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Leiden University

1. Remeijer, Casper Sebastiaan. Influence of oxygen in the sputter gas on creating a conducting interface in LaAlO3/SrTiO3.

Degree: 2019, Leiden University

In this study we investigate if we can change the interfacial conductivity in LaAlO3/SrTiO3 heterostructures by adding some oxygen to the argon sputter gas. We vary the deposition parameters to minimise the effect of the oxygen. We find that an increase in oxygen partial pressure increases the surface roughness. We also find that an increase in argon flow increases surface roughness. The optimised parameters, which minimise surface roughness, are in agreement with previous results of growing a conducting interface in LaAlO3/SrTiO3 by sputtering. However all our samples grown with oxygen are found to be insulating. A possible explanation for the effect of oxygen in the sputter gas is that the species oxidise before reaching the sample. We conclude that even a very small amount of oxygen in the sputter gas gives an insulating interface and that we can not make a conducting interface with oxygen in the sputter gas with the experimental set-up used. Advisors/Committee Members: Aarts, Jan (advisor).

Subjects/Keywords: conducting interface; sputter deposition; LaAlO3/SrTiO3; oxygen; argon; insulating

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Remeijer, C. S. (2019). Influence of oxygen in the sputter gas on creating a conducting interface in LaAlO3/SrTiO3. (Masters Thesis). Leiden University. Retrieved from http://hdl.handle.net/1887/72505

Chicago Manual of Style (16th Edition):

Remeijer, Casper Sebastiaan. “Influence of oxygen in the sputter gas on creating a conducting interface in LaAlO3/SrTiO3.” 2019. Masters Thesis, Leiden University. Accessed May 25, 2019. http://hdl.handle.net/1887/72505.

MLA Handbook (7th Edition):

Remeijer, Casper Sebastiaan. “Influence of oxygen in the sputter gas on creating a conducting interface in LaAlO3/SrTiO3.” 2019. Web. 25 May 2019.

Vancouver:

Remeijer CS. Influence of oxygen in the sputter gas on creating a conducting interface in LaAlO3/SrTiO3. [Internet] [Masters thesis]. Leiden University; 2019. [cited 2019 May 25]. Available from: http://hdl.handle.net/1887/72505.

Council of Science Editors:

Remeijer CS. Influence of oxygen in the sputter gas on creating a conducting interface in LaAlO3/SrTiO3. [Masters Thesis]. Leiden University; 2019. Available from: http://hdl.handle.net/1887/72505

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