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Author
Title Feasibility Study and Design of AFM Production Wafer Calibration Method using Electrostatic Pull-in Instability
URL
Publication Date
Degree Level masters
University/Publisher Delft University of Technology
Abstract

Precision and Microsystems Engineering

Mechanical, Maritime and Materials Engineering

Subjects/Keywords MEMS; AFM; Probe; Electrostatic; Pull-in; Cantilever
Contributors Staufer, U. (mentor)
Language en
Rights (c) 2013 Molenaar, E.P.
Country of Publication nl
Record ID oai:tudelft.nl:uuid:a64e6ff5-eb0c-4f30-987e-356c57123fe7
Repository delft
Date Retrieved
Date Indexed 2020-06-19

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…Static . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Dynamic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16 17 18 3-2 Electrostatic Pull-in Instability (EPI)…

…21 3-1-1 3-1-2 3-1-3 3-2-1 Physics behind EPI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21 3-2-2 Electrostatic Pull-In used as a calibration method . . . . . . . . . . . . . 3-3 From lumped model to cantilever…

…23 23 Master of Science Thesis E. P. Molenaar iv Contents 4 Modeling the cantilever beam 25 4-1 Modeling Electrostatic Pull-in . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 4-1-1 Potential energy equation…

…this calibration a concept for an experimental measurement set-up will be made. 1-4 Outline of thesis The new calibration technique is based on the Electrostatic Pull-in Instability, or EPI, of cantilever beams. Initial research into this technique…

in electrostatic calibration. . . . 17 (c) The electric field lines generating an upward force on the cantilever. . . . . 17 3-3 Load button calibration set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . 18 (a)…

…27 4-3 Results of calculations of the pull-in voltage performed with COMSOL Multiphysics 32 (a) Electric Potential . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 (b) Deflection of 500 Ám beam due to 2.8V…

…the electrode surface after the pull-in voltage has been reached. . . . . . . . . . . . 63 8-1 Concepts to measure dimensions. . . . . . . . . . . . . . . . . . . . . . . . . . . 66 60 61 (a) White light interferometer…

…67 (b) Placing wafer at different structures. . . . . . . . . . . . . . . . . . . . . . 67 (c) Stepped electrodes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67 8-3 Concepts to detect pull-in moment…

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