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You searched for subject:(Microactuator). Showing records 1 – 30 of 31 total matches.

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Brigham Young University

1. Holst, Gregory L. Modeling, Design, and Testing of an Underwater Microactuation System Using a Standard MEMS Foundry Process.

Degree: MS, 2011, Brigham Young University

 This work presents the modeling, design, and testing of an underwater microactuation system. It is composed of several thermomechanical in-plane microactuators (TIM) integrated with a… (more)

Subjects/Keywords: Microelectromechanical Systems; MEMS; BioMEMS; underwater microactuator; thermomechanical in-plane microactuator; Mechanical Engineering

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Holst, G. L. (2011). Modeling, Design, and Testing of an Underwater Microactuation System Using a Standard MEMS Foundry Process. (Masters Thesis). Brigham Young University. Retrieved from https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=3625&context=etd

Chicago Manual of Style (16th Edition):

Holst, Gregory L. “Modeling, Design, and Testing of an Underwater Microactuation System Using a Standard MEMS Foundry Process.” 2011. Masters Thesis, Brigham Young University. Accessed May 07, 2021. https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=3625&context=etd.

MLA Handbook (7th Edition):

Holst, Gregory L. “Modeling, Design, and Testing of an Underwater Microactuation System Using a Standard MEMS Foundry Process.” 2011. Web. 07 May 2021.

Vancouver:

Holst GL. Modeling, Design, and Testing of an Underwater Microactuation System Using a Standard MEMS Foundry Process. [Internet] [Masters thesis]. Brigham Young University; 2011. [cited 2021 May 07]. Available from: https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=3625&context=etd.

Council of Science Editors:

Holst GL. Modeling, Design, and Testing of an Underwater Microactuation System Using a Standard MEMS Foundry Process. [Masters Thesis]. Brigham Young University; 2011. Available from: https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=3625&context=etd


University of Alberta

2. Movahedian, Samira. High Speed Paraffin Nanocomposite Phase Change Microactuator for Microvalve Applications.

Degree: MS, Department of Electrical and Computer Engineering, 2012, University of Alberta

 Microvalves are an essential part of microfluidic systems for chemical and biological analysis. However, the lack of high performance materials has hindered the development of… (more)

Subjects/Keywords: Microactuator; Nanocomposite; SU-8; Phase-change; Microvalve; Paraffin

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APA (6th Edition):

Movahedian, S. (2012). High Speed Paraffin Nanocomposite Phase Change Microactuator for Microvalve Applications. (Masters Thesis). University of Alberta. Retrieved from https://era.library.ualberta.ca/files/3x816n47s

Chicago Manual of Style (16th Edition):

Movahedian, Samira. “High Speed Paraffin Nanocomposite Phase Change Microactuator for Microvalve Applications.” 2012. Masters Thesis, University of Alberta. Accessed May 07, 2021. https://era.library.ualberta.ca/files/3x816n47s.

MLA Handbook (7th Edition):

Movahedian, Samira. “High Speed Paraffin Nanocomposite Phase Change Microactuator for Microvalve Applications.” 2012. Web. 07 May 2021.

Vancouver:

Movahedian S. High Speed Paraffin Nanocomposite Phase Change Microactuator for Microvalve Applications. [Internet] [Masters thesis]. University of Alberta; 2012. [cited 2021 May 07]. Available from: https://era.library.ualberta.ca/files/3x816n47s.

Council of Science Editors:

Movahedian S. High Speed Paraffin Nanocomposite Phase Change Microactuator for Microvalve Applications. [Masters Thesis]. University of Alberta; 2012. Available from: https://era.library.ualberta.ca/files/3x816n47s


Anna University

3. Kalaiarasi A R. Design modeling and analysis of cantilever based mems devices with improved performance;.

Degree: Design modeling and analysis of cantilever based mems devices with improved performance, 2015, Anna University

Micro Electro Mechanical Systems MEMS is a technology which is used to fabricate the components in miniature form in all science and engineering fields Cantilever… (more)

Subjects/Keywords: Finite Element Method; Microactuator analytical modeling; Micro Electro Mechanical Systems

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APA (6th Edition):

R, K. A. (2015). Design modeling and analysis of cantilever based mems devices with improved performance;. (Thesis). Anna University. Retrieved from http://shodhganga.inflibnet.ac.in/handle/10603/48798

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

R, Kalaiarasi A. “Design modeling and analysis of cantilever based mems devices with improved performance;.” 2015. Thesis, Anna University. Accessed May 07, 2021. http://shodhganga.inflibnet.ac.in/handle/10603/48798.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

R, Kalaiarasi A. “Design modeling and analysis of cantilever based mems devices with improved performance;.” 2015. Web. 07 May 2021.

Vancouver:

R KA. Design modeling and analysis of cantilever based mems devices with improved performance;. [Internet] [Thesis]. Anna University; 2015. [cited 2021 May 07]. Available from: http://shodhganga.inflibnet.ac.in/handle/10603/48798.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

R KA. Design modeling and analysis of cantilever based mems devices with improved performance;. [Thesis]. Anna University; 2015. Available from: http://shodhganga.inflibnet.ac.in/handle/10603/48798

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


Penn State University

4. Cheong, Jongpil. DESIGN, FABRICATION, MODELING, AND EXPERIMENTAL TESTING OF A PIEZOELECTRIC FLEXTENSIONAL MICROACTUATOR.

Degree: 2008, Penn State University

 The necessity for reliable and low-cost microactuators capable of providing high resolution displacements and controlled force has been consistently being brought up because of their… (more)

Subjects/Keywords: Buckling; PZT; beam; flextensional; microactuator

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APA (6th Edition):

Cheong, J. (2008). DESIGN, FABRICATION, MODELING, AND EXPERIMENTAL TESTING OF A PIEZOELECTRIC FLEXTENSIONAL MICROACTUATOR. (Thesis). Penn State University. Retrieved from https://submit-etda.libraries.psu.edu/catalog/6580

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Cheong, Jongpil. “DESIGN, FABRICATION, MODELING, AND EXPERIMENTAL TESTING OF A PIEZOELECTRIC FLEXTENSIONAL MICROACTUATOR.” 2008. Thesis, Penn State University. Accessed May 07, 2021. https://submit-etda.libraries.psu.edu/catalog/6580.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Cheong, Jongpil. “DESIGN, FABRICATION, MODELING, AND EXPERIMENTAL TESTING OF A PIEZOELECTRIC FLEXTENSIONAL MICROACTUATOR.” 2008. Web. 07 May 2021.

Vancouver:

Cheong J. DESIGN, FABRICATION, MODELING, AND EXPERIMENTAL TESTING OF A PIEZOELECTRIC FLEXTENSIONAL MICROACTUATOR. [Internet] [Thesis]. Penn State University; 2008. [cited 2021 May 07]. Available from: https://submit-etda.libraries.psu.edu/catalog/6580.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Cheong J. DESIGN, FABRICATION, MODELING, AND EXPERIMENTAL TESTING OF A PIEZOELECTRIC FLEXTENSIONAL MICROACTUATOR. [Thesis]. Penn State University; 2008. Available from: https://submit-etda.libraries.psu.edu/catalog/6580

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


Arizona State University

5. Sampath Kumar, Swathy. Autonomous MEMS- Based Intracellular Neural Interfaces.

Degree: Biomedical Engineering, 2018, Arizona State University

 Intracellular voltage recordings from single neurons in vitro and in vivo have been fundamental to our understanding of neuronal function. Conventional electrodes and associated positioning… (more)

Subjects/Keywords: Bioengineering; brain implant; intracellular recording; microactuator; microelectrode array; neural recording; robot

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APA (6th Edition):

Sampath Kumar, S. (2018). Autonomous MEMS- Based Intracellular Neural Interfaces. (Doctoral Dissertation). Arizona State University. Retrieved from http://repository.asu.edu/items/51761

Chicago Manual of Style (16th Edition):

Sampath Kumar, Swathy. “Autonomous MEMS- Based Intracellular Neural Interfaces.” 2018. Doctoral Dissertation, Arizona State University. Accessed May 07, 2021. http://repository.asu.edu/items/51761.

MLA Handbook (7th Edition):

Sampath Kumar, Swathy. “Autonomous MEMS- Based Intracellular Neural Interfaces.” 2018. Web. 07 May 2021.

Vancouver:

Sampath Kumar S. Autonomous MEMS- Based Intracellular Neural Interfaces. [Internet] [Doctoral dissertation]. Arizona State University; 2018. [cited 2021 May 07]. Available from: http://repository.asu.edu/items/51761.

Council of Science Editors:

Sampath Kumar S. Autonomous MEMS- Based Intracellular Neural Interfaces. [Doctoral Dissertation]. Arizona State University; 2018. Available from: http://repository.asu.edu/items/51761


University of Alberta

6. Saunders, Joseph RC. AC Frequency-based Cyclical Electrical Stimulation of Hydrogel Microactuators.

Degree: PhD, Department of Mechanical Engineering, 2013, University of Alberta

 The continuing interest in Lab-on-a-Chip technologies and Point-of-Care diagnostics systems is driving the development of supporting components for microfluidic regulation. Optimally the microfluidic regulation components… (more)

Subjects/Keywords: Cyclical; MEMS; AC Frequency; Microactuator; Electrical; Dynamic Mechanical Properties; Hydrogel; Dielectric Barrier; Swelling; Numerical Modeling

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APA (6th Edition):

Saunders, J. R. (2013). AC Frequency-based Cyclical Electrical Stimulation of Hydrogel Microactuators. (Doctoral Dissertation). University of Alberta. Retrieved from https://era.library.ualberta.ca/files/td96k351f

Chicago Manual of Style (16th Edition):

Saunders, Joseph RC. “AC Frequency-based Cyclical Electrical Stimulation of Hydrogel Microactuators.” 2013. Doctoral Dissertation, University of Alberta. Accessed May 07, 2021. https://era.library.ualberta.ca/files/td96k351f.

MLA Handbook (7th Edition):

Saunders, Joseph RC. “AC Frequency-based Cyclical Electrical Stimulation of Hydrogel Microactuators.” 2013. Web. 07 May 2021.

Vancouver:

Saunders JR. AC Frequency-based Cyclical Electrical Stimulation of Hydrogel Microactuators. [Internet] [Doctoral dissertation]. University of Alberta; 2013. [cited 2021 May 07]. Available from: https://era.library.ualberta.ca/files/td96k351f.

Council of Science Editors:

Saunders JR. AC Frequency-based Cyclical Electrical Stimulation of Hydrogel Microactuators. [Doctoral Dissertation]. University of Alberta; 2013. Available from: https://era.library.ualberta.ca/files/td96k351f


University of Michigan

7. Copic, Davor. Fabrication of Polymer and Nanocomposite Microstructures and Microactuators by Capillary Infiltration and Replica Molding.

Degree: PhD, Mechanical Engineering, 2013, University of Michigan

 Addition of micro- and/or nanoscale textures to surfaces can enable engineering of a wide range of properties. Passive surfaces (using fixed microstructures) can manipulate cell… (more)

Subjects/Keywords: CNT-polymer Composite; Liquid Crystal Network; Microactuator; Active Surfaces; Mechanical Engineering; Engineering

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APA (6th Edition):

Copic, D. (2013). Fabrication of Polymer and Nanocomposite Microstructures and Microactuators by Capillary Infiltration and Replica Molding. (Doctoral Dissertation). University of Michigan. Retrieved from http://hdl.handle.net/2027.42/102390

Chicago Manual of Style (16th Edition):

Copic, Davor. “Fabrication of Polymer and Nanocomposite Microstructures and Microactuators by Capillary Infiltration and Replica Molding.” 2013. Doctoral Dissertation, University of Michigan. Accessed May 07, 2021. http://hdl.handle.net/2027.42/102390.

MLA Handbook (7th Edition):

Copic, Davor. “Fabrication of Polymer and Nanocomposite Microstructures and Microactuators by Capillary Infiltration and Replica Molding.” 2013. Web. 07 May 2021.

Vancouver:

Copic D. Fabrication of Polymer and Nanocomposite Microstructures and Microactuators by Capillary Infiltration and Replica Molding. [Internet] [Doctoral dissertation]. University of Michigan; 2013. [cited 2021 May 07]. Available from: http://hdl.handle.net/2027.42/102390.

Council of Science Editors:

Copic D. Fabrication of Polymer and Nanocomposite Microstructures and Microactuators by Capillary Infiltration and Replica Molding. [Doctoral Dissertation]. University of Michigan; 2013. Available from: http://hdl.handle.net/2027.42/102390


Texas A&M University

8. Colbert, Keegan David. An Experimentally Verified Model for Thermal Microactuators Including Nonlinear Material Properties, Radiation, and Intra-Device Heat Conduction.

Degree: MS, Aerospace Engineering, 2016, Texas A&M University

 A multi-physics model and computational method is presented for predicting the performance of thermal microactuators at high input powers. The model accounts for nonlinear temperature… (more)

Subjects/Keywords: Microactuator; Thermal Actuator; Flexure Actuator; MEMS; Finite Element Analysis; Intra-Device Heat Transfer; Galerkin Method

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APA (6th Edition):

Colbert, K. D. (2016). An Experimentally Verified Model for Thermal Microactuators Including Nonlinear Material Properties, Radiation, and Intra-Device Heat Conduction. (Masters Thesis). Texas A&M University. Retrieved from http://hdl.handle.net/1969.1/157167

Chicago Manual of Style (16th Edition):

Colbert, Keegan David. “An Experimentally Verified Model for Thermal Microactuators Including Nonlinear Material Properties, Radiation, and Intra-Device Heat Conduction.” 2016. Masters Thesis, Texas A&M University. Accessed May 07, 2021. http://hdl.handle.net/1969.1/157167.

MLA Handbook (7th Edition):

Colbert, Keegan David. “An Experimentally Verified Model for Thermal Microactuators Including Nonlinear Material Properties, Radiation, and Intra-Device Heat Conduction.” 2016. Web. 07 May 2021.

Vancouver:

Colbert KD. An Experimentally Verified Model for Thermal Microactuators Including Nonlinear Material Properties, Radiation, and Intra-Device Heat Conduction. [Internet] [Masters thesis]. Texas A&M University; 2016. [cited 2021 May 07]. Available from: http://hdl.handle.net/1969.1/157167.

Council of Science Editors:

Colbert KD. An Experimentally Verified Model for Thermal Microactuators Including Nonlinear Material Properties, Radiation, and Intra-Device Heat Conduction. [Masters Thesis]. Texas A&M University; 2016. Available from: http://hdl.handle.net/1969.1/157167

9. Rohtlaid, Kätlin. Fabrication, caractérisation et intégration de microactionneurs et de microcapteurs à base de polymères conducteurs électroniques : Fabrication, characterization and integration of microactuators and microsensors based on electronically conductive polymers.

Degree: Docteur es, Chimie - Cergy, 2019, Cergy-Pontoise

 Les polymères électroactifs (EAPs) sont capables de changer de forme et/ou de dimension en réponse à une stimulation électrique, mais aussi de générer un signal… (more)

Subjects/Keywords: Microactionneur; Microcapteur; Polymères conducteurs électroniques; Microsystemes; Microactuator; Microsensor; Electronically conducting polymers; Microsystems

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APA (6th Edition):

Rohtlaid, K. (2019). Fabrication, caractérisation et intégration de microactionneurs et de microcapteurs à base de polymères conducteurs électroniques : Fabrication, characterization and integration of microactuators and microsensors based on electronically conductive polymers. (Doctoral Dissertation). Cergy-Pontoise. Retrieved from http://www.theses.fr/2019CERG1029

Chicago Manual of Style (16th Edition):

Rohtlaid, Kätlin. “Fabrication, caractérisation et intégration de microactionneurs et de microcapteurs à base de polymères conducteurs électroniques : Fabrication, characterization and integration of microactuators and microsensors based on electronically conductive polymers.” 2019. Doctoral Dissertation, Cergy-Pontoise. Accessed May 07, 2021. http://www.theses.fr/2019CERG1029.

MLA Handbook (7th Edition):

Rohtlaid, Kätlin. “Fabrication, caractérisation et intégration de microactionneurs et de microcapteurs à base de polymères conducteurs électroniques : Fabrication, characterization and integration of microactuators and microsensors based on electronically conductive polymers.” 2019. Web. 07 May 2021.

Vancouver:

Rohtlaid K. Fabrication, caractérisation et intégration de microactionneurs et de microcapteurs à base de polymères conducteurs électroniques : Fabrication, characterization and integration of microactuators and microsensors based on electronically conductive polymers. [Internet] [Doctoral dissertation]. Cergy-Pontoise; 2019. [cited 2021 May 07]. Available from: http://www.theses.fr/2019CERG1029.

Council of Science Editors:

Rohtlaid K. Fabrication, caractérisation et intégration de microactionneurs et de microcapteurs à base de polymères conducteurs électroniques : Fabrication, characterization and integration of microactuators and microsensors based on electronically conductive polymers. [Doctoral Dissertation]. Cergy-Pontoise; 2019. Available from: http://www.theses.fr/2019CERG1029


Delft University of Technology

10. Goosen, J.F.L. Design and fabrication of a surface micromachined positioning device.

Degree: 1996, Delft University of Technology

Subjects/Keywords: microactuator; surface micromachining; stress measurement; electrostatics

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APA (6th Edition):

Goosen, J. F. L. (1996). Design and fabrication of a surface micromachined positioning device. (Doctoral Dissertation). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949 ; urn:NBN:nl:ui:24-uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949 ; urn:NBN:nl:ui:24-uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949 ; http://resolver.tudelft.nl/uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949

Chicago Manual of Style (16th Edition):

Goosen, J F L. “Design and fabrication of a surface micromachined positioning device.” 1996. Doctoral Dissertation, Delft University of Technology. Accessed May 07, 2021. http://resolver.tudelft.nl/uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949 ; urn:NBN:nl:ui:24-uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949 ; urn:NBN:nl:ui:24-uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949 ; http://resolver.tudelft.nl/uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949.

MLA Handbook (7th Edition):

Goosen, J F L. “Design and fabrication of a surface micromachined positioning device.” 1996. Web. 07 May 2021.

Vancouver:

Goosen JFL. Design and fabrication of a surface micromachined positioning device. [Internet] [Doctoral dissertation]. Delft University of Technology; 1996. [cited 2021 May 07]. Available from: http://resolver.tudelft.nl/uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949 ; urn:NBN:nl:ui:24-uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949 ; urn:NBN:nl:ui:24-uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949 ; http://resolver.tudelft.nl/uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949.

Council of Science Editors:

Goosen JFL. Design and fabrication of a surface micromachined positioning device. [Doctoral Dissertation]. Delft University of Technology; 1996. Available from: http://resolver.tudelft.nl/uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949 ; urn:NBN:nl:ui:24-uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949 ; urn:NBN:nl:ui:24-uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949 ; http://resolver.tudelft.nl/uuid:8b7cbd97-dec8-4fa8-a33c-bbea8dffa949


University of Toronto

11. Kose, Talha. Development of Optical Zoom and Optical Image Stabilization Systems for Miniature Cameras.

Degree: PhD, 2020, University of Toronto

 This thesis presents the development of an optical zooming (OZ) system and an optical image stabilization (OIS) system suitable for miniature cameras. Miniature cameras are… (more)

Subjects/Keywords: MEMS; Microactuator; Miniature Camera; Optical Image Stabilization; Optical Zoom; Optomechanical Design; 0548

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APA (6th Edition):

Kose, T. (2020). Development of Optical Zoom and Optical Image Stabilization Systems for Miniature Cameras. (Doctoral Dissertation). University of Toronto. Retrieved from http://hdl.handle.net/1807/103373

Chicago Manual of Style (16th Edition):

Kose, Talha. “Development of Optical Zoom and Optical Image Stabilization Systems for Miniature Cameras.” 2020. Doctoral Dissertation, University of Toronto. Accessed May 07, 2021. http://hdl.handle.net/1807/103373.

MLA Handbook (7th Edition):

Kose, Talha. “Development of Optical Zoom and Optical Image Stabilization Systems for Miniature Cameras.” 2020. Web. 07 May 2021.

Vancouver:

Kose T. Development of Optical Zoom and Optical Image Stabilization Systems for Miniature Cameras. [Internet] [Doctoral dissertation]. University of Toronto; 2020. [cited 2021 May 07]. Available from: http://hdl.handle.net/1807/103373.

Council of Science Editors:

Kose T. Development of Optical Zoom and Optical Image Stabilization Systems for Miniature Cameras. [Doctoral Dissertation]. University of Toronto; 2020. Available from: http://hdl.handle.net/1807/103373

12. Andersson, Martin. Ag-In transient liquid phase bonding for high temperature stainless steel micro actuators.

Degree: Microsystems Technology, 2013, Uppsala University

  A stainless steel, high temperature, phase change micro actuator has been demonstrated using the solid-liquid phase transition of mannitol at 168°C and In-Ag transient… (more)

Subjects/Keywords: TLP; PCM; microactuator; mannitol; high temperature; microsystems

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APA (6th Edition):

Andersson, M. (2013). Ag-In transient liquid phase bonding for high temperature stainless steel micro actuators. (Thesis). Uppsala University. Retrieved from http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-207559

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Andersson, Martin. “Ag-In transient liquid phase bonding for high temperature stainless steel micro actuators.” 2013. Thesis, Uppsala University. Accessed May 07, 2021. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-207559.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Andersson, Martin. “Ag-In transient liquid phase bonding for high temperature stainless steel micro actuators.” 2013. Web. 07 May 2021.

Vancouver:

Andersson M. Ag-In transient liquid phase bonding for high temperature stainless steel micro actuators. [Internet] [Thesis]. Uppsala University; 2013. [cited 2021 May 07]. Available from: http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-207559.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Andersson M. Ag-In transient liquid phase bonding for high temperature stainless steel micro actuators. [Thesis]. Uppsala University; 2013. Available from: http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-207559

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Western Ontario

13. Al-Aribe, Khaled M. Optically Driven PH Gradient Generator Based on Self-Assembled Proton Pumps for Activating Hydrogel Microactuators.

Degree: 2012, University of Western Ontario

 This dissertation presents a new approach for developing a biologically inspired photo-electro-chemo-mechanical microactuator by exploiting the ion pumping characteristics of bacteriorhodopsin (bR) proton pumps and… (more)

Subjects/Keywords: Optical driven microactuator; molecular self-assembly; bacteriorhodopsin (bR) monolayer; biotin labelling; pH gradient generator; biofunctionalized surface.; Mechanical Engineering

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APA (6th Edition):

Al-Aribe, K. M. (2012). Optically Driven PH Gradient Generator Based on Self-Assembled Proton Pumps for Activating Hydrogel Microactuators. (Thesis). University of Western Ontario. Retrieved from https://ir.lib.uwo.ca/etd/415

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Al-Aribe, Khaled M. “Optically Driven PH Gradient Generator Based on Self-Assembled Proton Pumps for Activating Hydrogel Microactuators.” 2012. Thesis, University of Western Ontario. Accessed May 07, 2021. https://ir.lib.uwo.ca/etd/415.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Al-Aribe, Khaled M. “Optically Driven PH Gradient Generator Based on Self-Assembled Proton Pumps for Activating Hydrogel Microactuators.” 2012. Web. 07 May 2021.

Vancouver:

Al-Aribe KM. Optically Driven PH Gradient Generator Based on Self-Assembled Proton Pumps for Activating Hydrogel Microactuators. [Internet] [Thesis]. University of Western Ontario; 2012. [cited 2021 May 07]. Available from: https://ir.lib.uwo.ca/etd/415.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Al-Aribe KM. Optically Driven PH Gradient Generator Based on Self-Assembled Proton Pumps for Activating Hydrogel Microactuators. [Thesis]. University of Western Ontario; 2012. Available from: https://ir.lib.uwo.ca/etd/415

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

14. JIA WENHUI. Simulation and optimization of performances of an electrostatic microactuator for HDD.

Degree: 2004, National University of Singapore

Subjects/Keywords: simulation; optimization; electrostatic; microactuator; response surface method (RSM); HDD

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APA (6th Edition):

WENHUI, J. (2004). Simulation and optimization of performances of an electrostatic microactuator for HDD. (Thesis). National University of Singapore. Retrieved from http://scholarbank.nus.edu.sg/handle/10635/13636

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

WENHUI, JIA. “Simulation and optimization of performances of an electrostatic microactuator for HDD.” 2004. Thesis, National University of Singapore. Accessed May 07, 2021. http://scholarbank.nus.edu.sg/handle/10635/13636.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

WENHUI, JIA. “Simulation and optimization of performances of an electrostatic microactuator for HDD.” 2004. Web. 07 May 2021.

Vancouver:

WENHUI J. Simulation and optimization of performances of an electrostatic microactuator for HDD. [Internet] [Thesis]. National University of Singapore; 2004. [cited 2021 May 07]. Available from: http://scholarbank.nus.edu.sg/handle/10635/13636.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

WENHUI J. Simulation and optimization of performances of an electrostatic microactuator for HDD. [Thesis]. National University of Singapore; 2004. Available from: http://scholarbank.nus.edu.sg/handle/10635/13636

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Maryland

15. Liu, Yingkai. Fabrication and Characterization of Polypyrrole/Gold Bilayer Microactuators for Bio-Mems Applications.

Degree: Mechanical Engineering, 2005, University of Maryland

 The proof of concept for conjugated polymer bilayer microactuators had been demonstrated prior to this dissertation with numerous devices, and their advantages in biomedical applications… (more)

Subjects/Keywords: Engineering, Mechanical; MEMS; polypyrrole; bilayer; microactuator; biomedical

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APA (6th Edition):

Liu, Y. (2005). Fabrication and Characterization of Polypyrrole/Gold Bilayer Microactuators for Bio-Mems Applications. (Thesis). University of Maryland. Retrieved from http://hdl.handle.net/1903/3008

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Liu, Yingkai. “Fabrication and Characterization of Polypyrrole/Gold Bilayer Microactuators for Bio-Mems Applications.” 2005. Thesis, University of Maryland. Accessed May 07, 2021. http://hdl.handle.net/1903/3008.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Liu, Yingkai. “Fabrication and Characterization of Polypyrrole/Gold Bilayer Microactuators for Bio-Mems Applications.” 2005. Web. 07 May 2021.

Vancouver:

Liu Y. Fabrication and Characterization of Polypyrrole/Gold Bilayer Microactuators for Bio-Mems Applications. [Internet] [Thesis]. University of Maryland; 2005. [cited 2021 May 07]. Available from: http://hdl.handle.net/1903/3008.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Liu Y. Fabrication and Characterization of Polypyrrole/Gold Bilayer Microactuators for Bio-Mems Applications. [Thesis]. University of Maryland; 2005. Available from: http://hdl.handle.net/1903/3008

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Michigan

16. Diez-Garias, Francisco J. Electrokinetic microactuator arrays for active sublayer control of turbulent boundary layers.

Degree: PhD, Mechanical engineering, 2002, University of Michigan

 The present study has been the first to examine the electrokinetic principle as the basis for a new class of microscale actuator arrays for active… (more)

Subjects/Keywords: Active; Arrays; Control; Drag; Electrokinetic; Microactuator; Sublayer; Turbulent Boundary Layers

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APA (6th Edition):

Diez-Garias, F. J. (2002). Electrokinetic microactuator arrays for active sublayer control of turbulent boundary layers. (Doctoral Dissertation). University of Michigan. Retrieved from http://hdl.handle.net/2027.42/129377

Chicago Manual of Style (16th Edition):

Diez-Garias, Francisco J. “Electrokinetic microactuator arrays for active sublayer control of turbulent boundary layers.” 2002. Doctoral Dissertation, University of Michigan. Accessed May 07, 2021. http://hdl.handle.net/2027.42/129377.

MLA Handbook (7th Edition):

Diez-Garias, Francisco J. “Electrokinetic microactuator arrays for active sublayer control of turbulent boundary layers.” 2002. Web. 07 May 2021.

Vancouver:

Diez-Garias FJ. Electrokinetic microactuator arrays for active sublayer control of turbulent boundary layers. [Internet] [Doctoral dissertation]. University of Michigan; 2002. [cited 2021 May 07]. Available from: http://hdl.handle.net/2027.42/129377.

Council of Science Editors:

Diez-Garias FJ. Electrokinetic microactuator arrays for active sublayer control of turbulent boundary layers. [Doctoral Dissertation]. University of Michigan; 2002. Available from: http://hdl.handle.net/2027.42/129377

17. Choi, Jong Soo. Thin-Film PZT Scanning Micro-actuators for Vertical Cross-sectional Imaging in Endomicroscopy.

Degree: PhD, Mechanical Engineering, 2017, University of Michigan

 The advancement of optics and the development of microelectromechanical systems (MEMS) based scanners has enabled powerful optical imaging techniques that can perform optical sectioning with… (more)

Subjects/Keywords: piezoelectric microactuator for vertical cross-sectional imaging in endomicroscopy; Science

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APA (6th Edition):

Choi, J. S. (2017). Thin-Film PZT Scanning Micro-actuators for Vertical Cross-sectional Imaging in Endomicroscopy. (Doctoral Dissertation). University of Michigan. Retrieved from http://hdl.handle.net/2027.42/137124

Chicago Manual of Style (16th Edition):

Choi, Jong Soo. “Thin-Film PZT Scanning Micro-actuators for Vertical Cross-sectional Imaging in Endomicroscopy.” 2017. Doctoral Dissertation, University of Michigan. Accessed May 07, 2021. http://hdl.handle.net/2027.42/137124.

MLA Handbook (7th Edition):

Choi, Jong Soo. “Thin-Film PZT Scanning Micro-actuators for Vertical Cross-sectional Imaging in Endomicroscopy.” 2017. Web. 07 May 2021.

Vancouver:

Choi JS. Thin-Film PZT Scanning Micro-actuators for Vertical Cross-sectional Imaging in Endomicroscopy. [Internet] [Doctoral dissertation]. University of Michigan; 2017. [cited 2021 May 07]. Available from: http://hdl.handle.net/2027.42/137124.

Council of Science Editors:

Choi JS. Thin-Film PZT Scanning Micro-actuators for Vertical Cross-sectional Imaging in Endomicroscopy. [Doctoral Dissertation]. University of Michigan; 2017. Available from: http://hdl.handle.net/2027.42/137124


Brigham Young University

18. Teichert, Kendall B. Multi-physics Modeling and Calibration for Self-sensing of Thermomechanical In-plane Microactuators.

Degree: MS, 2008, Brigham Young University

 As technology advances and engineering capabilities improve, more research has focused on microscopic possibilities. Microelectromechanical systems (MEMS) is one area that has received much attention… (more)

Subjects/Keywords: teichert; BYU; piezoresistance; calibration; self-sensing; thermomechanical in-plane microactuator; MEMS; Mechanical Engineering

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APA (6th Edition):

Teichert, K. B. (2008). Multi-physics Modeling and Calibration for Self-sensing of Thermomechanical In-plane Microactuators. (Masters Thesis). Brigham Young University. Retrieved from https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=2527&context=etd

Chicago Manual of Style (16th Edition):

Teichert, Kendall B. “Multi-physics Modeling and Calibration for Self-sensing of Thermomechanical In-plane Microactuators.” 2008. Masters Thesis, Brigham Young University. Accessed May 07, 2021. https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=2527&context=etd.

MLA Handbook (7th Edition):

Teichert, Kendall B. “Multi-physics Modeling and Calibration for Self-sensing of Thermomechanical In-plane Microactuators.” 2008. Web. 07 May 2021.

Vancouver:

Teichert KB. Multi-physics Modeling and Calibration for Self-sensing of Thermomechanical In-plane Microactuators. [Internet] [Masters thesis]. Brigham Young University; 2008. [cited 2021 May 07]. Available from: https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=2527&context=etd.

Council of Science Editors:

Teichert KB. Multi-physics Modeling and Calibration for Self-sensing of Thermomechanical In-plane Microactuators. [Masters Thesis]. Brigham Young University; 2008. Available from: https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=2527&context=etd


University of Minnesota

19. Makowski, Jan Dominique. Band-Gap tuning through mechanical semiconductor heterostructures.

Degree: PhD, 2008, University of Minnesota

 Band-gap engineering of semiconductor heterostructures has become commonplace for laser diodes and photodetectors. However, the quantum states of these devices are largely fixed during crystal… (more)

Subjects/Keywords: Band-Gap Engineering; Microactuator; MOEMS; Photoluminescence; Quantum Coupling; Quantum Well Devices; Electrical Engineering

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APA (6th Edition):

Makowski, J. D. (2008). Band-Gap tuning through mechanical semiconductor heterostructures. (Doctoral Dissertation). University of Minnesota. Retrieved from http://purl.umn.edu/47186

Chicago Manual of Style (16th Edition):

Makowski, Jan Dominique. “Band-Gap tuning through mechanical semiconductor heterostructures.” 2008. Doctoral Dissertation, University of Minnesota. Accessed May 07, 2021. http://purl.umn.edu/47186.

MLA Handbook (7th Edition):

Makowski, Jan Dominique. “Band-Gap tuning through mechanical semiconductor heterostructures.” 2008. Web. 07 May 2021.

Vancouver:

Makowski JD. Band-Gap tuning through mechanical semiconductor heterostructures. [Internet] [Doctoral dissertation]. University of Minnesota; 2008. [cited 2021 May 07]. Available from: http://purl.umn.edu/47186.

Council of Science Editors:

Makowski JD. Band-Gap tuning through mechanical semiconductor heterostructures. [Doctoral Dissertation]. University of Minnesota; 2008. Available from: http://purl.umn.edu/47186


Georgia Tech

20. Finkler, Ofer. Electrostatic microactuator control system for force spectroscopy.

Degree: MS, Electrical and Computer Engineering, 2009, Georgia Tech

 Single molecule force spectroscopy is an important technique to determine the interaction forces between biomolecules. Atomic force microscopy (AFM) is one of the tools used… (more)

Subjects/Keywords: Atomic force microscopy; Electrostatic microactuator; Single molecule force spectroscopy; Microactuators; Microelectromechanical systems

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APA (6th Edition):

Finkler, O. (2009). Electrostatic microactuator control system for force spectroscopy. (Masters Thesis). Georgia Tech. Retrieved from http://hdl.handle.net/1853/31669

Chicago Manual of Style (16th Edition):

Finkler, Ofer. “Electrostatic microactuator control system for force spectroscopy.” 2009. Masters Thesis, Georgia Tech. Accessed May 07, 2021. http://hdl.handle.net/1853/31669.

MLA Handbook (7th Edition):

Finkler, Ofer. “Electrostatic microactuator control system for force spectroscopy.” 2009. Web. 07 May 2021.

Vancouver:

Finkler O. Electrostatic microactuator control system for force spectroscopy. [Internet] [Masters thesis]. Georgia Tech; 2009. [cited 2021 May 07]. Available from: http://hdl.handle.net/1853/31669.

Council of Science Editors:

Finkler O. Electrostatic microactuator control system for force spectroscopy. [Masters Thesis]. Georgia Tech; 2009. Available from: http://hdl.handle.net/1853/31669

21. Wernow, Josiah Natan. On the Future of Head-Based Microactuators in Hard Disk Drives.

Degree: Mechanical Engineering, 2012, University of California – Berkeley

 Dual-stage actuation is an important technology enabler for advancing hard disk drive capacity and performance. This thesis describes the ongoing trend of decreasing track pitches… (more)

Subjects/Keywords: Mechanical engineering; Materials Science; Electrical engineering; Dual-stage; Hard disk drive; Microactuator; Microfabrication; Optimal control; Piezoelectric

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APA (6th Edition):

Wernow, J. N. (2012). On the Future of Head-Based Microactuators in Hard Disk Drives. (Thesis). University of California – Berkeley. Retrieved from http://www.escholarship.org/uc/item/4hb450jm

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Wernow, Josiah Natan. “On the Future of Head-Based Microactuators in Hard Disk Drives.” 2012. Thesis, University of California – Berkeley. Accessed May 07, 2021. http://www.escholarship.org/uc/item/4hb450jm.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Wernow, Josiah Natan. “On the Future of Head-Based Microactuators in Hard Disk Drives.” 2012. Web. 07 May 2021.

Vancouver:

Wernow JN. On the Future of Head-Based Microactuators in Hard Disk Drives. [Internet] [Thesis]. University of California – Berkeley; 2012. [cited 2021 May 07]. Available from: http://www.escholarship.org/uc/item/4hb450jm.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Wernow JN. On the Future of Head-Based Microactuators in Hard Disk Drives. [Thesis]. University of California – Berkeley; 2012. Available from: http://www.escholarship.org/uc/item/4hb450jm

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

22. Cho, In Sik. Development of SOI-based Thermally Actuated Micromirror.

Degree: 2019, University of Waterloo

 Micromirror is a Micro-Electro-Mechanical Systems (MEMS) device used to steer light by tilting or displacing a reflective surface. It is applied in numerous scanning applications… (more)

Subjects/Keywords: micromirror; MEMS mirror; MEMS scanner; MEMS device; MEMS; microactuator; MEMS actuator; microfabrication; LiDAR; MEMS optics

…MEMS device is explained. 2.1. Microactuator A microactuator or MEMS actuator is a device… 

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APA (6th Edition):

Cho, I. S. (2019). Development of SOI-based Thermally Actuated Micromirror. (Thesis). University of Waterloo. Retrieved from http://hdl.handle.net/10012/15120

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Cho, In Sik. “Development of SOI-based Thermally Actuated Micromirror.” 2019. Thesis, University of Waterloo. Accessed May 07, 2021. http://hdl.handle.net/10012/15120.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Cho, In Sik. “Development of SOI-based Thermally Actuated Micromirror.” 2019. Web. 07 May 2021.

Vancouver:

Cho IS. Development of SOI-based Thermally Actuated Micromirror. [Internet] [Thesis]. University of Waterloo; 2019. [cited 2021 May 07]. Available from: http://hdl.handle.net/10012/15120.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Cho IS. Development of SOI-based Thermally Actuated Micromirror. [Thesis]. University of Waterloo; 2019. Available from: http://hdl.handle.net/10012/15120

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

23. Ρέππα, Βασιλική. Fault detection and diagnosis : application in microelectromechanical systems.

Degree: 2010, University of Patras

This thesis presents the development of a fault detection and diagnosis (FDD) procedure capable of capturing, isolating and identifying multiple abrupt parametric faults. The proposed… (more)

Subjects/Keywords: Fault detection; Fault isolation; Fault identification; Set membership identification; Orthotopes; Ellipsoids; Microelectromechanical systems; Electrostatic microactuator; Torsional resonance atomic force microscope; 620.004 4; Ανίχνευση σφαλμάτων; Απομόνωση σφαλμάτων; Αναγνώριση σφαλμάτων; Αναγνώριση συνόλου συμμετοχής; Ορθότοπα; Ελλειψοειδή; Μικροηλεκτρομηχανικά συστήματα; Ηλεκτροστατικός μικροεπενεργητής; Ατομικό μικροσκόπιο συντονισμού στρέψης

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APA (6th Edition):

Ρέππα, . (2010). Fault detection and diagnosis : application in microelectromechanical systems. (Doctoral Dissertation). University of Patras. Retrieved from http://nemertes.lis.upatras.gr/jspui/handle/10889/3932

Chicago Manual of Style (16th Edition):

Ρέππα, Βασιλική. “Fault detection and diagnosis : application in microelectromechanical systems.” 2010. Doctoral Dissertation, University of Patras. Accessed May 07, 2021. http://nemertes.lis.upatras.gr/jspui/handle/10889/3932.

MLA Handbook (7th Edition):

Ρέππα, Βασιλική. “Fault detection and diagnosis : application in microelectromechanical systems.” 2010. Web. 07 May 2021.

Vancouver:

Ρέππα . Fault detection and diagnosis : application in microelectromechanical systems. [Internet] [Doctoral dissertation]. University of Patras; 2010. [cited 2021 May 07]. Available from: http://nemertes.lis.upatras.gr/jspui/handle/10889/3932.

Council of Science Editors:

Ρέππα . Fault detection and diagnosis : application in microelectromechanical systems. [Doctoral Dissertation]. University of Patras; 2010. Available from: http://nemertes.lis.upatras.gr/jspui/handle/10889/3932


Brigham Young University

24. Cragun, Rebecca. Thermal Microactuators for Microelectromechanical Systems (MEMS).

Degree: MS, 2003, Brigham Young University

  Microactuators are needed to convert energy into mechanical work at the microscale. Thermal microactuators can be used to produce this needed mechanical work. The… (more)

Subjects/Keywords: MEMS; microelectromechanical systems; compliant micromechanism; compliant mechanism; thermal actuator; microactuator; thermal expansion device; themomechanical inplane micromechanisms; thermal expansion; Mechanical Engineering

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APA (6th Edition):

Cragun, R. (2003). Thermal Microactuators for Microelectromechanical Systems (MEMS). (Masters Thesis). Brigham Young University. Retrieved from https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1053&context=etd

Chicago Manual of Style (16th Edition):

Cragun, Rebecca. “Thermal Microactuators for Microelectromechanical Systems (MEMS).” 2003. Masters Thesis, Brigham Young University. Accessed May 07, 2021. https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1053&context=etd.

MLA Handbook (7th Edition):

Cragun, Rebecca. “Thermal Microactuators for Microelectromechanical Systems (MEMS).” 2003. Web. 07 May 2021.

Vancouver:

Cragun R. Thermal Microactuators for Microelectromechanical Systems (MEMS). [Internet] [Masters thesis]. Brigham Young University; 2003. [cited 2021 May 07]. Available from: https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1053&context=etd.

Council of Science Editors:

Cragun R. Thermal Microactuators for Microelectromechanical Systems (MEMS). [Masters Thesis]. Brigham Young University; 2003. Available from: https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1053&context=etd


Brigham Young University

25. Waterfall, Tyler Lane. Design of Piezoresistive MEMS Force and Displacement Sensors.

Degree: MS, 2006, Brigham Young University

  MEMS (MicroElectroMechanical Systems) sensors are used in acceleration, flow, pressure and force sensing applications on the micro and macro levels. Much research has focused… (more)

Subjects/Keywords: piezoresistance; MEMS; force; displacement; sensor; characterization; integral; compliant mechanisms; thermal; microactuator; complex loads; polysilicon; Mechanical Engineering

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APA (6th Edition):

Waterfall, T. L. (2006). Design of Piezoresistive MEMS Force and Displacement Sensors. (Masters Thesis). Brigham Young University. Retrieved from https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1805&context=etd

Chicago Manual of Style (16th Edition):

Waterfall, Tyler Lane. “Design of Piezoresistive MEMS Force and Displacement Sensors.” 2006. Masters Thesis, Brigham Young University. Accessed May 07, 2021. https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1805&context=etd.

MLA Handbook (7th Edition):

Waterfall, Tyler Lane. “Design of Piezoresistive MEMS Force and Displacement Sensors.” 2006. Web. 07 May 2021.

Vancouver:

Waterfall TL. Design of Piezoresistive MEMS Force and Displacement Sensors. [Internet] [Masters thesis]. Brigham Young University; 2006. [cited 2021 May 07]. Available from: https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1805&context=etd.

Council of Science Editors:

Waterfall TL. Design of Piezoresistive MEMS Force and Displacement Sensors. [Masters Thesis]. Brigham Young University; 2006. Available from: https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1805&context=etd


University of Florida

26. Sahu, Bijoyraj. Design, Fabrication, and Characterization of a Scanning Probe Microscopy Cantilever with an Integrated Electrothermally Actuated Microgripper for Automated Tool-Tip Exchange.

Degree: PhD, Mechanical Engineering - Mechanical and Aerospace Engineering, 2013, University of Florida

Subjects/Keywords: Analytical models; Cantilevers; Design analysis; Design optimization; Electric potential; Etching; Manufacturing; Modeling; Silicon; Structural deflection; afm; electrothermal; microactuator; microgripper; nanofabrication

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APA (6th Edition):

Sahu, B. (2013). Design, Fabrication, and Characterization of a Scanning Probe Microscopy Cantilever with an Integrated Electrothermally Actuated Microgripper for Automated Tool-Tip Exchange. (Doctoral Dissertation). University of Florida. Retrieved from https://ufdc.ufl.edu/UFE0045392

Chicago Manual of Style (16th Edition):

Sahu, Bijoyraj. “Design, Fabrication, and Characterization of a Scanning Probe Microscopy Cantilever with an Integrated Electrothermally Actuated Microgripper for Automated Tool-Tip Exchange.” 2013. Doctoral Dissertation, University of Florida. Accessed May 07, 2021. https://ufdc.ufl.edu/UFE0045392.

MLA Handbook (7th Edition):

Sahu, Bijoyraj. “Design, Fabrication, and Characterization of a Scanning Probe Microscopy Cantilever with an Integrated Electrothermally Actuated Microgripper for Automated Tool-Tip Exchange.” 2013. Web. 07 May 2021.

Vancouver:

Sahu B. Design, Fabrication, and Characterization of a Scanning Probe Microscopy Cantilever with an Integrated Electrothermally Actuated Microgripper for Automated Tool-Tip Exchange. [Internet] [Doctoral dissertation]. University of Florida; 2013. [cited 2021 May 07]. Available from: https://ufdc.ufl.edu/UFE0045392.

Council of Science Editors:

Sahu B. Design, Fabrication, and Characterization of a Scanning Probe Microscopy Cantilever with an Integrated Electrothermally Actuated Microgripper for Automated Tool-Tip Exchange. [Doctoral Dissertation]. University of Florida; 2013. Available from: https://ufdc.ufl.edu/UFE0045392


Louisiana State University

27. Song, In-Hyouk. Laterally Movable Gate Field Effect Transistor (LMGFET) for microsensor and microactuator applications.

Degree: PhD, Electrical and Computer Engineering, 2005, Louisiana State University

 Laterally Movable Gate Field Effect Transistor (LMGFET) invented at LSU as a microactuator is the subject of study in this research. The gate moving in… (more)

Subjects/Keywords: monolithic integration; MEMS; LMGFET; laterally movable gate FET; post-IC fabrication; LIGA-like; microsensor; microactuator

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APA (6th Edition):

Song, I. (2005). Laterally Movable Gate Field Effect Transistor (LMGFET) for microsensor and microactuator applications. (Doctoral Dissertation). Louisiana State University. Retrieved from etd-04152005-002604 ; https://digitalcommons.lsu.edu/gradschool_dissertations/702

Chicago Manual of Style (16th Edition):

Song, In-Hyouk. “Laterally Movable Gate Field Effect Transistor (LMGFET) for microsensor and microactuator applications.” 2005. Doctoral Dissertation, Louisiana State University. Accessed May 07, 2021. etd-04152005-002604 ; https://digitalcommons.lsu.edu/gradschool_dissertations/702.

MLA Handbook (7th Edition):

Song, In-Hyouk. “Laterally Movable Gate Field Effect Transistor (LMGFET) for microsensor and microactuator applications.” 2005. Web. 07 May 2021.

Vancouver:

Song I. Laterally Movable Gate Field Effect Transistor (LMGFET) for microsensor and microactuator applications. [Internet] [Doctoral dissertation]. Louisiana State University; 2005. [cited 2021 May 07]. Available from: etd-04152005-002604 ; https://digitalcommons.lsu.edu/gradschool_dissertations/702.

Council of Science Editors:

Song I. Laterally Movable Gate Field Effect Transistor (LMGFET) for microsensor and microactuator applications. [Doctoral Dissertation]. Louisiana State University; 2005. Available from: etd-04152005-002604 ; https://digitalcommons.lsu.edu/gradschool_dissertations/702


University of Cincinnati

28. CHO, HYOUNG JIN. MICROMACHINED PERMANENT MAGNETS AND THEIR MEMS APPLICATIONS.

Degree: PhD, Engineering : Electrical Engineering, 2002, University of Cincinnati

 In this research, new micromachined permanent magnets have been proposed, developed and characterized for MEMS applications. In realizing micromachined permanent magnets, a new electroplating technique… (more)

Subjects/Keywords: magnetic mems; micromachined magnetic microactuator; micromachined optical scanner; micromachined permanent magnet; bi-directional actuation

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APA (6th Edition):

CHO, H. J. (2002). MICROMACHINED PERMANENT MAGNETS AND THEIR MEMS APPLICATIONS. (Doctoral Dissertation). University of Cincinnati. Retrieved from http://rave.ohiolink.edu/etdc/view?acc_num=ucin1014839747

Chicago Manual of Style (16th Edition):

CHO, HYOUNG JIN. “MICROMACHINED PERMANENT MAGNETS AND THEIR MEMS APPLICATIONS.” 2002. Doctoral Dissertation, University of Cincinnati. Accessed May 07, 2021. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1014839747.

MLA Handbook (7th Edition):

CHO, HYOUNG JIN. “MICROMACHINED PERMANENT MAGNETS AND THEIR MEMS APPLICATIONS.” 2002. Web. 07 May 2021.

Vancouver:

CHO HJ. MICROMACHINED PERMANENT MAGNETS AND THEIR MEMS APPLICATIONS. [Internet] [Doctoral dissertation]. University of Cincinnati; 2002. [cited 2021 May 07]. Available from: http://rave.ohiolink.edu/etdc/view?acc_num=ucin1014839747.

Council of Science Editors:

CHO HJ. MICROMACHINED PERMANENT MAGNETS AND THEIR MEMS APPLICATIONS. [Doctoral Dissertation]. University of Cincinnati; 2002. Available from: http://rave.ohiolink.edu/etdc/view?acc_num=ucin1014839747


Brigham Young University

29. Jensen, Kimberly A. Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning.

Degree: MS, 2003, Brigham Young University

 This thesis introduces two ortho-planar MEMS devices that can be used to position microcomponents: the XZ Micropositioning Mechanism and the XYZ Micromanipulator. The displacement and… (more)

Subjects/Keywords: MEMS; microelectromechanical systems; micropositioning; compliant mechanisms; out-of-plane; ortho-planar; surface micromachining; thermal actuation; thermomechanical in-plane microactuator; TIM; Mechanical Engineering

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Jensen, K. A. (2003). Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning. (Masters Thesis). Brigham Young University. Retrieved from https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1229&context=etd

Chicago Manual of Style (16th Edition):

Jensen, Kimberly A. “Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning.” 2003. Masters Thesis, Brigham Young University. Accessed May 07, 2021. https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1229&context=etd.

MLA Handbook (7th Edition):

Jensen, Kimberly A. “Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning.” 2003. Web. 07 May 2021.

Vancouver:

Jensen KA. Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning. [Internet] [Masters thesis]. Brigham Young University; 2003. [cited 2021 May 07]. Available from: https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1229&context=etd.

Council of Science Editors:

Jensen KA. Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning. [Masters Thesis]. Brigham Young University; 2003. Available from: https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1229&context=etd


Delft University of Technology

30. Perez Garza, H.H. Development of Nanotools for Applications in (sub-)Femtofluidics and Graphene Technologies.

Degree: 2015, Delft University of Technology

 Properties of matter at the nano-scale may be very different from the ones observed at the macro-scale. The continuous variation of characteristics with diminishing size… (more)

Subjects/Keywords: Nanotechnology; MEMS; Femtopipette; AFM; Hollow Cantilever; Nanopipette; Microfluidics; Micropumps; Dispensing; Aspirating; Piezoresistive; Nanomanipulator; In-plane Tensile Device; Extreme Strain; Thermal Microactuator; Graphene; Clamping

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APA (6th Edition):

Perez Garza, H. H. (2015). Development of Nanotools for Applications in (sub-)Femtofluidics and Graphene Technologies. (Doctoral Dissertation). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4 ; urn:NBN:nl:ui:24-uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4 ; urn:NBN:nl:ui:24-uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4 ; http://resolver.tudelft.nl/uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4

Chicago Manual of Style (16th Edition):

Perez Garza, H H. “Development of Nanotools for Applications in (sub-)Femtofluidics and Graphene Technologies.” 2015. Doctoral Dissertation, Delft University of Technology. Accessed May 07, 2021. http://resolver.tudelft.nl/uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4 ; urn:NBN:nl:ui:24-uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4 ; urn:NBN:nl:ui:24-uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4 ; http://resolver.tudelft.nl/uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4.

MLA Handbook (7th Edition):

Perez Garza, H H. “Development of Nanotools for Applications in (sub-)Femtofluidics and Graphene Technologies.” 2015. Web. 07 May 2021.

Vancouver:

Perez Garza HH. Development of Nanotools for Applications in (sub-)Femtofluidics and Graphene Technologies. [Internet] [Doctoral dissertation]. Delft University of Technology; 2015. [cited 2021 May 07]. Available from: http://resolver.tudelft.nl/uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4 ; urn:NBN:nl:ui:24-uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4 ; urn:NBN:nl:ui:24-uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4 ; http://resolver.tudelft.nl/uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4.

Council of Science Editors:

Perez Garza HH. Development of Nanotools for Applications in (sub-)Femtofluidics and Graphene Technologies. [Doctoral Dissertation]. Delft University of Technology; 2015. Available from: http://resolver.tudelft.nl/uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4 ; urn:NBN:nl:ui:24-uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4 ; urn:NBN:nl:ui:24-uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4 ; http://resolver.tudelft.nl/uuid:ca9e559b-ec04-4d4f-ac52-bf94b2e901e4

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