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You searched for +publisher:"University of Illinois – Urbana-Champaign" +contributor:("Ruzic, David N."). Showing records 1 – 30 of 44 total matches.

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University of Illinois – Urbana-Champaign

1. Meng, Liang. Plasma diagnostics and ITO film deposition by RF-assisted closed-field dual magnetron system.

Degree: MS, 0139, 2011, University of Illinois – Urbana-Champaign

 Deposition of indium tin oxide (ITO) among various transparent conductive materials on flexible organic substrates has been intensively investigated among academics and industrials for a… (more)

Subjects/Keywords: Indium Tin Oxide; Radio Frequency (RF)-assisted magnetron; Closed-field magnetron; Large area substrate; Organic substrate; Low temperature deposition; Plasma diagnostics; Langmuir probe; Ionization Fraction; Gridded energy analyzer

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APA (6th Edition):

Meng, L. (2011). Plasma diagnostics and ITO film deposition by RF-assisted closed-field dual magnetron system. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/18237

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Meng, Liang. “Plasma diagnostics and ITO film deposition by RF-assisted closed-field dual magnetron system.” 2011. Thesis, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/18237.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Meng, Liang. “Plasma diagnostics and ITO film deposition by RF-assisted closed-field dual magnetron system.” 2011. Web. 16 Sep 2019.

Vancouver:

Meng L. Plasma diagnostics and ITO film deposition by RF-assisted closed-field dual magnetron system. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2011. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/18237.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Meng L. Plasma diagnostics and ITO film deposition by RF-assisted closed-field dual magnetron system. [Thesis]. University of Illinois – Urbana-Champaign; 2011. Available from: http://hdl.handle.net/2142/18237

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Illinois – Urbana-Champaign

2. Lofgren, Robert E. Surface cleaning of optics by plasma (scope) with atomic hydrogen.

Degree: MS, 5183, 2010, University of Illinois – Urbana-Champaign

 A major obstacle in the implementation of extreme ultraviolet (EUV) light photolithography in production tools is the accumulation of fuel debris on the collector optics… (more)

Subjects/Keywords: Plamsa; Extreme ultraviolet (EUV) lithography; Plasma Etching Model

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APA (6th Edition):

Lofgren, R. E. (2010). Surface cleaning of optics by plasma (scope) with atomic hydrogen. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/16728

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Lofgren, Robert E. “Surface cleaning of optics by plasma (scope) with atomic hydrogen.” 2010. Thesis, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/16728.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Lofgren, Robert E. “Surface cleaning of optics by plasma (scope) with atomic hydrogen.” 2010. Web. 16 Sep 2019.

Vancouver:

Lofgren RE. Surface cleaning of optics by plasma (scope) with atomic hydrogen. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2010. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/16728.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Lofgren RE. Surface cleaning of optics by plasma (scope) with atomic hydrogen. [Thesis]. University of Illinois – Urbana-Champaign; 2010. Available from: http://hdl.handle.net/2142/16728

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Illinois – Urbana-Champaign

3. Raman, Priya. Chemical sputtering studies of lithiated ATJ graphite.

Degree: MS, 5183, 2013, University of Illinois – Urbana-Champaign

 Plasma Facing Component (PFC) materials are crucial to fusion reactor development. There is no one material that functions as an ideal PFC material. As a… (more)

Subjects/Keywords: ATJ graphite; Lithium; Chemical sputtering; Chemical erosion

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APA (6th Edition):

Raman, P. (2013). Chemical sputtering studies of lithiated ATJ graphite. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/42432

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Raman, Priya. “Chemical sputtering studies of lithiated ATJ graphite.” 2013. Thesis, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/42432.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Raman, Priya. “Chemical sputtering studies of lithiated ATJ graphite.” 2013. Web. 16 Sep 2019.

Vancouver:

Raman P. Chemical sputtering studies of lithiated ATJ graphite. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2013. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/42432.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Raman P. Chemical sputtering studies of lithiated ATJ graphite. [Thesis]. University of Illinois – Urbana-Champaign; 2013. Available from: http://hdl.handle.net/2142/42432

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Illinois – Urbana-Champaign

4. Sporre, John R. Detection of energetic neutral flux emanating from extreme ultraviolet light lithography sources.

Degree: MS, 0139, 2010, University of Illinois – Urbana-Champaign

 The advancement of the semiconductor industry depends on the improvement and advancement of the processes involved in creating integrated circuits. The most critical of these… (more)

Subjects/Keywords: Extreme Ultraviolet (EUV); debris mitigation; neutral debris; energetic neutrals; z-pinch; XTS 13-35; neutral detector; Flux; Ion Flux; Neutral Flux; source debris

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APA (6th Edition):

Sporre, J. R. (2010). Detection of energetic neutral flux emanating from extreme ultraviolet light lithography sources. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/16940

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Sporre, John R. “Detection of energetic neutral flux emanating from extreme ultraviolet light lithography sources.” 2010. Thesis, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/16940.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Sporre, John R. “Detection of energetic neutral flux emanating from extreme ultraviolet light lithography sources.” 2010. Web. 16 Sep 2019.

Vancouver:

Sporre JR. Detection of energetic neutral flux emanating from extreme ultraviolet light lithography sources. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2010. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/16940.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Sporre JR. Detection of energetic neutral flux emanating from extreme ultraviolet light lithography sources. [Thesis]. University of Illinois – Urbana-Champaign; 2010. Available from: http://hdl.handle.net/2142/16940

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Illinois – Urbana-Champaign

5. Ouyang, Zihao. Deposition of yttria-stabilized zirconia thermal barrier coatings by laser-assisted plasma coating at atmospheric pressure.

Degree: MS, 5183, 2011, University of Illinois – Urbana-Champaign

 This thesis details the design and construction of a microwave generation system, and a coaxial cylindrical plasma torch, where an atmospheric-pressure plasma (APP) can be… (more)

Subjects/Keywords: thermal barrier coatings; atmospheric pressure plasma; pulsed laser deposition; plasma-assisted pulsed laser ablation; optical emission spectroscopy

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APA (6th Edition):

Ouyang, Z. (2011). Deposition of yttria-stabilized zirconia thermal barrier coatings by laser-assisted plasma coating at atmospheric pressure. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/24163

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Ouyang, Zihao. “Deposition of yttria-stabilized zirconia thermal barrier coatings by laser-assisted plasma coating at atmospheric pressure.” 2011. Thesis, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/24163.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Ouyang, Zihao. “Deposition of yttria-stabilized zirconia thermal barrier coatings by laser-assisted plasma coating at atmospheric pressure.” 2011. Web. 16 Sep 2019.

Vancouver:

Ouyang Z. Deposition of yttria-stabilized zirconia thermal barrier coatings by laser-assisted plasma coating at atmospheric pressure. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2011. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/24163.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Ouyang Z. Deposition of yttria-stabilized zirconia thermal barrier coatings by laser-assisted plasma coating at atmospheric pressure. [Thesis]. University of Illinois – Urbana-Champaign; 2011. Available from: http://hdl.handle.net/2142/24163

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Illinois – Urbana-Champaign

6. Drobny, Jon Thomas. F-TRIDYN: A Monte-Carlo, BCA code for modeling ion-surface interactions with rough materials and coupling plasma and material codes.

Degree: MS, Nuclear, Plasma, Radiolgc Engr, 2017, University of Illinois – Urbana-Champaign

 Fractal-TRIDYN (F-TRIDYN) is a modified version of the widely used Monte Carlo, Binary Collision Approximation code TRIDYN that has been upgraded to include an explicit… (more)

Subjects/Keywords: Plasma Material Interactions; Fusion; Binary Collision Approximation; Surface Roughness; Fractal Geometry; Sputtering

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APA (6th Edition):

Drobny, J. T. (2017). F-TRIDYN: A Monte-Carlo, BCA code for modeling ion-surface interactions with rough materials and coupling plasma and material codes. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/99426

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Drobny, Jon Thomas. “F-TRIDYN: A Monte-Carlo, BCA code for modeling ion-surface interactions with rough materials and coupling plasma and material codes.” 2017. Thesis, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/99426.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Drobny, Jon Thomas. “F-TRIDYN: A Monte-Carlo, BCA code for modeling ion-surface interactions with rough materials and coupling plasma and material codes.” 2017. Web. 16 Sep 2019.

Vancouver:

Drobny JT. F-TRIDYN: A Monte-Carlo, BCA code for modeling ion-surface interactions with rough materials and coupling plasma and material codes. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2017. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/99426.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Drobny JT. F-TRIDYN: A Monte-Carlo, BCA code for modeling ion-surface interactions with rough materials and coupling plasma and material codes. [Thesis]. University of Illinois – Urbana-Champaign; 2017. Available from: http://hdl.handle.net/2142/99426

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Illinois – Urbana-Champaign

7. Piotrowicz, Pawel A. Physics of the helicon antenna on the prototype materials exposure experiment.

Degree: MS, Nuclear, Plasma, Radiolgc Engr, 2018, University of Illinois – Urbana-Champaign

 Proto-MPEX has been operating in a high-density “helicon-mode” of operation. The helicon mode of operation is classified by an increase in target on-axis electron density… (more)

Subjects/Keywords: helicon; plasma; radio-frequency; antenna

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APA (6th Edition):

Piotrowicz, P. A. (2018). Physics of the helicon antenna on the prototype materials exposure experiment. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/100910

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Piotrowicz, Pawel A. “Physics of the helicon antenna on the prototype materials exposure experiment.” 2018. Thesis, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/100910.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Piotrowicz, Pawel A. “Physics of the helicon antenna on the prototype materials exposure experiment.” 2018. Web. 16 Sep 2019.

Vancouver:

Piotrowicz PA. Physics of the helicon antenna on the prototype materials exposure experiment. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2018. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/100910.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Piotrowicz PA. Physics of the helicon antenna on the prototype materials exposure experiment. [Thesis]. University of Illinois – Urbana-Champaign; 2018. Available from: http://hdl.handle.net/2142/100910

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation


University of Illinois – Urbana-Champaign

8. Ouyang, Zihao. Characterization, optimization, and simulation in through silicon via (TSV) dry etch.

Degree: PhD, 5183, 2014, University of Illinois – Urbana-Champaign

 Two approaches of through-silicon-via (TSV) etching methods, the Bosch process (alternating etching/passivation phases) and the single-step etching, have been experimentally investigated and theoretically modeled in… (more)

Subjects/Keywords: Through-Silicon-Vias (TSVs); Plasma; Dry etch

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APA (6th Edition):

Ouyang, Z. (2014). Characterization, optimization, and simulation in through silicon via (TSV) dry etch. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/46941

Chicago Manual of Style (16th Edition):

Ouyang, Zihao. “Characterization, optimization, and simulation in through silicon via (TSV) dry etch.” 2014. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/46941.

MLA Handbook (7th Edition):

Ouyang, Zihao. “Characterization, optimization, and simulation in through silicon via (TSV) dry etch.” 2014. Web. 16 Sep 2019.

Vancouver:

Ouyang Z. Characterization, optimization, and simulation in through silicon via (TSV) dry etch. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2014. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/46941.

Council of Science Editors:

Ouyang Z. Characterization, optimization, and simulation in through silicon via (TSV) dry etch. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2014. Available from: http://hdl.handle.net/2142/46941


University of Illinois – Urbana-Champaign

9. Shin, Hyung Joo. Cleaning of tin debris by reactive ion etching in a discharge-produced EUV plasma source.

Degree: PhD, 0139, 2010, University of Illinois – Urbana-Champaign

 Extreme ultraviolet lithography (EUVL) is a promising candidate for the next generation of lithography technique to continue Moore's law. Moore's law has been upheld by… (more)

Subjects/Keywords: Extreme Ultraviolet (EUV) source; Plasma; Chlorine; Tin; Cleaning; Etching; Contamination; Mirror; Model

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APA (6th Edition):

Shin, H. J. (2010). Cleaning of tin debris by reactive ion etching in a discharge-produced EUV plasma source. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/14691

Chicago Manual of Style (16th Edition):

Shin, Hyung Joo. “Cleaning of tin debris by reactive ion etching in a discharge-produced EUV plasma source.” 2010. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/14691.

MLA Handbook (7th Edition):

Shin, Hyung Joo. “Cleaning of tin debris by reactive ion etching in a discharge-produced EUV plasma source.” 2010. Web. 16 Sep 2019.

Vancouver:

Shin HJ. Cleaning of tin debris by reactive ion etching in a discharge-produced EUV plasma source. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2010. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/14691.

Council of Science Editors:

Shin HJ. Cleaning of tin debris by reactive ion etching in a discharge-produced EUV plasma source. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2010. Available from: http://hdl.handle.net/2142/14691


University of Illinois – Urbana-Champaign

10. Raman, Priya. Magnetic field optimization for high power impulse magnetron sputtering.

Degree: PhD, Nuclear, Plasma, Radiolgc Engr, 2016, University of Illinois – Urbana-Champaign

 High Power Pulsed Magnetron Sputtering (HPPMS) or High Power Impulse Magnetron Sputtering (HiPIMS) is a promising Physical Vapor Deposition technique with several advantages over DC… (more)

Subjects/Keywords: High Power Impulse Magnetron Sputtering (HiPIMS); High Power Pulsed Magnetron Sputtering (HPPMS ); Magnetron Sputtering

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APA (6th Edition):

Raman, P. (2016). Magnetic field optimization for high power impulse magnetron sputtering. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/90929

Chicago Manual of Style (16th Edition):

Raman, Priya. “Magnetic field optimization for high power impulse magnetron sputtering.” 2016. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/90929.

MLA Handbook (7th Edition):

Raman, Priya. “Magnetic field optimization for high power impulse magnetron sputtering.” 2016. Web. 16 Sep 2019.

Vancouver:

Raman P. Magnetic field optimization for high power impulse magnetron sputtering. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2016. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/90929.

Council of Science Editors:

Raman P. Magnetic field optimization for high power impulse magnetron sputtering. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2016. Available from: http://hdl.handle.net/2142/90929


University of Illinois – Urbana-Champaign

11. Xu, Wenyu. Experimental and numerical analysis of thermoelectric magnetohydrodynamic driven liquid lithium flow in open channels for fusion applications.

Degree: PhD, Nuclear Engineering, 2015, University of Illinois – Urbana-Champaign

 The concept of using molten metal as a plasma facing material (PFM) has been widely considered, and liquid lithium, among many choices, has attracted a… (more)

Subjects/Keywords: Controlled fusion; liquid lithium; thermoelectric Magnetohydrodynamics; plasma facing component

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APA (6th Edition):

Xu, W. (2015). Experimental and numerical analysis of thermoelectric magnetohydrodynamic driven liquid lithium flow in open channels for fusion applications. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/78620

Chicago Manual of Style (16th Edition):

Xu, Wenyu. “Experimental and numerical analysis of thermoelectric magnetohydrodynamic driven liquid lithium flow in open channels for fusion applications.” 2015. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/78620.

MLA Handbook (7th Edition):

Xu, Wenyu. “Experimental and numerical analysis of thermoelectric magnetohydrodynamic driven liquid lithium flow in open channels for fusion applications.” 2015. Web. 16 Sep 2019.

Vancouver:

Xu W. Experimental and numerical analysis of thermoelectric magnetohydrodynamic driven liquid lithium flow in open channels for fusion applications. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2015. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/78620.

Council of Science Editors:

Xu W. Experimental and numerical analysis of thermoelectric magnetohydrodynamic driven liquid lithium flow in open channels for fusion applications. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2015. Available from: http://hdl.handle.net/2142/78620


University of Illinois – Urbana-Champaign

12. Fiflis, Peter Robert. Interaction of plasmas with lithium and tungsten fusion plasma facing components.

Degree: PhD, Nuclear, Plasma, Radiolgc Engr, 2016, University of Illinois – Urbana-Champaign

 One of the largest outstanding issues in magnetic confinement fusion is the interaction of the fusion plasma with the first wall of the device; an… (more)

Subjects/Keywords: Fusion; Plasma facing components (PFC); Lithium; Stability; Tungsten; Nanostructuring

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APA (6th Edition):

Fiflis, P. R. (2016). Interaction of plasmas with lithium and tungsten fusion plasma facing components. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/90576

Chicago Manual of Style (16th Edition):

Fiflis, Peter Robert. “Interaction of plasmas with lithium and tungsten fusion plasma facing components.” 2016. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/90576.

MLA Handbook (7th Edition):

Fiflis, Peter Robert. “Interaction of plasmas with lithium and tungsten fusion plasma facing components.” 2016. Web. 16 Sep 2019.

Vancouver:

Fiflis PR. Interaction of plasmas with lithium and tungsten fusion plasma facing components. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2016. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/90576.

Council of Science Editors:

Fiflis PR. Interaction of plasmas with lithium and tungsten fusion plasma facing components. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2016. Available from: http://hdl.handle.net/2142/90576


University of Illinois – Urbana-Champaign

13. Jung, Soonwook. Development of high energy pulsed plasma simulator for plasma-lithium trench experiment.

Degree: PhD, 5183, 2014, University of Illinois – Urbana-Champaign

 To simulate detrimental events in a tokamak and provide a test-stand for a liquid lithium infused trench (LiMIT) device, a pulsed plasma source utilizing a… (more)

Subjects/Keywords: plasma; fusion; theta pinch; plasma material interaction; plasma gun; vapor shielding; compact toroid

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APA (6th Edition):

Jung, S. (2014). Development of high energy pulsed plasma simulator for plasma-lithium trench experiment. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/50746

Chicago Manual of Style (16th Edition):

Jung, Soonwook. “Development of high energy pulsed plasma simulator for plasma-lithium trench experiment.” 2014. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/50746.

MLA Handbook (7th Edition):

Jung, Soonwook. “Development of high energy pulsed plasma simulator for plasma-lithium trench experiment.” 2014. Web. 16 Sep 2019.

Vancouver:

Jung S. Development of high energy pulsed plasma simulator for plasma-lithium trench experiment. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2014. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/50746.

Council of Science Editors:

Jung S. Development of high energy pulsed plasma simulator for plasma-lithium trench experiment. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2014. Available from: http://hdl.handle.net/2142/50746


University of Illinois – Urbana-Champaign

14. Christenson, Michael Peter. The design and development of hydrogen isotope extraction technologies for a limit-style liquid lithium loop.

Degree: PhD, Nuclear, Plasma, Radiolgc Engr, 2018, University of Illinois – Urbana-Champaign

 As lithium has grown in popularity as a plasma-facing material, efforts have been placed on examining its viability as a first wall candidate. Lithium has… (more)

Subjects/Keywords: Plasma; Lithium; Hydrogen; Deuterium; Tritium; Retention; Recovery; Recycling; Thermoelectic Magnetohydrodynamics; Dissolution; Precipitation; Flux; Exposure

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APA (6th Edition):

Christenson, M. P. (2018). The design and development of hydrogen isotope extraction technologies for a limit-style liquid lithium loop. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/100902

Chicago Manual of Style (16th Edition):

Christenson, Michael Peter. “The design and development of hydrogen isotope extraction technologies for a limit-style liquid lithium loop.” 2018. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/100902.

MLA Handbook (7th Edition):

Christenson, Michael Peter. “The design and development of hydrogen isotope extraction technologies for a limit-style liquid lithium loop.” 2018. Web. 16 Sep 2019.

Vancouver:

Christenson MP. The design and development of hydrogen isotope extraction technologies for a limit-style liquid lithium loop. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2018. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/100902.

Council of Science Editors:

Christenson MP. The design and development of hydrogen isotope extraction technologies for a limit-style liquid lithium loop. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2018. Available from: http://hdl.handle.net/2142/100902


University of Illinois – Urbana-Champaign

15. Markidis, Stefano. Development of implicit kinetic simulation methods, and their application to ion beam propagation in current and future neutralized drift compression experiments.

Degree: PhD, 0139, 2010, University of Illinois – Urbana-Champaign

 Ion beams can be accelerated and focused to hit a target thus releasing high density power to achieve nuclear fusion. They can also be used… (more)

Subjects/Keywords: implicit Particle-in-Cell; fully implicit PIC; ion beam neutralization; ion beam sheath oscillations; shock formation via Langmuir waves and ion beam propagation; Neutralized Drift Compression Experiment (NDCX)

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APA (6th Edition):

Markidis, S. (2010). Development of implicit kinetic simulation methods, and their application to ion beam propagation in current and future neutralized drift compression experiments. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/16090

Chicago Manual of Style (16th Edition):

Markidis, Stefano. “Development of implicit kinetic simulation methods, and their application to ion beam propagation in current and future neutralized drift compression experiments.” 2010. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/16090.

MLA Handbook (7th Edition):

Markidis, Stefano. “Development of implicit kinetic simulation methods, and their application to ion beam propagation in current and future neutralized drift compression experiments.” 2010. Web. 16 Sep 2019.

Vancouver:

Markidis S. Development of implicit kinetic simulation methods, and their application to ion beam propagation in current and future neutralized drift compression experiments. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2010. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/16090.

Council of Science Editors:

Markidis S. Development of implicit kinetic simulation methods, and their application to ion beam propagation in current and future neutralized drift compression experiments. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2010. Available from: http://hdl.handle.net/2142/16090


University of Illinois – Urbana-Champaign

16. Peck, Jason A. Laser-enhanced plasma etching of semiconductor materials.

Degree: PhD, Nuclear, Plasma, Radiolgc Engr, 2017, University of Illinois – Urbana-Champaign

 In this work, laser exposure was coupled with plasma etch processes for local etch rate enhancement, and under some conditions, etch activation. Materials were tested… (more)

Subjects/Keywords: Plasma; Etching; Silicon; Laser; Processing

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APA (6th Edition):

Peck, J. A. (2017). Laser-enhanced plasma etching of semiconductor materials. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/104723

Chicago Manual of Style (16th Edition):

Peck, Jason A. “Laser-enhanced plasma etching of semiconductor materials.” 2017. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/104723.

MLA Handbook (7th Edition):

Peck, Jason A. “Laser-enhanced plasma etching of semiconductor materials.” 2017. Web. 16 Sep 2019.

Vancouver:

Peck JA. Laser-enhanced plasma etching of semiconductor materials. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2017. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/104723.

Council of Science Editors:

Peck JA. Laser-enhanced plasma etching of semiconductor materials. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2017. Available from: http://hdl.handle.net/2142/104723


University of Illinois – Urbana-Champaign

17. Shin, Charles. Microplasma chemical reaction enhancement by laser modification of dielectric surface topography.

Degree: PhD, Electrical & Computer Engr, 2018, University of Illinois – Urbana-Champaign

 A newly developed etching technique, infrared laser ablation, for microplasma device fabrication is introduced. The ablated surface provides a topography that is distinct from the… (more)

Subjects/Keywords: Microplasmas; Plasmachemistry

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APA (6th Edition):

Shin, C. (2018). Microplasma chemical reaction enhancement by laser modification of dielectric surface topography. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/102472

Chicago Manual of Style (16th Edition):

Shin, Charles. “Microplasma chemical reaction enhancement by laser modification of dielectric surface topography.” 2018. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/102472.

MLA Handbook (7th Edition):

Shin, Charles. “Microplasma chemical reaction enhancement by laser modification of dielectric surface topography.” 2018. Web. 16 Sep 2019.

Vancouver:

Shin C. Microplasma chemical reaction enhancement by laser modification of dielectric surface topography. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2018. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/102472.

Council of Science Editors:

Shin C. Microplasma chemical reaction enhancement by laser modification of dielectric surface topography. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2018. Available from: http://hdl.handle.net/2142/102472


University of Illinois – Urbana-Champaign

18. Balasundaram, Karthik. Metal-assisted chemical etching as a disruptive platform for multi-dimensional semiconductor sculpting.

Degree: PhD, Electrical & Computer Engr, 2015, University of Illinois – Urbana-Champaign

 Conventional top-down fabrication approaches for semiconductor manufacturing can be classified into dry (anisotropic) and wet etch (isotropic or orientation-dependent) processes. At present, fabrication of novel… (more)

Subjects/Keywords: semiconductor; Metal-assisted Chemical Etching (MacEtch); magnetic field

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APA (6th Edition):

Balasundaram, K. (2015). Metal-assisted chemical etching as a disruptive platform for multi-dimensional semiconductor sculpting. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/87969

Chicago Manual of Style (16th Edition):

Balasundaram, Karthik. “Metal-assisted chemical etching as a disruptive platform for multi-dimensional semiconductor sculpting.” 2015. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/87969.

MLA Handbook (7th Edition):

Balasundaram, Karthik. “Metal-assisted chemical etching as a disruptive platform for multi-dimensional semiconductor sculpting.” 2015. Web. 16 Sep 2019.

Vancouver:

Balasundaram K. Metal-assisted chemical etching as a disruptive platform for multi-dimensional semiconductor sculpting. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2015. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/87969.

Council of Science Editors:

Balasundaram K. Metal-assisted chemical etching as a disruptive platform for multi-dimensional semiconductor sculpting. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2015. Available from: http://hdl.handle.net/2142/87969


University of Illinois – Urbana-Champaign

19. Gartia, Manas Ranjan. Nanoplasmonics and silicon nanophotonics devices for sensing applications.

Degree: PhD, 5183, 2014, University of Illinois – Urbana-Champaign

 Nanophotonics deals with the interaction of light with matter in nanometer scale. One of the subsets of nanophotonics is nanoplasmonics, which deals with manipulation of… (more)

Subjects/Keywords: Plasmonics; Nanophotonics; Nanohole array; Biosensing; Optical spectroscopy; surface enhanced Raman spectroscopy (SERS); Raman; Solar cell; Fluorescence imaging; Cell imaging

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APA (6th Edition):

Gartia, M. R. (2014). Nanoplasmonics and silicon nanophotonics devices for sensing applications. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/55157

Chicago Manual of Style (16th Edition):

Gartia, Manas Ranjan. “Nanoplasmonics and silicon nanophotonics devices for sensing applications.” 2014. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/55157.

MLA Handbook (7th Edition):

Gartia, Manas Ranjan. “Nanoplasmonics and silicon nanophotonics devices for sensing applications.” 2014. Web. 16 Sep 2019.

Vancouver:

Gartia MR. Nanoplasmonics and silicon nanophotonics devices for sensing applications. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2014. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/55157.

Council of Science Editors:

Gartia MR. Nanoplasmonics and silicon nanophotonics devices for sensing applications. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2014. Available from: http://hdl.handle.net/2142/55157


University of Illinois – Urbana-Champaign

20. Li, Benben. Performance and analysis of the plasma bipolar junction transistor: Control of the surface electrical properties.

Degree: PhD, 1200, 2012, University of Illinois – Urbana-Champaign

 A new configuration of plasma bipolar junction transistor (PBJT) based on an epitaxial wafer has been designed and fabricated. Its electrical properties and the collector… (more)

Subjects/Keywords: plasma bipolar junction transistor; microplasma; plasma transistor; plasma/semiconductor interface

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APA (6th Edition):

Li, B. (2012). Performance and analysis of the plasma bipolar junction transistor: Control of the surface electrical properties. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/34458

Chicago Manual of Style (16th Edition):

Li, Benben. “Performance and analysis of the plasma bipolar junction transistor: Control of the surface electrical properties.” 2012. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/34458.

MLA Handbook (7th Edition):

Li, Benben. “Performance and analysis of the plasma bipolar junction transistor: Control of the surface electrical properties.” 2012. Web. 16 Sep 2019.

Vancouver:

Li B. Performance and analysis of the plasma bipolar junction transistor: Control of the surface electrical properties. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2012. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/34458.

Council of Science Editors:

Li B. Performance and analysis of the plasma bipolar junction transistor: Control of the surface electrical properties. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2012. Available from: http://hdl.handle.net/2142/34458


University of Illinois – Urbana-Champaign

21. Tchertchian, Paul A. Hybrid plasma-semiconductor devices.

Degree: PhD, 1200, 2010, University of Illinois – Urbana-Champaign

 A hybrid plasma-semiconductor phototransistor has been realized by substituting a plasma for the collector of an npn bipolar junction transistor. Designated as the plasma bipolar… (more)

Subjects/Keywords: Plasma; Transistor; Optoelectronic; Phototransistor

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APA (6th Edition):

Tchertchian, P. A. (2010). Hybrid plasma-semiconductor devices. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/17048

Chicago Manual of Style (16th Edition):

Tchertchian, Paul A. “Hybrid plasma-semiconductor devices.” 2010. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/17048.

MLA Handbook (7th Edition):

Tchertchian, Paul A. “Hybrid plasma-semiconductor devices.” 2010. Web. 16 Sep 2019.

Vancouver:

Tchertchian PA. Hybrid plasma-semiconductor devices. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2010. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/17048.

Council of Science Editors:

Tchertchian PA. Hybrid plasma-semiconductor devices. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2010. Available from: http://hdl.handle.net/2142/17048

22. Jin, Kai. Argon bubble transport and capture in continuous casting with an external magnetic field using GPU-based large eddy simulations.

Degree: PhD, Mechanical Engineering, 2016, University of Illinois – Urbana-Champaign

 Continuous casting produces over 95% of steel in the world today, hence even small improvements to this important industrial process can have large economic impact.… (more)

Subjects/Keywords: Computational fluid dynamics (CFD); Multi-GPU Computing; Continuous Casting; Two-phase flow; Electromagnetic Braking

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APA (6th Edition):

Jin, K. (2016). Argon bubble transport and capture in continuous casting with an external magnetic field using GPU-based large eddy simulations. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/95333

Chicago Manual of Style (16th Edition):

Jin, Kai. “Argon bubble transport and capture in continuous casting with an external magnetic field using GPU-based large eddy simulations.” 2016. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/95333.

MLA Handbook (7th Edition):

Jin, Kai. “Argon bubble transport and capture in continuous casting with an external magnetic field using GPU-based large eddy simulations.” 2016. Web. 16 Sep 2019.

Vancouver:

Jin K. Argon bubble transport and capture in continuous casting with an external magnetic field using GPU-based large eddy simulations. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2016. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/95333.

Council of Science Editors:

Jin K. Argon bubble transport and capture in continuous casting with an external magnetic field using GPU-based large eddy simulations. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2016. Available from: http://hdl.handle.net/2142/95333


University of Illinois – Urbana-Champaign

23. Wiersma, Zachary Scott Bender. Analytical evaluation of microplasma technologies for production of hydrogen fuel from water.

Degree: PhD, Chemistry, 2018, University of Illinois – Urbana-Champaign

 A H2-based energy economy could alleviate fossil fuel environmental effects. Hydrogen is an ideal fuel because of its ultra-high energy density, availability in common sources… (more)

Subjects/Keywords: plasma chemistry; plasma physics; hydrogen fuel; water reactions

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APA (6th Edition):

Wiersma, Z. S. B. (2018). Analytical evaluation of microplasma technologies for production of hydrogen fuel from water. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/100983

Chicago Manual of Style (16th Edition):

Wiersma, Zachary Scott Bender. “Analytical evaluation of microplasma technologies for production of hydrogen fuel from water.” 2018. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/100983.

MLA Handbook (7th Edition):

Wiersma, Zachary Scott Bender. “Analytical evaluation of microplasma technologies for production of hydrogen fuel from water.” 2018. Web. 16 Sep 2019.

Vancouver:

Wiersma ZSB. Analytical evaluation of microplasma technologies for production of hydrogen fuel from water. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2018. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/100983.

Council of Science Editors:

Wiersma ZSB. Analytical evaluation of microplasma technologies for production of hydrogen fuel from water. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2018. Available from: http://hdl.handle.net/2142/100983


University of Illinois – Urbana-Champaign

24. Ahern, Drew. Investigation of a space propulsion concept using inertial electrostatic confinement.

Degree: PhD, Aerospace Engineering, 2018, University of Illinois – Urbana-Champaign

 This thesis discusses the Helicon Injected Inertial Plasma Electrostatic Rocket (HIIPER), a space propulsion concept consisting of a helicon source for plasma generation and an… (more)

Subjects/Keywords: electric propulsion; inertial electrostatic confinement

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APA (6th Edition):

Ahern, D. (2018). Investigation of a space propulsion concept using inertial electrostatic confinement. (Doctoral Dissertation). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/100997

Chicago Manual of Style (16th Edition):

Ahern, Drew. “Investigation of a space propulsion concept using inertial electrostatic confinement.” 2018. Doctoral Dissertation, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/100997.

MLA Handbook (7th Edition):

Ahern, Drew. “Investigation of a space propulsion concept using inertial electrostatic confinement.” 2018. Web. 16 Sep 2019.

Vancouver:

Ahern D. Investigation of a space propulsion concept using inertial electrostatic confinement. [Internet] [Doctoral dissertation]. University of Illinois – Urbana-Champaign; 2018. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/100997.

Council of Science Editors:

Ahern D. Investigation of a space propulsion concept using inertial electrostatic confinement. [Doctoral Dissertation]. University of Illinois – Urbana-Champaign; 2018. Available from: http://hdl.handle.net/2142/100997

25. Szott, Matthew Michael. Flow control and associated technologies to advance the application of TEMHD-driven liquid lithium in fusion devices.

Degree: MS, Nuclear, Plasma, Radiolgc Engr, 2016, University of Illinois – Urbana-Champaign

 As the fusion research community trends toward building larger and hotter devices, evidence points to the fact that solid plasma facing components will not be… (more)

Subjects/Keywords: Fusion; Plasma Facing Components (PFCs); Lithium; Thermoelectric Magnetohydrodynamics (TEMHD); Liquid Lithium Flow Control; Contact Angle; Lithium Dryout; Experimental Advanced Superconducting Tokamak (EAST)

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APA (6th Edition):

Szott, M. M. (2016). Flow control and associated technologies to advance the application of TEMHD-driven liquid lithium in fusion devices. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/95381

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Szott, Matthew Michael. “Flow control and associated technologies to advance the application of TEMHD-driven liquid lithium in fusion devices.” 2016. Thesis, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/95381.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Szott, Matthew Michael. “Flow control and associated technologies to advance the application of TEMHD-driven liquid lithium in fusion devices.” 2016. Web. 16 Sep 2019.

Vancouver:

Szott MM. Flow control and associated technologies to advance the application of TEMHD-driven liquid lithium in fusion devices. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2016. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/95381.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Szott MM. Flow control and associated technologies to advance the application of TEMHD-driven liquid lithium in fusion devices. [Thesis]. University of Illinois – Urbana-Champaign; 2016. Available from: http://hdl.handle.net/2142/95381

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

26. Ritz, Eithan. Charging in Aspect Ratio Dependent Etching.

Degree: MS, 0139, 2011, University of Illinois – Urbana-Champaign

 In this work, a novel diagnostic tool was developed in order to provide a measurement technique for sidewall charging in high aspect ratio features exposed… (more)

Subjects/Keywords: Plasma; plasma etching; via twisting; sidewall charging

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APA (6th Edition):

Ritz, E. (2011). Charging in Aspect Ratio Dependent Etching. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/24130

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Ritz, Eithan. “Charging in Aspect Ratio Dependent Etching.” 2011. Thesis, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/24130.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Ritz, Eithan. “Charging in Aspect Ratio Dependent Etching.” 2011. Web. 16 Sep 2019.

Vancouver:

Ritz E. Charging in Aspect Ratio Dependent Etching. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2011. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/24130.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Ritz E. Charging in Aspect Ratio Dependent Etching. [Thesis]. University of Illinois – Urbana-Champaign; 2011. Available from: http://hdl.handle.net/2142/24130

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

27. Aghazarian, Maro. Study of the effects of roughness, ultraviolet radiation, multipactoring and magnetic field on vacuum breakdown.

Degree: MS, 0139, 2013, University of Illinois – Urbana-Champaign

 Breakdowns in vaccuum and the factors a ffecting them have been studied for more than a hundred years, with applications ranging from high voltage isolation… (more)

Subjects/Keywords: vacuum breakdowns; Ion Cyclotron Range of Frequencies (ICRF) antennas; breakdown; macroroughness; high voltage breakdown; electrical breakdown; surface roughness; effects of UV on breakdown; vacuum breakdown; ICRF antenna breakdown

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APA (6th Edition):

Aghazarian, M. (2013). Study of the effects of roughness, ultraviolet radiation, multipactoring and magnetic field on vacuum breakdown. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/45506

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Aghazarian, Maro. “Study of the effects of roughness, ultraviolet radiation, multipactoring and magnetic field on vacuum breakdown.” 2013. Thesis, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/45506.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Aghazarian, Maro. “Study of the effects of roughness, ultraviolet radiation, multipactoring and magnetic field on vacuum breakdown.” 2013. Web. 16 Sep 2019.

Vancouver:

Aghazarian M. Study of the effects of roughness, ultraviolet radiation, multipactoring and magnetic field on vacuum breakdown. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2013. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/45506.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Aghazarian M. Study of the effects of roughness, ultraviolet radiation, multipactoring and magnetic field on vacuum breakdown. [Thesis]. University of Illinois – Urbana-Champaign; 2013. Available from: http://hdl.handle.net/2142/45506

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

28. Fiflis, Peter. Technology and engineering of liquid lithium for fusion applications.

Degree: MS, 5183, 2013, University of Illinois – Urbana-Champaign

 Many outstanding issues in tokamak fusion arise from the interaction of the fusion plasma with the first wall of the device, particularly in the divertor… (more)

Subjects/Keywords: Lithium; Fusion; Plasma; Lithium plasma facing components (PFCs); Contact Angle; Seebeck

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APA (6th Edition):

Fiflis, P. (2013). Technology and engineering of liquid lithium for fusion applications. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/45297

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Fiflis, Peter. “Technology and engineering of liquid lithium for fusion applications.” 2013. Thesis, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/45297.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Fiflis, Peter. “Technology and engineering of liquid lithium for fusion applications.” 2013. Web. 16 Sep 2019.

Vancouver:

Fiflis P. Technology and engineering of liquid lithium for fusion applications. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2013. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/45297.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Fiflis P. Technology and engineering of liquid lithium for fusion applications. [Thesis]. University of Illinois – Urbana-Champaign; 2013. Available from: http://hdl.handle.net/2142/45297

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

29. Elg, Daniel. Magnetic mitigation of energetic ions for extreme ultraviolet lithography sources.

Degree: MS, 5183, 2013, University of Illinois – Urbana-Champaign

 For decades, the semiconductor industry has followed a trend known as Moore’s Law by doubling the number of transistors that can fit on a given… (more)

Subjects/Keywords: Extreme Ultraviolet (EUV); Collector Optics; Debris Mitigation; Magnetic Mitigation

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Elg, D. (2013). Magnetic mitigation of energetic ions for extreme ultraviolet lithography sources. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/44169

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Elg, Daniel. “Magnetic mitigation of energetic ions for extreme ultraviolet lithography sources.” 2013. Thesis, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/44169.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Elg, Daniel. “Magnetic mitigation of energetic ions for extreme ultraviolet lithography sources.” 2013. Web. 16 Sep 2019.

Vancouver:

Elg D. Magnetic mitigation of energetic ions for extreme ultraviolet lithography sources. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2013. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/44169.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Elg D. Magnetic mitigation of energetic ions for extreme ultraviolet lithography sources. [Thesis]. University of Illinois – Urbana-Champaign; 2013. Available from: http://hdl.handle.net/2142/44169

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

30. Hong, Jungmi. Atmospheric pressure plasma chemical deposition by using dielectric barrier discharge system.

Degree: MS, 5183, 2013, University of Illinois – Urbana-Champaign

 During the last decade atmospheric pressure plasma sources have been very successful in various practical applications such as surface cleaning, modification and sterilization. Lately thin… (more)

Subjects/Keywords: Plasma Chemical Deposition; Dielectric Barrier Discharge; Atmospheric Pressure Plasma

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Hong, J. (2013). Atmospheric pressure plasma chemical deposition by using dielectric barrier discharge system. (Thesis). University of Illinois – Urbana-Champaign. Retrieved from http://hdl.handle.net/2142/44156

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Chicago Manual of Style (16th Edition):

Hong, Jungmi. “Atmospheric pressure plasma chemical deposition by using dielectric barrier discharge system.” 2013. Thesis, University of Illinois – Urbana-Champaign. Accessed September 16, 2019. http://hdl.handle.net/2142/44156.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

MLA Handbook (7th Edition):

Hong, Jungmi. “Atmospheric pressure plasma chemical deposition by using dielectric barrier discharge system.” 2013. Web. 16 Sep 2019.

Vancouver:

Hong J. Atmospheric pressure plasma chemical deposition by using dielectric barrier discharge system. [Internet] [Thesis]. University of Illinois – Urbana-Champaign; 2013. [cited 2019 Sep 16]. Available from: http://hdl.handle.net/2142/44156.

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

Council of Science Editors:

Hong J. Atmospheric pressure plasma chemical deposition by using dielectric barrier discharge system. [Thesis]. University of Illinois – Urbana-Champaign; 2013. Available from: http://hdl.handle.net/2142/44156

Note: this citation may be lacking information needed for this citation format:
Not specified: Masters Thesis or Doctoral Dissertation

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