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Delft University of Technology

1. Hekner, S.M. Optimal Experiment Design for Improved Parameter Estimation in Thermo-Mechanical Feedforward Models:.

Degree: 2016, Delft University of Technology

URL: http://resolver.tudelft.nl/uuid:8c30a22e-a0e8-4aff-a299-f568869fe617

ASML's wafer scanners are crucial machines in the production of integrated circuits (ICs). An important performance parameter in these photo-lithographic machines is the so-called stacking precision, which is a measure for the accurate stacking of multiple layers during the photo-lithography process in the xy-plane. The stacking precision is, amongst others, hampered by disturbances. Currently, a model is used to predict the disturbances and, subseqently, this information is used to compensate for stacking misalignment by active control.
Some of the model parameters, used in the model, are not accurately known which result in inaccurate stacking compensation. The model parameter accuracy can be improved by using experiments subjected to model parameter calibration. Unfortunately, model parameter calibration may be hampered when choosing an insufficient experimental set-up. For example, it can lead to severe model parameter correlation. One way to improve the stacking precision is to calibrate the model parameters of the model by means of an optimal conducted experiment.
Two experimental cases of the model are optimized using two different objective functions. Case 1 contains model parameter 1 and 2, and case 2 contains model parameter 1 and 3. A D-optimality objective function, which is the determinant of the information matrix, and an ACE1-optimality objective function, which focusses on the correlation between specified model parameter and the eigenvalues of the information matrix associated to the same model parameters. An optimization algorithm is used to perform the complex experiment optimization problem that originates by the characteristics of the model. Eventually, it is possible to acquire an optimal experiment which can increase model parameter accuracy and, therefore, give a reduction of worst-case stacking misalignment error by 54.4% and 9.4% when considering a 95% confidence bounce for model parameter case 1 and 2, respectively.
*Advisors/Committee Members: Van der Veen, G., Van der Meulen, S..*

Subjects/Keywords: Experiment design; parameter estimation

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APA (6^{th} Edition):

Hekner, S. M. (2016). Optimal Experiment Design for Improved Parameter Estimation in Thermo-Mechanical Feedforward Models:. (Masters Thesis). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:8c30a22e-a0e8-4aff-a299-f568869fe617

Chicago Manual of Style (16^{th} Edition):

Hekner, S M. “Optimal Experiment Design for Improved Parameter Estimation in Thermo-Mechanical Feedforward Models:.” 2016. Masters Thesis, Delft University of Technology. Accessed March 24, 2019. http://resolver.tudelft.nl/uuid:8c30a22e-a0e8-4aff-a299-f568869fe617.

MLA Handbook (7^{th} Edition):

Hekner, S M. “Optimal Experiment Design for Improved Parameter Estimation in Thermo-Mechanical Feedforward Models:.” 2016. Web. 24 Mar 2019.

Vancouver:

Hekner SM. Optimal Experiment Design for Improved Parameter Estimation in Thermo-Mechanical Feedforward Models:. [Internet] [Masters thesis]. Delft University of Technology; 2016. [cited 2019 Mar 24]. Available from: http://resolver.tudelft.nl/uuid:8c30a22e-a0e8-4aff-a299-f568869fe617.

Council of Science Editors:

Hekner SM. Optimal Experiment Design for Improved Parameter Estimation in Thermo-Mechanical Feedforward Models:. [Masters Thesis]. Delft University of Technology; 2016. Available from: http://resolver.tudelft.nl/uuid:8c30a22e-a0e8-4aff-a299-f568869fe617

2. Liu, B.Y. Motion control of a contactless stage:.

Degree: 2015, Delft University of Technology

URL: http://resolver.tudelft.nl/uuid:8d845096-ec4a-4b9a-aead-a33e2a273a33

In the manufacturing process of flat panel displays (FPD), such as the making of the photomasks and the lithographic process of the glass substrates, the demand for a larger but thinner substrate is increasing. Consequently, the moving stage of these manufacturing machines become larger in size and heavier in weight. The high velocity and acceleration specifications for positioning a moving stage of several tons will require much more power and higher power rate output than any usual positioning tasks. One solution to eliminate the moving mass of the stage is to use a contactless stage.
A contactless positioning stage which is capable of controlling a 100 mm wafer in three in-plane degrees of freedom has been developed successfully in the Mechatronic System Design group of the Precision and Microsystems Department. The deployed controller on the contactless stage is a decoupled three-loop Single Input Single Output (SISO) cascaded controller designed by classical loop shaping methods. An initial study shows that the in-plane rotational DoF is disturbed when the center of mass of the wafer is moved from the center of the concatenated air actuators and the planar translational axes are accelerating or decelerating. In addition, the power spectral densities of the measured pressure signals indicate that a high power pressure disturbance affects each control pressure channel.
Therefore, the contactless positioning stage should be treated as a Multi Input Multi Output (MIMO) system and controlled with control schemes tailored to the wafer dynamics and the spectrum of disturbances as a potential alternative positioning mechanism at nano/micro levels. In this thesis, the goal is to develop a three in-plane degrees of freedom, multivariable model of the contactless stage, and identify its dynamics or estimate its parameters. With a determined control configuration, design and develop control schemes on the contactless stage that achieves a positioning specification with sub-micrometer precision when performing positioning tasks similar to an industrial precision positioning stage used in FPD manufacturing.
With a cascaded control scheme, the dynamics of the contactless stage consist of pressure dynamics and wafer dynamics. The pressure dynamics of the air channels are identified by the Closed-loop Multivariable Output Error Subspace (CL-MOESP) algorithm first. Then the wafer dynamics are modeled from the Newton-Euler equations and the model parameters with disturbance forces in plane are estimated with an extended Kalman filter. Both dynamic models are validated by the comparisons of the frequency response functions (FRFs) of the derived models with the measured FRFs of the system.
The pressure and position control problems are formulated with the required performance specifications. Then, both the pressure and position controller are synthesized using pole placement with sensitivity function shaping techniques. With high bandwidth inner pressure loops, a MIMO triangular controller is designed to control the positions…
*Advisors/Committee Members: Verhaegen, M., Van Ostayen, R., Van der Veen, G., Vuong, P..*

Subjects/Keywords: contactless; positioning

…*University* *of*
*Technology* in [5]. A conceptual diagram of the contactless actuator is… …adopted in
precision machines, a contactless actuator is proposed by van Ostayen at *Delft*…

Record Details Similar Records

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^{th} Edition):

Liu, B. Y. (2015). Motion control of a contactless stage:. (Masters Thesis). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:8d845096-ec4a-4b9a-aead-a33e2a273a33

Chicago Manual of Style (16^{th} Edition):

Liu, B Y. “Motion control of a contactless stage:.” 2015. Masters Thesis, Delft University of Technology. Accessed March 24, 2019. http://resolver.tudelft.nl/uuid:8d845096-ec4a-4b9a-aead-a33e2a273a33.

MLA Handbook (7^{th} Edition):

Liu, B Y. “Motion control of a contactless stage:.” 2015. Web. 24 Mar 2019.

Vancouver:

Liu BY. Motion control of a contactless stage:. [Internet] [Masters thesis]. Delft University of Technology; 2015. [cited 2019 Mar 24]. Available from: http://resolver.tudelft.nl/uuid:8d845096-ec4a-4b9a-aead-a33e2a273a33.

Council of Science Editors:

Liu BY. Motion control of a contactless stage:. [Masters Thesis]. Delft University of Technology; 2015. Available from: http://resolver.tudelft.nl/uuid:8d845096-ec4a-4b9a-aead-a33e2a273a33

3. Van der Marel, C. Controller-structure optimization using parameter-dependent modal reduced state-space models:.

Degree: 2014, Delft University of Technology

URL: http://resolver.tudelft.nl/uuid:38d7c6a3-9cb6-4354-9d67-b15bd911c2db

Although it is still common in the field of motion control systems to first design the structure and then the controller, integrated design approaches are becoming more popular. The problem of finding optimal parameters for a parameterized structure and controller by solving an optimization problem will be referred to as it{controller-structure optimization} (CSO). These types of problems are often characterized as multi-objective and non-convex and therefore hard to solve. Especially if the parameterized structure is modelled in a finite-element (FE) environment.
This MSc thesis report presents a design approach for solving a CSO problem by using an approximate model of the parameterized structure in the form of a it{parameter-dependent state-space} (PDSS) model. The PDSS model is obtained by taking a few samples of the original structure. Each of these samples represents a it{linear time-invariant} (LTI) modal reduced state-space model. The main emphasis of this MSc thesis is to investigate whether this approach is able to approximate the solution of the original (comprehensive) CSO problem in an efficient way.
*Advisors/Committee Members: Van Wingerden, J.W., Langelaar, M., Van der Veen, G..*

Subjects/Keywords: Controller-structure optimization; parameter-dependent state-space; Mode switching; Integral optimization; Simultaneaus optimization

…*University* *of*
*Technology*, department of Delft Center for Systems and Control (DCSC), has… …Langelaar (PME)
dr.ir. Gijs van der Veen (PME)
*Delft*, *University* *of*… …Acknowledgments
The master thesis report is the final piece of work that a student at the *Delft*… …*Technology*
December 8, 2014
Master of Science Thesis
C. van der Marel
C. van der Marel
viii
C…

Record Details Similar Records

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6^{th} Edition):

Van der Marel, C. (2014). Controller-structure optimization using parameter-dependent modal reduced state-space models:. (Masters Thesis). Delft University of Technology. Retrieved from http://resolver.tudelft.nl/uuid:38d7c6a3-9cb6-4354-9d67-b15bd911c2db

Chicago Manual of Style (16^{th} Edition):

Van der Marel, C. “Controller-structure optimization using parameter-dependent modal reduced state-space models:.” 2014. Masters Thesis, Delft University of Technology. Accessed March 24, 2019. http://resolver.tudelft.nl/uuid:38d7c6a3-9cb6-4354-9d67-b15bd911c2db.

MLA Handbook (7^{th} Edition):

Van der Marel, C. “Controller-structure optimization using parameter-dependent modal reduced state-space models:.” 2014. Web. 24 Mar 2019.

Vancouver:

Van der Marel C. Controller-structure optimization using parameter-dependent modal reduced state-space models:. [Internet] [Masters thesis]. Delft University of Technology; 2014. [cited 2019 Mar 24]. Available from: http://resolver.tudelft.nl/uuid:38d7c6a3-9cb6-4354-9d67-b15bd911c2db.

Council of Science Editors:

Van der Marel C. Controller-structure optimization using parameter-dependent modal reduced state-space models:. [Masters Thesis]. Delft University of Technology; 2014. Available from: http://resolver.tudelft.nl/uuid:38d7c6a3-9cb6-4354-9d67-b15bd911c2db