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You searched for +publisher:"University of Connecticut" +contributor:("Bryan D. Huey, Seok-Woo Lee, Ryan Rudy"). One record found.

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University of Connecticut

1. Rivas, Manuel. Nanoscale Mapping of In-Situ Micro Electro Mechanical Systems with Atomic Force Microscopy.

Degree: MS, Materials Science and Engineering, 2018, University of Connecticut

Micro-electro-mechanical-systems (MEMS) are increasingly at our fingertips. To understand and thereby improve their performance, especially given their ever-decreasing sizes, it is crucial to measure their functionality in-situ. Atomic Force Microscopy (AFM) is well suited for such studies, allowing nanoscale lateral and vertical resolution of static displacements, as well as mapping of the dynamic response of these physically actuating microsystems. In this work, the vibration of a tuning fork based viscosity sensor is mapped and compared to model experiments in air, liquid, and a curing collagen gel. The switching response of a MEMS switch with nanosecond time-scale activation is also monitored – including mapping resonances of the driving microcantilever, the displacement of an overhanging contact structure in response to periodic pulsing, and measurements of the synchronization between the switched RF signal and the applied forces. Such nanoscale in-situ AFM investigations of MEMS can be crucial for enhancing modeling, design, and the ultimate performance of these increasingly important and sophisticated devices. Advisors/Committee Members: Bryan D. Huey, Seok-Woo Lee, Ryan Rudy, Bryan D. Huey.

Subjects/Keywords: AFM; In-situ; MEMS

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Rivas, M. (2018). Nanoscale Mapping of In-Situ Micro Electro Mechanical Systems with Atomic Force Microscopy. (Masters Thesis). University of Connecticut. Retrieved from https://opencommons.uconn.edu/gs_theses/1179

Chicago Manual of Style (16th Edition):

Rivas, Manuel. “Nanoscale Mapping of In-Situ Micro Electro Mechanical Systems with Atomic Force Microscopy.” 2018. Masters Thesis, University of Connecticut. Accessed June 16, 2019. https://opencommons.uconn.edu/gs_theses/1179.

MLA Handbook (7th Edition):

Rivas, Manuel. “Nanoscale Mapping of In-Situ Micro Electro Mechanical Systems with Atomic Force Microscopy.” 2018. Web. 16 Jun 2019.

Vancouver:

Rivas M. Nanoscale Mapping of In-Situ Micro Electro Mechanical Systems with Atomic Force Microscopy. [Internet] [Masters thesis]. University of Connecticut; 2018. [cited 2019 Jun 16]. Available from: https://opencommons.uconn.edu/gs_theses/1179.

Council of Science Editors:

Rivas M. Nanoscale Mapping of In-Situ Micro Electro Mechanical Systems with Atomic Force Microscopy. [Masters Thesis]. University of Connecticut; 2018. Available from: https://opencommons.uconn.edu/gs_theses/1179

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