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You searched for subject:(Electrostatic MEMS). Showing records 1 – 30 of 62 total matches.

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University of Waterloo

1. Alneamy, Ayman. Combined Electrostatic/Electromagnetic MEMS Actuators.

Degree: 2016, University of Waterloo

 In this work, one and two degrees of freedom (DOF) lumped mass models of Micro- Electro-Mechanical System (MEMS) actuators are introduced, investigated, and compared to… (more)

Subjects/Keywords: MEMS; ELECTROSTATIC; ELECTROMAGNETIC; COMBINED ACTUATOR

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Alneamy, A. (2016). Combined Electrostatic/Electromagnetic MEMS Actuators. (Thesis). University of Waterloo. Retrieved from http://hdl.handle.net/10012/10622

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Alneamy, Ayman. “Combined Electrostatic/Electromagnetic MEMS Actuators.” 2016. Thesis, University of Waterloo. Accessed April 14, 2021. http://hdl.handle.net/10012/10622.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Alneamy, Ayman. “Combined Electrostatic/Electromagnetic MEMS Actuators.” 2016. Web. 14 Apr 2021.

Vancouver:

Alneamy A. Combined Electrostatic/Electromagnetic MEMS Actuators. [Internet] [Thesis]. University of Waterloo; 2016. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/10012/10622.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Alneamy A. Combined Electrostatic/Electromagnetic MEMS Actuators. [Thesis]. University of Waterloo; 2016. Available from: http://hdl.handle.net/10012/10622

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


King Abdullah University of Science and Technology

2. Jaber, Nizar. Higher Order Modes Excitation of Micro Cantilever Beams.

Degree: Physical Science and Engineering (PSE) Division, 2014, King Abdullah University of Science and Technology

 In this study, we present analytical and experimental investigation of electrically actuated micro cantilever based resonators. These devices are fabricated using polyimide and coated with… (more)

Subjects/Keywords: MEMS; MicroContilever; Electrostatic; Resonators; Modes

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APA (6th Edition):

Jaber, N. (2014). Higher Order Modes Excitation of Micro Cantilever Beams. (Thesis). King Abdullah University of Science and Technology. Retrieved from http://hdl.handle.net/10754/317259

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Jaber, Nizar. “Higher Order Modes Excitation of Micro Cantilever Beams.” 2014. Thesis, King Abdullah University of Science and Technology. Accessed April 14, 2021. http://hdl.handle.net/10754/317259.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Jaber, Nizar. “Higher Order Modes Excitation of Micro Cantilever Beams.” 2014. Web. 14 Apr 2021.

Vancouver:

Jaber N. Higher Order Modes Excitation of Micro Cantilever Beams. [Internet] [Thesis]. King Abdullah University of Science and Technology; 2014. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/10754/317259.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Jaber N. Higher Order Modes Excitation of Micro Cantilever Beams. [Thesis]. King Abdullah University of Science and Technology; 2014. Available from: http://hdl.handle.net/10754/317259

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Utah

3. Anjewierden, Douglas. An electrostatic microvalve for pneumatic control of microfluidic systems.

Degree: MS, Mechanical Engineering, 2011, University of Utah

 An electrostatic microvalve for the pneumatic control of microfluidic devices is designed, modeled, fabricated, and characterized. The valve consists of several, individually manufactured pieces assembled… (more)

Subjects/Keywords: Electrostatic; MEMS; Microfluidics; Microvalves; Pneumatic control

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APA (6th Edition):

Anjewierden, D. (2011). An electrostatic microvalve for pneumatic control of microfluidic systems. (Masters Thesis). University of Utah. Retrieved from http://content.lib.utah.edu/cdm/singleitem/collection/etd3/id/398/rec/198

Chicago Manual of Style (16th Edition):

Anjewierden, Douglas. “An electrostatic microvalve for pneumatic control of microfluidic systems.” 2011. Masters Thesis, University of Utah. Accessed April 14, 2021. http://content.lib.utah.edu/cdm/singleitem/collection/etd3/id/398/rec/198.

MLA Handbook (7th Edition):

Anjewierden, Douglas. “An electrostatic microvalve for pneumatic control of microfluidic systems.” 2011. Web. 14 Apr 2021.

Vancouver:

Anjewierden D. An electrostatic microvalve for pneumatic control of microfluidic systems. [Internet] [Masters thesis]. University of Utah; 2011. [cited 2021 Apr 14]. Available from: http://content.lib.utah.edu/cdm/singleitem/collection/etd3/id/398/rec/198.

Council of Science Editors:

Anjewierden D. An electrostatic microvalve for pneumatic control of microfluidic systems. [Masters Thesis]. University of Utah; 2011. Available from: http://content.lib.utah.edu/cdm/singleitem/collection/etd3/id/398/rec/198


University of Windsor

4. Aryal, Niwit. Design And Modeling Of An Electrostatic Ally Actuated Mems Micromirror For Light Detection And Ranging.

Degree: MA, Electrical and Computer Engineering, 2019, University of Windsor

 A Light Detection and Ranging (LIDAR) system, which is one of the promising technologies for autonomous vehicles, contains many miniature micromachined devices. The micromirror is… (more)

Subjects/Keywords: electrostatic actuation; LIDAR; MEMS micromirror; PolyMUMPs; repulsive electrostatic actuation; stroke

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APA (6th Edition):

Aryal, N. (2019). Design And Modeling Of An Electrostatic Ally Actuated Mems Micromirror For Light Detection And Ranging. (Masters Thesis). University of Windsor. Retrieved from https://scholar.uwindsor.ca/etd/8160

Chicago Manual of Style (16th Edition):

Aryal, Niwit. “Design And Modeling Of An Electrostatic Ally Actuated Mems Micromirror For Light Detection And Ranging.” 2019. Masters Thesis, University of Windsor. Accessed April 14, 2021. https://scholar.uwindsor.ca/etd/8160.

MLA Handbook (7th Edition):

Aryal, Niwit. “Design And Modeling Of An Electrostatic Ally Actuated Mems Micromirror For Light Detection And Ranging.” 2019. Web. 14 Apr 2021.

Vancouver:

Aryal N. Design And Modeling Of An Electrostatic Ally Actuated Mems Micromirror For Light Detection And Ranging. [Internet] [Masters thesis]. University of Windsor; 2019. [cited 2021 Apr 14]. Available from: https://scholar.uwindsor.ca/etd/8160.

Council of Science Editors:

Aryal N. Design And Modeling Of An Electrostatic Ally Actuated Mems Micromirror For Light Detection And Ranging. [Masters Thesis]. University of Windsor; 2019. Available from: https://scholar.uwindsor.ca/etd/8160


University of Waterloo

5. Khater, Mahmoud Elsayed. Use of Instabilities in Electrostatic Micro-Electro-Mechanical Systems for Actuation and Sensing.

Degree: 2011, University of Waterloo

 This thesis develops methods to exploit static and dynamic instabilities in electrostatic MEMS to develop new MEMS devices, namely dynamically actuated micro switches and binary… (more)

Subjects/Keywords: Electrostatic MEMS; Nonlinear Dynamics; Gas sensors; MEMS switches

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Khater, M. E. (2011). Use of Instabilities in Electrostatic Micro-Electro-Mechanical Systems for Actuation and Sensing. (Thesis). University of Waterloo. Retrieved from http://hdl.handle.net/10012/6398

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Khater, Mahmoud Elsayed. “Use of Instabilities in Electrostatic Micro-Electro-Mechanical Systems for Actuation and Sensing.” 2011. Thesis, University of Waterloo. Accessed April 14, 2021. http://hdl.handle.net/10012/6398.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Khater, Mahmoud Elsayed. “Use of Instabilities in Electrostatic Micro-Electro-Mechanical Systems for Actuation and Sensing.” 2011. Web. 14 Apr 2021.

Vancouver:

Khater ME. Use of Instabilities in Electrostatic Micro-Electro-Mechanical Systems for Actuation and Sensing. [Internet] [Thesis]. University of Waterloo; 2011. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/10012/6398.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Khater ME. Use of Instabilities in Electrostatic Micro-Electro-Mechanical Systems for Actuation and Sensing. [Thesis]. University of Waterloo; 2011. Available from: http://hdl.handle.net/10012/6398

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


Université de Grenoble

6. Koszewski, Adam. Etude de la fiabilité de MEMS à fonctionnement électrostatique : Reliability studies of electrostatically actuated MEMS.

Degree: Docteur es, Sciences et technologie industrielles, 2011, Université de Grenoble

Cette thèse résume les travaux concernant les essais de fiabilité des commutateurs RF MEMS capacitifs et ohmiques développé par le CEA-Leti.Dans le premier chapitre les… (more)

Subjects/Keywords: Switch; Fiabilité; Électrostatique; Dielectrique; MEMS; Contact; Switch; Reliability; Electrostatic; Dielectric; MEMS; Contact

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Koszewski, A. (2011). Etude de la fiabilité de MEMS à fonctionnement électrostatique : Reliability studies of electrostatically actuated MEMS. (Doctoral Dissertation). Université de Grenoble. Retrieved from http://www.theses.fr/2011GRENT063

Chicago Manual of Style (16th Edition):

Koszewski, Adam. “Etude de la fiabilité de MEMS à fonctionnement électrostatique : Reliability studies of electrostatically actuated MEMS.” 2011. Doctoral Dissertation, Université de Grenoble. Accessed April 14, 2021. http://www.theses.fr/2011GRENT063.

MLA Handbook (7th Edition):

Koszewski, Adam. “Etude de la fiabilité de MEMS à fonctionnement électrostatique : Reliability studies of electrostatically actuated MEMS.” 2011. Web. 14 Apr 2021.

Vancouver:

Koszewski A. Etude de la fiabilité de MEMS à fonctionnement électrostatique : Reliability studies of electrostatically actuated MEMS. [Internet] [Doctoral dissertation]. Université de Grenoble; 2011. [cited 2021 Apr 14]. Available from: http://www.theses.fr/2011GRENT063.

Council of Science Editors:

Koszewski A. Etude de la fiabilité de MEMS à fonctionnement électrostatique : Reliability studies of electrostatically actuated MEMS. [Doctoral Dissertation]. Université de Grenoble; 2011. Available from: http://www.theses.fr/2011GRENT063


INP Toulouse

7. Ciotirca, Lavinia-Elena. System design of a low-power three-axis underdamped MEMS accelerometer with simultaneous electrostatic damping control : Conception d’un circuit d’instrumentation hautes performances dédié à un accéléromètre troisaxes sous-amorti, pour le marché de l’électronique grand public.

Degree: Docteur es, Micro Nano Systèmes, 2017, INP Toulouse

 L’intégration de plusieurs capteurs inertiels au sein d’un même dispositif de type MEMS afin de pouvoir estimer plusieurs degrés de liberté devient un enjeu important… (more)

Subjects/Keywords: Microélectronique; Capteurs inertiels; MEMS; Amortissement électrostatique; Microelectronics; Inertial sensors; MEMS; Electrostatic damping

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APA (6th Edition):

Ciotirca, L. (2017). System design of a low-power three-axis underdamped MEMS accelerometer with simultaneous electrostatic damping control : Conception d’un circuit d’instrumentation hautes performances dédié à un accéléromètre troisaxes sous-amorti, pour le marché de l’électronique grand public. (Doctoral Dissertation). INP Toulouse. Retrieved from http://www.theses.fr/2017INPT0043

Chicago Manual of Style (16th Edition):

Ciotirca, Lavinia-Elena. “System design of a low-power three-axis underdamped MEMS accelerometer with simultaneous electrostatic damping control : Conception d’un circuit d’instrumentation hautes performances dédié à un accéléromètre troisaxes sous-amorti, pour le marché de l’électronique grand public.” 2017. Doctoral Dissertation, INP Toulouse. Accessed April 14, 2021. http://www.theses.fr/2017INPT0043.

MLA Handbook (7th Edition):

Ciotirca, Lavinia-Elena. “System design of a low-power three-axis underdamped MEMS accelerometer with simultaneous electrostatic damping control : Conception d’un circuit d’instrumentation hautes performances dédié à un accéléromètre troisaxes sous-amorti, pour le marché de l’électronique grand public.” 2017. Web. 14 Apr 2021.

Vancouver:

Ciotirca L. System design of a low-power three-axis underdamped MEMS accelerometer with simultaneous electrostatic damping control : Conception d’un circuit d’instrumentation hautes performances dédié à un accéléromètre troisaxes sous-amorti, pour le marché de l’électronique grand public. [Internet] [Doctoral dissertation]. INP Toulouse; 2017. [cited 2021 Apr 14]. Available from: http://www.theses.fr/2017INPT0043.

Council of Science Editors:

Ciotirca L. System design of a low-power three-axis underdamped MEMS accelerometer with simultaneous electrostatic damping control : Conception d’un circuit d’instrumentation hautes performances dédié à un accéléromètre troisaxes sous-amorti, pour le marché de l’électronique grand public. [Doctoral Dissertation]. INP Toulouse; 2017. Available from: http://www.theses.fr/2017INPT0043


University of Waterloo

8. Towfighian, Shahrzad. A Large-Stroke Electrostatic Micro-Actuator.

Degree: 2011, University of Waterloo

 Parallel-plate electrostatic actuators driven by a voltage difference between two electrodes suffer from an operation range limited to 30% of the gap that has significantly… (more)

Subjects/Keywords: Electrostatic actuator; chaotic resonator; MEMS; parrallel-plate actuator; large-stroke actuator; nonlinear MEMS

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Towfighian, S. (2011). A Large-Stroke Electrostatic Micro-Actuator. (Thesis). University of Waterloo. Retrieved from http://hdl.handle.net/10012/5725

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Towfighian, Shahrzad. “A Large-Stroke Electrostatic Micro-Actuator.” 2011. Thesis, University of Waterloo. Accessed April 14, 2021. http://hdl.handle.net/10012/5725.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Towfighian, Shahrzad. “A Large-Stroke Electrostatic Micro-Actuator.” 2011. Web. 14 Apr 2021.

Vancouver:

Towfighian S. A Large-Stroke Electrostatic Micro-Actuator. [Internet] [Thesis]. University of Waterloo; 2011. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/10012/5725.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Towfighian S. A Large-Stroke Electrostatic Micro-Actuator. [Thesis]. University of Waterloo; 2011. Available from: http://hdl.handle.net/10012/5725

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


Dalhousie University

9. Zhang, Tianming. ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR.

Degree: Master of Applied Science, Department of Electrical & Computer Engineering, 2012, Dalhousie University

 Several free-free beam micro-resonators are designed and fabricated using two commercially available surface micromachining processes, the UW-MEMS process and PolyMUMPs. Theoretical derivations of the design… (more)

Subjects/Keywords: MEMS; Free-Free Beam; Resonator; Electrostatic; FEA; Dynamic

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APA (6th Edition):

Zhang, T. (2012). ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR. (Masters Thesis). Dalhousie University. Retrieved from http://hdl.handle.net/10222/15700

Chicago Manual of Style (16th Edition):

Zhang, Tianming. “ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR.” 2012. Masters Thesis, Dalhousie University. Accessed April 14, 2021. http://hdl.handle.net/10222/15700.

MLA Handbook (7th Edition):

Zhang, Tianming. “ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR.” 2012. Web. 14 Apr 2021.

Vancouver:

Zhang T. ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR. [Internet] [Masters thesis]. Dalhousie University; 2012. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/10222/15700.

Council of Science Editors:

Zhang T. ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR. [Masters Thesis]. Dalhousie University; 2012. Available from: http://hdl.handle.net/10222/15700


University of California – Berkeley

10. Chou, Jeffrey Brian. MEMS Lens Scanners for Free-Space Optical Interconnects.

Degree: Electrical Engineering & Computer Sciences, 2011, University of California – Berkeley

 Optical interconnects are the next evolutionary step for computer server systems, replacing traditional copper interconnects to increase communication bandwidth and reduce overall power consumption. A… (more)

Subjects/Keywords: Electrical engineering; Blade Servers; Electrostatic Actuators; Interconnects; MEMS; Optics; Thermal Actuators

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APA (6th Edition):

Chou, J. B. (2011). MEMS Lens Scanners for Free-Space Optical Interconnects. (Thesis). University of California – Berkeley. Retrieved from http://www.escholarship.org/uc/item/5jj556m7

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Chou, Jeffrey Brian. “MEMS Lens Scanners for Free-Space Optical Interconnects.” 2011. Thesis, University of California – Berkeley. Accessed April 14, 2021. http://www.escholarship.org/uc/item/5jj556m7.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Chou, Jeffrey Brian. “MEMS Lens Scanners for Free-Space Optical Interconnects.” 2011. Web. 14 Apr 2021.

Vancouver:

Chou JB. MEMS Lens Scanners for Free-Space Optical Interconnects. [Internet] [Thesis]. University of California – Berkeley; 2011. [cited 2021 Apr 14]. Available from: http://www.escholarship.org/uc/item/5jj556m7.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Chou JB. MEMS Lens Scanners for Free-Space Optical Interconnects. [Thesis]. University of California – Berkeley; 2011. Available from: http://www.escholarship.org/uc/item/5jj556m7

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Waterloo

11. Alneamy, Ayman. Electrostatic Micro-Tweezers.

Degree: 2020, University of Waterloo

 This dissertation presents a novel electrostatic micro-tweezers designed to manipulate particles with diameters in the range of 5-14 μm. The tweezers consist of two grip-arms… (more)

Subjects/Keywords: MEMS; Electrostatic; Arch beam; Snap-through; Micro-Tweezers; Rotary inertia

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APA (6th Edition):

Alneamy, A. (2020). Electrostatic Micro-Tweezers. (Thesis). University of Waterloo. Retrieved from http://hdl.handle.net/10012/16017

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Alneamy, Ayman. “Electrostatic Micro-Tweezers.” 2020. Thesis, University of Waterloo. Accessed April 14, 2021. http://hdl.handle.net/10012/16017.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Alneamy, Ayman. “Electrostatic Micro-Tweezers.” 2020. Web. 14 Apr 2021.

Vancouver:

Alneamy A. Electrostatic Micro-Tweezers. [Internet] [Thesis]. University of Waterloo; 2020. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/10012/16017.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Alneamy A. Electrostatic Micro-Tweezers. [Thesis]. University of Waterloo; 2020. Available from: http://hdl.handle.net/10012/16017

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Manitoba

12. Cheng, Kar Mun. Electrostatic testing of simple MEMS structures.

Degree: Electrical and Computer Engineering, 2006, University of Manitoba

 In this thesis, an adapted form of dynamic Electrostatic Force Microscopy is presented as an alternative technique for non-contact dynamic characterization of beam resonators. The… (more)

Subjects/Keywords: MEMS; Resonators; Electrostatic; Non-contact

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APA (6th Edition):

Cheng, K. M. (2006). Electrostatic testing of simple MEMS structures. (Masters Thesis). University of Manitoba. Retrieved from http://hdl.handle.net/1993/259

Chicago Manual of Style (16th Edition):

Cheng, Kar Mun. “Electrostatic testing of simple MEMS structures.” 2006. Masters Thesis, University of Manitoba. Accessed April 14, 2021. http://hdl.handle.net/1993/259.

MLA Handbook (7th Edition):

Cheng, Kar Mun. “Electrostatic testing of simple MEMS structures.” 2006. Web. 14 Apr 2021.

Vancouver:

Cheng KM. Electrostatic testing of simple MEMS structures. [Internet] [Masters thesis]. University of Manitoba; 2006. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/1993/259.

Council of Science Editors:

Cheng KM. Electrostatic testing of simple MEMS structures. [Masters Thesis]. University of Manitoba; 2006. Available from: http://hdl.handle.net/1993/259


Virginia Tech

13. El-Helw, Sarah Reda. Designing and Fabricating MEMS Cantilever Switches.

Degree: MS, Electrical Engineering, 2016, Virginia Tech

 In this thesis, MEMS switches actuated using electrostatic actuation is explored. MEMS switches that are lateral switches and clamped-clamped switches are designed, fabricated, and tested… (more)

Subjects/Keywords: MEMS; Lateral Switches; Clamped-Clamped Switches; Electrostatic Actuation; Contact Resistance

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APA (6th Edition):

El-Helw, S. R. (2016). Designing and Fabricating MEMS Cantilever Switches. (Masters Thesis). Virginia Tech. Retrieved from http://hdl.handle.net/10919/82524

Chicago Manual of Style (16th Edition):

El-Helw, Sarah Reda. “Designing and Fabricating MEMS Cantilever Switches.” 2016. Masters Thesis, Virginia Tech. Accessed April 14, 2021. http://hdl.handle.net/10919/82524.

MLA Handbook (7th Edition):

El-Helw, Sarah Reda. “Designing and Fabricating MEMS Cantilever Switches.” 2016. Web. 14 Apr 2021.

Vancouver:

El-Helw SR. Designing and Fabricating MEMS Cantilever Switches. [Internet] [Masters thesis]. Virginia Tech; 2016. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/10919/82524.

Council of Science Editors:

El-Helw SR. Designing and Fabricating MEMS Cantilever Switches. [Masters Thesis]. Virginia Tech; 2016. Available from: http://hdl.handle.net/10919/82524


King Abdullah University of Science and Technology

14. Ramadan, Khaled S. SU-8 Based MEMS Process with Two Metal Layers using α-Si as a Sacrificial Material.

Degree: Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division, 2012, King Abdullah University of Science and Technology

 Polymer based microelectromechanical systems (MEMS) micromachining is finding more interest in research and applications. This is due to its low cost and less time processing… (more)

Subjects/Keywords: SU-8 MEMS; Electrostatic Actuation; α-Si sacrificial layer

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APA (6th Edition):

Ramadan, K. S. (2012). SU-8 Based MEMS Process with Two Metal Layers using α-Si as a Sacrificial Material. (Thesis). King Abdullah University of Science and Technology. Retrieved from http://hdl.handle.net/10754/222071

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Ramadan, Khaled S. “SU-8 Based MEMS Process with Two Metal Layers using α-Si as a Sacrificial Material.” 2012. Thesis, King Abdullah University of Science and Technology. Accessed April 14, 2021. http://hdl.handle.net/10754/222071.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Ramadan, Khaled S. “SU-8 Based MEMS Process with Two Metal Layers using α-Si as a Sacrificial Material.” 2012. Web. 14 Apr 2021.

Vancouver:

Ramadan KS. SU-8 Based MEMS Process with Two Metal Layers using α-Si as a Sacrificial Material. [Internet] [Thesis]. King Abdullah University of Science and Technology; 2012. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/10754/222071.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Ramadan KS. SU-8 Based MEMS Process with Two Metal Layers using α-Si as a Sacrificial Material. [Thesis]. King Abdullah University of Science and Technology; 2012. Available from: http://hdl.handle.net/10754/222071

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


King Abdullah University of Science and Technology

15. Saghir, Shahid. Nonlinear Mechanics of MEMS Rectangular Microplates under Electrostatic Actuation.

Degree: Physical Science and Engineering (PSE) Division, 2016, King Abdullah University of Science and Technology

 The first objective of the dissertation is to develop a suitable reduced order model capable of investigating the nonlinear mechanical behavior of von-Karman plates under… (more)

Subjects/Keywords: non linear mechanics; microplates; MEMS; Electrostatic force; Dynamics; non linear vibrations

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APA (6th Edition):

Saghir, S. (2016). Nonlinear Mechanics of MEMS Rectangular Microplates under Electrostatic Actuation. (Thesis). King Abdullah University of Science and Technology. Retrieved from http://hdl.handle.net/10754/621854

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Saghir, Shahid. “Nonlinear Mechanics of MEMS Rectangular Microplates under Electrostatic Actuation.” 2016. Thesis, King Abdullah University of Science and Technology. Accessed April 14, 2021. http://hdl.handle.net/10754/621854.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Saghir, Shahid. “Nonlinear Mechanics of MEMS Rectangular Microplates under Electrostatic Actuation.” 2016. Web. 14 Apr 2021.

Vancouver:

Saghir S. Nonlinear Mechanics of MEMS Rectangular Microplates under Electrostatic Actuation. [Internet] [Thesis]. King Abdullah University of Science and Technology; 2016. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/10754/621854.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Saghir S. Nonlinear Mechanics of MEMS Rectangular Microplates under Electrostatic Actuation. [Thesis]. King Abdullah University of Science and Technology; 2016. Available from: http://hdl.handle.net/10754/621854

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


King Abdullah University of Science and Technology

16. Hajjaj, Amal. Electrothermally Tuned and Electrostatically Actuated MEMS Resonators: Dynamics and Applications.

Degree: Physical Science and Engineering (PSE) Division, 2019, King Abdullah University of Science and Technology

 The objective of this thesis is to present a theoretical and experimental investigation of the dynamics of micro and nano-electromechanical systems electrothermally tuned and electrostatically… (more)

Subjects/Keywords: electrothermal; electrostatic; MEMS; Mode Coupling; Tunability; Filter / sensing

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APA (6th Edition):

Hajjaj, A. (2019). Electrothermally Tuned and Electrostatically Actuated MEMS Resonators: Dynamics and Applications. (Thesis). King Abdullah University of Science and Technology. Retrieved from http://hdl.handle.net/10754/652869

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Hajjaj, Amal. “Electrothermally Tuned and Electrostatically Actuated MEMS Resonators: Dynamics and Applications.” 2019. Thesis, King Abdullah University of Science and Technology. Accessed April 14, 2021. http://hdl.handle.net/10754/652869.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Hajjaj, Amal. “Electrothermally Tuned and Electrostatically Actuated MEMS Resonators: Dynamics and Applications.” 2019. Web. 14 Apr 2021.

Vancouver:

Hajjaj A. Electrothermally Tuned and Electrostatically Actuated MEMS Resonators: Dynamics and Applications. [Internet] [Thesis]. King Abdullah University of Science and Technology; 2019. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/10754/652869.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Hajjaj A. Electrothermally Tuned and Electrostatically Actuated MEMS Resonators: Dynamics and Applications. [Thesis]. King Abdullah University of Science and Technology; 2019. Available from: http://hdl.handle.net/10754/652869

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

17. Mahmood Paracha, Ayyaz. Design and fabrication of Mems-based, vibration powered energy harvesting device using electrostatic transduction : Conception et réalisation d'un micro-système pour la récupération de l'énergie vibratoire du milieu ambiant par transduction électrostatique.

Degree: Docteur es, Electronique, optronique et systèmes, 2009, Université Paris-Est

 Avec la réduction de l’énergie consommée par les capteurs miniatures, a émergé le nouveau concept de capteurs autonomes. Il s’agit de capteurs dont l’alimentation ne… (more)

Subjects/Keywords: Transduction électrostatique; Power MEMS; Récupération de l'énergie; Ipop; Pompe de charge; Electrostatic transduction; Power MEMS; Energy harvesting; Ipop; Charge pump circuit

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APA (6th Edition):

Mahmood Paracha, A. (2009). Design and fabrication of Mems-based, vibration powered energy harvesting device using electrostatic transduction : Conception et réalisation d'un micro-système pour la récupération de l'énergie vibratoire du milieu ambiant par transduction électrostatique. (Doctoral Dissertation). Université Paris-Est. Retrieved from http://www.theses.fr/2009PEST1038

Chicago Manual of Style (16th Edition):

Mahmood Paracha, Ayyaz. “Design and fabrication of Mems-based, vibration powered energy harvesting device using electrostatic transduction : Conception et réalisation d'un micro-système pour la récupération de l'énergie vibratoire du milieu ambiant par transduction électrostatique.” 2009. Doctoral Dissertation, Université Paris-Est. Accessed April 14, 2021. http://www.theses.fr/2009PEST1038.

MLA Handbook (7th Edition):

Mahmood Paracha, Ayyaz. “Design and fabrication of Mems-based, vibration powered energy harvesting device using electrostatic transduction : Conception et réalisation d'un micro-système pour la récupération de l'énergie vibratoire du milieu ambiant par transduction électrostatique.” 2009. Web. 14 Apr 2021.

Vancouver:

Mahmood Paracha A. Design and fabrication of Mems-based, vibration powered energy harvesting device using electrostatic transduction : Conception et réalisation d'un micro-système pour la récupération de l'énergie vibratoire du milieu ambiant par transduction électrostatique. [Internet] [Doctoral dissertation]. Université Paris-Est; 2009. [cited 2021 Apr 14]. Available from: http://www.theses.fr/2009PEST1038.

Council of Science Editors:

Mahmood Paracha A. Design and fabrication of Mems-based, vibration powered energy harvesting device using electrostatic transduction : Conception et réalisation d'un micro-système pour la récupération de l'énergie vibratoire du milieu ambiant par transduction électrostatique. [Doctoral Dissertation]. Université Paris-Est; 2009. Available from: http://www.theses.fr/2009PEST1038


Université Paris-Sud – Paris XI

18. Xu, Wei. Modeling and fabrication of tunable 3D integrated Mirau micro-interferometers : Modélisation et fabrication de microinterféromètres Mirau accordables intégrés 3D.

Degree: Docteur es, Physique, 2014, Université Paris-Sud – Paris XI

Les interféromètres de type Mirau sont largement utilisés dans les profilomètres et vibromètres optiques 3D plein champ et d’autres applications dans les domaines de la… (more)

Subjects/Keywords: MEMS; Interféromètres Mirau; Peignes électrostatiques verticaux; Intégration 3D; MEMS; Mirau interferometer; Electrostatic vertical comb; 3D integration

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Xu, W. (2014). Modeling and fabrication of tunable 3D integrated Mirau micro-interferometers : Modélisation et fabrication de microinterféromètres Mirau accordables intégrés 3D. (Doctoral Dissertation). Université Paris-Sud – Paris XI. Retrieved from http://www.theses.fr/2014PA112376

Chicago Manual of Style (16th Edition):

Xu, Wei. “Modeling and fabrication of tunable 3D integrated Mirau micro-interferometers : Modélisation et fabrication de microinterféromètres Mirau accordables intégrés 3D.” 2014. Doctoral Dissertation, Université Paris-Sud – Paris XI. Accessed April 14, 2021. http://www.theses.fr/2014PA112376.

MLA Handbook (7th Edition):

Xu, Wei. “Modeling and fabrication of tunable 3D integrated Mirau micro-interferometers : Modélisation et fabrication de microinterféromètres Mirau accordables intégrés 3D.” 2014. Web. 14 Apr 2021.

Vancouver:

Xu W. Modeling and fabrication of tunable 3D integrated Mirau micro-interferometers : Modélisation et fabrication de microinterféromètres Mirau accordables intégrés 3D. [Internet] [Doctoral dissertation]. Université Paris-Sud – Paris XI; 2014. [cited 2021 Apr 14]. Available from: http://www.theses.fr/2014PA112376.

Council of Science Editors:

Xu W. Modeling and fabrication of tunable 3D integrated Mirau micro-interferometers : Modélisation et fabrication de microinterféromètres Mirau accordables intégrés 3D. [Doctoral Dissertation]. Université Paris-Sud – Paris XI; 2014. Available from: http://www.theses.fr/2014PA112376


Université de Grenoble

19. Boisseau, Sébastien. Récupération d'énergie vibratoire à électrets : Robust/LPV Control of vehicle dynamics for comfort and safety improvements.

Degree: Docteur es, Sciences et technologie industrielles, 2011, Université de Grenoble

Issus de l'industrie de la microélectronique, les MEMS envahissent progressivement le marché avec des applications dans de nombreux domaines tels que l'aérospatiale, la médecine, l'industrie… (more)

Subjects/Keywords: Electret; Récupération d'énergie; Convertisseur électrostatique; Vibrations; Décharge Corona; MEMS; Electret; Energy harvesting; Electrostatic converter; Vibrations; Corona Discharge; MEMS

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APA (6th Edition):

Boisseau, S. (2011). Récupération d'énergie vibratoire à électrets : Robust/LPV Control of vehicle dynamics for comfort and safety improvements. (Doctoral Dissertation). Université de Grenoble. Retrieved from http://www.theses.fr/2011GRENT101

Chicago Manual of Style (16th Edition):

Boisseau, Sébastien. “Récupération d'énergie vibratoire à électrets : Robust/LPV Control of vehicle dynamics for comfort and safety improvements.” 2011. Doctoral Dissertation, Université de Grenoble. Accessed April 14, 2021. http://www.theses.fr/2011GRENT101.

MLA Handbook (7th Edition):

Boisseau, Sébastien. “Récupération d'énergie vibratoire à électrets : Robust/LPV Control of vehicle dynamics for comfort and safety improvements.” 2011. Web. 14 Apr 2021.

Vancouver:

Boisseau S. Récupération d'énergie vibratoire à électrets : Robust/LPV Control of vehicle dynamics for comfort and safety improvements. [Internet] [Doctoral dissertation]. Université de Grenoble; 2011. [cited 2021 Apr 14]. Available from: http://www.theses.fr/2011GRENT101.

Council of Science Editors:

Boisseau S. Récupération d'énergie vibratoire à électrets : Robust/LPV Control of vehicle dynamics for comfort and safety improvements. [Doctoral Dissertation]. Université de Grenoble; 2011. Available from: http://www.theses.fr/2011GRENT101

20. Torkkeli, Altti. Droplet Microfluidics on a Planar Surface.

Degree: 2004, VTT Technical Research Centre of Finland

This work reports on the modelling of, and experiments on, a method in which liquid is transported as droplets on a planar hydrophobic surface with… (more)

Subjects/Keywords: microfluidics; lab-on-a-chip; electrostatic droplet actuation; electrowetting; superhydrophobic surface; MEMS

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APA (6th Edition):

Torkkeli, A. (2004). Droplet Microfluidics on a Planar Surface. (Thesis). VTT Technical Research Centre of Finland. Retrieved from http://lib.tkk.fi/Diss/2003/isbn9513862380/

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Torkkeli, Altti. “Droplet Microfluidics on a Planar Surface.” 2004. Thesis, VTT Technical Research Centre of Finland. Accessed April 14, 2021. http://lib.tkk.fi/Diss/2003/isbn9513862380/.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Torkkeli, Altti. “Droplet Microfluidics on a Planar Surface.” 2004. Web. 14 Apr 2021.

Vancouver:

Torkkeli A. Droplet Microfluidics on a Planar Surface. [Internet] [Thesis]. VTT Technical Research Centre of Finland; 2004. [cited 2021 Apr 14]. Available from: http://lib.tkk.fi/Diss/2003/isbn9513862380/.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Torkkeli A. Droplet Microfluidics on a Planar Surface. [Thesis]. VTT Technical Research Centre of Finland; 2004. Available from: http://lib.tkk.fi/Diss/2003/isbn9513862380/

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Toronto

21. Ba Tis, Faez Saleh Ahmed. Novel Electrostatic Actuators with Applications.

Degree: PhD, 2017, University of Toronto

High-end smartphone cameras suffer from large size, high power consumption, and slow performance. These issues are mainly due to the poor performance of the voice… (more)

Subjects/Keywords: Autofocus; Electrostatic actuators; Large force; Large stroke; MEMS; Optical image stabilization; 0548

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APA (6th Edition):

Ba Tis, F. S. A. (2017). Novel Electrostatic Actuators with Applications. (Doctoral Dissertation). University of Toronto. Retrieved from http://hdl.handle.net/1807/97291

Chicago Manual of Style (16th Edition):

Ba Tis, Faez Saleh Ahmed. “Novel Electrostatic Actuators with Applications.” 2017. Doctoral Dissertation, University of Toronto. Accessed April 14, 2021. http://hdl.handle.net/1807/97291.

MLA Handbook (7th Edition):

Ba Tis, Faez Saleh Ahmed. “Novel Electrostatic Actuators with Applications.” 2017. Web. 14 Apr 2021.

Vancouver:

Ba Tis FSA. Novel Electrostatic Actuators with Applications. [Internet] [Doctoral dissertation]. University of Toronto; 2017. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/1807/97291.

Council of Science Editors:

Ba Tis FSA. Novel Electrostatic Actuators with Applications. [Doctoral Dissertation]. University of Toronto; 2017. Available from: http://hdl.handle.net/1807/97291


University of Waterloo

22. ALGHAMDI, MAJED. Electrostatic MEMS Bifurcation Sensors.

Degree: 2018, University of Waterloo

 We report experimental evidence of a new instability in electrostatic sensors, dubbed quasi-static pull-in, in two types of micro-sensors operating in ambient air. We find… (more)

Subjects/Keywords: Electrostatic MEMS; gas sensors; bifurcation-based sensing; Shilnikov Bifurcation; binary detection; Analog detection; Nonlinear instabilities

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APA (6th Edition):

ALGHAMDI, M. (2018). Electrostatic MEMS Bifurcation Sensors. (Thesis). University of Waterloo. Retrieved from http://hdl.handle.net/10012/13658

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

ALGHAMDI, MAJED. “Electrostatic MEMS Bifurcation Sensors.” 2018. Thesis, University of Waterloo. Accessed April 14, 2021. http://hdl.handle.net/10012/13658.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

ALGHAMDI, MAJED. “Electrostatic MEMS Bifurcation Sensors.” 2018. Web. 14 Apr 2021.

Vancouver:

ALGHAMDI M. Electrostatic MEMS Bifurcation Sensors. [Internet] [Thesis]. University of Waterloo; 2018. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/10012/13658.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

ALGHAMDI M. Electrostatic MEMS Bifurcation Sensors. [Thesis]. University of Waterloo; 2018. Available from: http://hdl.handle.net/10012/13658

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


Cleveland State University

23. Edwards, Jason. Modeling and Feedback Control of a MEMS Electrostatic Actuator.

Degree: MSin Electrical Engineering, Fenn College of Engineering, 2009, Cleveland State University

 This thesis describes the mathematical modeling and closed-loop voltage control of a MEMS electrostatic actuator. The control goal is to extend the travel range of… (more)

Subjects/Keywords: Engineering; MEMS; electrostatic actuator; feedback control

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APA (6th Edition):

Edwards, J. (2009). Modeling and Feedback Control of a MEMS Electrostatic Actuator. (Masters Thesis). Cleveland State University. Retrieved from http://rave.ohiolink.edu/etdc/view?acc_num=csu1247583924

Chicago Manual of Style (16th Edition):

Edwards, Jason. “Modeling and Feedback Control of a MEMS Electrostatic Actuator.” 2009. Masters Thesis, Cleveland State University. Accessed April 14, 2021. http://rave.ohiolink.edu/etdc/view?acc_num=csu1247583924.

MLA Handbook (7th Edition):

Edwards, Jason. “Modeling and Feedback Control of a MEMS Electrostatic Actuator.” 2009. Web. 14 Apr 2021.

Vancouver:

Edwards J. Modeling and Feedback Control of a MEMS Electrostatic Actuator. [Internet] [Masters thesis]. Cleveland State University; 2009. [cited 2021 Apr 14]. Available from: http://rave.ohiolink.edu/etdc/view?acc_num=csu1247583924.

Council of Science Editors:

Edwards J. Modeling and Feedback Control of a MEMS Electrostatic Actuator. [Masters Thesis]. Cleveland State University; 2009. Available from: http://rave.ohiolink.edu/etdc/view?acc_num=csu1247583924

24. Kärkkäinen, Anna-Maija. MEMS Based Voltage References.

Degree: 2006, VTT Technical Research Centre of Finland

 Voltage references are fundamental building blocks in many instruments like data logging systems, digital multimeters, and calibrators. State-of-the-art DC voltage references are large and expensive… (more)

Subjects/Keywords: MEMS; micro electromechanical systems; DC voltage reference; AC voltage reference; electrostatic charging; pull-in voltage; long-term stability; micromachining

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APA (6th Edition):

Kärkkäinen, A. (2006). MEMS Based Voltage References. (Thesis). VTT Technical Research Centre of Finland. Retrieved from http://lib.tkk.fi/Diss/2006/isbn9513868605/

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Kärkkäinen, Anna-Maija. “MEMS Based Voltage References.” 2006. Thesis, VTT Technical Research Centre of Finland. Accessed April 14, 2021. http://lib.tkk.fi/Diss/2006/isbn9513868605/.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Kärkkäinen, Anna-Maija. “MEMS Based Voltage References.” 2006. Web. 14 Apr 2021.

Vancouver:

Kärkkäinen A. MEMS Based Voltage References. [Internet] [Thesis]. VTT Technical Research Centre of Finland; 2006. [cited 2021 Apr 14]. Available from: http://lib.tkk.fi/Diss/2006/isbn9513868605/.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Kärkkäinen A. MEMS Based Voltage References. [Thesis]. VTT Technical Research Centre of Finland; 2006. Available from: http://lib.tkk.fi/Diss/2006/isbn9513868605/

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Michigan

25. Kim, Hanseup. An integrated electrostatic peristaltic gas micropump with active microvalves.

Degree: PhD, Electrical engineering, 2006, University of Michigan

 A high-performance micro gas pump for high-speed micro gas chromatography (muGC) as well as several microfabrication technologies used to build the proposed micropump, are reported.… (more)

Subjects/Keywords: Active; Electrostatic; Gas Micropump; Integrated; Mems; Microvalves; Peristaltic

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APA (6th Edition):

Kim, H. (2006). An integrated electrostatic peristaltic gas micropump with active microvalves. (Doctoral Dissertation). University of Michigan. Retrieved from http://hdl.handle.net/2027.42/126075

Chicago Manual of Style (16th Edition):

Kim, Hanseup. “An integrated electrostatic peristaltic gas micropump with active microvalves.” 2006. Doctoral Dissertation, University of Michigan. Accessed April 14, 2021. http://hdl.handle.net/2027.42/126075.

MLA Handbook (7th Edition):

Kim, Hanseup. “An integrated electrostatic peristaltic gas micropump with active microvalves.” 2006. Web. 14 Apr 2021.

Vancouver:

Kim H. An integrated electrostatic peristaltic gas micropump with active microvalves. [Internet] [Doctoral dissertation]. University of Michigan; 2006. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/2027.42/126075.

Council of Science Editors:

Kim H. An integrated electrostatic peristaltic gas micropump with active microvalves. [Doctoral Dissertation]. University of Michigan; 2006. Available from: http://hdl.handle.net/2027.42/126075


Indian Institute of Science

26. Reddy, Jayaprakash. Towards Design and Development of Indigenous Rate-Grade MEMS Gyroscopes.

Degree: PhD, Engineering, 2018, Indian Institute of Science

 Gyroscopes sense angular speed of the body on which they are mounted. Traditional mechanical gyroscopes are big, bulky, expensive, and hence limited to a few… (more)

Subjects/Keywords: MEMS Gyroscopes; Dual mass electrostatic vibratory gyroscope; Electromagnetic ring gyroscope; Research Subject Categories::TECHNOLOGY::Materials science::Other processing/assembly

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Reddy, J. (2018). Towards Design and Development of Indigenous Rate-Grade MEMS Gyroscopes. (Doctoral Dissertation). Indian Institute of Science. Retrieved from http://etd.iisc.ac.in/handle/2005/4107

Chicago Manual of Style (16th Edition):

Reddy, Jayaprakash. “Towards Design and Development of Indigenous Rate-Grade MEMS Gyroscopes.” 2018. Doctoral Dissertation, Indian Institute of Science. Accessed April 14, 2021. http://etd.iisc.ac.in/handle/2005/4107.

MLA Handbook (7th Edition):

Reddy, Jayaprakash. “Towards Design and Development of Indigenous Rate-Grade MEMS Gyroscopes.” 2018. Web. 14 Apr 2021.

Vancouver:

Reddy J. Towards Design and Development of Indigenous Rate-Grade MEMS Gyroscopes. [Internet] [Doctoral dissertation]. Indian Institute of Science; 2018. [cited 2021 Apr 14]. Available from: http://etd.iisc.ac.in/handle/2005/4107.

Council of Science Editors:

Reddy J. Towards Design and Development of Indigenous Rate-Grade MEMS Gyroscopes. [Doctoral Dissertation]. Indian Institute of Science; 2018. Available from: http://etd.iisc.ac.in/handle/2005/4107

27. Zhou, Yu. Low-voltage electrostatic actuators for deformable mirrors for adaptive optics.

Degree: Electrical and Computer Engineering, 2019, University of Manitoba

 In this thesis, a micromachined electrostatic actuator is proposed for a deformable mirror system that is designed to achieve a decent stroke (~10 µm) with… (more)

Subjects/Keywords: Electrostatic actuation; MEMS; Adaptive Optics; Deformable mirror

…x5D;. This specific design uses CMOS as the control of the electrostatic actuator and micro… …29 Fig. 2.19. SEM picture of the hybrid micro-mirror [34]. The electrostatic comb… …43 Fig. 4.1. A sketch of a parallel plate electrostatic actuator. The upper electrode is… …46 Fig. 4.2. Cross-section of an electrostatic actuator with attached phase sheet mirror… …46 Fig. 4.3. Drive voltage vs. displacement of a conventional parallel plate electrostatic… 

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APA (6th Edition):

Zhou, Y. (2019). Low-voltage electrostatic actuators for deformable mirrors for adaptive optics. (Thesis). University of Manitoba. Retrieved from http://hdl.handle.net/1993/34018

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Zhou, Yu. “Low-voltage electrostatic actuators for deformable mirrors for adaptive optics.” 2019. Thesis, University of Manitoba. Accessed April 14, 2021. http://hdl.handle.net/1993/34018.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Zhou, Yu. “Low-voltage electrostatic actuators for deformable mirrors for adaptive optics.” 2019. Web. 14 Apr 2021.

Vancouver:

Zhou Y. Low-voltage electrostatic actuators for deformable mirrors for adaptive optics. [Internet] [Thesis]. University of Manitoba; 2019. [cited 2021 Apr 14]. Available from: http://hdl.handle.net/1993/34018.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Zhou Y. Low-voltage electrostatic actuators for deformable mirrors for adaptive optics. [Thesis]. University of Manitoba; 2019. Available from: http://hdl.handle.net/1993/34018

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

28. Molenaar, E.P. (author). Feasibility Study and Design of AFM Production Wafer Calibration Method using Electrostatic Pull-in Instability.

Degree: 2013, Delft University of Technology

Precision and Microsystems Engineering

Mechanical, Maritime and Materials Engineering

Advisors/Committee Members: Staufer, U. (mentor).

Subjects/Keywords: MEMS; AFM; Probe; Electrostatic; Pull-in; Cantilever

Electrostatic Pull-in Instability (EPI) . . . . . . . . . . . . . . . . . . . . . . . . 21… …21 3-2-2 Electrostatic Pull-In used as a calibration method . . . . . . . . . . . . . 3-3… …1 Modeling Electrostatic Pull-in… …Schematic overview of the structures used in electrostatic calibration. . . . 17 (c)… …is based on the Electrostatic Pull-in Instability, or EPI, of cantilever beams. Initial… 

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Molenaar, E. P. (. (2013). Feasibility Study and Design of AFM Production Wafer Calibration Method using Electrostatic Pull-in Instability. (Masters Thesis). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:a64e6ff5-eb0c-4f30-987e-356c57123fe7

Chicago Manual of Style (16th Edition):

Molenaar, E P (author). “Feasibility Study and Design of AFM Production Wafer Calibration Method using Electrostatic Pull-in Instability.” 2013. Masters Thesis, Delft University of Technology. Accessed April 14, 2021. http://resolver.tudelft.nl/uuid:a64e6ff5-eb0c-4f30-987e-356c57123fe7.

MLA Handbook (7th Edition):

Molenaar, E P (author). “Feasibility Study and Design of AFM Production Wafer Calibration Method using Electrostatic Pull-in Instability.” 2013. Web. 14 Apr 2021.

Vancouver:

Molenaar EP(. Feasibility Study and Design of AFM Production Wafer Calibration Method using Electrostatic Pull-in Instability. [Internet] [Masters thesis]. Delft University of Technology; 2013. [cited 2021 Apr 14]. Available from: http://resolver.tudelft.nl/uuid:a64e6ff5-eb0c-4f30-987e-356c57123fe7.

Council of Science Editors:

Molenaar EP(. Feasibility Study and Design of AFM Production Wafer Calibration Method using Electrostatic Pull-in Instability. [Masters Thesis]. Delft University of Technology; 2013. Available from: http://resolver.tudelft.nl/uuid:a64e6ff5-eb0c-4f30-987e-356c57123fe7


University of Notre Dame

29. Jie Su. A Lateral-Drive Method to Address Pull-in Failure in MEMS</h1>.

Degree: Electrical Engineering, 2008, University of Notre Dame

Electrostatic drive is the most common actuation method in MEMS due to its low power, simplicity and ability to generate large forces. However, an… (more)

Subjects/Keywords: MEMS; Actuator; Fabry-Perot; Pull-in; Electrostatic

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Su, J. (2008). A Lateral-Drive Method to Address Pull-in Failure in MEMS</h1>. (Thesis). University of Notre Dame. Retrieved from https://curate.nd.edu/show/0g354f1841c

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Su, Jie. “A Lateral-Drive Method to Address Pull-in Failure in MEMS</h1>.” 2008. Thesis, University of Notre Dame. Accessed April 14, 2021. https://curate.nd.edu/show/0g354f1841c.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Su, Jie. “A Lateral-Drive Method to Address Pull-in Failure in MEMS</h1>.” 2008. Web. 14 Apr 2021.

Vancouver:

Su J. A Lateral-Drive Method to Address Pull-in Failure in MEMS</h1>. [Internet] [Thesis]. University of Notre Dame; 2008. [cited 2021 Apr 14]. Available from: https://curate.nd.edu/show/0g354f1841c.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Su J. A Lateral-Drive Method to Address Pull-in Failure in MEMS</h1>. [Thesis]. University of Notre Dame; 2008. Available from: https://curate.nd.edu/show/0g354f1841c

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Florida

30. Zhang, Xiaoyang. Robust Electrothermally Actuated Scanners for Fiberoptic Endoscopic Imaging and Wide-Angle Optics.

Degree: PhD, Electrical and Computer Engineering, 2016, University of Florida

Subjects/Keywords: electrostatic; electrothermal; endoscope; fiberoptics; mems; optics; scanner

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Zhang, X. (2016). Robust Electrothermally Actuated Scanners for Fiberoptic Endoscopic Imaging and Wide-Angle Optics. (Doctoral Dissertation). University of Florida. Retrieved from https://ufdc.ufl.edu/UFE0050667

Chicago Manual of Style (16th Edition):

Zhang, Xiaoyang. “Robust Electrothermally Actuated Scanners for Fiberoptic Endoscopic Imaging and Wide-Angle Optics.” 2016. Doctoral Dissertation, University of Florida. Accessed April 14, 2021. https://ufdc.ufl.edu/UFE0050667.

MLA Handbook (7th Edition):

Zhang, Xiaoyang. “Robust Electrothermally Actuated Scanners for Fiberoptic Endoscopic Imaging and Wide-Angle Optics.” 2016. Web. 14 Apr 2021.

Vancouver:

Zhang X. Robust Electrothermally Actuated Scanners for Fiberoptic Endoscopic Imaging and Wide-Angle Optics. [Internet] [Doctoral dissertation]. University of Florida; 2016. [cited 2021 Apr 14]. Available from: https://ufdc.ufl.edu/UFE0050667.

Council of Science Editors:

Zhang X. Robust Electrothermally Actuated Scanners for Fiberoptic Endoscopic Imaging and Wide-Angle Optics. [Doctoral Dissertation]. University of Florida; 2016. Available from: https://ufdc.ufl.edu/UFE0050667

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