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Title Passivity-based stabilization of a 1-DOF electrostatic MEMS model with a parasitic capacitance
Publication Date
Date Accessioned
Discipline/Department Mechanical Engineering
University/Publisher Texas Tech University
Abstract This thesis addresses the problem of stabilizing 1-DOF piston mode electrostatic actuator in the presence of parasitic capacitance due to conductive substrate. The current study makes use of passivity-based control technique to formulate controllers. The static and dynamic controller schemes based on total charge can result in a unique equilibrium, however, their region of attraction may be small and the equilibrium may lose stability through Hopf bifurcation for certain configurations. A new charge quantity Qcc is introduced and used to derive static and dynamic feedback controllers in order to resolve issues encountered in the controllers based on total charge. The controllers based on Qcc are proved to be capable of globally asymptotically stabilizing the unique feasible equilibrium point for the configurations where the movable electrode is screened from the parasitic electrode by the control electrode. When the movable electrode and the parasitic electrode are directly coupled to have a mutual capacitance, numerical simulations show that the region of attraction of the closed-loop equilibrium is large. The effects of the infinite parallel plate approximation inherent in the formulation on the controller performance are investigated.
Subjects/Keywords Charge pull-In; Parasitics; Electrostatic; Microelectromechanical systems
Contributors Berg, Jordan M. (Committee Chair)
Language en
Rights Unrestricted.
Country of Publication us
Record ID handle:2346/22651
Repository tdl
Date Indexed 2020-04-11

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…electrode in a capacitive gap is to be controlled by electrostatic actuation the fundamental nature of pull-in has to be dealt with. Simple voltage control on such a device would provide stability only over one third of the gap. This limitation can be…

…the surroundings. These interactions are commonly referred to as parasitics. It is known that parasitic capacitance can cause loss of stability of charge-controlled electrostatic MEMS through a saddle-node bifurcation known as charge pull-in [4, 5…

…Design and Analysis Incorporating Parasitics The nonlinear phenomenon of voltage pull-in associated with voltage control of electrostatic MEMS is well known. Details may be found, for example, in [16]. A number of researchers demonstrate…

…II of the zero dynamics of a 1-DOF MEMS model under charge control in the presence of parasitics, as parameter µI,II varies. Curves correspond to µI,II = 0, 0.5, 1, 1.5, and 2. For µI,II ≥ 0.5, charge pull-in occurs at the points marked by an ‘x…

…viii 39 40 40 45 Texas Tech University, Imiya Manjula Wickramasinghe, May 2008 CHAPTER 1 INTRODUCTION Electrostatic actuation is often chosen for MEMS devices due to number of reasons such as compactness. In applications where the position of an…

…eliminate charge pull-in. The work of this thesis addressed two problems in the previous work on control in the presence of parasitics. First, inconsistencies in the treatment for different electrode geometries was rectified during the present study. Here…

…based controllers used in the present study enjoy the advantage of simplicity of control law over the robust controller schemes proposed in [18]. The other literatures that relate to pull-in phenomena during this period do not explicitly…

…and fundamental forces acting on such devices under dielectric charging. [23] presents an investigation on how pull-in voltage may be reduced by using special input signal patterns. That study highlights the effects of dynamics of the…