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Georgia Tech

1. Diao, Jie. Development of Techniques to Quantify Chemical and Mechanical Modifications of Polymer Surfaces: Application to Chemical Mechanical Polishing.

Degree: PhD, Chemical Engineering, 2004, Georgia Tech

This thesis is devoted to development of techniques to quantify chemical and mechanical influences during chemical mechanical polishing (CMP) near the surface of a polymer film, poly (biphenyl dianhydride-p-phenylenediamine) (BPDA-PDA). To quantify chemical modifications during CMP, an iterative algorithm has been proposed to extract depth profiles based on Ficks second law of diffusion in a multi-element system from data supplied by angle resolved x-ray photoelectron spectroscopy. It has been demonstrated that the technique can be used to quantify the depth of chemical modification of BPDA-PDA surfaces treated with alkaline solutions. Polymer chains near the surface realign themselves during CMP and polarized infrared spectroscopy is chosen in this thesis to quantify chain orientations induced by CMP to evaluate the mechanical influence. A theoretical framework based on a 44 matrix method for spectral simulation together with an oscillator model for BPDA-PDA has been used to obtain quantitative chain orientation information on a post-CMP BPDA-PDA sample by fitting simulated polarized infrared spectra to experimentally generated spectra. Verification of the oscillator model was established from the complex refractive indices of BPDA-PDA films, which were determined using a new method (R/T ratio method) developed in this thesis to extract complex refractive indices of films with biaxial symmetry from polarized transmission and reflection spectra. Advisors/Committee Members: Hess, Dennis W. (Committee Chair), Morris, Jeffrey F. (Committee Co-Chair), Bottomley, Lawrence A. (Committee Member), Danyluk, Steven (Committee Member), Henderson, Clifford L. (Committee Member), Samuels, Robert J. (Committee Member).

Subjects/Keywords: Chemical mechanical polishing; Depth profile; Polymers; Optical properties; Angle resolved XPS

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Diao, J. (2004). Development of Techniques to Quantify Chemical and Mechanical Modifications of Polymer Surfaces: Application to Chemical Mechanical Polishing. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/7628

Chicago Manual of Style (16th Edition):

Diao, Jie. “Development of Techniques to Quantify Chemical and Mechanical Modifications of Polymer Surfaces: Application to Chemical Mechanical Polishing.” 2004. Doctoral Dissertation, Georgia Tech. Accessed May 09, 2021. http://hdl.handle.net/1853/7628.

MLA Handbook (7th Edition):

Diao, Jie. “Development of Techniques to Quantify Chemical and Mechanical Modifications of Polymer Surfaces: Application to Chemical Mechanical Polishing.” 2004. Web. 09 May 2021.

Vancouver:

Diao J. Development of Techniques to Quantify Chemical and Mechanical Modifications of Polymer Surfaces: Application to Chemical Mechanical Polishing. [Internet] [Doctoral dissertation]. Georgia Tech; 2004. [cited 2021 May 09]. Available from: http://hdl.handle.net/1853/7628.

Council of Science Editors:

Diao J. Development of Techniques to Quantify Chemical and Mechanical Modifications of Polymer Surfaces: Application to Chemical Mechanical Polishing. [Doctoral Dissertation]. Georgia Tech; 2004. Available from: http://hdl.handle.net/1853/7628

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