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You searched for +publisher:"Dalhousie University" +contributor:("Dr. Yuan Ma, Dr. Zhizhang (David) Chen"). One record found.

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Dalhousie University

1. Zhang, Tianming. ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR.

Degree: Master of Applied Science, Department of Electrical & Computer Engineering, 2012, Dalhousie University

Several free-free beam micro-resonators are designed and fabricated using two commercially available surface micromachining processes, the UW-MEMS process and PolyMUMPs. Theoretical derivations of the design parameters are presented and an electrical lumped behavior model is developed for a single resonator with direct mechanic-to-electric analogy. A finite-element analysis (FEA) tool, the COMSOL Multiphysics 4.2a, is utilized to simulate the effects of the critical structural dimensions and electromechanical coupling. A variety of analyses, such as modal, static and dynamic responses are performed in FEA and the results are compared with the analytical solutions. The static and dynamic performances of the fabricated UW-MEMS resonators are tested using the Vecco NT-9100 In-Motion System. The electrical testing is carried out to obtain the frequency characteristics in electrical domain of the device. Measured data are compared with the analytical and simulation results. Discrepancies are discussed and analyzed. Advisors/Committee Members: n/a (external-examiner), Dr. Jacek Ilow (graduate-coordinator), Dr. Kamal El-Sankary, Dr. William Phillips (thesis-reader), Dr. Yuan Ma, Dr. Zhizhang (David) Chen (thesis-supervisor), Not Applicable (ethics-approval), Not Applicable (manuscripts), Not Applicable (copyright-release).

Subjects/Keywords: MEMS; Free-Free Beam; Resonator; Electrostatic; FEA; Dynamic

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APA · Chicago · MLA · Vancouver · CSE | Export to Zotero / EndNote / Reference Manager

APA (6th Edition):

Zhang, T. (2012). ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR. (Masters Thesis). Dalhousie University. Retrieved from http://hdl.handle.net/10222/15700

Chicago Manual of Style (16th Edition):

Zhang, Tianming. “ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR.” 2012. Masters Thesis, Dalhousie University. Accessed December 08, 2019. http://hdl.handle.net/10222/15700.

MLA Handbook (7th Edition):

Zhang, Tianming. “ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR.” 2012. Web. 08 Dec 2019.

Vancouver:

Zhang T. ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR. [Internet] [Masters thesis]. Dalhousie University; 2012. [cited 2019 Dec 08]. Available from: http://hdl.handle.net/10222/15700.

Council of Science Editors:

Zhang T. ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR. [Masters Thesis]. Dalhousie University; 2012. Available from: http://hdl.handle.net/10222/15700

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