Northeastern University; 2016. [cited 2019 Oct 17]. Available from: http://hdl.handle.net/2047/D20195508.

Council of Science Editors:

Walther-Grant E. Analysis of the combined mode resonance in aluminum nitride MEMS resonators. [Masters Thesis]. Northeastern University; 2016. Available from: http://hdl.handle.net/2047/D20195508

IUPUI

19. Yuanzhi, Cao. The development of polystyrene based microfluidic gas generation system.

Degree: 2015, IUPUI

URL: http://hdl.handle.net/1805/7916

►

Indiana University-Purdue University Indianapolis (IUPUI)

The purpose of this thesis is to use experimental methods to seek deeper understanding and better performance in the self-circulating… (more)

▼

Indiana University-Purdue University Indianapolis (IUPUI)

The purpose of this thesis is to use experimental methods to seek deeper understanding and better performance in the self-circulating self-regulating microfluidic gas generator initially developed in Dr. Zhu’s group, by changing the major features and dimensions in the reaction channel of the device. In order to effectively conduct experiments described above, a microfabrication method that is capable of making new microfluidic devices with low cost, short time period, as well as relatively high accuracy was needed first. Developing such a fabrication method is the major part of this thesis. We initially used patterned polymer films and glass slide, and bonded them together by sequentially aligning and stacking them into a microfluidic device with patterned double-sided tapes. Later we developed a more advanced microfabrication method that used only patterned polystyrene (PS) films. The patterned PS films were obtained from a digital cutter and they were bonded into a microfluidic device by thermopress bonding method that required no heterogeneous bonding agents. This new method did not need manual assembly which greatly improved its precision (~ 100 µm), and it used only PS as device material that has favorable surface wetting property for microfluidics applications. In order to find the optimized microfluidic channel design to improve gas generating performance, we've designed and fabricated microfluidic devices with different channel dimensions using the PS fabrication method. Based on the gas generation testing results of those devices, we were able to come up with the optimal dimensions for the reaction channel that had the best gas generation performance. To obtain a more fundamental understanding about the working mechanism of our device and its bubble dynamics, we have conducted ultrafast X-ray imaging test at Advanced Photon Source (APS), Argonne National Laboratory. High speed (100 KHz) phase contrast images were captured that allowed us to observe directly inside the reaction channel on the cross section view during the self-circulating catalytic reaction. The images provided us with lots of insightful information that in turn helped the dimensional improvement for the microchannel design. The 100 KHz high speed images also gave us useful information about the dynamics of bubble development on a catalyst bed, such as growth and merging of the bubbles.

Advisors/Committee Members: Zhu, Likun, Yu, Huidan, El-Mounayri, Hazim A., Anwar, Sohel.

Subjects/Keywords: Microfluidics, Gas generation system, polystyrene; Microfluidics – Research; Microfluidic devices – Research; Polystyrene – Research; Microfabrication – Research; Microelectromechanical systems – Research; Electromechanical devices – Design and construction; Hydrodynamics; Mixing – Research; Gases – Research; Bubbles – Dynamics; Catalysis – Research

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APA (6^th Edition):

Yuanzhi, C. (2015). The development of polystyrene based microfluidic gas generation system. (Thesis). IUPUI. Retrieved from http://hdl.handle.net/1805/7916

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Yuanzhi, Cao. “The development of polystyrene based microfluidic gas generation system.” 2015. Thesis, IUPUI. Accessed October 17, 2019. http://hdl.handle.net/1805/7916.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Yuanzhi, Cao. “The development of polystyrene based microfluidic gas generation system.” 2015. Web. 17 Oct 2019.

Vancouver:

Yuanzhi C. The development of polystyrene based microfluidic gas generation system. [Internet] [Thesis]. IUPUI; 2015. [cited 2019 Oct 17]. Available from: http://hdl.handle.net/1805/7916.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Yuanzhi C. The development of polystyrene based microfluidic gas generation system. [Thesis]. IUPUI; 2015. Available from: http://hdl.handle.net/1805/7916

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

University of New Mexico

20. Abbas, Khawar. Characterization of the mechanical properties of freestanding platinum thin films.

Degree: Mechanical Engineering, 2013, University of New Mexico

URL: http://hdl.handle.net/1928/23078

► Many MEMS devices utilize nanocrystalline thin metallic films as mechanical structures, in particular, micro switching devices where these films are used as Ohmic contacts. But… (more)

▼ Many MEMS devices utilize nanocrystalline thin metallic films as mechanical structures, in particular, micro switching devices where these films are used as Ohmic contacts. But the elastic and plastic properties of these thin films (thickness < 1μm) are significantly different from those of the bulk material. At these scales the volume fraction of material defects such as: grain boundaries, dislocations and interstitials become quite significant and become a chief contributor to the physical and mechanical material properties. In order to effectively design MEMS devices it is important that these material properties are explored and mechanical behavior of the structure they form be characterized. Popular thin film materials used in MEMS devices are Aluminum (Al), Copper (Cu), Nickel (Ni) and Gold (Au). Platinum has traditionally gained acceptance into the MEMS industry because of its chemical inertness and high temperature stability. However the mechanical properties of platinum remains the least exploited. Platinum has a high Youngs Modulus (164 GPa, for bulk) and high melting temperature (1768 °C) and therefore can be used as a 'thin film' structure (cantilever, a bridge or a membrane) in high temperature environments with high resistance to mechanical failure. The physical size of these thin film structure make it very difficult to handle them and employ traditional mechanical testing methodologies and techniques and therefore require custom test platforms. One such recently developed platform is presented in this dissertation. The test platform is comprised of a microfabricated cascaded thermal actuator system and test specimen. The cascaded thermal actuator system is capable of providing tens of microns of displacement and tens of milli-Newton forces simultaneously while applying a relatively low temperature gradient across the test specimen. The dimensions of the platform make its use possible in both the SEM/TEM environments and on a probe station under an optical microscope. Digital image correlation was used to obtain similar accuracy (~10 nm) for displacement measurements in both an SEM and under an optical microscope. The mechanical behavior of nanocrystalline thin film structure has been the subject of extensive research in recent years. Mainly, the focus has been on the effects of the film thickness with only a few researchers mentioning anything about the grain sizes of their polycrystalline films. The effect of thin film cross sectional morphology on the mechanical behavior of a thin film structure has never been studied directly. Presented in this dissertation is experimental evidence that these thin film structures are composite structures of various grain morphologies and the overall mechanical behavior exhibited by them is the combined effect of individual contributions of each of these grain morphologies.' Advisors/Committee Members: Leseman, Zayd, Shen, Yu-Lin, Hall, Christopher, Hossein-Zadeh, Mani.

Subjects/Keywords: Metallic films – Mechanical properties – Testing; Platinum – Mechanical properties – testing; Microactuators; Nanostructured materials – Testing; Microelectromechanical systems – Design and construction.

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APA (6^th Edition):

Abbas, K. (2013). Characterization of the mechanical properties of freestanding platinum thin films. (Doctoral Dissertation). University of New Mexico. Retrieved from http://hdl.handle.net/1928/23078

Chicago Manual of Style (16^th Edition):

Abbas, Khawar. “Characterization of the mechanical properties of freestanding platinum thin films.” 2013. Doctoral Dissertation, University of New Mexico. Accessed October 17, 2019. http://hdl.handle.net/1928/23078.

MLA Handbook (7^th Edition):

Abbas, Khawar. “Characterization of the mechanical properties of freestanding platinum thin films.” 2013. Web. 17 Oct 2019.

Vancouver:

Abbas K. Characterization of the mechanical properties of freestanding platinum thin films. [Internet] [Doctoral dissertation]. University of New Mexico; 2013. [cited 2019 Oct 17]. Available from: http://hdl.handle.net/1928/23078.

Council of Science Editors:

Abbas K. Characterization of the mechanical properties of freestanding platinum thin films. [Doctoral Dissertation]. University of New Mexico; 2013. Available from: http://hdl.handle.net/1928/23078

Rochester Institute of Technology

21. Barron, Lance. High-reflectance, sputter-deposited aluminum alloy thin thin films for micro-electro-mechanical systems.

Degree: Center for Materials Science and Engineering, 2005, Rochester Institute of Technology

URL: https://scholarworks.rit.edu/theses/5760

► This study comprises an investigation of highly reflective thin film for microelectro- mechanical systems (MEMS) consisting of reflective components. For these applications, the desired film… (more)

▼ This study comprises an investigation of highly reflective thin film for microelectro- mechanical systems (MEMS) consisting of reflective components. For these applications, the desired film system must have (1) low stress, (2) high specular reflectivity, (3) improved nano-hardness relative to pure aluminum, (4) compatibility with traditional semiconductor fabrication techniques. This study is an in depth investigation of both the specular reflectance and mechanical properties of thin film reflectors formed by low-thermal (<200°C) processing. Six different aluminum films (containing Cu, Ti, Cr) were chosen based on extensive literature research. Each film was characterized by a variety of optical, electrical, and mechanical analytical techniques to obtain data relating microstructure to the film’s reflectivity and mechanical properties. A complete dielectric function for each deposited aluminum alloy has been developed utilizing Drude-Lorentz parameters and effective media approximations (EMA) to account for film surface topography. Results show that copper solute addition generate films that maintain much of the bulk reflectance of pure aluminum while refining surface morphology to create a more specular surface consisting of smaller, more uniform grains. Electron and atomic force microscopy and x-ray diffraction studies reveal that copper inclusion into the aluminum lattice cause both a reduction in the preferred orientation of the film and change in the lattice parameter. Copper concentrations of 1.0% and above lead to spatial variation in copper content within the films, with copper precipitating out of solution. Film hardness, resistivity, and stress increase as a function of copper content, with the absolute magnitude of stress being acceptable for MEMS applications. The addition of titanium and chromium to Al-1.0%Cu films cause further microstructure refinement as well as increased stress, resistivity, and hardness. Al-2.0%Ti-1.0%Cu and Al-2.0%Cr-1.0%Cu exhibit reflectivity spectra that differ significantly in both inter- and intraband absorption from that of pure aluminum. The Drude-Lorentz/EMA dielectric function model has been successfully applied to all alloy films explaining the observed reflectivity and showing an excellent agreement between measured and Drude resistivity. This study will enable to model and predict the optical response of thin films in terms of their intrinsic and extrinsic properties Advisors/Committee Members: Kurinec, Santosh, Gupta, S., Ewbank, Dale.

Subjects/Keywords: Thin films; Aluminum alloys; Microelectromechanical systems; Design and construction

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APA (6^th Edition):

Barron, L. (2005). High-reflectance, sputter-deposited aluminum alloy thin thin films for micro-electro-mechanical systems. (Thesis). Rochester Institute of Technology. Retrieved from https://scholarworks.rit.edu/theses/5760

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Barron, Lance. “High-reflectance, sputter-deposited aluminum alloy thin thin films for micro-electro-mechanical systems.” 2005. Thesis, Rochester Institute of Technology. Accessed October 17, 2019. https://scholarworks.rit.edu/theses/5760.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Barron, Lance. “High-reflectance, sputter-deposited aluminum alloy thin thin films for micro-electro-mechanical systems.” 2005. Web. 17 Oct 2019.

Vancouver:

Barron L. High-reflectance, sputter-deposited aluminum alloy thin thin films for micro-electro-mechanical systems. [Internet] [Thesis]. Rochester Institute of Technology; 2005. [cited 2019 Oct 17]. Available from: https://scholarworks.rit.edu/theses/5760.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Barron L. High-reflectance, sputter-deposited aluminum alloy thin thin films for micro-electro-mechanical systems. [Thesis]. Rochester Institute of Technology; 2005. Available from: https://scholarworks.rit.edu/theses/5760

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Hong Kong University of Science and Technology

22. Ma, Wei. Low temperature metal-based micro fabrication and packaging technology.

Degree: 2005, Hong Kong University of Science and Technology

URL: https://doi.org/10.14711/thesis-b856970 ; http://repository.ust.hk/ir/bitstream/1783.1-2432/1/th_redirect.html

► A low temperature multiple photoresist mold metal electroplating technology was developed. This technology can be utilized to fabricate metallic MEMS devices directly on substrates containing… (more)

▼ A low temperature multiple photoresist mold metal electroplating technology was developed. This technology can be utilized to fabricate metallic MEMS devices directly on substrates containing IC fabricated electronic devices by a post-IC process. Normal IC process flow is not affected by the add-on MEMS process. A further integrated packaging solution is also proposed with the same low temperature plating technology to supply the first-level, wafer scale package. The packaging process combines with the MEMS devices process seamlessly to unite the MEMS integration and packaging as a whole. Integration and packaging are considered together at the beginning of MEMS design which allows this technology to realize real batch fabrication and fulfill the task of low-cost manufacturing to meet the low-end application requirement. A packaged electrical inertia micro-switch was implemented. Separate and non-interfering photoresist-molded Au, Cu and PbSn solder metal-electroplating processes have been applied to the fabrication of the micro-switches and their wafer-level packaging in sealed cavities. The switches were designed using a simple but accurate lumped spring-mass model. The threshold velocity and natural frequency were calibrated by the drop hammer test and shaker test respectively. Testing results showed the good coincidence with the designed values. Packaging scheme supply the solution of independently control for the height of a switch and that of its cavity. It also provides leads for low-resistance electrical access to the sealed devices. The measured critical shear stress before packaging failure was around 30MPa for all samples. Using both the gross leak and fine leak hermeticity tests, all the samples reached the requirement. An integrated floating gate electrostatic micro power generator was also implemented by the developed technology. The micro power generator was designed based on the technology of floating gate. The pre-charged floating gate by the TN tunneling technique acted as the voltage bias. Power is generated using a variable capacitor, formed between the resonator and the floating gate. A full analysis of the generator was done based on the system differential equations. A linear model for small signal input and a general model for nonlinearity analysis were built. Simulations were done using both models. The results from the two models corresponded well with each other. The properties of the electronic devices and the mechanical resonator were fully tested. The consistency of the electronic devices properties before and after the back-end process showed that the processing of the mechanical device has little effect on standard IC devices. Output power depending on the driving frequency and the resistant load was investigated using the shaker test. The maximum output power happened at the designed natural frequency. With an optimum load, the power generator worked at the pre-designed scale.

Subjects/Keywords: Microelectronic packaging; Optoelectronic devices – Design and construction; Microelectromechanical systems; Microelectromechanical systems – Design and construction

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APA (6^th Edition):

Ma, W. (2005). Low temperature metal-based micro fabrication and packaging technology. (Thesis). Hong Kong University of Science and Technology. Retrieved from https://doi.org/10.14711/thesis-b856970 ; http://repository.ust.hk/ir/bitstream/1783.1-2432/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Ma, Wei. “Low temperature metal-based micro fabrication and packaging technology.” 2005. Thesis, Hong Kong University of Science and Technology. Accessed October 17, 2019. https://doi.org/10.14711/thesis-b856970 ; http://repository.ust.hk/ir/bitstream/1783.1-2432/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Ma, Wei. “Low temperature metal-based micro fabrication and packaging technology.” 2005. Web. 17 Oct 2019.

Vancouver:

Ma W. Low temperature metal-based micro fabrication and packaging technology. [Internet] [Thesis]. Hong Kong University of Science and Technology; 2005. [cited 2019 Oct 17]. Available from: https://doi.org/10.14711/thesis-b856970 ; http://repository.ust.hk/ir/bitstream/1783.1-2432/1/th_redirect.html.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Ma W. Low temperature metal-based micro fabrication and packaging technology. [Thesis]. Hong Kong University of Science and Technology; 2005. Available from: https://doi.org/10.14711/thesis-b856970 ; http://repository.ust.hk/ir/bitstream/1783.1-2432/1/th_redirect.html

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

McGill University

23. Mahdavi, Sareh. RF power amplifiers and MEMS varactors.

Degree: M. Eng., Department of Electrical and Computer Engineering., 2007, McGill University

URL: http://digitool.library.mcgill.ca/thesisfile112576.pdf

►

This thesis is concerned with the design and implementation of radio frequency (RF) power amplifiers and micro-electromechanical systems – namely MEMS varactors. This is driven by… (more)

Subjects/Keywords: Power amplifiers – Design and construction.; Amplifiers, Radio frequency – Design and construction.; Microelectromechanical systems – Design and construction.

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APA (6^th Edition):

Mahdavi, S. (2007). RF power amplifiers and MEMS varactors. (Masters Thesis). McGill University. Retrieved from http://digitool.library.mcgill.ca/thesisfile112576.pdf

Chicago Manual of Style (16^th Edition):

Mahdavi, Sareh. “RF power amplifiers and MEMS varactors.” 2007. Masters Thesis, McGill University. Accessed October 17, 2019. http://digitool.library.mcgill.ca/thesisfile112576.pdf.

MLA Handbook (7^th Edition):

Mahdavi, Sareh. “RF power amplifiers and MEMS varactors.” 2007. Web. 17 Oct 2019.

Vancouver:

Mahdavi S. RF power amplifiers and MEMS varactors. [Internet] [Masters thesis]. McGill University; 2007. [cited 2019 Oct 17]. Available from: http://digitool.library.mcgill.ca/thesisfile112576.pdf.

Council of Science Editors:

Mahdavi S. RF power amplifiers and MEMS varactors. [Masters Thesis]. McGill University; 2007. Available from: http://digitool.library.mcgill.ca/thesisfile112576.pdf

Portland State University

24. Li, Juncao. An Automata-Theoretic Approach to Hardware/Software Co-verification.

Degree: PhD, Computer Science, 2010, Portland State University

URL: http://pdxscholar.library.pdx.edu/open_access_etds/12

► Hardware/Software (HW/SW) interfaces are pervasive in computer systems. However, many HW/SW interface implementations are unreliable due to their intrinsically complicated nature. In industrial settings,… (more)

Subjects/Keywords: Computer network protocols – Design; System design; Computer systems – Verification; Computer interfaces – Design and construction

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APA (6^th Edition):

Li, J. (2010). An Automata-Theoretic Approach to Hardware/Software Co-verification. (Doctoral Dissertation). Portland State University. Retrieved from http://pdxscholar.library.pdx.edu/open_access_etds/12

Chicago Manual of Style (16^th Edition):

Li, Juncao. “An Automata-Theoretic Approach to Hardware/Software Co-verification.” 2010. Doctoral Dissertation, Portland State University. Accessed October 17, 2019. http://pdxscholar.library.pdx.edu/open_access_etds/12.

MLA Handbook (7^th Edition):

Li, Juncao. “An Automata-Theoretic Approach to Hardware/Software Co-verification.” 2010. Web. 17 Oct 2019.

Vancouver:

Li J. An Automata-Theoretic Approach to Hardware/Software Co-verification. [Internet] [Doctoral dissertation]. Portland State University; 2010. [cited 2019 Oct 17]. Available from: http://pdxscholar.library.pdx.edu/open_access_etds/12.

Council of Science Editors:

Li J. An Automata-Theoretic Approach to Hardware/Software Co-verification. [Doctoral Dissertation]. Portland State University; 2010. Available from: http://pdxscholar.library.pdx.edu/open_access_etds/12

Northeastern University

25. Rueda, Juan Carlos Aceros. MEMS testbed for accelerated testing of nanoelements.

Degree: PhD, Department of Electrical and Computer Engineering, 2008, Northeastern University

URL: http://hdl.handle.net/2047/d10017288

► Three types of MEMS devices were designed, modeled and fabricated. These devices consisted of microhotplates, resonators (angular and horizontal) and uniaxial tensile testers. Different types… (more)

▼ Three types of MEMS devices were designed, modeled and fabricated. These devices consisted of microhotplates, resonators (angular and horizontal) and uniaxial tensile testers. Different types of test specimens such as metallic thin films, metallic nanowires and electrospun polymer nanofibers were deposited and characterized. Fabrication methods for the devices were developed based on the encapsulation of nanoelements, the anisotropic dry etch of the top Silicon layer of a Silicon-On-Insulator (SOI) wafer and its release by a long wet etch in Buffered-Oxide-Etch (BOE). MEMS microhotplates were designed and fabricated for accelerated lifetime testing of thin films of Cr/Ru/Au, Cr/Ru and Ru as well as nanowires of Ru and RuOx. Rapid thermal cycling at a 1KHz pulse frequency was employed for testing the thin films. Nanowires were characterized using 1KHz and 500Hz pulse frequencies. It was found that the cycling frequency did not influence the nanowire lifetimes in air or in N2. The fabrication of the uniaxial tensile testers and the resonators proved to be a challenge due to stresses within the silicon device layer of the SOI wafers. These problems resulted in difficulties during the release step as well as the end profile of the devices. Even so, devices were fabricated and tested. The resonant frequency of angular resonators was characterized using a frequency sweep of the device. This yielded a resonant peak of 49.152KHz, which differed from the finite element model result (fr=49.4KHz) by 0.5 percent. Uniaxial tensile testers were fabricated and employed in the characterization of PolyEthylene Oxide (PEO) nanofibers. These fibers were deposited on the devices by electrospinning after the device was fully released. The displacements were measured using AFM scans of specially microfabricated markers. It was found that the generated images were not good enough to be employed for Digital Image Correlation (DIC) due to the large number of artifacts. Because of this, the devices display a large uncertainty on the displacement measurements. It was estimated that the fibers had an elastic modulus between 378MPa and 472MPa.

Subjects/Keywords: Electrical engineering; Nanoelements; MEMS; Microelectromechanical systems – Design and construction; Nanotechnology; Engineering

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APA (6^th Edition):

Rueda, J. C. A. (2008). MEMS testbed for accelerated testing of nanoelements. (Doctoral Dissertation). Northeastern University. Retrieved from http://hdl.handle.net/2047/d10017288

Chicago Manual of Style (16^th Edition):

Rueda, Juan Carlos Aceros. “MEMS testbed for accelerated testing of nanoelements.” 2008. Doctoral Dissertation, Northeastern University. Accessed October 17, 2019. http://hdl.handle.net/2047/d10017288.

MLA Handbook (7^th Edition):

Rueda, Juan Carlos Aceros. “MEMS testbed for accelerated testing of nanoelements.” 2008. Web. 17 Oct 2019.

Vancouver:

Rueda JCA. MEMS testbed for accelerated testing of nanoelements. [Internet] [Doctoral dissertation]. Northeastern University; 2008. [cited 2019 Oct 17]. Available from: http://hdl.handle.net/2047/d10017288.

Council of Science Editors:

Rueda JCA. MEMS testbed for accelerated testing of nanoelements. [Doctoral Dissertation]. Northeastern University; 2008. Available from: http://hdl.handle.net/2047/d10017288

Michigan State University

26. Sharma, Kanishka. Preliminary design approach to the first generation internal combustion wave disc engine.

Degree: MS, Department of Mechanical Engineering, 2008, Michigan State University

URL: http://etd.lib.msu.edu/islandora/object/etd:39254

Subjects/Keywords: Internal combustion engines – Design and construction; Unsteady flow (Fluid dynamics); Microelectromechanical systems

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APA (6^th Edition):

Sharma, K. (2008). Preliminary design approach to the first generation internal combustion wave disc engine. (Masters Thesis). Michigan State University. Retrieved from http://etd.lib.msu.edu/islandora/object/etd:39254

Chicago Manual of Style (16^th Edition):

Sharma, Kanishka. “Preliminary design approach to the first generation internal combustion wave disc engine.” 2008. Masters Thesis, Michigan State University. Accessed October 17, 2019. http://etd.lib.msu.edu/islandora/object/etd:39254.

MLA Handbook (7^th Edition):

Sharma, Kanishka. “Preliminary design approach to the first generation internal combustion wave disc engine.” 2008. Web. 17 Oct 2019.

Vancouver:

Sharma K. Preliminary design approach to the first generation internal combustion wave disc engine. [Internet] [Masters thesis]. Michigan State University; 2008. [cited 2019 Oct 17]. Available from: http://etd.lib.msu.edu/islandora/object/etd:39254.

Council of Science Editors:

Sharma K. Preliminary design approach to the first generation internal combustion wave disc engine. [Masters Thesis]. Michigan State University; 2008. Available from: http://etd.lib.msu.edu/islandora/object/etd:39254

Michigan State University

27. Vaidyanathan, Kartik. Application specific programmable processor for sensor based networks.

Degree: MS, Electrical and Computer Engineering, 2003, Michigan State University

URL: http://etd.lib.msu.edu/islandora/object/etd:32104

Subjects/Keywords: Detectors – Design and construction; Microelectromechanical systems; Detectors; Intelligent control systems

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APA (6^th Edition):

Vaidyanathan, K. (2003). Application specific programmable processor for sensor based networks. (Masters Thesis). Michigan State University. Retrieved from http://etd.lib.msu.edu/islandora/object/etd:32104

Chicago Manual of Style (16^th Edition):

Vaidyanathan, Kartik. “Application specific programmable processor for sensor based networks.” 2003. Masters Thesis, Michigan State University. Accessed October 17, 2019. http://etd.lib.msu.edu/islandora/object/etd:32104.

MLA Handbook (7^th Edition):

Vaidyanathan, Kartik. “Application specific programmable processor for sensor based networks.” 2003. Web. 17 Oct 2019.

Vancouver:

Vaidyanathan K. Application specific programmable processor for sensor based networks. [Internet] [Masters thesis]. Michigan State University; 2003. [cited 2019 Oct 17]. Available from: http://etd.lib.msu.edu/islandora/object/etd:32104.

Council of Science Editors:

Vaidyanathan K. Application specific programmable processor for sensor based networks. [Masters Thesis]. Michigan State University; 2003. Available from: http://etd.lib.msu.edu/islandora/object/etd:32104

Michigan State University

28. Chandrasekaran, Saravan Kumar. Design and fabrication of a high-temperature high-vacuum furnace to heat treat niobium for superconducting radio frequency cavities.

Degree: MS, Mechanical Engineering, 2010, Michigan State University

URL: http://etd.lib.msu.edu/islandora/object/etd:17484

Subjects/Keywords: Metallurgical furnaces – Design and construction; Niobium; Radio frequency microelectromechanical systems

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APA (6^th Edition):

Chandrasekaran, S. K. (2010). Design and fabrication of a high-temperature high-vacuum furnace to heat treat niobium for superconducting radio frequency cavities. (Masters Thesis). Michigan State University. Retrieved from http://etd.lib.msu.edu/islandora/object/etd:17484

Chicago Manual of Style (16^th Edition):

Chandrasekaran, Saravan Kumar. “Design and fabrication of a high-temperature high-vacuum furnace to heat treat niobium for superconducting radio frequency cavities.” 2010. Masters Thesis, Michigan State University. Accessed October 17, 2019. http://etd.lib.msu.edu/islandora/object/etd:17484.

MLA Handbook (7^th Edition):

Chandrasekaran, Saravan Kumar. “Design and fabrication of a high-temperature high-vacuum furnace to heat treat niobium for superconducting radio frequency cavities.” 2010. Web. 17 Oct 2019.

Vancouver:

Chandrasekaran SK. Design and fabrication of a high-temperature high-vacuum furnace to heat treat niobium for superconducting radio frequency cavities. [Internet] [Masters thesis]. Michigan State University; 2010. [cited 2019 Oct 17]. Available from: http://etd.lib.msu.edu/islandora/object/etd:17484.

Council of Science Editors:

Chandrasekaran SK. Design and fabrication of a high-temperature high-vacuum furnace to heat treat niobium for superconducting radio frequency cavities. [Masters Thesis]. Michigan State University; 2010. Available from: http://etd.lib.msu.edu/islandora/object/etd:17484

Michigan State University

29. Vagani, Marco. Design considerations for micro wave disc engines.

Degree: MS, Mechanical Engineering, 2008, Michigan State University

URL: http://etd.lib.msu.edu/islandora/object/etd:16677

Subjects/Keywords: Internal combustion engines – Design and construction; Unsteady flow (Fluid dynamics); Microelectromechanical systems

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APA (6^th Edition):

Vagani, M. (2008). Design considerations for micro wave disc engines. (Masters Thesis). Michigan State University. Retrieved from http://etd.lib.msu.edu/islandora/object/etd:16677

Chicago Manual of Style (16^th Edition):

Vagani, Marco. “Design considerations for micro wave disc engines.” 2008. Masters Thesis, Michigan State University. Accessed October 17, 2019. http://etd.lib.msu.edu/islandora/object/etd:16677.

MLA Handbook (7^th Edition):

Vagani, Marco. “Design considerations for micro wave disc engines.” 2008. Web. 17 Oct 2019.

Vancouver:

Vagani M. Design considerations for micro wave disc engines. [Internet] [Masters thesis]. Michigan State University; 2008. [cited 2019 Oct 17]. Available from: http://etd.lib.msu.edu/islandora/object/etd:16677.

Council of Science Editors:

Vagani M. Design considerations for micro wave disc engines. [Masters Thesis]. Michigan State University; 2008. Available from: http://etd.lib.msu.edu/islandora/object/etd:16677

Cape Peninsula University of Technology

30. Hendrickse, Christopher Justin. Development of the user input system for the control room upgrade of Southern African Large Telescope (SALT) .

Degree: 2015, Cape Peninsula University of Technology

URL: http://etd.cput.ac.za/handle/20.500.11838/2394

► Whether one is fascinated by the night sky as a child, or as a professional astronomer looking back to the beginning of time solving life’s… (more)

▼ Whether one is fascinated by the night sky as a child, or as a professional astronomer looking back to the beginning of time solving life’s big questions; at some point in our lives we have curiously looked up at the heavens above. The desire to explore the universe has lead us to constructing larger and more advanced telescopes, with the sole focus of observing deeper into the cosmos in an attempt to unravel its secrets. Like with most other technological advances, it has created advanced and technically complex control rooms. Based on a design ethnographic study this thesis will focus on the exploration of the effects of complex interfaces of a control room environment and its users, where one of the leading twenty first century telescopes of its kind, Southern Africa Largest Telescope (SALT), is studied. While the STS framework and policy debates concerning the rapid development and integration of complex human and non-human systems into larger systems become common practice. The design ethnographic study revealed that the operation of the SALT telescope and the research being conducted by the astronomers is clearly hindered by poor control room design. The study identified relationships between the framework and the empirical findings, which was used to frame a design pilot study to determine if further design intervention would have a positive impact on the interaction of a control room system. This project will consist of: a literature review, an ethnographic study and the analysis of the findings, design framing of a pilot study, a design pilot study, and an evaluation of the study. The results from the design pilot study clearly show that the application of a design intervention to a control room environment could potentially impact the space positively and reduced frustration, improve comfort, increased efficiency in the users work practices, and ultimately amplified productivity. Providing an appropriate starting point for the exploration of possible solutions for identified challenges experienced in complex control room environments, more importantly it contributed to narrowing the socio-technical gap, between the mechanical and research departments of a leading international optical telescope, SALT.

Subjects/Keywords: Control rooms – Design and construction; Telescopes – Design and construction; Human-computer interaction; User-centered system design

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APA (6^th Edition):

Hendrickse, C. J. (2015). Development of the user input system for the control room upgrade of Southern African Large Telescope (SALT) . (Thesis). Cape Peninsula University of Technology. Retrieved from http://etd.cput.ac.za/handle/20.500.11838/2394

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16^th Edition):

Hendrickse, Christopher Justin. “Development of the user input system for the control room upgrade of Southern African Large Telescope (SALT) .” 2015. Thesis, Cape Peninsula University of Technology. Accessed October 17, 2019. http://etd.cput.ac.za/handle/20.500.11838/2394.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7^th Edition):

Hendrickse, Christopher Justin. “Development of the user input system for the control room upgrade of Southern African Large Telescope (SALT) .” 2015. Web. 17 Oct 2019.

Vancouver:

Hendrickse CJ. Development of the user input system for the control room upgrade of Southern African Large Telescope (SALT) . [Internet] [Thesis]. Cape Peninsula University of Technology; 2015. [cited 2019 Oct 17]. Available from: http://etd.cput.ac.za/handle/20.500.11838/2394.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Hendrickse CJ. Development of the user input system for the control room upgrade of Southern African Large Telescope (SALT) . [Thesis]. Cape Peninsula University of Technology; 2015. Available from: http://etd.cput.ac.za/handle/20.500.11838/2394

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

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Open Access Theses and Dissertations