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Title Interface circuits for readout and control of a micro-hemispherical resonating gyroscope
Publication Date
Date Accessioned
Degree MS
Discipline/Department Electrical and Computer Engineering
Degree Level masters
University/Publisher Georgia Tech
Abstract Gyroscopes are inertial sensors that measure the rate or angle of rotation. One of the most promising technologies for reaching a high-performance MEMS gyroscope has been development of the micro-hemispherical shell resonator. (μHSR) This thesis presents the electronic control and read-out interface that has been developed to turn the μHSR into a fully functional micro-hemispherical resonating gyroscope (μHRG) capable of measuring the rate of rotation. First, the μHSR was characterized, which both enabled the design of the interface and led to new insights into the linearity and feed-through characteristics of the μHSR. Then a detailed analysis of the rate mode interface including calculations and simulations was performed. This interface was then implemented on custom printed circuit boards for both the analog front-end and analog back-end, along with a custom on-board vacuum chamber and chassis to house the μHSR and interface electronics. Finally the performance of the rate mode gyroscope interface was characterized, showing a linear scale factor of 8.57 mv/deg/s, an angle random walk (ARW) of 34 deg/sqrt(hr) and a bias instability of 330 deg/hr.
Subjects/Keywords uHRG; µHRG; MEMS; CVG; Coriolis; TIA; AM; FM; Micro-hemispherical resonating gyroscope; 3D-HARPSS; High-Q; Gyroscopes; Gyroscopic instruments; Gyroscope; Vibratory; Coriolis vibratory gyroscope; Interface; Circuits; Transimpedance amplifier; Rate integrating; Inertial sensor; Sensor; Oscillator; Analog; Control; Electrostatic; Capacitive; Noise; Characterization; Mode-matching; Wine-glass; Duffing; Non-linearity; Feed-through cancellation; Vibratory gyroscopes; Polysilicon
Contributors Ayazi, Farokh (advisor); Ghovanloo, Maysam (committee member); Wang, Hua (committee member)
Language en
Country of Publication us
Record ID handle:1853/53116
Repository gatech
Date Indexed 2018-01-11
Issued Date 2014-12-11 00:00:00
Note [degree] M.S.;

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…x5D; These two operating methods are illustrated in Figure 4. An example of split-mode and modematched gyroscopes are the Analog Devices (ADI) ADXRS [30] and The Georgia Tech M2-TFG gyroscopes [31], respectively. (a…

…silicon substrate but isolated by a 9 nitride layer as shown in Figure 8 (b). The device is fabricated using a low-cost batch fabrication 3D-HARPSS process in the Georgia Tech clean room. The device has a shell diameter of 1200 m, a shell…