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Title Design of an Energy-Efficient Interface Circuit for a MEMS-based Capacitive Pressure Sensor
Publication Date
Degree Level masters
University/Publisher Delft University of Technology

This thesis presents an incremental ?? capacitance-to-digital converter (CDC) that serves as an interface circuit for a MEMS-based pressure sensor. The thesis presents a systematic analysis of the CDC and compares different CDC architectures. A novel non-linear CDC is also proposed and analysed. Energy-efficiency of the CDC is improved by implementation of various design techniques like double sampling, system-level chopping and a novel inverter-based OTA. The CDC has been designed in such a way that it can operate with either an on-chip or external pressure sensor. The CDC can be tuned to compensate for a wide range of baseline capacitance. The CDC operates over a pressure range of 0-1.3 bar and achieves a pressure resolution of 1e?5 bar (equivalent to a resolution of 16 bits). The CDC is implemented in NXP 0.16?m 1P6M technology. The circuit design and layout of the CDC are presented. The CDC consumes 2.33?A from a 1.2V supply resulting in an energy consumption of only 2.01nJ, a significant improvement over the state-of-the-art.

Microelectronics & Computer Engineering

Electrical Engineering, Mathematics and Computer Science

Subjects/Keywords pressure-sensor interface; energy-efficiency; double sampling; inverter-based OTA; incremental ?? ADC
Contributors Pertijs, M. (mentor)
Language en
Rights (c) 2013 Rajendran, L.
Country of Publication nl
Record ID oai:tudelft.nl:uuid:b6b6915b-ac95-45ad-838d-c8fad5b8a171
Repository delft
Date Retrieved
Date Indexed 2020-06-19

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…2-8-2 Energy Consumption of Non-Linear CDC . . . . . . . . . . . . . . 2-9 Choosing the Order of the Modulator - Quantization Noise . . . . . . . . 2-9-1 Incremental ADC . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10 System Level…

…measure of the sensor capacitance (which in turn is influenced by the pressure), hence the prototype is aptly called as CDC or Capacitance to digital converter. The CDC is similar to the ∆Σ ADC. The comparison between the two is as follows […

…4]: • The primary difference between ∆Σ ADC and the CDC are: In the case of a CDC, Capacitance is not known and a known voltage is applied to measure it. A reference quantity Cref (reference capacitor) is used to measure the unknown…

…capacitor. On the other hand, in a switched-capacitor ∆Σ ADC, the input voltage is not known and a known value of capacitance is applied. A reference quantity called Vref is used to measure the unknown voltage. • The similarity between the CDC and ∆Σ ADC is…