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University of Rochester

1. Michalko, Aaron M. Advances in optical surface metrology by phase and prescription retrieval.

Degree: PhD, 2021, University of Rochester

This thesis presents advances in the application of phase retrieval techniques to optical metrology of spherical and freeform surfaces. We explore metrology configurations using transverse translation-diverse phase retrieval (TTDPR), in which translating subaperture illumination is projected on the test surface. The wavefront aberration, and from it surface error, can be reconstructed from measured reflected intensities. TTDPR is advantageous for freeform surface metrology due to its relatively simple hardware requirements and demonstrated accuracy in other fields. Through simulations we probe TTDPR performance as a function of various parameters including illumination beam softness, detector signal-to-noise ratio and position uncertainty of the illumination. We report on the laboratory measurement of a concave spherical test surface using TTDPR, which agrees with an interferometric measurement to 0:006λ root-mean-square (RMS) with certain terms removed. We report on measurements of a concave freeform using TTDPR. Freeform surface reconstructions from two disjoint datasets agree to 13 nm RMS, or 0:02λ RMS at λ = 632:8nm. Next we explore configurations suitable for metrology of convex surfaces. We explore a configuration using converging source illumination and a moving test surface. We discuss a suitable algorithm, prescription retrieval, with which we directly reconstruct surface prescription terms from measured intensities using combined ray-tracing and diffraction modeling. A prescription retrieval algorithm is demonstrated through simulation and ultimately a convex surface measurement using the technique is demonstrated.

Subjects/Keywords: Freeform optics; Optical metrology; Phase retrieval; Prescription retrieval; Wavefront sensing

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Michalko, A. M. (2021). Advances in optical surface metrology by phase and prescription retrieval. (Doctoral Dissertation). University of Rochester. Retrieved from http://hdl.handle.net/1802/36133

Chicago Manual of Style (16th Edition):

Michalko, Aaron M. “Advances in optical surface metrology by phase and prescription retrieval.” 2021. Doctoral Dissertation, University of Rochester. Accessed March 01, 2021. http://hdl.handle.net/1802/36133.

MLA Handbook (7th Edition):

Michalko, Aaron M. “Advances in optical surface metrology by phase and prescription retrieval.” 2021. Web. 01 Mar 2021.

Vancouver:

Michalko AM. Advances in optical surface metrology by phase and prescription retrieval. [Internet] [Doctoral dissertation]. University of Rochester; 2021. [cited 2021 Mar 01]. Available from: http://hdl.handle.net/1802/36133.

Council of Science Editors:

Michalko AM. Advances in optical surface metrology by phase and prescription retrieval. [Doctoral Dissertation]. University of Rochester; 2021. Available from: http://hdl.handle.net/1802/36133

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