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1.
Van Heest, Timothy Milner.
Identification of metal-organic framework materials for adsorptive separation of the rare gases: applicability of IAST and effects of inaccessible regions.
Degree: MS, Chemical Engineering, 2012, Georgia Tech
URL: http://hdl.handle.net/1853/43715
► A collection of >3000 MOFs with experimentally confirmed structures were screened for performance in three binary separations: Ar/Kr, Kr/Xe, and Xe/Rn. 70 materials were selected…
(more)
▼ A collection of >3000 MOFs with experimentally confirmed structures were screened for performance in three binary separations: Ar/Kr, Kr/Xe, and Xe/Rn. 70 materials were selected for further analysis, and calculations were performed to account for inaccessible regions. Single component GCMC calculations were performed to parameterize IAST calculations on these 70 materials, and the curve fitting problem in IAST was discussed. IAST calculations were confirmed with extensive binary GCMC calculations. For each binary separation, materials were identified with predicted performance that surpasses the state of the art. "Reverse selective" materials, for which a smaller gas species is preferably adsorbed over a larger species, were explained on the basis of surface fractal geometry, computed via a corrected surface area calculation. The effect of temperature on separation performance was also examined.
Advisors/Committee Members: David Sholl (Committee Chair), Krista Walton (Committee Member), Peter Hesketh (Committee Member), Sankar Nair (Committee Member).
Subjects/Keywords: Fractal geometry; Material; Noble gas; Rare gas; Surface area; MOF; Gases, Rare; Adsorption; Separation (Technology); Gases Purification
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APA (6th Edition):
Van Heest, T. M. (2012). Identification of metal-organic framework materials for adsorptive separation of the rare gases: applicability of IAST and effects of inaccessible regions. (Masters Thesis). Georgia Tech. Retrieved from http://hdl.handle.net/1853/43715
Chicago Manual of Style (16th Edition):
Van Heest, Timothy Milner. “Identification of metal-organic framework materials for adsorptive separation of the rare gases: applicability of IAST and effects of inaccessible regions.” 2012. Masters Thesis, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/43715.
MLA Handbook (7th Edition):
Van Heest, Timothy Milner. “Identification of metal-organic framework materials for adsorptive separation of the rare gases: applicability of IAST and effects of inaccessible regions.” 2012. Web. 23 Jan 2021.
Vancouver:
Van Heest TM. Identification of metal-organic framework materials for adsorptive separation of the rare gases: applicability of IAST and effects of inaccessible regions. [Internet] [Masters thesis]. Georgia Tech; 2012. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/43715.
Council of Science Editors:
Van Heest TM. Identification of metal-organic framework materials for adsorptive separation of the rare gases: applicability of IAST and effects of inaccessible regions. [Masters Thesis]. Georgia Tech; 2012. Available from: http://hdl.handle.net/1853/43715
2.
Aguilar, Ricardo Jose.
Ultra-low power microbridge gas sensor.
Degree: MS, Mechanical Engineering, 2012, Georgia Tech
URL: http://hdl.handle.net/1853/43723
► A miniature, ultra-low power, sensitive, microbridge gas sensor has been developed.The heat loss from the bridge is a function of the thermal conductivity of thegas…
(more)
▼ A miniature, ultra-low power, sensitive, microbridge gas sensor has been developed.The heat loss from the bridge is a function of the thermal conductivity of thegas ambient. Miniature thermal conductivity sensors have been developed for gaschromatography systems [1] and microhotplates have been built with MEMS technologywhich operates within the mW range of power [2]. In this work a lower power microbridgewas built which allowed for the amplification of the effect of gas thermalconductivity on heat loss from the heated microbridge due to the increase inthe surface-to-volume ratio of the sensing element. For the bridge fabrication,CMOS compatible technology, nanolithography, and polysilicon surfacemicromachining were employed. Eight microbridges were fabricated on each die,of varying lengths and widths, and with a thickness of 1 μm.
A voltagewas applied to the sensor and the resistance was calculated based upon thecurrent flow. The response has been tested with air, carbon dioxide, helium,and nitrogen. The resistance and temperature change for carbon dioxide was thegreatest, while the corresponding change for helium was the least. Thus the selectivity of the sensor todifferent gases was shown, as well as the robustness of the sensor. Another aspect of the sensor is that it hasvery low power consumption. The measuredpower consumption at 4 Volts is that of 11.5 mJ for Nitrogen, and 16.1 mJ forHelium.
Thesensor responds to ambient gas very rapidly. The time constant not only showsthe fast response of the sensor, but it also allows for more accuratedetection, given that each different gas produces a different correspondingtime constant from the sensor. The sensor is able to detect differentconcentrations of the same gas as well. Fromthe slopes that were calculated, the resistance change at 5 Volts operation wasfound to be 2.05mΩ/ppm, 1.14 mΩ/ppm at 4.5 Volts, and 0.7 mΩ/ppm at 4 Volts. Thehigher voltages yielded higher resistance changes for all of the gases thatwere tested.
Theversatility of the microbridge has been studied as well. Experiments were donein order to research the ability of a deposited film on the microbridge, inthis case tin oxide, to act as a sensing element for specific gases. In thissetup, the microbridge no longer is the sensing element, but instead acts as aheating element, whose sole purpose is to keep a constant temperature at whichit can then activate the SnO film, making it able to sense methane.
In conclusion,the microbridge was designed, fabricated, and tested for use as an electrothermalgas sensor. The sensor responds to ambient gas very rapidly with differentlevels of resistance change for different gases, purely due to the differencein thermal conductivity of each of the gases. Not only does it have a fastresponse, but it also operates at low power levels. Further research has beendone in the microbridge's ability to act as a heating element, in which the useof a SnO film as the sensing element, activated by the microbridge, was studied.
REFERENCES:
1. D.…
Advisors/Committee Members: Peter Hesketh (Committee Chair), Mostafa Ghiaasiaan (Committee Member), Todd Sulchek (Committee Member).
Subjects/Keywords: Hydrogen detector; Methane detector; Helium detector; Thermal conductivity detector; Gas sensor; Microbridge; Palladium film; Tin oxide film; Gas detectors
…KWJ Engineering and were fabricated in the Georgia Tech
cleanroom in 2008. The original…
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APA (6th Edition):
Aguilar, R. J. (2012). Ultra-low power microbridge gas sensor. (Masters Thesis). Georgia Tech. Retrieved from http://hdl.handle.net/1853/43723
Chicago Manual of Style (16th Edition):
Aguilar, Ricardo Jose. “Ultra-low power microbridge gas sensor.” 2012. Masters Thesis, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/43723.
MLA Handbook (7th Edition):
Aguilar, Ricardo Jose. “Ultra-low power microbridge gas sensor.” 2012. Web. 23 Jan 2021.
Vancouver:
Aguilar RJ. Ultra-low power microbridge gas sensor. [Internet] [Masters thesis]. Georgia Tech; 2012. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/43723.
Council of Science Editors:
Aguilar RJ. Ultra-low power microbridge gas sensor. [Masters Thesis]. Georgia Tech; 2012. Available from: http://hdl.handle.net/1853/43723
3.
Bernal, Ashley Lynn.
Lead zirconate titanate nanotubes processed via soft template infiltration.
Degree: PhD, Mechanical Engineering, 2011, Georgia Tech
URL: http://hdl.handle.net/1853/45886
► Nanoscale ferroelectric materials have numerous possible applications such as actively tunable photonic crystals, terahertz emitters, ultrasound transducers, and energy harvesters. One of most technologically relevant…
(more)
▼ Nanoscale ferroelectric materials have numerous possible applications such as actively tunable photonic crystals, terahertz emitters, ultrasound transducers, and energy harvesters. One of most technologically relevant ferroelectric materials is lead zirconate titanate (PZT) due to its large piezoelectric response. However, there are limited methods currently available for creating nanoscale PZT structures. Current top-down patterning methods include material removal via a high energy beam, which damages the piezoelectric's properties, and wet etching, which is an isotropic process that results in poor edge definition. Similarly, current bottom-up approaches such as hard template-growth and hydrothermal processing have limited control over the aspect ratio of the structures produced and lack site specific registry.
In this work, a bottom-up approach for creating PbZr₀.₅₂Ti₀.₄₈O₃ nanotubes was developed using soft-template infiltration by a sol-gel solution. This method allows excellent control of the structures produced, overcoming current manufacturing limitations. PZT nanotubes were fabricated with diameters ranging from 100 to 200 nm, aspect ratios (height to diameter) from 1.25:1 to 5:1, and wall thicknesses from 5 to 25 nm. The piezoelectric and ferroelectric nature of the nanotubes was characterized via scanning probe microscopy in order to investigate nanoscale phenomena. Specifically, the effects of lateral constraint, substrate clamping, and critical size on the extrinsic contribution to the piezoelectric response were studied and the results are discussed.
Advisors/Committee Members: Dr. Nazanin Bassiri-Gharb (Committee Chair), Dr. Oliver Brand (Committee Member), Dr. Peter Hesketh (Committee Member), Dr. Rosario Gerhardt (Committee Member), Dr. Todd Sulchek (Committee Member).
Subjects/Keywords: Size effects; Piezoresponse force microscopy; Nanomanufactruing; Ferroelectric materials; Thin films; Ferroelectricity; Microelectronics; Piezoelectric materials
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APA (6th Edition):
Bernal, A. L. (2011). Lead zirconate titanate nanotubes processed via soft template infiltration. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/45886
Chicago Manual of Style (16th Edition):
Bernal, Ashley Lynn. “Lead zirconate titanate nanotubes processed via soft template infiltration.” 2011. Doctoral Dissertation, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/45886.
MLA Handbook (7th Edition):
Bernal, Ashley Lynn. “Lead zirconate titanate nanotubes processed via soft template infiltration.” 2011. Web. 23 Jan 2021.
Vancouver:
Bernal AL. Lead zirconate titanate nanotubes processed via soft template infiltration. [Internet] [Doctoral dissertation]. Georgia Tech; 2011. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/45886.
Council of Science Editors:
Bernal AL. Lead zirconate titanate nanotubes processed via soft template infiltration. [Doctoral Dissertation]. Georgia Tech; 2011. Available from: http://hdl.handle.net/1853/45886
4.
Olivero, Daniel.
Traumatic brain injury biomarker discovery using mass spectrometry imaging of 3D neural cultures.
Degree: MS, Mechanical Engineering, 2011, Georgia Tech
URL: http://hdl.handle.net/1853/41102
► Biomarker research is of great interest in the field of traumatic brain injury (TBI), since there are numerous potential markers that may indicate central nervous…
(more)
▼ Biomarker research is of great interest in the field of traumatic brain injury (TBI), since there are numerous potential markers that may indicate central nervous system damage, yet the brain is normally well isolated and discovery is at its infancy. Traditional methods for biomarker discovery include time consuming multi step chromatographic mass spectrometery (MS) techniques or pre-defined serial probing using traditional assays, making the identification of biomarker panels limiting and expensive. These shortfalls have motivated the development of a MS based probe that can be embedded into 3D neural cultures and obtain temporal and spatial information about the release of biomarkers. Using the high sensitivity MS ionization method of nano-electrospray ionization (nano-ESI) with an in-line microdialysis (MD) unit allows us to use MS to analyze low concentrations of TBI biomarkers from within cell cultures with no need for off-line sample manipulation. This thesis goes through the development of the probe by studying the theoretical principles, simulations and experimental results of the probe's capability to sample small local concentrations of a marker within cell culture matrix, the MD unit's sample manipulation capabilities, and the ability to detect markers using in-line MD-nano-ESI MS.
Advisors/Committee Members: Dr. Michelle LaPlaca (Committee Co-Chair), Dr. Peter Kottke (Committee Co-Chair), Dr. Andrei Fedorov (Committee Member), Dr. Peter Hesketh (Committee Member).
Subjects/Keywords: Mass spectrometry; Traumatic brain injury; Microdialysis; Brain Wounds and injuries; Biochemical markers; Mass spectrometry
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APA (6th Edition):
Olivero, D. (2011). Traumatic brain injury biomarker discovery using mass spectrometry imaging of 3D neural cultures. (Masters Thesis). Georgia Tech. Retrieved from http://hdl.handle.net/1853/41102
Chicago Manual of Style (16th Edition):
Olivero, Daniel. “Traumatic brain injury biomarker discovery using mass spectrometry imaging of 3D neural cultures.” 2011. Masters Thesis, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/41102.
MLA Handbook (7th Edition):
Olivero, Daniel. “Traumatic brain injury biomarker discovery using mass spectrometry imaging of 3D neural cultures.” 2011. Web. 23 Jan 2021.
Vancouver:
Olivero D. Traumatic brain injury biomarker discovery using mass spectrometry imaging of 3D neural cultures. [Internet] [Masters thesis]. Georgia Tech; 2011. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/41102.
Council of Science Editors:
Olivero D. Traumatic brain injury biomarker discovery using mass spectrometry imaging of 3D neural cultures. [Masters Thesis]. Georgia Tech; 2011. Available from: http://hdl.handle.net/1853/41102

Georgia Tech
5.
Garcia, Caesar Theodore.
Packaging and Characterization of MEMS Optical Microphones.
Degree: MS, Mechanical Engineering, 2007, Georgia Tech
URL: http://hdl.handle.net/1853/19713
► Miniature microphones have numerous applications but often exhibit poor performance which can be attributed to the challenges associated with capacitive detection at small size scales.…
(more)
▼ Miniature microphones have numerous applications but often exhibit poor performance which can be attributed to the challenges associated with capacitive detection at small size scales. Optical detection methods are able to overcome some of these challenges although miniaturized integration of these optical systems has not yet been demonstrated. An optical interferometric detection scheme is presented and is implemented using micro-scale optoelectronic devices which are used primarily in fiber optic data transmission. Using basic diffraction theory, a model is developed and used to optimize the micro-optical system within a 1mm3 volume. Both omnidirectional and directional optical microphone designs are presented and a modular packaging architecture is assembled in order to test these devices. Results from the 2mm diameter omnidirectional optical microphone structure demonstrate a 26dBA noise floor. The biomimetic directional optical microphone, which has an equivalent port spacing of 1mm, demonstrates a noise floor of 34dBA. Additionally, these results demonstrate an array of two biomimetic directional optical microphones located on the same silicon chip and separated by less than 5mm. These results confirm the micro-optical detection method as an alternative to capacitive detection especially for miniaturized microphone applications and suggest that this method in its modular packaging architecture is competitive with industry leading
measurement microphones.
Advisors/Committee Members: Levent Degertekin (Committee Chair), Kenneth Cunefare (Committee Member), Peter Hesketh (Committee Member).
Subjects/Keywords: MEMS; Interferometry; Optical; Microphone; Microphone; Microelectromechanical systems; Computer simulation
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APA (6th Edition):
Garcia, C. T. (2007). Packaging and Characterization of MEMS Optical Microphones. (Masters Thesis). Georgia Tech. Retrieved from http://hdl.handle.net/1853/19713
Chicago Manual of Style (16th Edition):
Garcia, Caesar Theodore. “Packaging and Characterization of MEMS Optical Microphones.” 2007. Masters Thesis, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/19713.
MLA Handbook (7th Edition):
Garcia, Caesar Theodore. “Packaging and Characterization of MEMS Optical Microphones.” 2007. Web. 23 Jan 2021.
Vancouver:
Garcia CT. Packaging and Characterization of MEMS Optical Microphones. [Internet] [Masters thesis]. Georgia Tech; 2007. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/19713.
Council of Science Editors:
Garcia CT. Packaging and Characterization of MEMS Optical Microphones. [Masters Thesis]. Georgia Tech; 2007. Available from: http://hdl.handle.net/1853/19713

Georgia Tech
6.
Dukic, Megan Marie.
Vibrating Kelvin Probe Measurements of a Silicon Surface with the Underside Exposed to Light.
Degree: MS, Mechanical Engineering, 2007, Georgia Tech
URL: http://hdl.handle.net/1853/19862
► This thesis addresses the use of a vibrating Kelvin probe to monitor the change in the front surface potential of a silicon wafer while the…
(more)
▼ This thesis addresses the use of a vibrating Kelvin probe to monitor the change in the front surface potential of a silicon wafer while the rear surface is illuminated with monochromatic, visible light. Two tests were run to verify the change in surface potential. One test increased the intensity of the light and the other increased the wavelength while recording the front surface potential.
The change in the surface potential for a range of intensities of incident light was recorded and analyzed. The results show that the change in surface potential increased with increasing intensity. For each wafer, the smallest change in surface potential occurred at the lowest intensity, 3.77 mW. In the same respect, the largest change in surface potential occurred at the highest intensity, 17.8 mW. For all wafers, the change in surface potential ranged from approximately 8 mV at 3.77 mW to approximately 80 mV at 17.8 mW.
The change in the surface potential for a range of wavelengths of incident light was also recorded and analyzed. The results showed that the change in surface potential formed a skewed bell curve with increasing wavelength of incident light. For each wafer, the largest change in surface potential occurred at mid-range wavelengths, between 600 nm and 700 nm. The smallest change in surface potential occurred at 450 nm, the shortest wavelength, and 800 nm, the longest wavelength. For all wafers, the change in surface potential ranged from approximately 8 mV at 800 nm to approximately 165 mV at 700 nm.
A model based on excess electron diffusion within the silicon wafer was used to predict material properties. After curve fitting the model with experimental results, an excess electron lifetime of ôN = 17 µs and surface recombination rates of sFRONT = sREAR = 18,000cm/s were predicted. These values suggest poor silicon wafer quality relative to commercial silicon devices.
Regardless of the quality, the results show that the front surface potential of a silicon wafer is affected by incident light on the rear surface. The quantitative effect of the light is dependent on the properties of the light and the material properties of the silicon wafer.
Advisors/Committee Members: Dr Steven Danyluk (Committee Chair), Dr. Peter Hesketh (Committee Member), Dr. Shreyes Melkote (Committee Member).
Subjects/Keywords: Silicon; Photogeneration; Kelvin probe; Probes (Electronic instruments); Semiconductor wafers
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APA ·
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APA (6th Edition):
Dukic, M. M. (2007). Vibrating Kelvin Probe Measurements of a Silicon Surface with the Underside Exposed to Light. (Masters Thesis). Georgia Tech. Retrieved from http://hdl.handle.net/1853/19862
Chicago Manual of Style (16th Edition):
Dukic, Megan Marie. “Vibrating Kelvin Probe Measurements of a Silicon Surface with the Underside Exposed to Light.” 2007. Masters Thesis, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/19862.
MLA Handbook (7th Edition):
Dukic, Megan Marie. “Vibrating Kelvin Probe Measurements of a Silicon Surface with the Underside Exposed to Light.” 2007. Web. 23 Jan 2021.
Vancouver:
Dukic MM. Vibrating Kelvin Probe Measurements of a Silicon Surface with the Underside Exposed to Light. [Internet] [Masters thesis]. Georgia Tech; 2007. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/19862.
Council of Science Editors:
Dukic MM. Vibrating Kelvin Probe Measurements of a Silicon Surface with the Underside Exposed to Light. [Masters Thesis]. Georgia Tech; 2007. Available from: http://hdl.handle.net/1853/19862

Georgia Tech
7.
Simpson, Brian Keith, Jr.
Strain engineering as a method for manufacturing micro- and; nano- scale responsive particles.
Degree: MS, Mechanical Engineering, 2010, Georgia Tech
URL: http://hdl.handle.net/1853/34728
► Strain engineering is used as a means of manufacturing micro- and nano- scale particles with the ability to reversibly alter their geometry from three dimensional…
(more)
▼ Strain engineering is used as a means of manufacturing micro- and nano- scale particles with the ability to reversibly alter their geometry from three dimensional tubes to two dimensional flat layers. These particles are formed from a bi-layer of two dissimilar materials, one of which is the elastomeric material polydimethylsiloxane (PDMS), deposited under stress on a sacrificial substrate. Upon the release of the bi-layer structure from the substrate, interfacial residual stress is released resulting in the formation of tubes or coils. These particles possess the ability to dramatically alter their geometry and, consequently, change some properties that are reversible and can be triggered by a stimulus. This work focuses on the material selection and manufacturing of the bi-layer structures used to create the responsive particles and methods for characterizing and controlling the responsive nature of the particles. Furthermore, the potential of using these particles for a capture/release application is explored, and a systematic approach to scale up the manufacturing process for such particles is provided. This includes addressing many of the problems associated with fabricating ultra-thin layers, tuning the size of the particles, understanding how the stress accumulated at the interface of a bi-layer structure can be used as a tool for triggering a response as well as developing methods (i.e. experiments and applications) that allow the demonstration of this response.
Advisors/Committee Members: Dr. Kyriaki Kalaitzidou (Committee Chair), Dr. Karl Jacob (Committee Member), Dr. Peter Hesketh (Committee Member).
Subjects/Keywords: PDMS; Strain engineering; Responsive particles; Strain; Nanoparticles; Self-assembly (Chemistry); Residual stresses; Smart materials
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APA ·
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MLA ·
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Export
to Zotero / EndNote / Reference
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APA (6th Edition):
Simpson, Brian Keith, J. (2010). Strain engineering as a method for manufacturing micro- and; nano- scale responsive particles. (Masters Thesis). Georgia Tech. Retrieved from http://hdl.handle.net/1853/34728
Chicago Manual of Style (16th Edition):
Simpson, Brian Keith, Jr. “Strain engineering as a method for manufacturing micro- and; nano- scale responsive particles.” 2010. Masters Thesis, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/34728.
MLA Handbook (7th Edition):
Simpson, Brian Keith, Jr. “Strain engineering as a method for manufacturing micro- and; nano- scale responsive particles.” 2010. Web. 23 Jan 2021.
Vancouver:
Simpson, Brian Keith J. Strain engineering as a method for manufacturing micro- and; nano- scale responsive particles. [Internet] [Masters thesis]. Georgia Tech; 2010. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/34728.
Council of Science Editors:
Simpson, Brian Keith J. Strain engineering as a method for manufacturing micro- and; nano- scale responsive particles. [Masters Thesis]. Georgia Tech; 2010. Available from: http://hdl.handle.net/1853/34728

Georgia Tech
8.
Lightsey, Charles Hunter.
All-copper chip-to-substrate interconnections for flip-chip packages.
Degree: MS, Chemical Engineering, 2010, Georgia Tech
URL: http://hdl.handle.net/1853/34729
► Avatrel 8000P's excellent photo-definition properties and mechanical strength make it an ideal polymer collar material. Avatrel 8000P is a high contrast, I-line sensitive mixture that…
(more)
▼ Avatrel 8000P's excellent photo-definition properties and mechanical strength make it an ideal polymer collar material. Avatrel 8000P is a high contrast, I-line sensitive mixture that can be developed in traditional aqueous-base developers. The great photolithographical performance of this photopolymer can be partly contributed to the minimal amount of light absorbed by the base norbornene polymer. The processing conditions noted in this work are an optimized version, which have been shown to give superior photolithographical performance. The simple baking procedures make Avatrel 8000P easier to process than SU-8. The ability to develop Avatrel 8000P in aqueous base can reduce chemical waste. As shown by SEM images, high fidelity structures with aspect ratios of 7:1 can be fabricated in thick films with vertical sidewalls. Bonding between two copper surfaces over various gap sizes was achieved by electroless deposition without the addition of surfactants or inhibitors in the bath. The effect of anneal temperature on the electroless bond formed was analyzed. The electroless bond strength increased with anneal temperature. However, the bond strength estimation for samples annealed at 80°C to 120°C is a minimum value due to the failure location of most of the pillars and the resulting area used in the calculation of bond strength. Grain growth from copper recrystallization and removal of small defects improve the bond strength. Large voids at the interface of the two pillars were related to rough starting surfaces for the electroplated pillars.
Advisors/Committee Members: Paul A. Kohl (Committee Chair), Dennis W. Hess (Committee Member), Peter Hesketh (Committee Member).
Subjects/Keywords: Bonding; Flip-chip; Pillar; Electroless deposition; Copper; Flip chip technology; Microelectronic packaging; Microelectronics; Electroless plating
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APA ·
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MLA ·
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Export
to Zotero / EndNote / Reference
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APA (6th Edition):
Lightsey, C. H. (2010). All-copper chip-to-substrate interconnections for flip-chip packages. (Masters Thesis). Georgia Tech. Retrieved from http://hdl.handle.net/1853/34729
Chicago Manual of Style (16th Edition):
Lightsey, Charles Hunter. “All-copper chip-to-substrate interconnections for flip-chip packages.” 2010. Masters Thesis, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/34729.
MLA Handbook (7th Edition):
Lightsey, Charles Hunter. “All-copper chip-to-substrate interconnections for flip-chip packages.” 2010. Web. 23 Jan 2021.
Vancouver:
Lightsey CH. All-copper chip-to-substrate interconnections for flip-chip packages. [Internet] [Masters thesis]. Georgia Tech; 2010. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/34729.
Council of Science Editors:
Lightsey CH. All-copper chip-to-substrate interconnections for flip-chip packages. [Masters Thesis]. Georgia Tech; 2010. Available from: http://hdl.handle.net/1853/34729

Georgia Tech
9.
Wei, Xiaojin.
Stacked Microchannel Heat Sinks for Liquid Cooling of Microelectronics Devices.
Degree: PhD, Mechanical Engineering, 2004, Georgia Tech
URL: http://hdl.handle.net/1853/4873
► A stacked microchannel heat sink was developed to provide efficient cooling for microelectronics devices at a relatively low pressure drop while maintaining chip temperature uniformity.…
(more)
▼ A stacked microchannel heat sink was developed to provide efficient cooling for microelectronics devices at a relatively low pressure drop while maintaining chip temperature uniformity. Microfabrication techniques were employed to fabricate the stacked microchannel structure, and experiments were conducted to study its thermal performance. A total thermal resistance of less than 0.1 K/W was demonstrated for both counter flow and parallel flow configurations. The effects of flow direction and interlayer flow rate ratio were investigated. It was found that for the low flow rate range the parallel flow arrangement results in a better overall thermal performance than the counter flow arrangement; whereas, for the large flow rate range, the total thermal resistances for both the counter flow and parallel flow configurations are indistinguishable. On the other hand, the counter flow arrangement provides better temperature uniformity for the entire flow rate range tested. The effects of localized heating on the overall thermal performance were examined by selectively applying electrical power to the heaters. Numerical simulations were conducted to study the conjugate heat transfer inside the stacked microchannels. Negative heat flux conditions were found near the outlets of the microchannels for the counter flow arrangement. This is particularly evident for small flow rates. The numerical results clearly explain why the total thermal resistance for counter flow arrangement is larger than that for the parallel flow at low flow rates.
In addition, laminar flow inside the microchannels were characterized using Micro-PIV techniques. Microchannels of different width were fabricated in silicon, the smallest channel measuring 34 mm in width. Measurements were conducted at various channel depths. Measured velocity profiles at these depths were found to be in reasonable agreement with laminar flow theory. Micro-PIV measurement found that the maximum velocity is shifted significantly towards the top of the microchannels due to the sidewall slope, a common issue faced with DRIE etching. Numerical simulations were conducted to investigate the effects of the sidewall slope on the flow and heat transfer. The results show that the effects of large sidewall slope on heat transfer are significant; whereas, the effects on pressure drop are not as pronounced.
Advisors/Committee Members: Yogendra Joshi (Committee Chair), Andrei Fedorov (Committee Member), Bruno Frazier (Committee Member), C.P. Wong (Committee Member), Peter Hesketh (Committee Member).
Subjects/Keywords: Microchannels; Thermal management; Electronic cooling; Heat sink; Liquid cooling; Micro-PIV; PIV; Particle image velocimetry; Microelectronics Cooling; Particle image velocimetry; Heat sinks (Electronics); Heat Convection; Liquids Thermal properties
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Manager
APA (6th Edition):
Wei, X. (2004). Stacked Microchannel Heat Sinks for Liquid Cooling of Microelectronics Devices. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/4873
Chicago Manual of Style (16th Edition):
Wei, Xiaojin. “Stacked Microchannel Heat Sinks for Liquid Cooling of Microelectronics Devices.” 2004. Doctoral Dissertation, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/4873.
MLA Handbook (7th Edition):
Wei, Xiaojin. “Stacked Microchannel Heat Sinks for Liquid Cooling of Microelectronics Devices.” 2004. Web. 23 Jan 2021.
Vancouver:
Wei X. Stacked Microchannel Heat Sinks for Liquid Cooling of Microelectronics Devices. [Internet] [Doctoral dissertation]. Georgia Tech; 2004. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/4873.
Council of Science Editors:
Wei X. Stacked Microchannel Heat Sinks for Liquid Cooling of Microelectronics Devices. [Doctoral Dissertation]. Georgia Tech; 2004. Available from: http://hdl.handle.net/1853/4873

Georgia Tech
10.
Corno, James A.
Chemical and structural modification of porous silicon for energy storage and conversion.
Degree: PhD, Physics, 2008, Georgia Tech
URL: http://hdl.handle.net/1853/22700
► This thesis describes the fabrication and modification of porous silicon and titania structures for the purposes of energy storage and conversion. The first chapter provides…
(more)
▼ This thesis describes the fabrication and modification of porous silicon and titania structures for the purposes of energy storage and conversion. The first chapter provides the reader with background information on porous silicon, batteries, and photocatalysis. The second chapter describes porous silicon fabrication methods and the equipment used in these studies. The third and fourth chapters are journal articles which describe the results of efforts to produce a porous silicon electrode for lithium ion batteries. The fifth chapter is a journal article detailing the fabrication of a thin, free-standing porous silicon film which can be activated for possible photovoltaic and microreactor applications. The last chapter describes the formation of novel silver/silver oxide seed structures for titania photocatalyst nanostructures to be prepared for deposition on a porous silicon support interface.
Advisors/Committee Members: James Gole (Committee Chair), Ahmet Erbil (Committee Member), alexei marchenkov (Committee Member), Meilin Liu (Committee Member), peter hesketh (Committee Member).
Subjects/Keywords: Self-assembly; Photocatalysis; Microfilter; Lithium battery; Porous silicon; Porous silicon; Energy storage; Energy conversion
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APA ·
Chicago ·
MLA ·
Vancouver ·
CSE |
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APA (6th Edition):
Corno, J. A. (2008). Chemical and structural modification of porous silicon for energy storage and conversion. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/22700
Chicago Manual of Style (16th Edition):
Corno, James A. “Chemical and structural modification of porous silicon for energy storage and conversion.” 2008. Doctoral Dissertation, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/22700.
MLA Handbook (7th Edition):
Corno, James A. “Chemical and structural modification of porous silicon for energy storage and conversion.” 2008. Web. 23 Jan 2021.
Vancouver:
Corno JA. Chemical and structural modification of porous silicon for energy storage and conversion. [Internet] [Doctoral dissertation]. Georgia Tech; 2008. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/22700.
Council of Science Editors:
Corno JA. Chemical and structural modification of porous silicon for energy storage and conversion. [Doctoral Dissertation]. Georgia Tech; 2008. Available from: http://hdl.handle.net/1853/22700

Georgia Tech
11.
Mess, Francis McCarthy.
A Novel Sensor to Monitor Surface Charge Interactions: The Optically Stimulated Contact Potential Difference Probe.
Degree: PhD, Mechanical Engineering, 2006, Georgia Tech
URL: http://hdl.handle.net/1853/10460
► This study addresses the development of a sensor to monitor chemical adsorption and charge transfer processes on a surface using a contact potential difference probe…
(more)
▼ This study addresses the development of a sensor to monitor chemical adsorption and charge transfer processes on a surface using a contact potential difference probe (CPD). The current investigation is an outgrowth of ongoing research on non-vibrating CPD probes (nvCPD) which led to the recent development of a novel measurement technique utilizing optical stimulation: optically stimulated CPD (osCPD). Primary outcomes of this thesis are the theoretical modeling, fabrication and demonstration of a functional osCPD sensor. The research also involved significant engineering and experimentation in the design, development, and application of this sensor to oil condition monitoring.
This technique measures dielectric and chemical properties of a fluid at the interface between the fluid and a semiconductor substrate. Chopped visible light is used to stimulate the rear surface of a semiconductor substrate, and a CPD probe measures the work function response of the semiconductor on the front surface of the substrate. The work function response is influenced by the nature and quantity of adsorbed species on the top surface, allowing the probe to detect changes in chemical composition at the substrate/fluid interface.
An analytical model is developed that relates the osCPD sensor output signal to the chemical and dielectric properties of the oil sample, as well as to the geometry, composition, and control inputs of the silicon substrate and test fixture. In this investigation, the osCPD sensor was used to evaluate dielectric and chemical properties of commercially available engine oil. Oil samples were intentionally degraded through thermal aging (oxidation) and through addition of known contaminants. The osCPD sensor shows good sensitivity to depletion of antioxidants in the oil, as well as to the presence of ferric chloride, an oil-soluble salt typically used to calibrate laboratory test equipment.
Advisors/Committee Members: Steven Danyluk (Committee Chair), Ajeet Rohatgi (Committee Member), Jiri Janata (Committee Member), Peter Hesketh (Committee Member), Thomas Kurfess (Committee Member).
Subjects/Keywords: Kelvin probe; Volta effect; Probes (Electronic instruments) Design and construction
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APA ·
Chicago ·
MLA ·
Vancouver ·
CSE |
Export
to Zotero / EndNote / Reference
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APA (6th Edition):
Mess, F. M. (2006). A Novel Sensor to Monitor Surface Charge Interactions: The Optically Stimulated Contact Potential Difference Probe. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/10460
Chicago Manual of Style (16th Edition):
Mess, Francis McCarthy. “A Novel Sensor to Monitor Surface Charge Interactions: The Optically Stimulated Contact Potential Difference Probe.” 2006. Doctoral Dissertation, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/10460.
MLA Handbook (7th Edition):
Mess, Francis McCarthy. “A Novel Sensor to Monitor Surface Charge Interactions: The Optically Stimulated Contact Potential Difference Probe.” 2006. Web. 23 Jan 2021.
Vancouver:
Mess FM. A Novel Sensor to Monitor Surface Charge Interactions: The Optically Stimulated Contact Potential Difference Probe. [Internet] [Doctoral dissertation]. Georgia Tech; 2006. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/10460.
Council of Science Editors:
Mess FM. A Novel Sensor to Monitor Surface Charge Interactions: The Optically Stimulated Contact Potential Difference Probe. [Doctoral Dissertation]. Georgia Tech; 2006. Available from: http://hdl.handle.net/1853/10460

Georgia Tech
12.
Tse, Laam Angela.
Membrane Electrode Assembly (MEA) Design for Power Density Enhancement of Direct Methanol Fuel Cells (DMFCs).
Degree: PhD, Mechanical Engineering, 2006, Georgia Tech
URL: http://hdl.handle.net/1853/11522
► Micro-direct methanol fuel cells (micro-DMFC) can be the power supply solution for the next generation of handheld devices. The applications of the micro-DMFCs require them…
(more)
▼ Micro-direct methanol fuel cells (micro-DMFC) can be the power supply solution for the next generation of handheld devices. The applications of the micro-DMFCs require them to have high compactness, high performance, light weight, and long life. The major goal of this research project is to enhance the volumetric power density of direct methanol fuel cells (DMFCs). A performance roadmap has been formulated and showed that patterning the planar membrane electrode assembly (MEA) to 2-D and 3-D corrugated manifolds can greatly increase the power generation with very modest overall volume increases. In this project, different manufacturing processes for patterning MEAs with corrugations have been investigated. A folding process was selected to form 2D triangular corrugations on MEAs for experimental validations of the performance prediction. The experimental results show that the volumetric power densities of the corrugated MEAs have improved by about 25% compared to the planar MEAs, which is lower than the expected performance enhancement. ABAQUS software was used to simulate the manufacturing process and identify the causes of deformations during manufacture. Experimental analysis methods like impedance analysis and 4 point-probes were used to quantify the performance loss and microstructure alteration during the forming process. A model was proposed to relate the expected performance of corrugated MEAs to manufacturing process variables. Finally, different stacking configurations and issues related to cell stacking for corrugated MEAs are also investigated.
Advisors/Committee Members: David Rosen (Committee Chair), Comas Haynes (Committee Member), Meilin Liu (Committee Member), Peter Hesketh (Committee Member), Seyed Ghiaasiaan (Committee Member).
Subjects/Keywords: Passive DMFCs; Corrugated MEAs; MEA design; Corrugated MEA fabrication process; Fuel cells Design and construction; Methanol as fuel
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APA ·
Chicago ·
MLA ·
Vancouver ·
CSE |
Export
to Zotero / EndNote / Reference
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APA (6th Edition):
Tse, L. A. (2006). Membrane Electrode Assembly (MEA) Design for Power Density Enhancement of Direct Methanol Fuel Cells (DMFCs). (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/11522
Chicago Manual of Style (16th Edition):
Tse, Laam Angela. “Membrane Electrode Assembly (MEA) Design for Power Density Enhancement of Direct Methanol Fuel Cells (DMFCs).” 2006. Doctoral Dissertation, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/11522.
MLA Handbook (7th Edition):
Tse, Laam Angela. “Membrane Electrode Assembly (MEA) Design for Power Density Enhancement of Direct Methanol Fuel Cells (DMFCs).” 2006. Web. 23 Jan 2021.
Vancouver:
Tse LA. Membrane Electrode Assembly (MEA) Design for Power Density Enhancement of Direct Methanol Fuel Cells (DMFCs). [Internet] [Doctoral dissertation]. Georgia Tech; 2006. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/11522.
Council of Science Editors:
Tse LA. Membrane Electrode Assembly (MEA) Design for Power Density Enhancement of Direct Methanol Fuel Cells (DMFCs). [Doctoral Dissertation]. Georgia Tech; 2006. Available from: http://hdl.handle.net/1853/11522

Georgia Tech
13.
Charlton, Christy.
Quantum Cascade Lasers for Mid-Infrared Chemical Sensing.
Degree: PhD, Chemistry and Biochemistry, 2005, Georgia Tech
URL: http://hdl.handle.net/1853/13953
► The mid-infrared (MIR) spectral range (2-20 m) is particularly useful for chemical sensing due to the excitation of fundamental rotational and vibrational modes. In the…
(more)
▼ The mid-infrared (MIR) spectral range (2-20 m) is particularly useful for chemical sensing due to the excitation of fundamental rotational and vibrational modes. In the fingerprint region (10-20 m), most organic analytes have unique absorption patterns; absorption measurements in this region provide molecule-specific information with high sensitivity.
Quantum cascade lasers (QCLs) present an ideal light source for (MIR) chemical sensing due to their narrow linewidth, high spectral density, compact size, and ease of fabrication of nearly any MIR wavelength. As the emission wavelength is dependent on layer size within the heterostructure rather than material composition, various wavelengths in the MIR can be achieved through bandstructure engineering.
High sensitivity measurements have been achieved in both gas and liquid phase by developing integrated sensing systems. The laser emission frequency is selected to match a strong absorption feature for the analyte of interest where no other interfering bands are located. A waveguide is then developed to fit the application and wavelength used.
Gas sensing applications incorporate silica hollow waveguides (HWG) and an OmniGuide fiber (or photonic bandgap HWG). Analyte gas is injected into the hollow core allowing the HWG or OmniGuide to serve simultaneously as a waveguide and miniaturized gas cell. Sensitivities of parts per billion are achieved with a response time of 8 s and a sample volume of approximately 1 mL.
Liquid sensing is achieved via evanescent wave measurements with planar waveguides of silver halide (AgX) and gallium arsenide (GaAs). GaAs waveguides developed in this work have a thickness on the order of the wavelength of light achieving single-mode waveguides, providing a significant improvement in evanescent field strength over conventional multimode fibers. Liquid samples of L volume at the waveguide surfaces are detected.
QCLs have begun to be utilized as a light source in the MIR regime over the last decade. The next step in this field is the development of compact and highly integrated device platforms which take full advantage of this technology. The sensing demonstrations in this work advance the field towards finding key applications in medical, biological, environmental, and atmospheric measurements.
Advisors/Committee Members: Boris Mizaikoff (Committee Chair), Jiri Janata (Committee Member), Mohan Srinivasarao (Committee Member), Peter Hesketh (Committee Member), Thomas Orlando (Committee Member).
Subjects/Keywords: Evanescent field; Absorption; Optical; Silver halide; Planar waveguide; Photonic band gap; Hollow waveguides; Liquid phase; Gas phase
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❌
APA ·
Chicago ·
MLA ·
Vancouver ·
CSE |
Export
to Zotero / EndNote / Reference
Manager
APA (6th Edition):
Charlton, C. (2005). Quantum Cascade Lasers for Mid-Infrared Chemical Sensing. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/13953
Chicago Manual of Style (16th Edition):
Charlton, Christy. “Quantum Cascade Lasers for Mid-Infrared Chemical Sensing.” 2005. Doctoral Dissertation, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/13953.
MLA Handbook (7th Edition):
Charlton, Christy. “Quantum Cascade Lasers for Mid-Infrared Chemical Sensing.” 2005. Web. 23 Jan 2021.
Vancouver:
Charlton C. Quantum Cascade Lasers for Mid-Infrared Chemical Sensing. [Internet] [Doctoral dissertation]. Georgia Tech; 2005. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/13953.
Council of Science Editors:
Charlton C. Quantum Cascade Lasers for Mid-Infrared Chemical Sensing. [Doctoral Dissertation]. Georgia Tech; 2005. Available from: http://hdl.handle.net/1853/13953

Georgia Tech
14.
Moore, Christopher Wayne.
Microfabricated Fuel Cells To Power Integrated Circuits.
Degree: PhD, Chemical Engineering, 2005, Georgia Tech
URL: http://hdl.handle.net/1853/7106
► Microfabricated fuel cells have been designed and constructed on silicon integrated circuit wafers using many processes common in integrated circuit fabrication, including sputtering, polymer spin…
(more)
▼ Microfabricated fuel cells have been designed and constructed on silicon integrated circuit wafers using many processes common in integrated circuit fabrication, including sputtering, polymer spin coating, reactive ion etching, and photolithography. Fuel delivery microchannels were made through the use of sacrificial polymers. The characteristics of different sacrificial polymers were studied to find the most suitable for this work. A polypropylene carbonate solution containing a photo-acid generator could be directly patterned with ultraviolet exposure and thermal decomposition. The material that would serve as the fuel cells proton exchange membrane (PEM) encapsulated the microchannels. Silicon dioxide deposited by plasma enhanced chemical vapor deposition (PECVD) at relatively low temperatures exhibited material properties that made it suitable as a thin-film PEM in these devices. By adding phosphorous to the silicon dioxide recipe during deposition, a phosphosilicate glass was formed that had an increased ionic conductivity. Various polymers were tested for use as the PEM or in combination with oxide to form a composite PEM. While it did not work well alone, using Nafion on top of the glass layer to form a dual-layer PEM greatly enhanced the fuel cell performance, including yield and long-term reliability. Platinum and platinum/ruthenium catalyst layers were sputter deposited. Experiments were performed to find a range of thicknesses that resulted in porous layers allowing contact between reactants, catalyst, and the PEM. When using the deposited glasses, multiple layers of catalyst could be deposited between thin layers of the electrolyte, resulting in higher catalyst loading while maintaining porosity. The current and power output were greatly improved with these additional catalyst layers.
Advisors/Committee Members: Paul Kohl (Committee Chair), Carson Meredith (Committee Member), Dennis Hess (Committee Member), Meilin Liu (Committee Member), Peter Hesketh (Committee Member).
Subjects/Keywords: Micro power generation; Microchannels; Fuel cells; Microfabrication; Microelectromechanical systems; Microfabrication; Fuel cells; Integrated circuits Design and construction; MEMS
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❌
APA ·
Chicago ·
MLA ·
Vancouver ·
CSE |
Export
to Zotero / EndNote / Reference
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APA (6th Edition):
Moore, C. W. (2005). Microfabricated Fuel Cells To Power Integrated Circuits. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/7106
Chicago Manual of Style (16th Edition):
Moore, Christopher Wayne. “Microfabricated Fuel Cells To Power Integrated Circuits.” 2005. Doctoral Dissertation, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/7106.
MLA Handbook (7th Edition):
Moore, Christopher Wayne. “Microfabricated Fuel Cells To Power Integrated Circuits.” 2005. Web. 23 Jan 2021.
Vancouver:
Moore CW. Microfabricated Fuel Cells To Power Integrated Circuits. [Internet] [Doctoral dissertation]. Georgia Tech; 2005. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/7106.
Council of Science Editors:
Moore CW. Microfabricated Fuel Cells To Power Integrated Circuits. [Doctoral Dissertation]. Georgia Tech; 2005. Available from: http://hdl.handle.net/1853/7106

Georgia Tech
15.
Zhao, Yanzhu.
Metal-transfer-molding (MTM) technique for micromachined RF components.
Degree: PhD, Electrical and Computer Engineering, 2008, Georgia Tech
URL: http://hdl.handle.net/1853/24750
► This dissertation reports a metal-transfer-molding (MTM) technique for simultaneous implementation of air-lifted RF passive components, as well as coplanar waveguide (CPW) structures, in a high…
(more)
▼ This dissertation reports a metal-transfer-molding (MTM) technique for simultaneous implementation of air-lifted RF passive components, as well as coplanar waveguide (CPW) structures, in a high performance and potentially cost-effective fashion. A metal transfer mechanism is introduced into the conventional micro-molding process to realize polymer-core RF passive components and integration. A system-on-package (SOP) integration scheme of front-end RF components can be realized by this process. Several air-lifted RF components based on MTM technology have been presented with excellent performance. As an integration application of the MTM technology, a novel wireless passive airflow sensor based on the RF evanescent-mode cavity resonators has been also presented. The sensor makes use of RF technology to measure wind velocity through changes in the resonant frequency with applied airflow. Compared with reported wireless sensors based on conventional RF cavity resonator, this design has advantages such as compact size and greatly improved sensitivity. Wireless interrogating has also been demonstrated for the passive sensor. Overall, the RF components developed in this thesis illustrate the great potential of MTM technology in both wireless communication and sensor areas.
Advisors/Committee Members: Mark G. Allen (Committee Chair), J. Stevenson Kenney (Committee Member), Joy Laskar (Committee Member), Oliver Brand (Committee Member), Peter Hesketh (Committee Member).
Subjects/Keywords: MEMS; Micromachining; RF; Wireless; Sensor; Molding; Polymer; Radio frequency integrated circuits; Passive components; Wave guides; Micromachining
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❌
APA ·
Chicago ·
MLA ·
Vancouver ·
CSE |
Export
to Zotero / EndNote / Reference
Manager
APA (6th Edition):
Zhao, Y. (2008). Metal-transfer-molding (MTM) technique for micromachined RF components. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/24750
Chicago Manual of Style (16th Edition):
Zhao, Yanzhu. “Metal-transfer-molding (MTM) technique for micromachined RF components.” 2008. Doctoral Dissertation, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/24750.
MLA Handbook (7th Edition):
Zhao, Yanzhu. “Metal-transfer-molding (MTM) technique for micromachined RF components.” 2008. Web. 23 Jan 2021.
Vancouver:
Zhao Y. Metal-transfer-molding (MTM) technique for micromachined RF components. [Internet] [Doctoral dissertation]. Georgia Tech; 2008. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/24750.
Council of Science Editors:
Zhao Y. Metal-transfer-molding (MTM) technique for micromachined RF components. [Doctoral Dissertation]. Georgia Tech; 2008. Available from: http://hdl.handle.net/1853/24750

Georgia Tech
16.
Rowe, Laura Elizabeth.
An Active Microscaffold System with Fluid Delivery and Stimulation/Recording Functionalities for Culturing 3-D Neuronal Networks.
Degree: PhD, Electrical and Computer Engineering, 2007, Georgia Tech
URL: http://hdl.handle.net/1853/14542
► An Active Microscaffold System with Fluid Delivery and Stimulation/Recording Functionalities for Culturing 3-D Neuronal Networks Laura Elizabeth Rowe 215 Pages Directed by Dr. A. Bruno…
(more)
▼ An Active Microscaffold System with Fluid Delivery and Stimulation/Recording Functionalities for Culturing 3-D Neuronal Networks
Laura Elizabeth Rowe
215 Pages
Directed by Dr. A. Bruno Frazier
An active microscaffold system with fluid delivery and electrical stimulation/recording functionalities for 3-D neuronal culture studies is presented. The microscaffolds presented in this dissertation consist of an array of microfabricated towers with integrated microfluidic channels, fluid ports, and electrodes. The microfluidic channels and ports allow for perfusion of nutrients, gas exchange, and biochemical control of the extracellular environment throughout the 3-D culture, while the electrodes allow for active stimulation/recording of the 3-D neuronal network. In essence, the microscaffold serves as an artificial circulatory system to enable 3-D in vitro growth and proliferation of re-aggregate neuronal cell cultures. Increased cell survival on microscaffolds with nutrient perfusion at 14 and 21 days in vitro (DIV) is presented. Additionally, the microtower scaffold is built upon a substrate that is compatible with the Multi Channel Systems preamplifier setup to enable electrical stimulation/recording of the cultured network in a 3-D mutilelectrode array (MEA) environment. Impedance measurements on the functioning microtower electrodes were obtained. The overall goal of this research was to develop a BioMEMS technology to provide neuroscientists with a better investigative tool for studying 3-D in vitro neuronal networks than is currently available.
Advisors/Committee Members: Dr. A. Bruno Frazier (Committee Chair), Dr. Mark Allen (Committee Member), Dr. Peter Hesketh (Committee Member), Dr. Stephen P. DeWeerth (Committee Member), Dr. William Hunt (Committee Member).
Subjects/Keywords: BioMEMS; SU-8; Microscaffold; Multielectrode array; 3D; Microfluidics; Microelectrodes; Neuronal networks; 3D MEA; 3D neuronal networks; MEA; Neural networks (Neurobiology) Models; Microfluidics; Cell culture; BioMEMS
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APA ·
Chicago ·
MLA ·
Vancouver ·
CSE |
Export
to Zotero / EndNote / Reference
Manager
APA (6th Edition):
Rowe, L. E. (2007). An Active Microscaffold System with Fluid Delivery and Stimulation/Recording Functionalities for Culturing 3-D Neuronal Networks. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/14542
Chicago Manual of Style (16th Edition):
Rowe, Laura Elizabeth. “An Active Microscaffold System with Fluid Delivery and Stimulation/Recording Functionalities for Culturing 3-D Neuronal Networks.” 2007. Doctoral Dissertation, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/14542.
MLA Handbook (7th Edition):
Rowe, Laura Elizabeth. “An Active Microscaffold System with Fluid Delivery and Stimulation/Recording Functionalities for Culturing 3-D Neuronal Networks.” 2007. Web. 23 Jan 2021.
Vancouver:
Rowe LE. An Active Microscaffold System with Fluid Delivery and Stimulation/Recording Functionalities for Culturing 3-D Neuronal Networks. [Internet] [Doctoral dissertation]. Georgia Tech; 2007. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/14542.
Council of Science Editors:
Rowe LE. An Active Microscaffold System with Fluid Delivery and Stimulation/Recording Functionalities for Culturing 3-D Neuronal Networks. [Doctoral Dissertation]. Georgia Tech; 2007. Available from: http://hdl.handle.net/1853/14542

Georgia Tech
17.
McLean, Jeffrey John.
Interdigital Capacitive Micromachined Ultrasonic Transducers for Microfluidic Applications.
Degree: PhD, Mechanical Engineering, 2004, Georgia Tech
URL: http://hdl.handle.net/1853/7625
► The goal of this research was to develop acoustic sensors and actuators for microfluidic applications. To this end, capacitive micromachined ultrasonic transducers (cMUTs) were developed…
(more)
▼ The goal of this research was to develop acoustic sensors and actuators for microfluidic applications. To this end, capacitive micromachined ultrasonic transducers (cMUTs) were developed which generate guided acoustic waves in fluid half-spaces and microchannels. An interdigital transducer structure and a phased excitation scheme were used to selectively excite guided acoustic modes which propagate in a single lateral direction. Analytical models were developed to predict the geometric dispersion of the acoustic modes and to determine the sensitivity of the modes to changes in material and geometric parameters. Coupled field finite element models were also developed to predict the effect of membrane spacing and phasing on mode generation and directionality.
After designing the transducers, a surface micromachining process was developed which has a low processing temperature of 250C and has the potential for monolithically integrating cMUTs with CMOS electronics. The fabrication process makes extensive use of PECVD silicon nitride depositions for membrane formation and sealing. The fabricated interdigital cMUTs were placed in microfluidic channels and demonstrated to sense changes in fluid sound speed and flow rate using Scholte waves and other guided acoustic modes. The minimum detectable change in sound speed was 0.25m/s, and the minimum detectable change in flow rate was 1mL/min. The unique nature of the Scholte wave allowed for the measurement of fluid properties of a semi-infinite fluid using two transducers on a single substrate. Changes in water temperature, and thus sound speed, were measured and the minimum detectable change in temperature was found to be 0.1C. For fluid pumping, interdigital cMUTs were integrated into microchannels and excited with phase-shifted, continuous wave signals. Highly directional guided waves were generated which in turn generated acoustic streaming forces in the fluid. The acoustic streaming forces caused the fluid to be pumped in a single, electronically-controlled direction. For a power consumption of 43mW, a flow rate of 410nL/min was generated against a pressure of 3.4Pa; the thermodynamic efficiency was approximately 5x10-8%. Although the efficiency and pressure head are low, these transducers can be useful for precisely manipulating small amounts of fluid around microfluidic networks.
Advisors/Committee Members: Levent Degertekin (Committee Chair), Bruno Frazier (Committee Member), Mark Prausnitz (Committee Member), Peter Hesketh (Committee Member), Wenjing Ye (Committee Member), Yves Berthelot (Committee Member).
Subjects/Keywords: Acoustic streaming; Micropump; Scholte wave; Ultrasound; Flow sensor; Fluid sensor; Microfluidics; Guided acoustic wave; Acoustic streaming; Ultrasonic transducers Design and construction; Microfluidics; Microelectromechanical systems
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APA ·
Chicago ·
MLA ·
Vancouver ·
CSE |
Export
to Zotero / EndNote / Reference
Manager
APA (6th Edition):
McLean, J. J. (2004). Interdigital Capacitive Micromachined Ultrasonic Transducers for Microfluidic Applications. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/7625
Chicago Manual of Style (16th Edition):
McLean, Jeffrey John. “Interdigital Capacitive Micromachined Ultrasonic Transducers for Microfluidic Applications.” 2004. Doctoral Dissertation, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/7625.
MLA Handbook (7th Edition):
McLean, Jeffrey John. “Interdigital Capacitive Micromachined Ultrasonic Transducers for Microfluidic Applications.” 2004. Web. 23 Jan 2021.
Vancouver:
McLean JJ. Interdigital Capacitive Micromachined Ultrasonic Transducers for Microfluidic Applications. [Internet] [Doctoral dissertation]. Georgia Tech; 2004. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/7625.
Council of Science Editors:
McLean JJ. Interdigital Capacitive Micromachined Ultrasonic Transducers for Microfluidic Applications. [Doctoral Dissertation]. Georgia Tech; 2004. Available from: http://hdl.handle.net/1853/7625

Georgia Tech
18.
Schnell, Andrew Robert.
Use of decision-centric templates in the design of a separation column for a microscale gas chromatography system.
Degree: MS, Mechanical Engineering, 2006, Georgia Tech
URL: http://hdl.handle.net/1853/11622
► Along with knowledge of the interactions unique to microscale devices, designers of microelectromechanical systems (MEMS) require information about complex fabrication and packaging techniques in order…
(more)
▼ Along with knowledge of the interactions unique to microscale devices, designers of microelectromechanical systems (MEMS) require information about complex fabrication and packaging techniques in order to fully complete a successful design. To that end, the successful design of MEMS requires the collaboration of experts and designers in a variety of engineering fields. From the decision-based design perspective, MEMS designers require a means to sort the input and information generated in a collaborative design process. While the potential for the use of languages and part libraries have been addressed in the literature as a means to solve this problem, a means to embody these principles has not been addressed.
The use of modular, executable, decision-centric templates to rapidly compose, solve, archive, and reuse compromise Decision Support Problems (cDSP) for specific design problems has been proposed in the literature. The result of this work is a means of separating procedural design knowledge from declarative knowledge and parsing the cDSP into a set of computer-interpretable templates. A stated need in this work is the extension of the templates to accommodate the coupled solution of two cDSPs utilizing game theoretic principles.
In this thesis, the theoretical structures of decision-centric templates are applied to the needs of MEMS designers. Computer interpretable, decision-centric templates, used to save, reuse, and aid in design decisions, are extended to permit MEMS designers and fabricators to collaborate via coupled cDSPs, using game theoretic principles of cooperative, noncooperative, and leader-follower games. This approach is illustrated through its application to the design and prototype fabrication of microscale gas chromatography separation channels.
The outcome of this work is twofold: first, MEMS designers and fabricators will have a means to compose, collaboratively solve, archive, and reuse compromise Decision Support Problems in a computer interpretable manner, and second, decision templates will be extended through the use of game theoretic principles.
Advisors/Committee Members: Dr. Farrokh Mistree (Committee Co-Chair), Dr. Peter Hesketh (Committee Co-Chair), Dr. Chris Paredis (Committee Member), Dr. Janet K. Allen (Committee Member), Dr. Martha Gallivan (Committee Member).
Subjects/Keywords: MEMS; Decision-based design; Separation (Technology) Design; Microelectromechanical systems Design; Gas chromatography; Game theory; Decision support systems
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APA (6th Edition):
Schnell, A. R. (2006). Use of decision-centric templates in the design of a separation column for a microscale gas chromatography system. (Masters Thesis). Georgia Tech. Retrieved from http://hdl.handle.net/1853/11622
Chicago Manual of Style (16th Edition):
Schnell, Andrew Robert. “Use of decision-centric templates in the design of a separation column for a microscale gas chromatography system.” 2006. Masters Thesis, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/11622.
MLA Handbook (7th Edition):
Schnell, Andrew Robert. “Use of decision-centric templates in the design of a separation column for a microscale gas chromatography system.” 2006. Web. 23 Jan 2021.
Vancouver:
Schnell AR. Use of decision-centric templates in the design of a separation column for a microscale gas chromatography system. [Internet] [Masters thesis]. Georgia Tech; 2006. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/11622.
Council of Science Editors:
Schnell AR. Use of decision-centric templates in the design of a separation column for a microscale gas chromatography system. [Masters Thesis]. Georgia Tech; 2006. Available from: http://hdl.handle.net/1853/11622

Georgia Tech
19.
Johari, Houri.
Micromachined capacitive silicon bulk acoustic wave gyroscopes.
Degree: PhD, Mechanical Engineering, 2008, Georgia Tech
URL: http://hdl.handle.net/1853/31656
► Micromachined gyroscopes are attractive replacements to conventional macro-mechanical and optical gyroscopes due to their small size, low power and low cost. The application domain of…
(more)
▼ Micromachined gyroscopes are attractive replacements to conventional macro-mechanical and optical gyroscopes due to their small size, low power and low cost. The application domain of these devices is quickly expanding from automotive to aerospace and consumer electronics industries. As potential high volume consumer applications for micromachined gyroscopes continue to emerge, design and manufacturing techniques that improve their performance, shock survivability and reliability without driving up the cost and size become important.
Today, state-of-the-art micromachined gyroscopes can achieve high performance with low frequency operation (3-30kHz) but at the cost of large form factor, large operating voltages and high vacuum packaging. At the same time, most consumer applications require gyroscopes with fast response time and high shock survivability, which are generally unavailable in low frequency gyroscopes. As a result, innovative designs and fabrication technologies that will offer more practical gyroscopes are desired.
In this dissertation, capacitive bulk acoustic wave (BAW) silicon disk gyroscopes are introduced as a new class of micromachined gyroscope to investigate the operation of Coriolis-based vibratory gyroscopes at high frequency and further meet consumer electronics market demands. Capacitive BAW gyroscopes, operating in the frequency range of 1-10MHz are stationary devices with vibration amplitudes less than 20nm, resulting in high device bandwidth and high shock tolerance. They require low operating voltages, which simplifies the interface circuit design and implementation in standard CMOS technologies. They also demonstrate appropriate thermally stable performance in air, which eliminates the need both for vacuum packaging and for temperature control. A revised high aspect ratio poly- and single crystal silicon (HARPSS) process was utilized to implement these devices in thick SOI substrates with very small capacitive gap sizes (~200 nm). The prototype devices show ultra-high quality factors (Q>200,000) and large bandwidth of 15-30Hz.
In addition, the design and implementation of BAW disk gyroscopes are optimized for self-matched mode operation. Operating a vibratory gyroscope in matched mode is a straightforward way to improve performance parameters but, is challenging to achieve without applying large voltages. In this work, self-matched mode operation was provided by enhanced design of the perforations of the disk structure.
Furthermore, a multi-axis BAW gyroscope, an extension of the z-axis, is developed. This novel approach avoids the issues associated with integrating multiple proof masses, permitting a very small form factor. The multi-axis gyroscopes operate in out-of plane and in-plane modes to measure the rotation rate around the x- and z-axes. These gyroscopes were also optimized to achieve self-matched mode operation in their both modes.
Advisors/Committee Members: Dr. Farrokh Ayazi (Committee Chair), Dr. F. Levant Degertekin (Committee Co-Chair), Dr. Paul Kohl (Committee Member), Dr. Peter Hesketh (Committee Member), Dr. Suresh K. Sitaraman (Committee Member).
Subjects/Keywords: Gyroscopes; MEMS; Bulk acostic wave; Disk; Capacitive; High aspect ratio; High frequency; SOI; HARPSS; Gyroscopes; Micromachining; Acoustic surface wave devices
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❌
APA ·
Chicago ·
MLA ·
Vancouver ·
CSE |
Export
to Zotero / EndNote / Reference
Manager
APA (6th Edition):
Johari, H. (2008). Micromachined capacitive silicon bulk acoustic wave gyroscopes. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/31656
Chicago Manual of Style (16th Edition):
Johari, Houri. “Micromachined capacitive silicon bulk acoustic wave gyroscopes.” 2008. Doctoral Dissertation, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/31656.
MLA Handbook (7th Edition):
Johari, Houri. “Micromachined capacitive silicon bulk acoustic wave gyroscopes.” 2008. Web. 23 Jan 2021.
Vancouver:
Johari H. Micromachined capacitive silicon bulk acoustic wave gyroscopes. [Internet] [Doctoral dissertation]. Georgia Tech; 2008. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/31656.
Council of Science Editors:
Johari H. Micromachined capacitive silicon bulk acoustic wave gyroscopes. [Doctoral Dissertation]. Georgia Tech; 2008. Available from: http://hdl.handle.net/1853/31656

Georgia Tech
20.
Dickherber, Anthony.
Design, fabrication and testing of an acoustic resonator-based biosensor for the detection of cancer biomarkers.
Degree: PhD, Electrical and Computer Engineering, 2008, Georgia Tech
URL: http://hdl.handle.net/1853/26575
► The objective of this thesis research is to develop microelectronic acoustic technology towards biosensor applications. The development of a simple and robust resonator that employs…
(more)
▼ The objective of this thesis research is to develop microelectronic acoustic technology towards biosensor applications. The development of a simple and robust resonator that employs simple microelectronic fabrication techniques for its construction could provide the foundation for a cost-effective sensor platform. Subsequent development of an appropriate surface chemistry treatment would functionalize the resonator as a biosensor. Implementation of this design in an array configuration allows for the development of ligand microarrays, which subsequently allows for multi-ligand recognition signatures as well as testing redundancy. The applications for such a tool extend to a myriad of applications, but the focus of this research is to develop this technology towards an early cancer detection capability.
Specifically, I develop a solidly-mounted resonator with thin-film ZnO as my active piezoelectric layer. These resonators undergo an extensive development process to arrive at a final device design and are fully characterized throughout by X-ray diffraction and scattering analysis. Employing silane chemistry, these resonators are functionalized as immunosensors by covalently binding antibodies to the surface of the device. The quality of the surface chemistry is fully assessed using water contact angle, atomic force microscopy and confocal laser scanning microscopy. Functionalized biosensors are then used to quantify the concentration of known proteins marker in both a purified medium
and a physiologically-relevant medium.
Advisors/Committee Members: William Hunt (Committee Chair), Alfred Merrill, Jr. (Committee Member), John Petros (Committee Member), Peter Hesketh (Committee Member), Robert Butera (Committee Member).
Subjects/Keywords: Solidly mounted resonator; Organosilane; Prostate cancer; ZnO; Biosensor; Thin film resonator; Biosensors; Cancer; Microelectronics; Proteomics; Molecular diagnosis
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❌
APA ·
Chicago ·
MLA ·
Vancouver ·
CSE |
Export
to Zotero / EndNote / Reference
Manager
APA (6th Edition):
Dickherber, A. (2008). Design, fabrication and testing of an acoustic resonator-based biosensor for the detection of cancer biomarkers. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/26575
Chicago Manual of Style (16th Edition):
Dickherber, Anthony. “Design, fabrication and testing of an acoustic resonator-based biosensor for the detection of cancer biomarkers.” 2008. Doctoral Dissertation, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/26575.
MLA Handbook (7th Edition):
Dickherber, Anthony. “Design, fabrication and testing of an acoustic resonator-based biosensor for the detection of cancer biomarkers.” 2008. Web. 23 Jan 2021.
Vancouver:
Dickherber A. Design, fabrication and testing of an acoustic resonator-based biosensor for the detection of cancer biomarkers. [Internet] [Doctoral dissertation]. Georgia Tech; 2008. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/26575.
Council of Science Editors:
Dickherber A. Design, fabrication and testing of an acoustic resonator-based biosensor for the detection of cancer biomarkers. [Doctoral Dissertation]. Georgia Tech; 2008. Available from: http://hdl.handle.net/1853/26575

Georgia Tech
21.
Gill, Harvinder Singh.
Coated microneedles and microdermabrasion for transdermal delivery.
Degree: PhD, Bioengineering, 2007, Georgia Tech
URL: http://hdl.handle.net/1853/24711
► The major hurdle in the development of transdermal route as a versatile drug delivery method is the formidable transport barrier provided by the stratum corneum.…
(more)
▼ The major hurdle in the development of transdermal route as a versatile drug delivery method is the formidable transport barrier provided by the stratum corneum. Despite decades of research to overcome the stratum corneum barrier, limited success has been achieved. The objectives of this research were to develop and characterize two different strategies to overcome the stratum corneum barrier for transdermal delivery of biopharmaceuticals and vaccines. In the first strategy, coated microneedles (sharp-tipped, micron-sized structures) were developed to enable delivery of drugs directly into the skin by bypassing the stratum corneum barrier. In the second strategy, instead of bypassing the barrier, microdermabrasion was used to selectively abrade stratum corneum with sharp microparticles for topical drug application.
Coated microneedles
For developing painless microneedles, the first detailed study was performed to characterize the effect of microneedle geometry on pain caused by microneedle insertions in human volunteers. This study demonstrated that microneedles are significantly less painful than a 26-gage hypodermic needle and that decreasing microneedle length and numbers reduces pain.
Next, the first in-depth study of microneedle coating methods and formulations was performed to (i) develop a novel micron-scale dip-coating process, (ii) test the breadth of compounds that can be coated onto microneedles, and (iii) develop a rational basis to design novel coating formulations based on the physics of dip-coating.
Finally, a plasmid DNA-vaccine was coated onto microneedles to immunize mice, to provide the first evidence that microneedle-based skin immunization can generate a robust in vivo antigen-specific cytotoxic-T-lymphocyte response using similar, or lower, DNA doses on microneedles as when using the gene gun or intramuscular injection.
Microdermabrasion
We demonstrated for the first time that microdermabrasion in monkeys and humans can selectively, yet completely remove the stratum corneum layer. Using a mobile mode of microdermabrasion, an increase in the number of treatment passes led to greater tissue removal. Furthermore, topical application of Modified Vaccinia Ankara virus after microdermabrasion induced virus-specific antibodies in monkeys.
In conclusion, both coated microneedles and microdermabrasion were developed to enable delivery of biomolecules into the skin, indicating their potential for transdermal delivery of a wide range of biopharmaceuticals and vaccines.
Advisors/Committee Members: Dr. Mark R. Prausnitz (Committee Chair), Dr. Mark Feinberg (Committee Co-Chair), Dr. Mark Allen (Committee Member), Dr. Niren Murthy (Committee Member), Dr. Peter Hesketh (Committee Member), Dr. Robert Swerlick (Committee Member).
Subjects/Keywords: Microneedle coatings; Protein delivery; Protein coatings; Hepatitis C virus; Dip coating; Removal of stratum corneum; Microdermabrasion; DNA delivery; Vaccine delivery; Coating formulation; Microfabricated microneedles; Pocketed microneedles; Stainless steel microneedles; Transdermal medication; Drug delivery devices; Skin absorption; Dermabrasion
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Record Details
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❌
APA ·
Chicago ·
MLA ·
Vancouver ·
CSE |
Export
to Zotero / EndNote / Reference
Manager
APA (6th Edition):
Gill, H. S. (2007). Coated microneedles and microdermabrasion for transdermal delivery. (Doctoral Dissertation). Georgia Tech. Retrieved from http://hdl.handle.net/1853/24711
Chicago Manual of Style (16th Edition):
Gill, Harvinder Singh. “Coated microneedles and microdermabrasion for transdermal delivery.” 2007. Doctoral Dissertation, Georgia Tech. Accessed January 23, 2021.
http://hdl.handle.net/1853/24711.
MLA Handbook (7th Edition):
Gill, Harvinder Singh. “Coated microneedles and microdermabrasion for transdermal delivery.” 2007. Web. 23 Jan 2021.
Vancouver:
Gill HS. Coated microneedles and microdermabrasion for transdermal delivery. [Internet] [Doctoral dissertation]. Georgia Tech; 2007. [cited 2021 Jan 23].
Available from: http://hdl.handle.net/1853/24711.
Council of Science Editors:
Gill HS. Coated microneedles and microdermabrasion for transdermal delivery. [Doctoral Dissertation]. Georgia Tech; 2007. Available from: http://hdl.handle.net/1853/24711
.