+publisher:"ETH Zürich" +contributor:("Hierold, Christofer")

ETH Zürich

1. Staufert, Silvan. Conformal Parylene-C media separating membranes for pressure sensing applications in ventricular assist devices.

Degree: 2018, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/346464

► Heart failure is one of the most prevalent heath issues in todays world. Regardless, if the condition is not recognized early and allowed to progress… (more)

▼ Heart failure is one of the most prevalent heath issues in todays world. Regardless, if the condition is not recognized early and allowed to progress to its end stages, there are few treatment options available. The gold standard treatment and only permanent treatment of end-stage heart failure is heart transplantation. However, transplantation has proven to be an unsustainable model, as donor organ shortage is a prevalent issue. Ventricular assist devices (VAD) were introduced in the early 2000s and were quick to supplement the shortage of available donor organs. Over 10 years these mechanical circulatory support systems became a popular method to bridging the patients treatment until transplantation is possible. While incremental progress on the performance of the devices have been made, obvious shortcomings are present in todays VADs. One shortcoming of current generation VADs is their failure to properly respond to changes in the perfusion demand of the patient, as they are operated in a constant speed mode. The resulting adverse effects, under- and overpumping of the ventricle, have a significant impact on patient mortality. Unfortunately, the evident solution to this problem, implementation of control algorithms, is denied due to the lack of long-term stable and safe sensors. In this work, we propose an integration approach for commercial pressure sensors in VADs. The approach is based around a thin, polymeric membrane serving as the sensing interface. It is located in the inflow cannula of the VAD and implemented as an integral part of a conformal coating, covering the entirety of the cannula. Hence, the interface does not perturb the blood flow or increase the thrombogenicity of the device. The coating material is Parylene-C, a polymer known mainly as a protective coating for electronics has a unique deposition route and outstanding mechanical stability. Its biocompatibility has been proven in multiple clinical applications and novel developments make it a promising material regarding future functionalization. The sensing interface is produced in a newly developed fabrication process based on a sacrificial material release. The sacrificial material is v shaped to conformally complement the inside surface of the inflow cannula through a shaping body. A 10μm thick Parylene-C film is deposited and the sacrificial material is dissolved, forming the media separating membrane sensing interface. Membranes fabricated in such a manner with a diameter of 1.5mm deviated a maximum of 12μm from an ideally replicated cannula surface. A demonstrator pressure sensor assembly with the Parylene-C media separating membrane was fabricated and evaluated on a water based measurement bench. The sensing interface was not found to influence the measurement performance of the sensor in a significant manner and exhibited a stable performance over the duration of several weeks. A known shortcoming of Parylene-C is its lacking long-term adhesion to metals, especially in applications with… Advisors/Committee Members: Hierold, Christofer, Meboldt, Mirko.

Subjects/Keywords: Sensor; Pressure; Parylene; VAD

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APA (6^th Edition):

Staufert, S. (2018). Conformal Parylene-C media separating membranes for pressure sensing applications in ventricular assist devices. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/346464

Chicago Manual of Style (16^th Edition):

Staufert, Silvan. “Conformal Parylene-C media separating membranes for pressure sensing applications in ventricular assist devices.” 2018. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/346464.

MLA Handbook (7^th Edition):

Staufert, Silvan. “Conformal Parylene-C media separating membranes for pressure sensing applications in ventricular assist devices.” 2018. Web. 07 Dec 2019.

Vancouver:

Staufert S. Conformal Parylene-C media separating membranes for pressure sensing applications in ventricular assist devices. [Internet] [Doctoral dissertation]. ETH Zürich; 2018. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/346464.

Council of Science Editors:

Staufert S. Conformal Parylene-C media separating membranes for pressure sensing applications in ventricular assist devices. [Doctoral Dissertation]. ETH Zürich; 2018. Available from: http://hdl.handle.net/20.500.11850/346464

ETH Zürich

2. Thielen, Moritz. Thermal and Electrical Energy Converters and Interfaces for the Internet of Humans.

Degree: 2018, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/278193

► The emerging Internet of Humans (IoH) can shape future healthcare and consumer devices. The energy supply of IoH devices and unobtrusive interfacing with the human… (more)

▼ The emerging Internet of Humans (IoH) can shape future healthcare and consumer devices. The energy supply of IoH devices and unobtrusive interfacing with the human body remain fundamental challenges yet to be resolved. To address these obstacles, this work investigates thermal energy harvesting of body heat and soft thermal and electric skin interfaces. The thermal harvesting potential of the human body is assessed over the mechanisms of heat generation and thermoregulation. Experimental verification is provided through a user study with 56 participants. The study demonstrates that 2 mW cm^-2 to 40 mW cm^-2 of thermal energy are available for harvesting, depending on the subject, body location, environment, and activity. A significant decrease of thermal energy with age is observed and can be correlated to an increase in thermal skin resistance. To access the available energy, three wearable thermoelectric energy converters for different IoH applications are presented. A user-centered design approach, incorporating the complete pathway from body core to application, is pursued to combine performance with wearability. Special attention is paid to the critical interaction between thermal and electric energy conversion. A miniaturized thermal harvester for IoH sensor nodes generates μW, a wristband harvester supplying a multi-sensor bracelet hundreds of μW and a forehead harvester designed for a medical wearable mW of power. With a power density of 18.75 μW cm^-3 at room temperature, the forehead harvester delivers the highest power output per volume compared to existing systems and demonstrates that wearability can be drastically improved without compromising the performance. The wearability and performance of body heat harvesters is also defined by the thermal interfaces with the skin and the environment. A soft composite of silver particles and PDMS (Ag = 25 vol.%, λ = 1.42 W m^-1 K^-1) improves the comfort of skin interfaces without considerable power losses by adopting to the irregular body surface. A heat sink incorporating biomimetic microactuators with high temperature sensitivity (SD = 0.053K^-1) extends the applicable temperature range of thermal harvesters by dynamically changing the thermal interface resistance to the ambient. Lastly, to interface the human body electrically, soft, skin-conformal, and selfadhesive biopotential electrodes are presented. The dry skin interfaces show similar or superior performance in terms of skin-contact impedance (47 kΩ cm²) and motion artifact rejection (RMS = 30 μV) as compared to clinical standard gel electrodes. At the same time, skin irritations are minimized and the long-term stability in wet environments improves. The performance is validated by high-fidelity recordings of the ECG of athletes during workout in challenging environments and of the EEG through dense hair. The interfaces and energy converters presented in this thesis are integrated into a proof-of-concept wearable EEG system that combines different energy harvesting sources with ultra-low… Advisors/Committee Members: Hierold, Christofer, Gross, Thomas, Vörös, Janos, Majoe, Dennis.

Subjects/Keywords: Internet of things (IoT); Internet of Humans (IoH); THERMOELECTRIC GENERATORS (THERMOELECTRIC ENGINEERING); TEG; Energy harvesting; Harvesting of body heat; Thermal interfaces; electric interfaces; Biopotential electrodes; EEG; ECG

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Thielen, M. (2018). Thermal and Electrical Energy Converters and Interfaces for the Internet of Humans. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/278193

Chicago Manual of Style (16^th Edition):

Thielen, Moritz. “Thermal and Electrical Energy Converters and Interfaces for the Internet of Humans.” 2018. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/278193.

MLA Handbook (7^th Edition):

Thielen, Moritz. “Thermal and Electrical Energy Converters and Interfaces for the Internet of Humans.” 2018. Web. 07 Dec 2019.

Vancouver:

Thielen M. Thermal and Electrical Energy Converters and Interfaces for the Internet of Humans. [Internet] [Doctoral dissertation]. ETH Zürich; 2018. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/278193.

Council of Science Editors:

Thielen M. Thermal and Electrical Energy Converters and Interfaces for the Internet of Humans. [Doctoral Dissertation]. ETH Zürich; 2018. Available from: http://hdl.handle.net/20.500.11850/278193

ETH Zürich

3. Huang, Hen-Wei. Programmable Soft Micromachines with Morphological Computation for Adaptive Locomotion.

Degree: 2018, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/269443

► Researchers in biomedical applications have long had interest in the creation of smaller, softer, safer and more intelligent robots. The development of tmicro-electro-mechanical system (MEMS)… (more)

▼ Researchers in biomedical applications have long had interest in the creation of smaller, softer, safer and more intelligent robots. The development of tmicro-electro-mechanical system (MEMS) and nanotechnology have made great strides in building smaller robots. However, these micro/nano devices are generally made of silicon or metallic materials, whose intrinsically inflexible properties restrict the shape transformation of microrobots and pose potential threats for medical applications to a significant degree. Current progress in developing soft and smart materials such as stimuli-responsive hydrogel and shape memory polymer enables us to devise micromachines that can perceive external environments and respond with programmability through the conventional manufacturing techniques of MEMS. Using Origami/Kirigami design principles as a framework, we can establish complex three-dimensional (3D) microstructures employing self-folding polymer films. This programmable matter allows a single machine to transform into multiple folding forms. Here, we utilize magnetic hydrogel nanocomposites as programmable matter to construct microrobots that emulate the forms, locomotion, and morphological plasticity of various microorganisms. We encode and recode the 3D forms, magnetization profiles, and locomotion of the flexible microrobot powered and propelled by external magnetic fields, and then observe and study its motility and maneuverability in a non-structural, heterogeneous, and dynamically changing environment. Using acquired knowledge on microrobot locomotion with various forms in different environments, we program the morphological adaptation into a transformative microrobot. The microrobot then is able to change its form autonomously to optimal locomotion in diverse environments. The coordination between sensory input and shape-morphing output is the key to achieving adaptive locomotion. This study provides a reference for autonomous targeted therapies using smaller, softer, safer and more intelligent robots. Advisors/Committee Members: Nelson, Bradley J., Hierold, Christofer, Shea, Kristina, Sakar, Mahmut S..

Subjects/Keywords: ROBOTICS

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APA (6^th Edition):

Huang, H. (2018). Programmable Soft Micromachines with Morphological Computation for Adaptive Locomotion. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/269443

Chicago Manual of Style (16^th Edition):

Huang, Hen-Wei. “Programmable Soft Micromachines with Morphological Computation for Adaptive Locomotion.” 2018. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/269443.

MLA Handbook (7^th Edition):

Huang, Hen-Wei. “Programmable Soft Micromachines with Morphological Computation for Adaptive Locomotion.” 2018. Web. 07 Dec 2019.

Vancouver:

Huang H. Programmable Soft Micromachines with Morphological Computation for Adaptive Locomotion. [Internet] [Doctoral dissertation]. ETH Zürich; 2018. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/269443.

Council of Science Editors:

Huang H. Programmable Soft Micromachines with Morphological Computation for Adaptive Locomotion. [Doctoral Dissertation]. ETH Zürich; 2018. Available from: http://hdl.handle.net/20.500.11850/269443

4. Liu, Wei. Investigating the properties of metal-SWNT interfaces for SWNT-based nanodevices.

Degree: 2015, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/103496

Subjects/Keywords: FELDEFFEKTTRANSISTOREN, FET (ELEKTRONIK); FIELD EFFECT TRANSISTORS, FET (ELECTRONICS); ERZEUGUNG DÜNNER SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN); NANOELEKTRONIK; ELECTRIC PROPERTIES OF MATERIALS (MATERIALS SCIENCE); ELEKTRISCHE MATERIALEIGENSCHAFTEN (MATERIALWISSENSCHAFTEN); PRODUCTION OF THIN FILMS (PHYSICS OF MOLECULAR SYSTEMS); NANOELECTRONICS; NANOTUBES + CARBON NANOTUBES; NANORÖHRCHEN + KOHLENSTOFFNANORÖHRCHEN; info:eu-repo/classification/ddc/621.3; info:eu-repo/classification/ddc/620; Electric engineering; Engineering & allied operations

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Liu, W. (2015). Investigating the properties of metal-SWNT interfaces for SWNT-based nanodevices. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/103496

Chicago Manual of Style (16^th Edition):

Liu, Wei. “Investigating the properties of metal-SWNT interfaces for SWNT-based nanodevices.” 2015. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/103496.

MLA Handbook (7^th Edition):

Liu, Wei. “Investigating the properties of metal-SWNT interfaces for SWNT-based nanodevices.” 2015. Web. 07 Dec 2019.

Vancouver:

Liu W. Investigating the properties of metal-SWNT interfaces for SWNT-based nanodevices. [Internet] [Doctoral dissertation]. ETH Zürich; 2015. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/103496.

Council of Science Editors:

Liu W. Investigating the properties of metal-SWNT interfaces for SWNT-based nanodevices. [Doctoral Dissertation]. ETH Zürich; 2015. Available from: http://hdl.handle.net/20.500.11850/103496

ETH Zürich

5. Prochazka, Lukas. Optically interrogated MEMS pressure sensor array.

Degree: 2011, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/58403

Subjects/Keywords: WINDKANÄLE, TESTS, MODELLVERSUCHE (AERODYNAMIK); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); OPTOELECTRONIC DEVICES + PHOTOELECTRONIC DEVICES (OPTOELECTRONICS); PRESSURE MEASUREMENT + BAROMETERS + MANOMETERS (MECHANICS); WIND TUNNELS, TESTING, MODEL STUDIES (AERODYNAMICS); DRUCKMESSUNG + MANOMETER + MESSDOSEN + BAROMETER (MECHANIK); OPTOELEKTRONISCHE BAUELEMENTE + PHOTOELEKTRONISCHE BAUELEMENTE (OPTOELEKTRONIK); MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS); MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK); MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); info:eu-repo/classification/ddc/621.3; info:eu-repo/classification/ddc/530; Electric engineering; Physics

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Prochazka, L. (2011). Optically interrogated MEMS pressure sensor array. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/58403

Chicago Manual of Style (16^th Edition):

Prochazka, Lukas. “Optically interrogated MEMS pressure sensor array.” 2011. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/58403.

MLA Handbook (7^th Edition):

Prochazka, Lukas. “Optically interrogated MEMS pressure sensor array.” 2011. Web. 07 Dec 2019.

Vancouver:

Prochazka L. Optically interrogated MEMS pressure sensor array. [Internet] [Doctoral dissertation]. ETH Zürich; 2011. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/58403.

Council of Science Editors:

Prochazka L. Optically interrogated MEMS pressure sensor array. [Doctoral Dissertation]. ETH Zürich; 2011. Available from: http://hdl.handle.net/20.500.11850/58403

ETH Zürich

6. Rüst, Philipp Lukas. Micromachined viscosity sensors for the characterization of DNA solutions.

Degree: 2013, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/75306

Subjects/Keywords: POLYMERASE CHAIN REACTION (GENETIC TECHNIQUES); MICROMACHINING (MACHINING); VISKOSITÄT/MESSMETHODEN, MESSGERÄTE (FLUIDMECHANIK); LAB-ON-A-CHIP; POLYMERASEKETTENREAKTION (GENETISCHE TECHNIKEN); VISCOSITY/MEASUREMENT, METHODS AND APPARATUS (FLUID MECHANICS); MIKROBEARBEITUNG (SPANENDE UMFORMUNG); info:eu-repo/classification/ddc/621.3; info:eu-repo/classification/ddc/570; Electric engineering; Life sciences

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Rüst, P. L. (2013). Micromachined viscosity sensors for the characterization of DNA solutions. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/75306

Chicago Manual of Style (16^th Edition):

Rüst, Philipp Lukas. “Micromachined viscosity sensors for the characterization of DNA solutions.” 2013. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/75306.

MLA Handbook (7^th Edition):

Rüst, Philipp Lukas. “Micromachined viscosity sensors for the characterization of DNA solutions.” 2013. Web. 07 Dec 2019.

Vancouver:

Rüst PL. Micromachined viscosity sensors for the characterization of DNA solutions. [Internet] [Doctoral dissertation]. ETH Zürich; 2013. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/75306.

Council of Science Editors:

Rüst PL. Micromachined viscosity sensors for the characterization of DNA solutions. [Doctoral Dissertation]. ETH Zürich; 2013. Available from: http://hdl.handle.net/20.500.11850/75306

ETH Zürich

7. Burg, Brian R. Directing carbon nanotubes and graphene: fundamentals and parallel device integration using dielectrophoresis.

Degree: 2010, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/152253

Subjects/Keywords: MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK); NANOELEKTROMECHANISCHE BAUELEMENTE, NEMS (ELEKTROTECHNIK); NANORÖHRCHEN + KOHLENSTOFFNANORÖHRCHEN; GRAPHIT + DIAMANTEN + DIAMANT-ÄHNLICHER KOHLENSTOFF (ANORGANISCHE CHEMIE); ELEKTROPHORESE + KATAPHORESE + ANAPHORESE (ELEKTRODYNAMIK); MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS); NANOELECTROMECHANICAL COMPONENTS, NEMS (ELECTRICAL ENGINEERING); NANOTUBES + CARBON NANOTUBES; GRAPHITE + DIAMONDS + DIAMOND-LIKE CARBON (INORGANIC CHEMISTRY); ELECTROPHORESIS + KATAPHORESIS + ANAPHORESIS (ELECTRIC CURRENT); info:eu-repo/classification/ddc/620; Engineering & allied operations

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APA (6^th Edition):

Burg, B. R. (2010). Directing carbon nanotubes and graphene: fundamentals and parallel device integration using dielectrophoresis. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/152253

Chicago Manual of Style (16^th Edition):

Burg, Brian R. “Directing carbon nanotubes and graphene: fundamentals and parallel device integration using dielectrophoresis.” 2010. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/152253.

MLA Handbook (7^th Edition):

Burg, Brian R. “Directing carbon nanotubes and graphene: fundamentals and parallel device integration using dielectrophoresis.” 2010. Web. 07 Dec 2019.

Vancouver:

Burg BR. Directing carbon nanotubes and graphene: fundamentals and parallel device integration using dielectrophoresis. [Internet] [Doctoral dissertation]. ETH Zürich; 2010. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/152253.

Council of Science Editors:

Burg BR. Directing carbon nanotubes and graphene: fundamentals and parallel device integration using dielectrophoresis. [Doctoral Dissertation]. ETH Zürich; 2010. Available from: http://hdl.handle.net/20.500.11850/152253

ETH Zürich

8. Büthe, Lars. Digital output tilt sensor with conductive microspheres.

Degree: 2017, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/156256

Subjects/Keywords: FERTIGUNG IN DER ELEKTROTECHNIK, ELEKTRONIK, MIKRO-, NANOELEKTRONIK; MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK); SCHWERE + GRAVITATION + PENDEL (MECHANIK); MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); MIKROPARTIKEL + NANOPARTIKEL + MIKROSPHÄREN + NANOSPHÄREN (NANOTECHNOLOGIE); PRODUCTION IN ELECTRICAL ENGINEERING, ELECTRONICS, MICRO-, NANOELECTRONICS; MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS); GRAVITY + PENDULUM THEORY (MECHANICS); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); MICROPARTICLES + MICROSPHERES + NANOPARTICLES + NANOSPHERES (NANOTECHNOLOGY); info:eu-repo/classification/ddc/621.3; info:eu-repo/classification/ddc/621.3; Electric engineering; Electric engineering

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Büthe, L. (2017). Digital output tilt sensor with conductive microspheres. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/156256

Chicago Manual of Style (16^th Edition):

Büthe, Lars. “Digital output tilt sensor with conductive microspheres.” 2017. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/156256.

MLA Handbook (7^th Edition):

Büthe, Lars. “Digital output tilt sensor with conductive microspheres.” 2017. Web. 07 Dec 2019.

Vancouver:

Büthe L. Digital output tilt sensor with conductive microspheres. [Internet] [Doctoral dissertation]. ETH Zürich; 2017. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/156256.

Council of Science Editors:

Büthe L. Digital output tilt sensor with conductive microspheres. [Doctoral Dissertation]. ETH Zürich; 2017. Available from: http://hdl.handle.net/20.500.11850/156256

ETH Zürich

9. Yunjia, Li. Vertical comb-drive actuators for millimeter waveguide applications.

Degree: 2014, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/95922

Subjects/Keywords: MILLIMETERWELLEN, 30 GHZ BIS 300 GHZ (ELEKTROTECHNIK); WAVEGUIDES (ELECTRICAL OSCILLATION TECHNOLOGY); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); MICROMACHINE (MECHANICAL ENGINEERING); MIKROSTELLANTRIEBE + MIKROSTELLEINRICHTUNGEN (AUTOMATISCHE REGELUNG); WELLENLEITER (ELEKTRISCHE SCHWINGUNGSTECHNIK); MIKROMECHANIK (MASCHINENBAU); MILLIMETRIC WAVES, 30 GHZ TO 300 GHZ (ELECTRICAL ENGINEERING); MICRO SERVO-DRIVES + MICROACTUATORS (AUTOMATIC CONTROL); MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); info:eu-repo/classification/ddc/620; info:eu-repo/classification/ddc/621.3; Engineering & allied operations; Electric engineering

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APA (6^th Edition):

Yunjia, L. (2014). Vertical comb-drive actuators for millimeter waveguide applications. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/95922

Chicago Manual of Style (16^th Edition):

Yunjia, Li. “Vertical comb-drive actuators for millimeter waveguide applications.” 2014. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/95922.

MLA Handbook (7^th Edition):

Yunjia, Li. “Vertical comb-drive actuators for millimeter waveguide applications.” 2014. Web. 07 Dec 2019.

Vancouver:

Yunjia L. Vertical comb-drive actuators for millimeter waveguide applications. [Internet] [Doctoral dissertation]. ETH Zürich; 2014. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/95922.

Council of Science Editors:

Yunjia L. Vertical comb-drive actuators for millimeter waveguide applications. [Doctoral Dissertation]. ETH Zürich; 2014. Available from: http://hdl.handle.net/20.500.11850/95922

ETH Zürich

10. Büren, Thomas von. Body-worn inertial electromagnetic micro-generators.

Degree: 2006, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/149224

Subjects/Keywords: GENERATOREN (ELEKTRISCHE MASCHINEN); MIKROMECHANIK (MASCHINENBAU); MIKROSENSOREN (PHYSIK); ELEKTROMAGNETISCHE ENERGIE (ELEKTRODYNAMIK); GENERATORS (ELECTRICAL MACHINES); MICROMACHINE (MECHANICAL ENGINEERING); MICROSENSORS (PHYSICS); ELECTROMAGNETIC ENERGY (ELECTRODYNAMICS); info:eu-repo/classification/ddc/621.3; Electric engineering

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APA (6^th Edition):

Büren, T. v. (2006). Body-worn inertial electromagnetic micro-generators. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/149224

Chicago Manual of Style (16^th Edition):

Büren, Thomas von. “Body-worn inertial electromagnetic micro-generators.” 2006. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/149224.

MLA Handbook (7^th Edition):

Büren, Thomas von. “Body-worn inertial electromagnetic micro-generators.” 2006. Web. 07 Dec 2019.

Vancouver:

Büren Tv. Body-worn inertial electromagnetic micro-generators. [Internet] [Doctoral dissertation]. ETH Zürich; 2006. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/149224.

Council of Science Editors:

Büren Tv. Body-worn inertial electromagnetic micro-generators. [Doctoral Dissertation]. ETH Zürich; 2006. Available from: http://hdl.handle.net/20.500.11850/149224

ETH Zürich

11. Bachmann, Daniel. Multicompliant MEMS for measurement of adhesion energies and pull-off forces in an electrostatic bearing.

Degree: 2007, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/150012

Subjects/Keywords: MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); ELEKTROSTATIK/TECHNISCHE ANWENDUNG (ELEKTROTECHNIK); LAGER, LAGERSCHALEN (MASCHINENELEMENTE); GYROSKOPISCHE MESSMETHODEN (PHYSIK); DREHZAHLMESSUNG (MECHANIK); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); ELECTROSTATICS/TECHNICAL APPLICATIONS (ELECTRICAL ENGINEERING); BEARINGS, BUSHINGS (MACHINE COMPONENTS); GYROSCOPIC MEASURING METHODS (PHYSICS); TACHOMETER (MECHANICS); info:eu-repo/classification/ddc/620; info:eu-repo/classification/ddc/621.3; Engineering & allied operations; Electric engineering

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APA (6^th Edition):

Bachmann, D. (2007). Multicompliant MEMS for measurement of adhesion energies and pull-off forces in an electrostatic bearing. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/150012

Chicago Manual of Style (16^th Edition):

Bachmann, Daniel. “Multicompliant MEMS for measurement of adhesion energies and pull-off forces in an electrostatic bearing.” 2007. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/150012.

MLA Handbook (7^th Edition):

Bachmann, Daniel. “Multicompliant MEMS for measurement of adhesion energies and pull-off forces in an electrostatic bearing.” 2007. Web. 07 Dec 2019.

Vancouver:

Bachmann D. Multicompliant MEMS for measurement of adhesion energies and pull-off forces in an electrostatic bearing. [Internet] [Doctoral dissertation]. ETH Zürich; 2007. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/150012.

Council of Science Editors:

Bachmann D. Multicompliant MEMS for measurement of adhesion energies and pull-off forces in an electrostatic bearing. [Doctoral Dissertation]. ETH Zürich; 2007. Available from: http://hdl.handle.net/20.500.11850/150012

ETH Zürich

12. Burger, Norbert. Managing MEMS/NEMS technology development teams in the early phases of the innovation process: an exploratory investigation by case study research.

Degree: 2011, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/152680

Subjects/Keywords: INNOVATIONSMANAGEMENT (UNTERNEHMENSFÜHRUNG); TEAMARBEIT + GRUPPENARBEIT; TECHNISCH-WISSENSCHAFTLICHES PROJEKT; PRODUKTENTWICKLUNGSPROZESSE (PRODUKTION); MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); NANOELEKTROMECHANISCHE BAUELEMENTE, NEMS (ELEKTROTECHNIK); FALLSTUDIEN (DOKUMENTENTYP); INNOVATION MANAGEMENT (BUSINESS MANAGEMENT); TEAMWORK + GROUP WORK; TECHNICAL-SCIENTIFIC PROJECT; PRODUCT DEVELOPMENT PROCESSES (PRODUCTION); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); NANOELECTROMECHANICAL COMPONENTS, NEMS (ELECTRICAL ENGINEERING); CASE STUDIES (DOCUMENT TYPE); info:eu-repo/classification/ddc/621.3; info:eu-repo/classification/ddc/330; Electric engineering; Economics

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APA (6^th Edition):

Burger, N. (2011). Managing MEMS/NEMS technology development teams in the early phases of the innovation process: an exploratory investigation by case study research. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/152680

Chicago Manual of Style (16^th Edition):

Burger, Norbert. “Managing MEMS/NEMS technology development teams in the early phases of the innovation process: an exploratory investigation by case study research.” 2011. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/152680.

MLA Handbook (7^th Edition):

Burger, Norbert. “Managing MEMS/NEMS technology development teams in the early phases of the innovation process: an exploratory investigation by case study research.” 2011. Web. 07 Dec 2019.

Vancouver:

Burger N. Managing MEMS/NEMS technology development teams in the early phases of the innovation process: an exploratory investigation by case study research. [Internet] [Doctoral dissertation]. ETH Zürich; 2011. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/152680.

Council of Science Editors:

Burger N. Managing MEMS/NEMS technology development teams in the early phases of the innovation process: an exploratory investigation by case study research. [Doctoral Dissertation]. ETH Zürich; 2011. Available from: http://hdl.handle.net/20.500.11850/152680

ETH Zürich

13. Mattmann, Moritz Peter. Carbon nanotube field effect transistors with AI₂O₃ passivated metal contacts as NO₂ gas sensors.

Degree: 2011, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/152918

Subjects/Keywords: SENSOREN + DETEKTOREN (ANALYTISCHE CHEMIE); GASSENSOREN (PHYSIK); NANORÖHRCHEN + KOHLENSTOFFNANORÖHRCHEN; FELDEFFEKTTRANSISTOREN, FET (ELEKTRONIK); STICKSTOFFOXIDE (UMWELTSCHADSTOFFE); BESTIMMUNG VON STICKSTOFFOXIDEN (ANALYTISCHE CHEMIE); SENSORS + DETECTORS (ANALYTICAL CHEMISTRY); GAS SENSORS (PHYSICS); NANOTUBES + CARBON NANOTUBES; FIELD EFFECT TRANSISTORS, FET (ELECTRONICS); NITROGEN OXIDES (ENVIRONMENTAL POLLUTANTS); DETERMINATION OF NITROGEN OXIDES (ANALYTICAL CHEMISTRY); info:eu-repo/classification/ddc/621.3; info:eu-repo/classification/ddc/620; Electric engineering; Engineering & allied operations

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APA (6^th Edition):

Mattmann, M. P. (2011). Carbon nanotube field effect transistors with AI₂O₃ passivated metal contacts as NO₂ gas sensors. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/152918

Chicago Manual of Style (16^th Edition):

Mattmann, Moritz Peter. “Carbon nanotube field effect transistors with AI₂O₃ passivated metal contacts as NO₂ gas sensors.” 2011. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/152918.

MLA Handbook (7^th Edition):

Mattmann, Moritz Peter. “Carbon nanotube field effect transistors with AI₂O₃ passivated metal contacts as NO₂ gas sensors.” 2011. Web. 07 Dec 2019.

Vancouver:

Mattmann MP. Carbon nanotube field effect transistors with AI₂O₃ passivated metal contacts as NO₂ gas sensors. [Internet] [Doctoral dissertation]. ETH Zürich; 2011. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/152918.

Council of Science Editors:

Mattmann MP. Carbon nanotube field effect transistors with AI₂O₃ passivated metal contacts as NO₂ gas sensors. [Doctoral Dissertation]. ETH Zürich; 2011. Available from: http://hdl.handle.net/20.500.11850/152918

14. Süss, Tobias. Process development for a pressure sensor based on a suspended gate carbon nanotube field-effect transistor.

Degree: 2015, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/155518

Subjects/Keywords: DRUCKMESSUNG + MANOMETER + MESSDOSEN + BAROMETER (MECHANIK); MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK); FELDEFFEKTTRANSISTOREN, FET (ELEKTRONIK); NANORÖHRCHEN + KOHLENSTOFFNANORÖHRCHEN; PRESSURE MEASUREMENT + BAROMETERS + MANOMETERS (MECHANICS); MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS); FIELD EFFECT TRANSISTORS, FET (ELECTRONICS); NANOTUBES + CARBON NANOTUBES; info:eu-repo/classification/ddc/620; Engineering & allied operations

1 more image…

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APA (6^th Edition):

Süss, T. (2015). Process development for a pressure sensor based on a suspended gate carbon nanotube field-effect transistor. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/155518

Chicago Manual of Style (16^th Edition):

Süss, Tobias. “Process development for a pressure sensor based on a suspended gate carbon nanotube field-effect transistor.” 2015. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/155518.

MLA Handbook (7^th Edition):

Süss, Tobias. “Process development for a pressure sensor based on a suspended gate carbon nanotube field-effect transistor.” 2015. Web. 07 Dec 2019.

Vancouver:

Süss T. Process development for a pressure sensor based on a suspended gate carbon nanotube field-effect transistor. [Internet] [Doctoral dissertation]. ETH Zürich; 2015. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/155518.

Council of Science Editors:

Süss T. Process development for a pressure sensor based on a suspended gate carbon nanotube field-effect transistor. [Doctoral Dissertation]. ETH Zürich; 2015. Available from: http://hdl.handle.net/20.500.11850/155518

ETH Zürich

15. Chikkadi, Kiran. Wafer-scale integration of single-walled carbon nanotubes for gas sensing.

Degree: 2014, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/83798

Subjects/Keywords: NANOELEKTROMECHANISCHE BAUELEMENTE, NEMS (ELEKTROTECHNIK); FELDEFFEKTTRANSISTOREN, FET (ELEKTRONIK); FIELD EFFECT TRANSISTORS, FET (ELECTRONICS); NANOELECTROMECHANICAL COMPONENTS, NEMS (ELECTRICAL ENGINEERING); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); SENSOREN + DETEKTOREN (ANALYTISCHE CHEMIE); NITROGEN OXIDES (ENVIRONMENTAL POLLUTANTS); NANOTUBES + CARBON NANOTUBES; STICKSTOFFOXIDE (UMWELTSCHADSTOFFE); SENSORS + DETECTORS (ANALYTICAL CHEMISTRY); NANORÖHRCHEN + KOHLENSTOFFNANORÖHRCHEN; MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); info:eu-repo/classification/ddc/621.3; info:eu-repo/classification/ddc/620; Electric engineering; Engineering & allied operations

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Chikkadi, K. (2014). Wafer-scale integration of single-walled carbon nanotubes for gas sensing. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/83798

Chicago Manual of Style (16^th Edition):

Chikkadi, Kiran. “Wafer-scale integration of single-walled carbon nanotubes for gas sensing.” 2014. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/83798.

MLA Handbook (7^th Edition):

Chikkadi, Kiran. “Wafer-scale integration of single-walled carbon nanotubes for gas sensing.” 2014. Web. 07 Dec 2019.

Vancouver:

Chikkadi K. Wafer-scale integration of single-walled carbon nanotubes for gas sensing. [Internet] [Doctoral dissertation]. ETH Zürich; 2014. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/83798.

Council of Science Editors:

Chikkadi K. Wafer-scale integration of single-walled carbon nanotubes for gas sensing. [Doctoral Dissertation]. ETH Zürich; 2014. Available from: http://hdl.handle.net/20.500.11850/83798

ETH Zürich

16. Schmid, Silvan. Electrostatically actuated all-polymer microbeam resonators: Characterization and application.

Degree: 2009, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/21115

Subjects/Keywords: MIKROSYSTEMTECHNIK, MST; PLASTICS (MATERIALS); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); BIOSENSORS (BIOTECHNOLOGY); MICRO SYSTEM TECHNOLOGIES, MST; KUNSTSTOFFE (WERKSTOFFE); BIOSENSOREN (BIOTECHNOLOGIE); RESONATORS/ELECTRICAL OSCILLATION TECHNOLOGY; RESONATOREN/ELEKTRISCHE SCHWINGUNGSTECHNIK; MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); info:eu-repo/classification/ddc/621.3; Electric engineering

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APA (6^th Edition):

Schmid, S. (2009). Electrostatically actuated all-polymer microbeam resonators: Characterization and application. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/21115

Chicago Manual of Style (16^th Edition):

Schmid, Silvan. “Electrostatically actuated all-polymer microbeam resonators: Characterization and application.” 2009. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/21115.

MLA Handbook (7^th Edition):

Schmid, Silvan. “Electrostatically actuated all-polymer microbeam resonators: Characterization and application.” 2009. Web. 07 Dec 2019.

Vancouver:

Schmid S. Electrostatically actuated all-polymer microbeam resonators: Characterization and application. [Internet] [Doctoral dissertation]. ETH Zürich; 2009. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/21115.

Council of Science Editors:

Schmid S. Electrostatically actuated all-polymer microbeam resonators: Characterization and application. [Doctoral Dissertation]. ETH Zürich; 2009. Available from: http://hdl.handle.net/20.500.11850/21115

ETH Zürich

17. Gattiker, Felix. Novel ultrasound read-out for a wireless implantable passive strain sensor.

Degree: 2009, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/21116

Subjects/Keywords: MATHEMATICAL MODELING IN ELECTRICAL ENGINEERING, ELECTRONICS, TELECOMMUNICATIONS, MICROELECTRONICS; MICROTECHNOLOGY; IMPLANTS (SURGERY); ULTRASCHALLMESSTECHNIK; IMPLANTATE (CHIRURGIE); MODELLRECHNUNG/ELEKTROTECHNIK, ELEKTRONIK, NACHRICHTENTECHNIK, MIKROELEKTRONIK; ULTRASONIC MEASUREMENTS; MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS); MIKROTECHNIK; MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK); info:eu-repo/classification/ddc/610; info:eu-repo/classification/ddc/620; Medical sciences, medicine; Engineering & allied operations

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APA (6^th Edition):

Gattiker, F. (2009). Novel ultrasound read-out for a wireless implantable passive strain sensor. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/21116

Chicago Manual of Style (16^th Edition):

Gattiker, Felix. “Novel ultrasound read-out for a wireless implantable passive strain sensor.” 2009. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/21116.

MLA Handbook (7^th Edition):

Gattiker, Felix. “Novel ultrasound read-out for a wireless implantable passive strain sensor.” 2009. Web. 07 Dec 2019.

Vancouver:

Gattiker F. Novel ultrasound read-out for a wireless implantable passive strain sensor. [Internet] [Doctoral dissertation]. ETH Zürich; 2009. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/21116.

Council of Science Editors:

Gattiker F. Novel ultrasound read-out for a wireless implantable passive strain sensor. [Doctoral Dissertation]. ETH Zürich; 2009. Available from: http://hdl.handle.net/20.500.11850/21116

ETH Zürich

18. Helbling, Thomas. Carbon nanotube field effect transistors as electromechanical transducers.

Degree: 2010, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/27196

Subjects/Keywords: FELDEFFEKTTRANSISTOREN, FET (ELEKTRONIK); FIELD EFFECT TRANSISTORS, FET (ELECTRONICS); NANOTUBES + CARBON NANOTUBES; ELEKTROMECHANISCHE BAUTEILE (ELEKTROTECHNIK); MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS); MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK); ELECTROMECHANICAL COMPONENTS (ELECTRICAL ENGINEERING); NANORÖHRCHEN + KOHLENSTOFFNANORÖHRCHEN; info:eu-repo/classification/ddc/621.3; info:eu-repo/classification/ddc/620; Electric engineering; Engineering & allied operations

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APA (6^th Edition):

Helbling, T. (2010). Carbon nanotube field effect transistors as electromechanical transducers. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/27196

Chicago Manual of Style (16^th Edition):

Helbling, Thomas. “Carbon nanotube field effect transistors as electromechanical transducers.” 2010. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/27196.

MLA Handbook (7^th Edition):

Helbling, Thomas. “Carbon nanotube field effect transistors as electromechanical transducers.” 2010. Web. 07 Dec 2019.

Vancouver:

Helbling T. Carbon nanotube field effect transistors as electromechanical transducers. [Internet] [Doctoral dissertation]. ETH Zürich; 2010. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/27196.

Council of Science Editors:

Helbling T. Carbon nanotube field effect transistors as electromechanical transducers. [Doctoral Dissertation]. ETH Zürich; 2010. Available from: http://hdl.handle.net/20.500.11850/27196

ETH Zürich

19. Muoth, Matthias. Clean integration of single-walled carbon nanotubes for electromechanical systems.

Degree: 2013, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/65608

Subjects/Keywords: NANOELEKTROMECHANISCHE BAUELEMENTE, NEMS (ELEKTROTECHNIK); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); NANOELECTROMECHANICAL COMPONENTS, NEMS (ELECTRICAL ENGINEERING); TRANSISTOREN (ELEKTRONIK); PHOTOLITHOGRAPHIE (PHOTOGRAPHIE); PHOTOLITHOGRAPHY (PHOTOGRAPHY); NANOTUBES + CARBON NANOTUBES; TRANSISTORS (ELECTRONICS); NANORÖHRCHEN + KOHLENSTOFFNANORÖHRCHEN; MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); info:eu-repo/classification/ddc/621.3; info:eu-repo/classification/ddc/620; Electric engineering; Engineering & allied operations

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APA (6^th Edition):

Muoth, M. (2013). Clean integration of single-walled carbon nanotubes for electromechanical systems. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/65608

Chicago Manual of Style (16^th Edition):

Muoth, Matthias. “Clean integration of single-walled carbon nanotubes for electromechanical systems.” 2013. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/65608.

MLA Handbook (7^th Edition):

Muoth, Matthias. “Clean integration of single-walled carbon nanotubes for electromechanical systems.” 2013. Web. 07 Dec 2019.

Vancouver:

Muoth M. Clean integration of single-walled carbon nanotubes for electromechanical systems. [Internet] [Doctoral dissertation]. ETH Zürich; 2013. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/65608.

Council of Science Editors:

Muoth M. Clean integration of single-walled carbon nanotubes for electromechanical systems. [Doctoral Dissertation]. ETH Zürich; 2013. Available from: http://hdl.handle.net/20.500.11850/65608

ETH Zürich

20. Wojtas, Nina Z. Microfluidic Thermoelectric Heat Exchangers for Low-Temperature Waste Heat Recovery.

Degree: 2014, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/95920

Subjects/Keywords: MICROFLUIDICS AND NANOFLUIDICS; THERMOELECTRIC GENERATORS (THERMOELECTRIC ENGINEERING); THERMOELEKTRISCHE GENERATOREN (THERMOELEKTROTECHNIK); HEAT TRANSFER + HEAT EXCHANGERS + COOLING PROCESSES + HEAT INSULATION (PROCESS ENGINEERING); ABWÄRMEREDUKTION (UMWELTSCHUTZ); WASTE HEAT REDUCTION (ENVIRONMENTAL PROTECTION); MIKROFLUIDIK UND NANOFLUIDIK; WÄRMESPEICHER + WÄRMEAUSTAUSCHER + WÄRMEISOLATION + WÄRMEÜBERTRAGUNG + KÜHLUNGSVERFAHREN (VERFAHRENSTECHNIK); info:eu-repo/classification/ddc/660; info:eu-repo/classification/ddc/621.3; Chemical engineering; Electric engineering

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APA (6^th Edition):

Wojtas, N. Z. (2014). Microfluidic Thermoelectric Heat Exchangers for Low-Temperature Waste Heat Recovery. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/95920

Chicago Manual of Style (16^th Edition):

Wojtas, Nina Z. “Microfluidic Thermoelectric Heat Exchangers for Low-Temperature Waste Heat Recovery.” 2014. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/95920.

MLA Handbook (7^th Edition):

Wojtas, Nina Z. “Microfluidic Thermoelectric Heat Exchangers for Low-Temperature Waste Heat Recovery.” 2014. Web. 07 Dec 2019.

Vancouver:

Wojtas NZ. Microfluidic Thermoelectric Heat Exchangers for Low-Temperature Waste Heat Recovery. [Internet] [Doctoral dissertation]. ETH Zürich; 2014. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/95920.

Council of Science Editors:

Wojtas NZ. Microfluidic Thermoelectric Heat Exchangers for Low-Temperature Waste Heat Recovery. [Doctoral Dissertation]. ETH Zürich; 2014. Available from: http://hdl.handle.net/20.500.11850/95920

ETH Zürich

21. Wouters, Silke C. New Type of Three-Axis Hall Sensor Designed for High-Accuracy Magnetic Field Measurements.

Degree: 2016, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/122027

Subjects/Keywords: CALIBRATION AND TESTING OF INSTRUMENTS (PHYSICS); HALL SENSORS (APPLIED MAGNETISM); EICHUNG UND PRÜFUNG VON MESSGERÄTEN (PHYSIK); HALLSENSOREN (TECHNISCHER MAGNETISMUS); MAGNETIC MEASURING METHODS (PHYSICS); MAGNETISCHE MESSMETHODEN (PHYSIK); info:eu-repo/classification/ddc/530; Physics

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APA (6^th Edition):

Wouters, S. C. (2016). New Type of Three-Axis Hall Sensor Designed for High-Accuracy Magnetic Field Measurements. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/122027

Chicago Manual of Style (16^th Edition):

Wouters, Silke C. “New Type of Three-Axis Hall Sensor Designed for High-Accuracy Magnetic Field Measurements.” 2016. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/122027.

MLA Handbook (7^th Edition):

Wouters, Silke C. “New Type of Three-Axis Hall Sensor Designed for High-Accuracy Magnetic Field Measurements.” 2016. Web. 07 Dec 2019.

Vancouver:

Wouters SC. New Type of Three-Axis Hall Sensor Designed for High-Accuracy Magnetic Field Measurements. [Internet] [Doctoral dissertation]. ETH Zürich; 2016. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/122027.

Council of Science Editors:

Wouters SC. New Type of Three-Axis Hall Sensor Designed for High-Accuracy Magnetic Field Measurements. [Doctoral Dissertation]. ETH Zürich; 2016. Available from: http://hdl.handle.net/20.500.11850/122027

ETH Zürich

22. Doring, Valentin. Integration of Single-Walled Carbon Nanotubes into Torsional Pendulum Devices for Future Sensing Applications.

Degree: 2015, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/107716

Subjects/Keywords: HALBLEITERBAUELEMENTE + ELEKTRONISCHE BAUELEMENTE (ELEKTRONIK); ELECTRONIC MATERIALS; ELEKTRONISCHE WERKSTOFFE; NANOTUBES + CARBON NANOTUBES; SEMICONDUCTOR COMPONENTS + ELECTRONIC COMPONENTS (ELECTRONICS); MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS); MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK); NANORÖHRCHEN + KOHLENSTOFFNANORÖHRCHEN; info:eu-repo/classification/ddc/620; Engineering & allied operations

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APA (6^th Edition):

Doring, V. (2015). Integration of Single-Walled Carbon Nanotubes into Torsional Pendulum Devices for Future Sensing Applications. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/107716

Chicago Manual of Style (16^th Edition):

Doring, Valentin. “Integration of Single-Walled Carbon Nanotubes into Torsional Pendulum Devices for Future Sensing Applications.” 2015. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/107716.

MLA Handbook (7^th Edition):

Doring, Valentin. “Integration of Single-Walled Carbon Nanotubes into Torsional Pendulum Devices for Future Sensing Applications.” 2015. Web. 07 Dec 2019.

Vancouver:

Doring V. Integration of Single-Walled Carbon Nanotubes into Torsional Pendulum Devices for Future Sensing Applications. [Internet] [Doctoral dissertation]. ETH Zürich; 2015. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/107716.

Council of Science Editors:

Doring V. Integration of Single-Walled Carbon Nanotubes into Torsional Pendulum Devices for Future Sensing Applications. [Doctoral Dissertation]. ETH Zürich; 2015. Available from: http://hdl.handle.net/20.500.11850/107716

ETH Zürich

23. Schoeberle, Bernd Michael. Evaluation of viscoelastic materials for MEMS by creep compliance analysis.

Degree: 2008, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/11203

Subjects/Keywords: BRUCHFESTIGKEIT (ELASTOMECHANIK); EIGENSPANNUNG (ELASTOMECHANIK); EIGENSCHAFTEN DÜNNER SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN); PHOTOLITHOGRAPHY (PHOTOGRAPHY); MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); INTERNAL STRESS (ELASTOMECHANICS); KRIECHEN, KRIECHVERHALTEN (ELASTOMECHANIK); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); BREAKING STRENGTH (ELASTOMECHANICS); VISKOELASTIZITÄT (ELASTOMECHANIK); PHOTOLITHOGRAPHIE (PHOTOGRAPHIE); VISCOELASTICITY (ELASTOMECHANICS); CREEP (ELASTOMECHANICS); PROPERTIES OF THIN LAYERS (PHYSICS OF MOLECULAR SYSTEMS); info:eu-repo/classification/ddc/621.3; Electric engineering

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Schoeberle, B. M. (2008). Evaluation of viscoelastic materials for MEMS by creep compliance analysis. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/11203

Chicago Manual of Style (16^th Edition):

Schoeberle, Bernd Michael. “Evaluation of viscoelastic materials for MEMS by creep compliance analysis.” 2008. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/11203.

MLA Handbook (7^th Edition):

Schoeberle, Bernd Michael. “Evaluation of viscoelastic materials for MEMS by creep compliance analysis.” 2008. Web. 07 Dec 2019.

Vancouver:

Schoeberle BM. Evaluation of viscoelastic materials for MEMS by creep compliance analysis. [Internet] [Doctoral dissertation]. ETH Zürich; 2008. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/11203.

Council of Science Editors:

Schoeberle BM. Evaluation of viscoelastic materials for MEMS by creep compliance analysis. [Doctoral Dissertation]. ETH Zürich; 2008. Available from: http://hdl.handle.net/20.500.11850/11203

ETH Zürich

24. Boutry, Clémentine M. Biodegradable passive resonant circuits for wireless implant applications.

Degree: 2012, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/60227

Subjects/Keywords: KUNSTSTOFFE (BIOMEDIZINISCHE MATERIALIEN); BIODEGRADABLE MEDICAL MATERIALS; TETRAPYRROLE COMPOUNDS + POLYPYRROLE COMPOUNDS (HETEROCYCLIC HYDROCARBONS); WIRELESS SIGNAL TRANSMISSION (TELECOMMUNICATIONS); MEDICAL SENSORS (MEDICAL TECHNOLOGY); PLASTICS (BIOMEDICAL MATERIALS); DRAHTLOSE SIGNALÜBERTRAGUNG (NACHRICHTENTECHNIK); RESONATORS/ELECTRICAL OSCILLATION TECHNOLOGY; MEDIZINISCHE SENSOREN (MEDIZINISCHE TECHNIK); TETRAPYRROLVERBINDUNGEN + POLYPYRROLVERBINDUNGEN (HETEROCYCLISCHE KOHLENWASSERSTOFFE); RESONATOREN/ELEKTRISCHE SCHWINGUNGSTECHNIK; BIOLOGISCH ABBAUBARE MEDIZINISCHE MATERIALIEN; info:eu-repo/classification/ddc/610; Medical sciences, medicine

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Boutry, C. M. (2012). Biodegradable passive resonant circuits for wireless implant applications. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/60227

Chicago Manual of Style (16^th Edition):

Boutry, Clémentine M. “Biodegradable passive resonant circuits for wireless implant applications.” 2012. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/60227.

MLA Handbook (7^th Edition):

Boutry, Clémentine M. “Biodegradable passive resonant circuits for wireless implant applications.” 2012. Web. 07 Dec 2019.

Vancouver:

Boutry CM. Biodegradable passive resonant circuits for wireless implant applications. [Internet] [Doctoral dissertation]. ETH Zürich; 2012. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/60227.

Council of Science Editors:

Boutry CM. Biodegradable passive resonant circuits for wireless implant applications. [Doctoral Dissertation]. ETH Zürich; 2012. Available from: http://hdl.handle.net/20.500.11850/60227

ETH Zürich

25. Ergeneman, Olgaç. Wireless actuation and readout of magnetic biomicrosystems.

Degree: 2011, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/152737

Subjects/Keywords: MIKROROBOTER; DRAHTLOSE SIGNALÜBERTRAGUNG (NACHRICHTENTECHNIK); MIKROSENSOREN (PHYSIK); MAGNETISCHE EIGENSCHAFTEN (ELEKTRODYNAMIK); MIKROSYSTEMTECHNIK, MST; BIOLOGISCHE SYSTEME UND BIOLOGISCHE ORGANISMEN, CHARAKTERISTIKEN UND EIGENSCHAFTEN; MICRO ROBOTS; WIRELESS SIGNAL TRANSMISSION (TELECOMMUNICATIONS); MICROSENSORS (PHYSICS); MAGNETIC PROPERTIES (ELECTRODYNAMICS); MICRO SYSTEM TECHNOLOGIES, MST; BIOLOGICAL SYSTEMS AND BIOLOGICAL ORGANISMS, PROPERTIES AND CHARACTERISTICS; info:eu-repo/classification/ddc/621.3; Electric engineering

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Ergeneman, O. (2011). Wireless actuation and readout of magnetic biomicrosystems. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/152737

Chicago Manual of Style (16^th Edition):

Ergeneman, Olgaç. “Wireless actuation and readout of magnetic biomicrosystems.” 2011. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/152737.

MLA Handbook (7^th Edition):

Ergeneman, Olgaç. “Wireless actuation and readout of magnetic biomicrosystems.” 2011. Web. 07 Dec 2019.

Vancouver:

Ergeneman O. Wireless actuation and readout of magnetic biomicrosystems. [Internet] [Doctoral dissertation]. ETH Zürich; 2011. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/152737.

Council of Science Editors:

Ergeneman O. Wireless actuation and readout of magnetic biomicrosystems. [Doctoral Dissertation]. ETH Zürich; 2011. Available from: http://hdl.handle.net/20.500.11850/152737

ETH Zürich

26. Taprogge, Jens Ludwig Manfred. A self-alignment strategy for parallel C4 MEMS packaging.

Degree: 2013, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/154151

Subjects/Keywords: FERTIGUNG IN DER ELEKTROTECHNIK, ELEKTRONIK, MIKRO-, NANOELEKTRONIK; MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); PRODUCTION IN ELECTRICAL ENGINEERING, ELECTRONICS, MICRO-, NANOELECTRONICS; MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); info:eu-repo/classification/ddc/621.3; Electric engineering

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Taprogge, J. L. M. (2013). A self-alignment strategy for parallel C4 MEMS packaging. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/154151

Chicago Manual of Style (16^th Edition):

Taprogge, Jens Ludwig Manfred. “A self-alignment strategy for parallel C4 MEMS packaging.” 2013. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/154151.

MLA Handbook (7^th Edition):

Taprogge, Jens Ludwig Manfred. “A self-alignment strategy for parallel C4 MEMS packaging.” 2013. Web. 07 Dec 2019.

Vancouver:

Taprogge JLM. A self-alignment strategy for parallel C4 MEMS packaging. [Internet] [Doctoral dissertation]. ETH Zürich; 2013. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/154151.

Council of Science Editors:

Taprogge JLM. A self-alignment strategy for parallel C4 MEMS packaging. [Doctoral Dissertation]. ETH Zürich; 2013. Available from: http://hdl.handle.net/20.500.11850/154151

ETH Zürich

27. Peters, Christian. Biodegradable Superparamagnetic Polymer Composites: From Material Identification to Device Application.

Degree: 2015, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/113438

Subjects/Keywords: POLYMER COMPOUND MATERIALS AND FIBRE REINFORCED PLASTICS; BIODEGRADABLE MEDICAL MATERIALS; NANOROBOTS; NANOROBOTER; PARAMAGNETIC MATERIALS; PARAMAGNETISCHE WERKSTOFFE; POLYMERE VERBUNDWERKSTOFFE UND FASERVERSTÄRKTE KUNSTSTOFFE; BIOLOGISCH ABBAUBARE MEDIZINISCHE MATERIALIEN; info:eu-repo/classification/ddc/610; Medical sciences, medicine

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Peters, C. (2015). Biodegradable Superparamagnetic Polymer Composites: From Material Identification to Device Application. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/113438

Chicago Manual of Style (16^th Edition):

Peters, Christian. “Biodegradable Superparamagnetic Polymer Composites: From Material Identification to Device Application.” 2015. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/113438.

MLA Handbook (7^th Edition):

Peters, Christian. “Biodegradable Superparamagnetic Polymer Composites: From Material Identification to Device Application.” 2015. Web. 07 Dec 2019.

Vancouver:

Peters C. Biodegradable Superparamagnetic Polymer Composites: From Material Identification to Device Application. [Internet] [Doctoral dissertation]. ETH Zürich; 2015. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/113438.

Council of Science Editors:

Peters C. Biodegradable Superparamagnetic Polymer Composites: From Material Identification to Device Application. [Doctoral Dissertation]. ETH Zürich; 2015. Available from: http://hdl.handle.net/20.500.11850/113438

ETH Zürich

28. Youn, Seul Ki. Diameter Modulation and Integration of Vertically Aligned Single Walled Carbon Nanotubes for Understanding of Mass Transport in Carbon Nanotubes.

Degree: 2014, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/112099

Subjects/Keywords: MEMBRANEN (PHYSIKALISCHE CHEMIE); POROSITÄT UND PERMEABILITÄT (PHYSIK VON MOLEKULARSYSTEMEN); POROSITY AND PERMEABILITY (PHYSICS OF MOLECULAR SYSTEMS); KATALYSATOREN (CHEMISCHE REAKTIONEN); CHEMISCHE SYNTHESEN; NANOTUBES + CARBON NANOTUBES; CHEMICAL SYNTHESIS; CATALYSTS (CHEMICAL REACTIONS); MEMBRANES (PHYSICAL CHEMISTRY); NANORÖHRCHEN + KOHLENSTOFFNANORÖHRCHEN; info:eu-repo/classification/ddc/620; Engineering & allied operations

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Youn, S. K. (2014). Diameter Modulation and Integration of Vertically Aligned Single Walled Carbon Nanotubes for Understanding of Mass Transport in Carbon Nanotubes. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/112099

Chicago Manual of Style (16^th Edition):

Youn, Seul Ki. “Diameter Modulation and Integration of Vertically Aligned Single Walled Carbon Nanotubes for Understanding of Mass Transport in Carbon Nanotubes.” 2014. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/112099.

MLA Handbook (7^th Edition):

Youn, Seul Ki. “Diameter Modulation and Integration of Vertically Aligned Single Walled Carbon Nanotubes for Understanding of Mass Transport in Carbon Nanotubes.” 2014. Web. 07 Dec 2019.

Vancouver:

Youn SK. Diameter Modulation and Integration of Vertically Aligned Single Walled Carbon Nanotubes for Understanding of Mass Transport in Carbon Nanotubes. [Internet] [Doctoral dissertation]. ETH Zürich; 2014. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/112099.

Council of Science Editors:

Youn SK. Diameter Modulation and Integration of Vertically Aligned Single Walled Carbon Nanotubes for Understanding of Mass Transport in Carbon Nanotubes. [Doctoral Dissertation]. ETH Zürich; 2014. Available from: http://hdl.handle.net/20.500.11850/112099

ETH Zürich

29. Suter, Marcel. Photopatternable superparamagnetic nanocomposite for the fabrication of microstructures.

Degree: 2012, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/60325

Subjects/Keywords: MIKROSYSTEMTECHNIK, MST; POLYMER COMPOUND MATERIALS AND FIBRE REINFORCED PLASTICS; AUXILIARY MATERIALS AND ADDITIVES IN PLASTICS INDUSTRY; MICROSTRUCTURE OF MOLECULAR SYSTEMS (PHYSICS); HILFSSTOFFE UND ZUSATZSTOFFE IN DER KUNSTSTOFFINDUSTRIE; MICRO SYSTEM TECHNOLOGIES, MST; MIKROSTRUKTUR VON MOLEKULARSYSTEMEN (PHYSIK); MAGNETIC MATERIALS; MAGNETISCHE WERKSTOFFE; POLYMERE VERBUNDWERKSTOFFE UND FASERVERSTÄRKTE KUNSTSTOFFE; info:eu-repo/classification/ddc/620; info:eu-repo/classification/ddc/621.3; Engineering & allied operations; Electric engineering

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Suter, M. (2012). Photopatternable superparamagnetic nanocomposite for the fabrication of microstructures. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/60325

Chicago Manual of Style (16^th Edition):

Suter, Marcel. “Photopatternable superparamagnetic nanocomposite for the fabrication of microstructures.” 2012. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/60325.

MLA Handbook (7^th Edition):

Suter, Marcel. “Photopatternable superparamagnetic nanocomposite for the fabrication of microstructures.” 2012. Web. 07 Dec 2019.

Vancouver:

Suter M. Photopatternable superparamagnetic nanocomposite for the fabrication of microstructures. [Internet] [Doctoral dissertation]. ETH Zürich; 2012. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/60325.

Council of Science Editors:

Suter M. Photopatternable superparamagnetic nanocomposite for the fabrication of microstructures. [Doctoral Dissertation]. ETH Zürich; 2012. Available from: http://hdl.handle.net/20.500.11850/60325

ETH Zürich

30. Kühne, Stéphane. Active electrostatic MEMS bearing for inertial sensing applications.

Degree: 2012, ETH Zürich

URL: http://hdl.handle.net/20.500.11850/62581

Subjects/Keywords: Mikroelektromechanische Bauelemente; TACHOMETER (MECHANICS); DREHZAHLMESSUNG (MECHANIK); Mems; MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); GYROSCOPIC MEASURING METHODS (PHYSICS); Gyroskopische Messmethoden; Drehzahlmessung; GYROSKOPISCHE MESSMETHODEN (PHYSIK); MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); info:eu-repo/classification/ddc/621.3; Electric engineering

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^th Edition):

Kühne, S. (2012). Active electrostatic MEMS bearing for inertial sensing applications. (Doctoral Dissertation). ETH Zürich. Retrieved from http://hdl.handle.net/20.500.11850/62581

Chicago Manual of Style (16^th Edition):

Kühne, Stéphane. “Active electrostatic MEMS bearing for inertial sensing applications.” 2012. Doctoral Dissertation, ETH Zürich. Accessed December 07, 2019. http://hdl.handle.net/20.500.11850/62581.

MLA Handbook (7^th Edition):

Kühne, Stéphane. “Active electrostatic MEMS bearing for inertial sensing applications.” 2012. Web. 07 Dec 2019.

Vancouver:

Kühne S. Active electrostatic MEMS bearing for inertial sensing applications. [Internet] [Doctoral dissertation]. ETH Zürich; 2012. [cited 2019 Dec 07]. Available from: http://hdl.handle.net/20.500.11850/62581.

Council of Science Editors:

Kühne S. Active electrostatic MEMS bearing for inertial sensing applications. [Doctoral Dissertation]. ETH Zürich; 2012. Available from: http://hdl.handle.net/20.500.11850/62581

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